CN202854393U - Focusing compensation device - Google Patents
Focusing compensation device Download PDFInfo
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- CN202854393U CN202854393U CN 201220506677 CN201220506677U CN202854393U CN 202854393 U CN202854393 U CN 202854393U CN 201220506677 CN201220506677 CN 201220506677 CN 201220506677 U CN201220506677 U CN 201220506677U CN 202854393 U CN202854393 U CN 202854393U
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Abstract
The utility model discloses a focusing compensation device which is used for independently adjusting an optimal imaging plane of a plurality of optical imaging components in a multi-axis-imaging system, wherein the optical imaging components are microscopes. The focusing compensation device comprises a plurality of image position shifting devices provided with a plurality of different pieces, wherein each image position shifting device comprises an optical path length changing component which is arranged in an optical path of each microscope. The utility model provides the focusing compensation device which can compensate the differences in imaging plane positions of the independent components in the multi-dimensional imaging system and can assist in promoting the manufacture of the whole system and ensuring the focusing of the imaging of the independent array components.
Description
Technical field
The utility model belongs to the array of microscopes technical field, relates in particular to a kind of focus-compensating device.
Background technology
In multiplanar imaging system, a large amount of optical elements are arranged in the same array, thereby between adjacent optical element fixing relation are arranged.Its advantage is to come scanning object by consistent operation, makes on the picture plane of object imaging and focusing to an expectation.Especially, in the mini microscope array, a large amount of micro objectives are arranged in the same array, are used for replacing independent object lens to come a large zone of scanning object, and the faster resolution of speed is higher.Such mini microscope array sees PCT patent publication No. No.WO for details to be published on September 26th, 02/075370,2002.The mini microscope array also refers to array microscope.In array of microscopes, the imaging sensor of each element is arranged on independent a large amount of planar substrates in the array, has promoted manufacturing to be connected connection with electronics.In the sort of situation, can not be adjusted separately corresponding to the axial location of the sensor of each microscope components.Yet the mistake of camera lens manufacturing and assembling can cause that the object plane of microscope components is different, so just can not be coplanar well.In the sort of situation, when the object plane of microscope components is coplanar, the image of some microscope sensors is not coplanar just, so imaging sensor is surveyed a still unfocused image.In principle, this problem is present in any multiplanar imaging system with an array sensor and respective optical element.For fear of this problem, the dispersion of the shape of lens surface, lens thickness and lens needs very high tightness tolerance limit.Yet such tolerance limit is difficulty and expensive.Therefore, need to take method to compensate difference, especially array microscope on the picture planimetric position of independent component in the multiplanar imaging system, with the manufacturing that promotes this system and the focusing of guaranteeing the imaging of independent array element.
The utility model content
In view of the defective that above-mentioned prior art exists, the purpose of this utility model is to propose a kind of focus-compensating device.
The purpose of this utility model will be achieved by the following technical programs:
A kind of focus-compensating device, be used for regulating independently the optimal imaging plane of a plurality of optical imagery element of multiaxis imaging, described optical imagery element is microscope, described focus-compensating device comprises a plurality of picture position offset assemblies with a plurality of different parts, described picture position offset assembly comprises that an optical path length changes element, and described optical path length changes element and is arranged in the described microscopical light path.
Preferably, above-mentioned a kind of focus-compensating device, wherein: described microscope is the mini microscope array.
Preferably, above-mentioned a kind of focus-compensating device, wherein: described optical path length changes element and comprises a plane-parallel plate.
Preferably, above-mentioned a kind of focus-compensating device, wherein: at least two described optical path length changes element and is arranged on the same support unit.
Preferably, above-mentioned a kind of focus-compensating device, wherein: an anti-reflection coating is arranged at least one face of described support unit.
Outstanding effect of the present utility model is: the utility model has overcome above-mentioned problem, by a kind of focus-compensating device is provided, compensated the difference on the picture planimetric position of independent component in the multiplanar imaging system, promoted the manufacturing of whole system and guaranteed the focusing of the imaging of independent array element.
Following constipation closes the embodiment accompanying drawing, embodiment of the present utility model is described in further detail, so that technical solutions of the utility model are easier to understand, grasp.
Description of drawings
Fig. 1 is the synoptic diagram of array optical element of the array microscope of prior art;
Fig. 2 is the cut-open view of the array microscope of Fig. 1;
Fig. 3 is the cut-open view of the array microscope of the utility model embodiment 1;
Fig. 4 is the cut-open view of the array microscope of the utility model embodiment 2;
Fig. 5 is that the optical path length of the utility model embodiment 3 is adjusted the equipment synoptic diagram;
The cut-open view of the array microscope of Fig. 6 the utility model embodiment 4.
Embodiment
As shown in Figure 1, traditional mini microscope array 10 is comprised of three subarrays 12,14,16, and each subarray is comprised of each one of them of three lens of optical element in substrate and the array of microscopes 10.Therefore, for each element in the array of microscopes, substrate 18 supports a bottom lens 20; Substrate 22 supports middle part lens 24; Substrate 26 supports top lens 28; Each lens in three subarrays are to arrange along optical axis separately ideally.Lens are as one of substrate complete part, and perhaps discrete element is fixed on the substrate separately.Under any circumstance, they have fixing position at substrate, with another fixing position are arranged.The cut-open view of the array microscope among Fig. 1 as shown in Figure 2.This part is comprised of four array of microscopes 30,32,34,36, is formed by the substrate 18,20 of piling up, 22 lens 20,24,28.Object 38 is by the array microscope imaging, and array of microscopes element 30,32,34,37 produces image 40,42,44,46, is surveyed by electronic sensor array 48.Independently the image of array of microscopes element formation is placed on the different shaft positions, such as the image 44 of element 34 formation, because manufacturing and the assembly error of array of microscopes.When sensor array and lens arra are fixed on the independent substrate, another element defocuses to make the adjustment of the axial location of the substrate that array element focuses on will make at least.
Embodiment 1:
Present embodiment provides the compensation of imaging surface difference in the array element, by the imaging surface of mobile alone microscope element, and not mobile any sensor substrate or lens arra substrate.As shown in Figure 3, the optical path length of array element can be inserted in the optical path, a compensator that is formed by medium, and its refractive index is different from the medium that is soaked with array, has changed the optical path length between object and the imaging.This has changed the one-tenth the position of image that element produces conversely.Preferably, this is by inserting plane-parallel plate 50 in the optical path of array element, and for example the axial location of the imaging surface of element 34 changes.Plane-parallel plate 50 is made by suitable optical material, glass for example, and the refractive index that has is different from the medium on next door.When the refractive index ratio of plane-parallel plate 50 is soaked with the medium of array microscope when many, image-forming range will increase.When the refractive index ratio of plane-parallel plate 50 is soaked with the medium of array microscope when few, image-forming range will reduce.
Optical path length is relevant for physical distance d, and the refractive index n of the medium that passes by light is as follows:
Usually, the axial conversion △ of microscope imaging is fixed against the refractive index of the medium of the imaging space that is soaked with array microscope, and the refractive index of plane-parallel plate and the thickness of plane-parallel plate are as follows:
N wherein
pThe refractive index of plane-parallel plate, n
mIt is the refractive index of medium that is soaked with the imaging space of array microscope.Therefore the imaging space of array of microscopes is immersed in the air:
For example, the distance B of the imaging surface of microscope components 34 shortage sensitive face 40 among Fig. 2.Supposing that microscopical imaging space is immersed in the air, is n by inserting a refractive index
pThickness is the plane-parallel plate of t, and imaging surface is adjusted to consistent with sensitive face 40, therefore:
As shown in Figure 3, microscope components 34 46 moves to position 52 as the plane from the position.
Embodiment 2:
If the microscope components more than in the array microscope needs focus-compensating, namely need a compensator, each element needs a plane-parallel plate.Selectively, compensator can be the form of single-chip microcomputer, as shown in Figure 4.Use single-chip microcomputer that two reasons are arranged, different from discrete plane-parallel plate.The first, the assembling of single-chip microcomputer is simpler.The second, single-chip microcomputer can be designed to be introduced a nominal image for each element and moves.Preferably, antireflecting coating is placed on the optical surface of single-chip microcomputer, makes the illuminating ray maximization, reduces the straight line light of reflection at supporting surface.This allows monolithic compensator compensating focusing on both direction.In practice, need some microscope components of focus-compensating to have imaging surface, the position of imaging surface is in the back of sensor cover rather than front.As a feasible method, when array microscope is immersed in the air, imaging only can be moved from microscope components, because the neither one refractive index is less than 1.0 feasible material.In this method, compensator must be placed in the optical path of all microscope components, changes on all images to one normal face.
Fig. 4 has showed another cross section of array microscope among Fig. 1, is comprised of four different array of microscopes elements 54,56,58,60, and its image 64,66,68,70 can form at different axial locations, comprises a monolithic compensator board 62.Can find out that in this case image 64 and 68 can move at sensitive face and form.
The nominal thickness of monolithic compensator board 62 causes that the nominal of the image of array of microscopes element moves.Imaging sensor 72 is placed in a corresponding nominal position.Corresponding to array of microscopes element 54,56,58,60, each moving meter is to position 84,86,88,90 on the compensation plane for moving area 74,76,78,80.In this example, movement can be nominal, and such as element 78 and 80, perhaps recess is such as element 74.Therefore, monolithic compensator board 62 provides the advantage of twocouese compensator, therefore microscopically can be moved forward or removes the nominal position as the plane.
In order to make suitable monolithic compensator board 62, the image space of each array of microscopes element must be known.These positions can be by simulating with ray tracing software, ZEMAX zero R for example, if make and assembly error known.Yet actual image space is measured after array microscope is established.When the image space of each microscope components is known, each microscopical compensator face thickness can be calculated, and as above-mentioned, preferably, uses ray tracing software.Monolithic compensator board 62 can be used suitable material manufacturing, for example glass, plastics, collosol and gel or crystal.They can be made by suitable method, for example single-point diamond cutting technology, casting or photoetching technique.Preferably, monolithic compensator board 62 capped antireflecting coating increase the light that passes through, and reduce straight line light.
Embodiment 3:
Present embodiment is the use of compensator of axial location of the imaging of independent capable of regulating array of microscopes element.For example, by utilizing two optical wedges 92 and 94, be fixed on movably on the transparent substrate 96, they have formed a plane-parallel plate together like this, such as Fig. 5.By moving two chocks forward and away from another, such as arrow 98 and 100 indications, the thickness of plane-parallel plate and corresponding image 102 are formed by light beam 104, can be different.Preferably, two right parallel surfaces of chock have antireflecting coating to come maximum illumination light.Chock 92 and 94 moves forward or removes by a pair of driver 106.These of driver conversions drive signal, and for example an electronic signal under the form of curtage come the transverse conversion chock, so total optical thickness is changed.The most promising a kind of technology is deep electroformed mould technology for making, is used for the manufacturing of driver, reaches the 1mm level, enough fills axial location, adjusts each microscopical focusing length.
Independent adjustable compensator allows the accurate adjustment of the image space of array microscope, therefore guarantees that the foozle of compensator, the smooth difference of sensor array, manufacturing and the assembly error of array of microscopes can be compensated.In addition, the smooth degree of different objects and object thickness are compensated on a dynamic basis.Respectively second method of compensation that separately compensates the manufacturing of alone microscope array element and the focusing error that assembly error causes is, utilize the advantage of the axial chromatic aberration of microscope components, under specific wavelength, operate array of microscopes, form the image of a focusing at imaging sensor.The operative wavelength of the element that need to compensate is not different from the wavelength of normal compensation.This method has been utilized this following true advantage, the unnecessary axial chromatic aberration that is adjusted of a mini microscope objective lens design of array microscope.On the contrary, the different wave length and the axial chromatic aberration that focus on axial location can be used to compensate for chromatic aberration.
Embodiment 4:
The spectroscopic light source illumination that each array of microscopes element of present embodiment is expanded.A corresponding narrow spectral hand light filter is placed in the front of the imaging sensor of each array of microscopes element.If do not have difference at image space, the narrow frequency band light filter of all array of microscopes elements is identical.Yet if variant on image space, different array of microscopes elements needs different narrow band spectrum light filters.As shown in Figure 6, it is one group of array of microscopes element 108,110,112,114, if the image space of each element is in the back of the nominal position on the sensor substrate surface 116 of a relevant wavelength, for 118, one of element 108 and images the light filter of short wavelength be used to be moved into image planes and make element back to sensor surface.On the other hand, if the image space of an element in the front of transducer face 116 nominal positions, is used to move as the plane before sensitive face for element 112 and 122, one long wavelength filter 132 of image.Element 110 and 114 image space are placed on the substrate face 116 of nominal, and by narrow frequency band light filter 130 and 134, its centre wavelength is nominal wavelength.
Mechanical module based on ray tracing or alone microscope array element, knowledge together with manufacturing and assembly error, the perhaps experiment value of independent image space under the nominal wavelength, as mentioned above, the centre wavelength of the light filter of each array of microscopes element can be determined.Suitable narrow band light filter, for example little optical filter or the calibrating device of handing in an examination paper can be manufactured.Light filter is manufactured to discrete elements, is placed on the substrate, perhaps substrate of independent formation.
The utility model still has numerous embodiments, and all employing equivalents or equivalent transformation and all technical schemes of forming all drop within the protection domain of the present utility model.
Claims (5)
1. focus-compensating device, be used for regulating independently the optimal imaging plane of a plurality of optical imagery element of multiaxis imaging, it is characterized in that: described optical imagery element is microscope, described focus-compensating device comprises a plurality of picture position offset assemblies with a plurality of different parts, described picture position offset assembly comprises that an optical path length changes element, and described optical path length changes element and is arranged in the described microscopical light path.
2. a kind of focus-compensating device according to claim 1, it is characterized in that: described microscope is the mini microscope array.
3. a kind of focus-compensating device according to claim 1 is characterized in that: described optical path length changes element and comprises a plane-parallel plate.
4. a kind of focus-compensating device according to claim 3 is characterized in that: at least two described optical path length changes element and is arranged on the same support unit.
5. a kind of focus-compensating device according to claim 4, it is characterized in that: an anti-reflection coating is arranged at least one face of described support unit.
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| CN 201220506677 CN202854393U (en) | 2012-09-29 | 2012-09-29 | Focusing compensation device |
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| CN 201220506677 CN202854393U (en) | 2012-09-29 | 2012-09-29 | Focusing compensation device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103575231A (en) * | 2013-04-19 | 2014-02-12 | 帝麦克斯(苏州)医疗科技有限公司 | Method for processing object surface profile of large-area glass slide |
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2012
- 2012-09-29 CN CN 201220506677 patent/CN202854393U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103575231A (en) * | 2013-04-19 | 2014-02-12 | 帝麦克斯(苏州)医疗科技有限公司 | Method for processing object surface profile of large-area glass slide |
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