CN202898046U - Fusion vacuum treatment furnace for producing 6N-level solar grade polysilicon - Google Patents
Fusion vacuum treatment furnace for producing 6N-level solar grade polysilicon Download PDFInfo
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- CN202898046U CN202898046U CN 201220586983 CN201220586983U CN202898046U CN 202898046 U CN202898046 U CN 202898046U CN 201220586983 CN201220586983 CN 201220586983 CN 201220586983 U CN201220586983 U CN 201220586983U CN 202898046 U CN202898046 U CN 202898046U
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Abstract
The utility model discloses a fusion vacuum treatment furnace for producing 6N-level solar grade polysilicon, which comprises a hydraulic cylinder, a variable-frequency furnace, a power wire-inlet system, a water inlet/outlet system, a vacuum cover and a movable trolley. The fusion vacuum treatment furnace disclosed by the utility model has the advantages that the metal silicon of the level 4-5N (industrial silicon) is directly used as a raw material for refining and producing 6N-level solar grade silicon; the technological process is short, the equipment investment is greatly saved, and the operation procedure of the technology is simplified, thus the consumption of power and materials is greatly reduced, the production cost is remarkably lowered, and the product has stronger market competitiveness; and moreover, the fusion vacuum treatment furnace disclosed by the utility model causes little environmental pollution and conforms to the requirements of the industrial policy for low energy consumption, low consumption, low cost and no environmental pollution proposed by the national and local sectors.
Description
Technical field
The utility model relates to a kind of melting vacuum-treat stove for the production of 6N level solar-grade polysilicon, belong to extraordinary metallurgical equipment technology field.
Background technology
Now normal operation 2N grade metallic silicon (industrial silicon) as raw material refining produce 6N level solar energy level silicon, the process meanses such as acidleach, electron beam, plasma smelting are taked in whole technical process, and technical process is long, and facility investment is high, the technological operation program is loaded down with trivial details, power consumption, high material consumption, production cost is high, pollutes large, product does not have the market competitiveness, can't satisfy the less energy-consumption that country and local sector propose, low consumption, the industry policy requirement of low cost, environmental nonpollution.
Summary of the invention
The utility model proposes a kind of melting vacuum-treat stove for the production of 6N level solar-grade polysilicon, its purpose is intended to overcome the existing defects of prior art, satisfies the requirement of 4～5N grade high-purity silicon production 6N level solar-grade polysilicon that mineral hot furnace is produced.
Technical solution of the present utility model: produce the melting vacuum-treat stove of 6N level solar-grade polysilicon, its structure comprises hydro-cylinder, frequency conversion furnace, electric power incoming line system, inlet and outlet system, vacuum (-tight) housing and travelling car; Wherein electric power incoming line system, inlet and outlet system are installed on the shell of frequency conversion furnace, and hydro-cylinder is mounted on a side of frequency conversion furnace, and hydro-cylinder is used for the usefulness of frequency conversion tilting furnace, and the cylinder pushes frequency conversion furnace overturns and lifting, and its flip angle is 105 degree to the maximum; Vacuum (-tight) housing is installed in the top of frequency conversion furnace, vacuum (-tight) housing by chain suspension on travelling car.
Advantage of the present utility model: directly use 4～5N grade metallic silicon (industrial silicon) to produce 6N level solar energy level silicon as the raw material refining; Technical process is short, has greatly saved facility investment, has simplified the technological operation program, and power consumption, materials consumption are reduced greatly, decrease production cost, make product have more the market competitiveness; Pollution to environment is minimum, meets the less energy-consumption that country and local sector propose, low consumption, the industry policy requirement of low-cost environmental nonpollution; This technique is a kind of new technique of the standby solar energy level silicon of novel metallurgical legal system of uniqueness, for pioneering, will provide Reliable guarantee for we promote metallurgy method production polysilicon both at home and abroad.
Description of drawings
Fig. 1 is a kind of structural representation of the melting vacuum-treat stove for the production of 6N level solar-grade polysilicon.
Fig. 2 is the process flow sheet of preparation 4～5N grade metallic silicon (industrial silicon).
Fig. 3 is take the process flow sheet of 4～5N grade metallic silicon (industrial silicon) as raw material production 6N level solar-grade polysilicon.
1 is the intermediate frequency furnace lid support among the figure, the 2nd, and intermediate frequency bell, the 3rd, hydro-cylinder; the 4th, frequency conversion furnace, the 5th, sealing member, the 6th, argon-blowing device; the 7th, electric power incoming line system, the 8th, furnace lining, the 9th, inlet and outlet system; the 10th, slag liquid, the 11st, form thief hole, the 12nd, vacuum (-tight) housing; the 13rd, travelling car; the 14th, vacuum lead, the 15th, blowing argon hole, the 16th, silicon liquid.
Embodiment
As shown in Figure 1, its structure comprises hydro-cylinder 3, frequency conversion furnace 4, electric power incoming line system 7, inlet and outlet system 9, vacuum (-tight) housing 12 and travelling car 13; Wherein electric power incoming line system 7, inlet and outlet system 9 are installed on the shell of frequency conversion furnace 4, hydro-cylinder 3 is mounted on a side of frequency conversion furnace 4, hydro-cylinder 3 is used for the usefulness of frequency conversion tilting furnace, and hydro-cylinder 3 promotes frequency conversion furnace 4 and overturns and lifting, and its flip angle is 105 degree to the maximum; Vacuum (-tight) housing 12 is installed in the top of frequency conversion furnace 4, vacuum (-tight) housing 12 by chain suspension on travelling car 13.
Described frequency conversion furnace 4 comprises the cylindrical shell of inductor block, yoke and stainless steel sealing, and inductor block adopts the rectangle copper tube, consists of ruhmkorff coil by the multiple tracks insulation processing, and ruhmkorff coil guarantees electric discharge phenomena do not occur when vacuum refinement, guarantees its normal operation; Arrange many group yokes around ruhmkorff coil, yoke can improve the plant capacity factor, reduces power consumption, reduces eddy losses; Ruhmkorff coil and yoke are installed in the cylindrical shell of stainless steel sealing, all adopt vacuum-sealing to connect with water-cooled cable, water-cooled tube in the outer inlet and outlet system 9 of cylindrical shell.
Described body water-cooling cable, the cooling of vacuum pump is totally carried out by the user, satisfies water inlet less than 35 ℃, and draining is less than 55 ℃, hydraulic pressure 2.5Kg/ cm2.Total Water 100 m3/h, water quality must meet national standards for industrial water usage.
Described vacuum (-tight) housing 12 is installed in outside the intermediate frequency bell 2, and it is the cylindrical shell with end socket that is welded into by stainless steel, and the bottom is round flange, and the body of heater upper flange is sealed to each other, and the above arranges vaccum seal ring; Vacuum (-tight) housing 12 1 sides are equipped with to vacuumize takes over 14, after covering, vacuum (-tight) housing 12 can vacuumize by vacuumizing to take in 14 pairs of bodies of heater, in the vacuum (-tight) housing 12 crucible cover is housed, can prevent that heat too runs off, establish form thief hole 11 on the vacuum (-tight) housing 12, can be by form thief hole 11 sampling thermometrics, vacuum (-tight) housing 12 by chain suspension on travelling car 13, travelling car 13 has track, vacuum (-tight) housing 12 is displaced sideways, mechanical transmission is all adopted in the movement of the lifting of vacuum (-tight) housing 12 and intermediate frequency furnace lid support 1, guarantees its stable drive, reliably reaches safety.
Described vacuum system: according to the vacuum tightness requirement of technique to equipment, adopt 2 grades of pump forms, satisfy the requirement in the 0.5-10mbar pressure range of its vacuum tightness; Three parallel connections of H-150 slide valve pump add that one of ETP-1800 lobe pump forms a cover unit (totally 2 covers) body of heater is vacuumized.According to smelting characteristic, at vacuum pipe the cooling and dedusting device is set, when guaranteeing equipment operation vacuum refinement, can obtain higher vacuum.Be provided with one of minipump in the vacuum pipe, be convenient in the volatilization in early stage of finding time, pollutent is too much, causes mechanical pump, and lobe pump produces fault, and impact is used.Whole vacuum system operation all can the PLC automatic operation.
Contrast Fig. 3, take the method for 4～5N grade metallic silicon (industrial silicon) as raw material production 6N level solar-grade polysilicon, the method comprises following technique:
4～5N grade high-purity silicon product of the solid block of 1) mineral hot furnace as shown in Figure 2 being produced (or liquid) adds in the intermediate frequency furnace, carry out the fusing under the non-vacuum condition, and adding contains Si, Ca, Al under high temperature (1600-1900 ℃), its weight percent is Si:Ca:Al=30-45:30-40, the slag former of 25-35, through the refining of twice electromagnetic induction slag former, B among the Si is controlled at below the 1ppm effectively, and Al, the Ca in the high-purity Si, iron etc. also obtain the reduction of 89-90% simultaneously; Stirring by Ar Blowing is carried out in the bottom when carrying out antivacuum fusing, simultaneously, carries out the Ar protection in stove top;
2) the slag liquid mixture that produces being carried out slag liquid separates, slagging-off obtains silicon liquid, silicon liquid is poured in the separator special purpose packet, the processing that vacuumizes through vacuum (-tight) housing, solidify and obtain block HIGH-PURITY SILICON material, block HIGH-PURITY SILICON material is weighed, and carries out the ICP-AES(spectrograph) or ICP-MS matter know instrument well) analyze;
3) the block HIGH-PURITY SILICON material directional solidification furnace of after fragmentation, packing into, directional freeze is solidified processing carrying out melt orientation under vacuum tightness 1000-10000Pa condition, obtains the solar-grade polysilicon ingot;
4) polycrystal silicon ingot is carried out the impurity excision, then carry out ICP-AES or ICP-MS analysis, FT-IR analysis and SIRM, U-PCD, EBIC analysis;
5) silicon ingot that step 4) is obtained carries out defective ingot to be separated, and the tankage warehouse-in is stacked, and then finished ingot is put in storage.
Claims (5)
1. produce the melting vacuum-treat stove of 6N level solar-grade polysilicon, it is characterized in that structure comprises hydro-cylinder, frequency conversion furnace, electric power incoming line system, inlet and outlet system, vacuum (-tight) housing and travelling car; Wherein electric power incoming line system, inlet and outlet system are installed on the shell of frequency conversion furnace, and hydro-cylinder is mounted on a side of frequency conversion furnace, and being used for the flip angle that the cylinder pushes frequency conversion furnace of the usefulness of frequency conversion tilting furnace overturns is 105 degree; Vacuum (-tight) housing is installed in the top of frequency conversion furnace, vacuum (-tight) housing by chain suspension on travelling car.
2. the melting vacuum-treat stove of production according to claim 1 6N level solar-grade polysilicon, it is characterized in that described frequency conversion furnace comprises the cylindrical shell of inductor block, yoke and stainless steel sealing, inductor block adopts the rectangle copper tube, consists of ruhmkorff coil by the multiple tracks insulation processing; Around ruhmkorff coil, arrange many group yokes; Ruhmkorff coil and yoke are installed in the cylindrical shell of stainless steel sealing, all adopt vacuum-sealing to connect with water-cooled cable, water-cooled tube in the outer inlet and outlet system of cylindrical shell.
3. the melting vacuum-treat stove of production 6N level solar-grade polysilicon according to claim 1 is characterized in that in the described frequency conversion furnace body of heater silicon liquid being housed, and the upper strata of silicon liquid is slag liquid; The intermediate frequency bell is housed on the frequency conversion furnace, and the intermediate frequency bell is mounted on the intermediate frequency furnace lid support, and intermediate frequency furnace covers and has the blowing argon hole, and the bottom of frequency conversion furnace is equipped with argon-blowing device.
4. the melting vacuum-treat stove of production according to claim 1 6N level solar-grade polysilicon, it is characterized in that described sealing member is installed in needs the place that seals between the shell of frequency conversion furnace body of heater and electric power incoming line system, inlet and outlet system, the wire inlet system power supply connects ruhmkorff coil, furnace lining parcel frequency conversion furnace, the housing of inlet and outlet system and frequency conversion furnace joins.
5. the melting vacuum-treat stove of production according to claim 1 6N level solar-grade polysilicon, it is characterized in that described vacuum (-tight) housing is installed in outside the intermediate frequency bell, it is the cylindrical shell with end socket that is welded into by stainless steel, the bottom is round flange, sealed to each other with the body of heater upper flange, the above arranges vaccum seal ring; Vacuum (-tight) housing one side is equipped with and vacuumizes adapter, and crucible cover is housed in the vacuum (-tight) housing, establishes the form thief hole on the vacuum (-tight) housing, and on travelling car, travelling car has track to vacuum (-tight) housing by chain suspension.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220586983 CN202898046U (en) | 2012-11-09 | 2012-11-09 | Fusion vacuum treatment furnace for producing 6N-level solar grade polysilicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220586983 CN202898046U (en) | 2012-11-09 | 2012-11-09 | Fusion vacuum treatment furnace for producing 6N-level solar grade polysilicon |
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| Publication Number | Publication Date |
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| CN202898046U true CN202898046U (en) | 2013-04-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220586983 Expired - Lifetime CN202898046U (en) | 2012-11-09 | 2012-11-09 | Fusion vacuum treatment furnace for producing 6N-level solar grade polysilicon |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110207492A (en) * | 2019-07-05 | 2019-09-06 | 无锡刚正精密吸铸有限公司 | Convenient type vacuum melting furnace |
| CN113584586A (en) * | 2021-08-06 | 2021-11-02 | 宁夏红日东升新能源材料有限公司 | Method and device for purifying polycrystalline silicon by centrifugal directional solidification |
-
2012
- 2012-11-09 CN CN 201220586983 patent/CN202898046U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110207492A (en) * | 2019-07-05 | 2019-09-06 | 无锡刚正精密吸铸有限公司 | Convenient type vacuum melting furnace |
| CN113584586A (en) * | 2021-08-06 | 2021-11-02 | 宁夏红日东升新能源材料有限公司 | Method and device for purifying polycrystalline silicon by centrifugal directional solidification |
| CN113584586B (en) * | 2021-08-06 | 2024-04-26 | 宁夏红日东升新能源材料有限公司 | Centrifugal directional solidification purification method and device for polysilicon |
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| GR01 | Patent grant | ||
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| CX01 | Expiry of patent term |
Granted publication date: 20130424 |