Equipment for Heating Processing stove silk lead-in wire fixing device for installing
Technical field
The present invention relates to a kind of semiconductor heat treatment facility stove silk lead-in wire fixing device for installing.
Background technology
The mode that stove silk lead fixing structure is adopted on this field Equipment for Heating Processing at present; If there is tangible alignment error in stove silk lead-in wire in installation process; Then can not effectively regulate with elimination error adverse effect, and stove silk lead-in wire can not carry out good strick precaution with the insulation of inboard wall of furnace body fixed block; Present stove silk lead fixing structure also exists complex structure, and inconvenient characteristics are installed.
In order to overcome the above problems, the present invention has done useful improvement.
Summary of the invention
The technical problem that (one) will solve
The purpose of this invention is to provide a kind of stove silk lead-in wire can effectively avoided and contact with inboard wall of furnace body, and the stove silk of effectively eliminating the adverse effect that alignment error the brings mount fixing structure that goes between.
(2) technical scheme
The present invention realizes through following technical scheme: a kind of Equipment for Heating Processing stove silk lead-in wire fixing device for installing comprises the lead-in wire fixed block; Said lead-in wire fixed block is provided with through hole, is used for going between through the stove silk; Be provided with boss around the said through hole, said boss is positioned at a side of said lead-in wire fixed block; The material of said lead-in wire fixed block is an insulating materials.
Particularly, described through hole is a slotted hole.
Further, this device also comprises set bolt; Described lead-in wire fixed block is provided with installing hole, and described set bolt passes this installing hole and fixes described lead-in wire fixed block.
Further, described installing hole is a slotted hole, and the length direction of this installing hole and the length direction of said through hole are perpendicular; Described lead-in wire fixed block is fixed through set bolt after the length direction of slotted hole carries out position adjustments.
Further again, described installing hole is two, and said two installing holes are separately positioned on the two ends of said through hole.
In addition, the material of described lead-in wire fixed block is a pottery.
(3) beneficial effect
Compare with product with prior art, the present invention has following advantage:
1. potential safety hazard and other adverse effects brought by the alignment error of stove silk lead-in wire in the Equipment for Heating Processing have effectively been eliminated;
2. the fixing device for installing of this stove silk lead-in wire is simple in structure, is convenient to Installation and Debugging.
Description of drawings
Fig. 1 is the front view of lead-in wire fixed block of the present invention;
Fig. 2 is the cross section view of Fig. 1;
Fig. 3 is the rearview of lead-in wire fixed block of the present invention;
Fig. 4 is the installation site sketch map of lead-in wire fixed block of the present invention on body of heater;
Fig. 5 is the installation site sketch map of the present invention to stove silk lead-in wire.
In the accompanying drawing, the assembly of each mark representative and corresponding construction are tabulated as follows:
1, lead-in wire fixed block, 2, boss, 3, through hole, 4, installing hole, 5, stove silk lead-in wire, 6, inboard wall of furnace body, 7, set bolt.
The specific embodiment
Do a detailed explanation below in conjunction with the accompanying drawing specific embodiments of the invention.
Like Fig. 1, Fig. 2 and shown in Figure 3, be used for the fixing device for installing of semiconductor heat treatment facility stove silk lead-in wire, this device is mainly lead-in wire fixed block 1, and this lead-in wire fixed block 1 is provided with boss 2 and through hole 3.Boss 2 is arranged on around the port of a side of through hole 3.Through hole 3 is the slotted hole shape.At the two ends of through hole 3, also be provided with two installing holes 4 on the lead-in wire fixed block 1, these two installing holes 4 are similarly the slotted hole shape, and their length direction is vertical with the length direction of through hole 3.
As shown in Figure 4, boss 2 can be embedded in 6 li of inboard wall of furnace body, and stove silk lead-in wire 5 stretches out from the through hole 3 on this lead-in wire fixed block 1.Boss 2 can effectively prevent contacting of stove silk lead-in wire 5 and inboard wall of furnace body 6, has strengthened the security of equipment.Stove silk lead-in wire 5 places in the described through hole 3; Through hole 3 on the lead-in wire fixed block 1 adopts the form of slotted hole to absorb the alignment error of stove silk lead-in wire 5 on inboard wall of furnace body 6, guarantees that stove silk lead-in wire 5 can not make stove silk lead-in wire 5 produce corresponding external force because of the effect of mismachining tolerance or alignment error.
As shown in Figure 5, set bolt 7 is fixed on the inboard wall of furnace body 6 through installing hole 4 fixed block 1 that will go between.Because installing hole 4 also is the slotted hole shape, so lead-in wire fixed block 1 can be along this slotted hole length direction move left and right, lead-in wire fixed block 1 is after the length direction of slotted hole carries out position adjustments, and is fixing through set bolt 7.Thereby accomplish the adjusting of the relative position of lead-in wire fixed block 1 and stove silk lead-in wire 5.
This Design of device material should be high temperature resistant, insulating materials; Be preferably pottery.
Above embodiment only is used to explain the present invention; And be not limitation of the present invention; The those of ordinary skill in relevant technologies field under the situation that does not break away from the spirit and scope of the present invention, can also be made various variations and modification; Therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.