CN102809297A - Furnace wire lead mounting and fixing device for thermal treatment equipment - Google Patents

Furnace wire lead mounting and fixing device for thermal treatment equipment Download PDF

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Publication number
CN102809297A
CN102809297A CN2012103142842A CN201210314284A CN102809297A CN 102809297 A CN102809297 A CN 102809297A CN 2012103142842 A CN2012103142842 A CN 2012103142842A CN 201210314284 A CN201210314284 A CN 201210314284A CN 102809297 A CN102809297 A CN 102809297A
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China
Prior art keywords
lead
hole
wire
fixed block
fixing device
Prior art date
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Granted
Application number
CN2012103142842A
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Chinese (zh)
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CN102809297B (en
Inventor
孙少东
董金卫
王健
钟华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
North China Science And Technology Group Ltd By Share Ltd
Beijing Naura Microelectronics Equipment Co Ltd
Original Assignee
Beijing Sevenstar Electronics Co Ltd
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Application filed by Beijing Sevenstar Electronics Co Ltd filed Critical Beijing Sevenstar Electronics Co Ltd
Priority to CN201210314284.2A priority Critical patent/CN102809297B/en
Publication of CN102809297A publication Critical patent/CN102809297A/en
Application granted granted Critical
Publication of CN102809297B publication Critical patent/CN102809297B/en
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Abstract

The invention relates to a furnace wire lead mounting and fixing device for thermal treatment equipment. The furnace wire lead mounting and fixing device comprises a lead fixing block which is provided with a through hole. A furnace wire lead can pass through the through hole. A boss is arranged on the periphery of the through hole and on one side of the lead fixing block. The lead fixing block is made of insulation materials. Safety potential hazards and other adverse affections caused by mounting error of the furnace wire lead in the thermal treatment equipment can be effectively eliminated. Besides, the furnace wire lead mounting and fixing device is simple and convenient to mount and debug.

Description

Equipment for Heating Processing stove silk lead-in wire fixing device for installing
Technical field
The present invention relates to a kind of semiconductor heat treatment facility stove silk lead-in wire fixing device for installing.
Background technology
The mode that stove silk lead fixing structure is adopted on this field Equipment for Heating Processing at present; If there is tangible alignment error in stove silk lead-in wire in installation process; Then can not effectively regulate with elimination error adverse effect, and stove silk lead-in wire can not carry out good strick precaution with the insulation of inboard wall of furnace body fixed block; Present stove silk lead fixing structure also exists complex structure, and inconvenient characteristics are installed.
In order to overcome the above problems, the present invention has done useful improvement.
Summary of the invention
The technical problem that (one) will solve
The purpose of this invention is to provide a kind of stove silk lead-in wire can effectively avoided and contact with inboard wall of furnace body, and the stove silk of effectively eliminating the adverse effect that alignment error the brings mount fixing structure that goes between.
(2) technical scheme
The present invention realizes through following technical scheme: a kind of Equipment for Heating Processing stove silk lead-in wire fixing device for installing comprises the lead-in wire fixed block; Said lead-in wire fixed block is provided with through hole, is used for going between through the stove silk; Be provided with boss around the said through hole, said boss is positioned at a side of said lead-in wire fixed block; The material of said lead-in wire fixed block is an insulating materials.
Particularly, described through hole is a slotted hole.
Further, this device also comprises set bolt; Described lead-in wire fixed block is provided with installing hole, and described set bolt passes this installing hole and fixes described lead-in wire fixed block.
Further, described installing hole is a slotted hole, and the length direction of this installing hole and the length direction of said through hole are perpendicular; Described lead-in wire fixed block is fixed through set bolt after the length direction of slotted hole carries out position adjustments.
Further again, described installing hole is two, and said two installing holes are separately positioned on the two ends of said through hole.
In addition, the material of described lead-in wire fixed block is a pottery.
(3) beneficial effect
Compare with product with prior art, the present invention has following advantage:
1. potential safety hazard and other adverse effects brought by the alignment error of stove silk lead-in wire in the Equipment for Heating Processing have effectively been eliminated;
2. the fixing device for installing of this stove silk lead-in wire is simple in structure, is convenient to Installation and Debugging.
Description of drawings
Fig. 1 is the front view of lead-in wire fixed block of the present invention;
Fig. 2 is the cross section view of Fig. 1;
Fig. 3 is the rearview of lead-in wire fixed block of the present invention;
Fig. 4 is the installation site sketch map of lead-in wire fixed block of the present invention on body of heater;
Fig. 5 is the installation site sketch map of the present invention to stove silk lead-in wire.
In the accompanying drawing, the assembly of each mark representative and corresponding construction are tabulated as follows:
1, lead-in wire fixed block, 2, boss, 3, through hole, 4, installing hole, 5, stove silk lead-in wire, 6, inboard wall of furnace body, 7, set bolt.
The specific embodiment
Do a detailed explanation below in conjunction with the accompanying drawing specific embodiments of the invention.
Like Fig. 1, Fig. 2 and shown in Figure 3, be used for the fixing device for installing of semiconductor heat treatment facility stove silk lead-in wire, this device is mainly lead-in wire fixed block 1, and this lead-in wire fixed block 1 is provided with boss 2 and through hole 3.Boss 2 is arranged on around the port of a side of through hole 3.Through hole 3 is the slotted hole shape.At the two ends of through hole 3, also be provided with two installing holes 4 on the lead-in wire fixed block 1, these two installing holes 4 are similarly the slotted hole shape, and their length direction is vertical with the length direction of through hole 3.
As shown in Figure 4, boss 2 can be embedded in 6 li of inboard wall of furnace body, and stove silk lead-in wire 5 stretches out from the through hole 3 on this lead-in wire fixed block 1.Boss 2 can effectively prevent contacting of stove silk lead-in wire 5 and inboard wall of furnace body 6, has strengthened the security of equipment.Stove silk lead-in wire 5 places in the described through hole 3; Through hole 3 on the lead-in wire fixed block 1 adopts the form of slotted hole to absorb the alignment error of stove silk lead-in wire 5 on inboard wall of furnace body 6, guarantees that stove silk lead-in wire 5 can not make stove silk lead-in wire 5 produce corresponding external force because of the effect of mismachining tolerance or alignment error.
As shown in Figure 5, set bolt 7 is fixed on the inboard wall of furnace body 6 through installing hole 4 fixed block 1 that will go between.Because installing hole 4 also is the slotted hole shape, so lead-in wire fixed block 1 can be along this slotted hole length direction move left and right, lead-in wire fixed block 1 is after the length direction of slotted hole carries out position adjustments, and is fixing through set bolt 7.Thereby accomplish the adjusting of the relative position of lead-in wire fixed block 1 and stove silk lead-in wire 5.
This Design of device material should be high temperature resistant, insulating materials; Be preferably pottery.
Above embodiment only is used to explain the present invention; And be not limitation of the present invention; The those of ordinary skill in relevant technologies field under the situation that does not break away from the spirit and scope of the present invention, can also be made various variations and modification; Therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.

Claims (6)

1. an Equipment for Heating Processing stove silk lead-in wire fixing device for installing is characterized in that comprise the lead-in wire fixed block, said lead-in wire fixed block is provided with through hole, is used for going between through the stove silk; Be provided with boss around the said through hole, said boss is positioned at a side of said lead-in wire fixed block; The material of said lead-in wire fixed block is an insulating materials.
2. stove silk lead-in wire fixing device for installing according to claim 1 is characterized in that described through hole is a slotted hole.
3. stove silk lead-in wire fixing device for installing according to claim 2 is characterized in that this device also comprises set bolt; Described lead-in wire fixed block is provided with installing hole, and described set bolt passes this installing hole and fixes described lead-in wire fixed block.
4. stove silk lead-in wire fixing device for installing according to claim 3 is characterized in that described installing hole is a slotted hole, and the length direction of this installing hole and the length direction of said through hole are perpendicular; Described lead-in wire fixed block is fixed through set bolt after the length direction of slotted hole carries out position adjustments.
5. stove silk lead-in wire fixing device for installing according to claim 4 it is characterized in that described installing hole is two, and said two installing holes is separately positioned on the two ends of said through hole.
6. stove silk lead-in wire fixing device for installing according to claim 1 is characterized in that the material of described lead-in wire fixed block is a pottery.
CN201210314284.2A 2012-08-29 2012-08-29 Furnace wire lead mounting and fixing device for thermal treatment equipment Active CN102809297B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210314284.2A CN102809297B (en) 2012-08-29 2012-08-29 Furnace wire lead mounting and fixing device for thermal treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210314284.2A CN102809297B (en) 2012-08-29 2012-08-29 Furnace wire lead mounting and fixing device for thermal treatment equipment

Publications (2)

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CN102809297A true CN102809297A (en) 2012-12-05
CN102809297B CN102809297B (en) 2015-01-21

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104154754A (en) * 2014-07-31 2014-11-19 长兴华久耐火材料厂 Prefabricated brick for kiln hood walls
CN112696929A (en) * 2020-12-18 2021-04-23 北京北方华创微电子装备有限公司 Semiconductor heat treatment equipment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2636178Y (en) * 2003-06-17 2004-08-25 北京七星华创电子股份有限公司 Furnace body for vertical heating furnace
US20060118546A1 (en) * 2004-08-04 2006-06-08 Ibiden Co., Ltd. Firing furnace and method for manufacturing porous ceramic fired object with firing furnace
CN201352061Y (en) * 2008-12-17 2009-11-25 北京七星华创电子股份有限公司 300mm vertical oxidation furnace body furnace wire lead fixing device
CN201811591U (en) * 2010-09-16 2011-04-27 范楚廷 Ceramic closed constant temperature electric furnace
CN202869282U (en) * 2012-08-29 2013-04-10 北京七星华创电子股份有限公司 Installation fixing device of heat processing equipment furnace wire lead

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2636178Y (en) * 2003-06-17 2004-08-25 北京七星华创电子股份有限公司 Furnace body for vertical heating furnace
US20060118546A1 (en) * 2004-08-04 2006-06-08 Ibiden Co., Ltd. Firing furnace and method for manufacturing porous ceramic fired object with firing furnace
CN201352061Y (en) * 2008-12-17 2009-11-25 北京七星华创电子股份有限公司 300mm vertical oxidation furnace body furnace wire lead fixing device
CN201811591U (en) * 2010-09-16 2011-04-27 范楚廷 Ceramic closed constant temperature electric furnace
CN202869282U (en) * 2012-08-29 2013-04-10 北京七星华创电子股份有限公司 Installation fixing device of heat processing equipment furnace wire lead

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104154754A (en) * 2014-07-31 2014-11-19 长兴华久耐火材料厂 Prefabricated brick for kiln hood walls
CN112696929A (en) * 2020-12-18 2021-04-23 北京北方华创微电子装备有限公司 Semiconductor heat treatment equipment
CN112696929B (en) * 2020-12-18 2023-02-14 北京北方华创微电子装备有限公司 Semiconductor heat treatment equipment

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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District

Patentee after: North China Science and technology group Limited by Share Ltd.

Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2

Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd.

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20180316

Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No.

Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd.

Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District

Patentee before: North China Science and technology group Limited by Share Ltd.