CN202869282U - Installation fixing device of heat processing equipment furnace wire lead - Google Patents
Installation fixing device of heat processing equipment furnace wire lead Download PDFInfo
- Publication number
- CN202869282U CN202869282U CN 201220436086 CN201220436086U CN202869282U CN 202869282 U CN202869282 U CN 202869282U CN 201220436086 CN201220436086 CN 201220436086 CN 201220436086 U CN201220436086 U CN 201220436086U CN 202869282 U CN202869282 U CN 202869282U
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- lead
- hole
- fixing device
- wire
- installing
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Abstract
The utility model relates to an installation fixing device of a semiconductor heat processing equipment furnace wire lead. The installation fixing device comprises a lead fixing block, wherein a through hole is formed in the lead fixing block, and used for a furnace wire lead to pass. A boss is arranged on the periphery of the through hole, and located at one side of the lead fixing block made of insulation materials. The installation fixing device is capable of effectively eliminating potential safety hazards and other adverse influences in a heat processing device caused by installation errors of the furnace wire lead, and is simple in structure, and convenient to install and debug.
Description
Technical field
The utility model relates to a kind of semiconductor heat treatment facility stove silk lead-in wire fixing device for installing.
Background technology
The mode that stove silk lead fixing structure adopts on this field Equipment for Heating Processing at present, if there is obvious alignment error in stove silk lead-in wire in installation process, then can not effectively regulate to eliminate the error adverse effect to fixed block, and stove silk lead-in wire can not carry out good strick precaution with the insulation of inboard wall of furnace body; Present stove silk lead fixing structure also exists complex structure, and inconvenient characteristics are installed.
In order to overcome the above problems, the utility model has been done useful improvement.
The utility model content
The technical problem that (one) will solve
The purpose of this utility model provides a kind of stove silk lead-in wire can effectively avoided and contacts with inboard wall of furnace body, and the stove silk of effectively eliminating the adverse effect that alignment error the brings mount fixing structure that goes between.
(2) technical scheme
The utility model is achieved through the following technical solutions: a kind of Equipment for Heating Processing stove silk lead-in wire fixing device for installing comprises the lead-in wire fixed block; Described lead-in wire fixed block is provided with through hole; Be provided with boss around the described through hole, described boss is positioned at a side of described lead-in wire fixed block; The material of described lead-in wire fixed block is insulating materials.
Particularly, described through hole is slotted hole.
Further, this device also comprises set bolt; Described lead-in wire fixed block is provided with installing hole, and described set bolt passes this installing hole.
Further, described installing hole is slotted hole, and the length direction of this installing hole and the length direction of described through hole are perpendicular.
Further again, described installing hole is two, and described two installing holes are separately positioned on the two ends of described through hole.
In addition, the material of described lead-in wire fixed block is pottery.
(3) beneficial effect
Compare with product with prior art, the utility model has the following advantages:
1, effectively eliminated for being brought by the alignment error of stove silk lead-in wire in the Equipment for Heating Processing
Potential safety hazard and other adverse effects;
2, the fixing device for installing of this stove silk lead-in wire is simple in structure, is convenient to installation and debugging.
Description of drawings
Fig. 1 is lead-in wire fixed block front view of the present utility model;
Fig. 2 is the profile of Fig. 1;
Fig. 3 is the rearview of lead-in wire fixed block of the present utility model;
Fig. 4 is the installation site schematic diagram of lead-in wire fixed block of the present utility model on body of heater;
Fig. 5 is that the utility model is to the installation site schematic diagram of stove silk lead-in wire.
In the accompanying drawing, assembly and the corresponding construction of each mark representative are listed as follows:
1, lead-in wire fixed block, 2, boss, 3, through hole, 4, installing hole, 5, stove silk lead-in wire, 6, inboard wall of furnace body, 7, set bolt.
The specific embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present utility model is made a detailed explanation.
Such as Fig. 1, Fig. 2 and shown in Figure 3, be used for the fixing device for installing of semiconductor heat treatment facility stove silk lead-in wire, this device is mainly lead-in wire fixed block 1, and this lead-in wire fixed block 1 is provided with boss 2 and through hole 3.Boss 2 is arranged on around the port of a side of through hole 3.Through hole 3 is the slotted hole shape.At the two ends of through hole 3, also be provided with two installing holes 4 on the lead-in wire fixed block 1, these two installing holes 4 are similarly the slotted hole shape, and their length direction is vertical with the length direction of through hole 3.
As shown in Figure 4, boss 2 can be embedded in 6 li of inboard wall of furnace body, and stove silk lead-in wire 5 stretches out from the through hole 3 on this lead-in wire fixed block 1.Boss 2 can effectively prevent the contacting of conductor of stove silk lead-in wire 5 and inboard wall of furnace body 6, has strengthened the security of equipment.Stove silk lead-in wire 5 places in the described through hole 3, through hole 3 on the lead-in wire fixed block 1 adopts the form of slotted hole to come the alignment error of absorption furnace silk lead-in wire 5 on inboard wall of furnace body 6, guarantees that stove silk lead-in wire 5 can not make because of the effect of mismachining tolerance or alignment error stove silk lead-in wire 5 produce corresponding external force.
As shown in Figure 5, set bolt 7 is fixed on the inboard wall of furnace body 6 by installing hole 4 fixed block 1 that will go between.Because installing hole 4 also is the slotted hole shape, therefore lead-in wire fixed block 1 can be along this slotted hole length direction move left and right, lead-in wire fixed block 1 is after the length direction of slotted hole carries out position adjustments, and is fixing by set bolt 7.Thereby finish the adjusting of the relative position of lead-in wire fixed block 1 and stove silk lead-in wire 5.
The designing material of this device should be high temperature resistant, insulating materials; Be preferably pottery.
The above only is preferred embodiment of the present utility model, and is in order to limit the utility model, not all within spirit of the present utility model and principle, any modification of doing, is equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (6)
1. an Equipment for Heating Processing stove silk lead-in wire fixing device for installing is characterized in that, comprise the lead-in wire fixed block, described lead-in wire fixed block is provided with through hole; Be provided with boss around the described through hole, described boss is positioned at a side of described lead-in wire fixed block; The material of described lead-in wire fixed block is insulating materials.
2. stove silk lead-in wire fixing device for installing according to claim 1 is characterized in that, described through hole is slotted hole.
3. stove silk lead-in wire fixing device for installing according to claim 2 is characterized in that, this device also comprises set bolt; Described lead-in wire fixed block is provided with installing hole, and described set bolt passes this installing hole.
4. stove silk lead-in wire fixing device for installing according to claim 3 is characterized in that, described installing hole is slotted hole, and the length direction of this installing hole and the length direction of described through hole are perpendicular.
5. stove silk lead-in wire fixing device for installing according to claim 4 is characterized in that, described installing hole is two, and described two installing holes are separately positioned on the two ends of described through hole.
6. stove silk lead-in wire fixing device for installing according to claim 1 is characterized in that, the material of described lead-in wire fixed block is pottery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220436086 CN202869282U (en) | 2012-08-29 | 2012-08-29 | Installation fixing device of heat processing equipment furnace wire lead |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220436086 CN202869282U (en) | 2012-08-29 | 2012-08-29 | Installation fixing device of heat processing equipment furnace wire lead |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202869282U true CN202869282U (en) | 2013-04-10 |
Family
ID=48035996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220436086 Withdrawn - After Issue CN202869282U (en) | 2012-08-29 | 2012-08-29 | Installation fixing device of heat processing equipment furnace wire lead |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202869282U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102809297A (en) * | 2012-08-29 | 2012-12-05 | 北京七星华创电子股份有限公司 | Furnace wire lead mounting and fixing device for thermal treatment equipment |
-
2012
- 2012-08-29 CN CN 201220436086 patent/CN202869282U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102809297A (en) * | 2012-08-29 | 2012-12-05 | 北京七星华创电子股份有限公司 | Furnace wire lead mounting and fixing device for thermal treatment equipment |
| CN102809297B (en) * | 2012-08-29 | 2015-01-21 | 北京七星华创电子股份有限公司 | Furnace wire lead mounting and fixing device for thermal treatment equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130410 Effective date of abandoning: 20150121 |
|
| RGAV | Abandon patent right to avoid regrant |