Equipment for Heating Processing stove silk lead-in wire fixing device for installing
Technical field
The present invention relates to a kind of semiconductor heat treatment equipment stove silk lead-in wire fixing device for installing.
Background technology
The mode that in this field Equipment for Heating Processing, stove silk lead fixing structure adopts at present, if there is obvious alignment error in stove silk lead-in wire in installation process, then can not effectively regulate to eliminate error adverse effect to fixed block, and stove silk lead-in wire can not carry out good strick precaution with the insulation of inboard wall of furnace body; Current stove silk lead fixing structure also also exists complex structure, installs inconvenient feature.
In order to overcome the above problems, invention has been useful improvement.
Summary of the invention
(1) technical problem that will solve
The object of this invention is to provide one can effectively avoid stove silk lead-in wire to contact with inboard wall of furnace body, and effectively eliminates the stove silk lead-in wire mount fixing structure of the adverse effect that alignment error is brought.
(2) technical scheme
The present invention is achieved by the following technical solutions: a kind of Equipment for Heating Processing stove silk lead-in wire fixing device for installing, comprises lead-in wire fixed block; Described lead-in wire fixed block is provided with through hole, for being gone between by stove silk; Be provided with boss around described through hole, described boss is positioned at the side of described lead-in wire fixed block; The material of described lead-in wire fixed block is insulating materials.
Particularly, described through hole is slotted hole.
Further, this device also comprises set bolt; Described lead-in wire fixed block is provided with installing hole, and described set bolt fixes described lead-in wire fixed block through this installing hole.
Further, described installing hole is slotted hole, the length direction of this installing hole and the length direction of described through hole perpendicular; Described lead-in wire fixed block, after the length direction of slotted hole carries out position adjustments, is fixed by set bolt.
Further again, described installing hole is two, and described two installing holes are separately positioned on the two ends of described through hole.
In addition, the material of described lead-in wire fixed block is pottery.
(3) beneficial effect
Compare with product with prior art, the present invention has the following advantages:
1. effectively eliminate potential safety hazard and other adverse effects that the alignment error gone between by stove silk in Equipment for Heating Processing is brought;
2. the fixing device for installing structure of this stove silk lead-in wire is simple, is convenient to installation and debugging.
Accompanying drawing explanation
Fig. 1 is the front view of lead-in wire fixed block of the present invention;
Fig. 2 is the cross section view of Fig. 1;
Fig. 3 is the rearview of lead-in wire fixed block of the present invention;
Fig. 4 is the installation site schematic diagram of lead-in wire fixed block of the present invention on body of heater;
Fig. 5 is the installation site schematic diagram that the present invention goes between to stove silk.
In accompanying drawing, the assembly representated by each mark and corresponding construction are listed as follows:
1, go between fixed block, and 2, boss, 3, through hole, 4, installing hole, 5, stove silk lead-in wire, 6, inboard wall of furnace body, 7, set bolt.
Detailed description of the invention
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is made a detailed explanation.
As shown in Figure 1, Figure 2 and Figure 3, for the fixing device for installing of semiconductor heat treatment equipment stove silk lead-in wire, this device is mainly lead-in wire fixed block 1, and this lead-in wire fixed block 1 is provided with boss 2 and through hole 3.Boss 2 is arranged on around the port of the side of through hole 3.Through hole 3 is slotted hole shape.At the two ends of through hole 3, lead-in wire fixed block 1 is also provided with two installing holes 4, and these two installing holes 4 are similarly slotted hole shape, and their length direction is vertical with the length direction of through hole 3.
As shown in Figure 4, boss 2 can be embedded in inboard wall of furnace body 6 li, and stove silk lead-in wire 5 stretches out from the through hole 3 this lead-in wire fixed block 1.Boss 2 can effectively prevent stove silk go between 5 with the contacting of inboard wall of furnace body 6, enhance the security of equipment.Stove silk lead-in wire 5 is placed in described through hole 3, through hole 3 on lead-in wire fixed block 1 adopts the form of slotted hole to carry out the alignment error of absorption furnace silk lead-in wire 5 on inboard wall of furnace body 6, guarantees that stove silk lead-in wire 5 can not make because of the effect of mismachining tolerance or alignment error stove silk go between and 5 produce corresponding external force.
As shown in Figure 5, lead-in wire fixed block 1 is fixed on inboard wall of furnace body 6 by installing hole 4 by set bolt 7.Because installing hole 4 is also slotted hole shape, therefore lead-in wire fixed block 1 can move left and right along this slotted hole length direction, and lead-in wire fixed block 1, after the length direction of slotted hole carries out position adjustments, is fixed by set bolt 7.Thus complete lead-in wire fixed block 1 and stove silk go between 5 the adjustment of relative position.
The designing material of this device should be high temperature resistant, insulating materials; Be preferably pottery.
Above embodiment is only for illustration of the present invention; and be not limitation of the present invention; the those of ordinary skill of relevant technical field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all equivalent technical schemes also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.