CN202794851U - Novel exposing device - Google Patents
Novel exposing device Download PDFInfo
- Publication number
- CN202794851U CN202794851U CN 201220487400 CN201220487400U CN202794851U CN 202794851 U CN202794851 U CN 202794851U CN 201220487400 CN201220487400 CN 201220487400 CN 201220487400 U CN201220487400 U CN 201220487400U CN 202794851 U CN202794851 U CN 202794851U
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- Prior art keywords
- exposure
- vacuum
- base plate
- storage tank
- novel
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Abstract
The utility model discloses a novel exposing device. The novel exposing device comprises a machine table and an exposing area device arranged on the machine table, wherein the exposing area device comprises a shell body and an exposer which is arranged on the upper portion of the inside of the shell body, two exposing tables capable of sliding into or out of the shell body on the horizontal plane are respectively arranged at two sides of the exposing area device, each exposing table comprises a base plate, a glass table top and an upper cover, each glass table top is arranged on each base plate, one end of each upper cover is connected to each base plate in a hinged mode, a drawing-resistant film is arranged on the lower surface of the upper cover, a vacuum pumping guide pipe is arranged in each base plate, the edge of each upper cover is connected with the edge of each base plate in a sealing mode, each vacuum pumping guide pipe is connected with a vacuum pumping device, the vacuum pumping device comprises a vacuum pump and a vacuum air storage tank, the vacuum pump is connected with the vacuum air storage tank, and the vacuum air storage tank is respectively connected with the vacuum pumping guide pipes. The novel exposing device is simple in structure, improves the exposing productive efficiency, avoids frequent opening and closing of the vacuum pump in the vacuum pumping device, and avoids fatigue wear of the vacuum pump.
Description
Technical field
The utility model relates to the precision photo etching imaging device, particularly relates to a kind of novel exposure device.
Background technology
Present exposure device belongs in the precision photo etching imaging device, and it is to adopt UV-irradiation, but makes the material that can accept certain specific wavelength sensitization, is being subject to the on all four device of pattern on the generation formation of light-struck zone and the film.Existing a kind of novel exposure device or be exactly to only have an exposure desk, when in exposure desk enters the exposure region device, exposing, can only wait for its exposure pull out after complete exposure desk take out prepare again material behind the exposing material and vacuumize after push again in the exposure region device and expose.The shortcoming of such exposure device is that the exposure rate of output is lower.Also having a kind of exposure device is that up and down two exposure desks are set, one of them exposure desk such as upper strata exposure desk push when exposing in the exposure region, another exposure desk is that lower floor can do the preliminary work that overlays anti-membrane and aspiration vacuum exposing material and exposure desk are ready to, after complete being drawn out of upper strata exposure desk exposure in the exposure region, ready lower floor exposure desk being pushed carry out exposure-processed in the exposure region again.The advantage of a kind of novel exposure device like this is that exposure is produced efficient and doubled, but because exposure desk is positioned at levels, therefore intensity and the time of exposure inhomogeneous, need the additional adjustment time shutter, and can not guarantee that the luminous energy of exposing is to the same amount consistance of exposing material irradiation.In addition, no matter the conduit that vacuumizes that is an exposure desk or two exposure desks all is directly to be connected with vacuum extractor, vacuumize during use, then turning off vacuum pump stops to vacuumize, when vacuumizing, restart by needs vacuum pump, start so continually and close vacuum pump, be easy to cause the fatigue wear of vacuum pump.
Summary of the invention
The utility model is finished in order to solve deficiency of the prior art, that the purpose of this utility model provides is simple in structure, improve exposure produces efficient, and avoid frequent opening and closing of vacuum pump in the vacuum extractor, avoid a kind of novel exposure device of vacuum pump fatigue wear.
A kind of novel exposure device of the present utility model, comprise board and the exposure region device that is arranged on the described board, described exposure region device comprises housing and is arranged on the exposer of described enclosure interior top, but described exposure region device both sides arrange respectively a surface level and slip into or skid off the interior exposure desk of described housing, described exposure desk comprises base plate, be arranged on the glass table top on the base plate, one end is articulated in the loam cake on the described base plate, described loam cake lower surface has overlayed anti-membrane, arrange in the described base plate and vacuumize conduit, described cover rim and described bottom edge are tightly connected, the described conduit that vacuumizes is connected with vacuum extractor, described vacuum extractor comprises vacuum pump and vacuum air storage tank, described vacuum pump is connected with described vacuum air storage tank, and described vacuum air storage tank is connected with the described conduit that vacuumizes respectively.
A kind of novel exposure device of the present utility model can also be:
Described vacuum air storage tank and described vacuumize between the conduit all to arrange to take out let out control device.
Described taking out let out control device and comprised and vacuumize pedal control switch and let out the vacuum pedal control switch, and the described pedal control switch that vacuumizes is connected with vacuum air storage tank, describedly lets out the vacuum pedal control switch and vacuumizes conduit and be connected.
Described cover rim and described bottom edge arrange respectively O-ring seal and sealing gasket, described loam cake and described base plate cover, described O-ring seal and described sealing gasket jam-packed are at described loam cake and described bottom edge place, and the surface elasticity of described O-ring seal and described sealing gasket offsets.
Described O-ring seal is the soft rubber O-ring seal, and described sealing gasket is rubber gasket.
Be connected through the hinge between described loam cake and the described base plate.
Described exposer is the cold ultraviolet light lamp.
Described cold ultraviolet light lamp is arranged in the light gathering reflective housing, and described cold ultraviolet light lamp top arranges exhaust fan.
A kind of novel exposure device of the present utility model, owing to comprise board and the exposure region device that is arranged on the described board, described exposure region device comprises housing and is arranged on the exposer of described enclosure interior top, but described exposure region device both sides arrange respectively a surface level and slip into or skid off the interior exposure desk of described housing, described exposure desk comprises base plate, be arranged on the glass table top on the base plate, one end is articulated in the loam cake on the described base plate, described loam cake lower surface has overlayed anti-membrane, arrange in the described base plate and vacuumize conduit, described cover rim and described bottom edge are tightly connected, the described conduit that vacuumizes is connected with vacuum extractor, described vacuum extractor comprises vacuum pump and vacuum air storage tank, described vacuum pump is connected with described vacuum air storage tank, and described vacuum air storage tank is connected with the described conduit that vacuumizes respectively.During use, the exposure desk of exposure region device one side is ready to first push afterwards and carries out exposure-processed in the housing, simultaneously the exposure desk that is positioned at the other side of exposure region device is overlayed anti-membrane and the preliminary work such as vacuumizes, after finishing, the exposure of the exposure desk in the exposure region device is drawn out, then the exposure desk of ready opposite side is pushed in the exposure region device and expose, between its exposure period, exposing material after the exposure is taken off, and then the preliminary work of next time exposing, so cycling.Like this, the advantage that has in terms of existing technologies be relatively simple for structure, improved exposure and produced efficient, and when two exposure desks are positioned on the same level face, when namely being positioned at the exposure of exposure region device, distance between exposing material and the exposer is changeless, therefore do not need luminous energy that the additional adjustment time shutter just can guarantee to expose to the same amount consistance that exposing material shines, guaranteed to produce the effect of product and the consistance of quality.In addition and since vacuumize conduit respectively with vacuumize gas-holder and be connected, therefore, vacuum pump does not need to keep running always, when one of them exposure desk does not need to vacuumize, directly close and vacuumize being connected between conduit and the vacuum air storage tank, open simultaneously and let out vacuum valve and get final product.And when surpassing setting value, vacuum pump can not start, so both can guarantee that vacuum air storage tank is had an effect when needs vacuumize vacuumizes so that exposure desk is evacuated, and also can avoid vacuum pump to turn round always, and avoids vacuum pump because of frequent starting and close fatigue wear.
Description of drawings
A kind of novel exposure device embodiment synoptic diagram of Fig. 1 the utility model.
The figure number explanation
1 ... board 2 ... exposure region device 3 ... housing
4 ... exposer 5 ... exposure desk 6 ... guide rail
7 ... light gathering reflective housing 8 ... exhaust fan 9 ... base plate
10 ... glass table top 11 ... loam cake 12 ... anti-membrane
13 ... O-ring seal 14 ... vacuumize conduit 15 ... vacuum extractor
16 ... hinge 17 ... vacuum air storage tank 18 ... vacuum pump
19 ... vacuumize pedal control switch 20 ... let out the vacuum pedal control switch
21 ... safety light illuminating lamp 22 ... sealing gasket
Embodiment
Fig. 1 below in conjunction with accompanying drawing is described in further detail a kind of novel exposure device of the present utility model.
A kind of novel exposure device of the present utility model, please refer to Fig. 1, comprise board 1 and the exposure region device 2 that is arranged on the described board 1, described exposure region device 2 comprises housing 3 and is arranged on the exposer 4 of described housing 3 inner and upper, but described exposure region device 2 both sides arrange respectively a surface level and slip into or skid off exposure desk 5 in the described housing 3, described exposure desk 5 comprises base plate 9, be arranged on the glass table top 10 on the base plate 9, one end is articulated in the loam cake 11 on the described base plate 9, described loam cake 11 lower surfaces have overlayed anti-membrane 12, described base plate 9 interior settings vacuumize conduit 14, described loam cake 11 edges are connected with described base plate 9 edge seals, the described conduit 14 that vacuumizes is connected with vacuum extractor 15, described vacuum extractor 15 comprises vacuum pump 18 and vacuum air storage tank 17, described vacuum pump 18 is connected with described vacuum air storage tank 17, and described vacuum air storage tank 17 is connected with the described conduit 14 that vacuumizes respectively.During use, the exposure desk 5 of exposure region device 2 one sides is ready to first push afterwards and carries out exposure-processed in the housing 3, the preliminary work the such as simultaneously exposure desk 5 that is positioned at exposure region device 2 other sides is overlayed anti-membrane 12 and vacuumize, after finishing, exposure desk 5 exposures in the exposure region device 2 are drawn out, then the exposure desk 5 of ready opposite side is pushed in the exposure region device 2 and expose, between its exposure period, exposing material after the exposure is taken off, and then the preliminary work of next time exposing, so cycling.Like this, the advantage that has in terms of existing technologies be relatively simple for structure, improved exposure and produced efficient, and when two exposure desks 5 are positioned on the same level face, when namely being positioned at exposure region device 2 both sides, distance between exposing material and the exposer 4 is changeless, therefore do not need luminous energy that the additional adjustment time shutter just can guarantee to expose to the same amount consistance that exposing material shines, guaranteed to produce the effect of product and the consistance of quality.In addition, since vacuumize conduit 14 respectively with vacuumize gas-holder 17 and be connected, therefore, vacuum pump 18 does not need to keep running always, when one of them exposure desk 5 does not need to vacuumize, directly close and vacuumize being connected between conduit 14 and the vacuum air storage tank 17, open simultaneously and let out vacuum valve and begin to let out vacuum.And when the vacuum gas-holder does not surpass setting value, vacuum pump can not start, so both can guarantee that vacuum air storage tank 17 is had an effect when needs vacuumize vacuumizes so that exposure desk 5 is evacuated, also can avoid vacuum pump 18 to turn round always, and avoid vacuum pump 18 because of frequent starting and close fatigue wear.
A kind of novel exposure device of the present utility model please refer to Fig. 1, on the basis of technical scheme specifically can be in front described vacuum air storage tank 17 and described vacuumize between the conduit 14 all to arrange to take out let out control device.Take out the effect of letting out device and be control vacuum air storage tank 17 and the disconnection that vacuumizes annexation between the conduit 14 and be connected, 17 pairs of vacuum air storage tank vacuumize conduit 14 effects to vacuumizing processing in the exposure desk 5 when both connect, when after being in vacuum state in the exposure desk 5, no longer needing to vacuumize, disconnection vacuumizes being connected of conduit 14 and vacuum air storage tank 17, and after the exposure, when needing the vacuum state of contact exposure platform 5, take out and let out control device control and vacuumize conduit 14 openings, let out vacuum.Further preferred technical scheme is that described taking out let out control device and comprised and vacuumize pedal control switch 19 and let out vacuum pedal control switch 20, the described pedal control switch 19 that vacuumizes is connected with vacuum air storage tank 17, describedly lets out vacuum pedal control switch 20 and vacuumizes conduit 14 and be connected.Like this, when needs vacuumize, step on and vacuumize pedal control switch 19, vacuum air storage tank 17 with vacuumize conduit 14 and be connected conducting, exposure desk 5 is vacuumized processing.When needing to let out vacuum after the exposure, step on and let out vacuum pedal control switch 20, vacuumize conduit 14 and extraneous conducting, exposure desk 5 is let out application of vacuum.
A kind of novel exposure device of the present utility model please refer to Fig. 1, specifically can be on the described board 1 guide rail 6 or polished rod to be set in front on the basis of technical scheme, and the exposure desk 5 of described exposure region device 2 both sides is slidingly connected with described guide rail 6 or polished rod respectively.Like this, two exposure desks 5 horizontally slip and then are pushed in the exposure region device 2 or in described exposure region device 2 at same guide rail 6 and are drawn out, guarantee that the horizontal level of two exposure desks 5 in exposure region device 2 is identical, namely can realize Bidirectional slide, structure is simple again, and guarantees that two exposure desks 5 are on the same level face.Further preferred technical scheme is to pulley, on the described board 1 pair of guide rails 6 is set, and described slide rail or pulley and described guide rail 6 are slidingly connected.The luminous energy of stationarity that pair of guide rails 6 guarantees that further exposure desks 5 slide and exposure is set to the same amount consistance of exposing material irradiation.And the slide rail of exposure desk 5 bottoms or at least one pair of pulley are realized the slip of exposure desk 5 on guide rail 6.Comparative optimization be that two polished rods are set on the described board 1, described each exposure desk 5 bottom arrange four axial sleeve of bushing, described four axial sleeve of bushing are set on the described polished rod symmetrically.Two exposure desks 5 just can slide at polished rod like this.Certainly can also adopt other structures device so that exposure desk 5 can flatly slip into or skid off in the housing 3.
A kind of novel exposure device of the present utility model, please refer to Fig. 1, can also be that described loam cake 11 edges and described base plate 9 edges arrange respectively O-ring seal 13 and sealing gasket 22 in front on the basis of technical scheme, described loam cake 11 covers with described base plate 9, described O-ring seal 13 and described sealing gasket 22 jam-packeds are in described loam cake 11 and described base plate 9 edges, and described O-ring seal 13 offsets with the surface of described sealing gasket 22.This spline structure can realize that described loam cake 11 edges are connected with described base plate 9 edge seals.Both being tightly connected guarantees that exposure desk 5 vacuumizing of interior exposing material preparatory stage are achieved.O-ring seal 13 is set and sealing gasket 22 surface elasticities offset, guarantees both elasticity jam-packeds after loam cake 11 and base plate 9 cover, guarantee sealing effectiveness.Further preferred technical scheme is that described O-ring seal 13 is soft rubber O-ring seal 13, and described sealing gasket 22 is soft rubber sealing gasket 22.Can guarantee like this resilient seal between O-ring seal 13 and the sealing gasket 22, and sealing effectiveness is relatively good, cost is low.Can also be described loam cake 11 with described base plate 9 between be connected by hinge 16.Loam cake 11 can be opened or cover along hinge 16 upsets like this.Certainly can also adopt the mode that is connected by jointed shaft between described loam cake 11 and the described base plate 9 to realize hinged between loam cake 11 and the base plate 9.
A kind of novel exposure device of the present utility model please refer to Fig. 1, can also be that described exposer 4 is the cold ultraviolet light lamp in front on the basis of technical scheme.Like this, owing to use the cold ultraviolet light lamp, when guaranteeing exposure effect, avoid distributing a large amount of heats, and then saved the cooling system of a whole set of complex and expensive in existing a kind of novel exposure device, reduce a kind of cost of novel exposure device, energy-saving and cost-reducing, low-carbon environment-friendly.Further preferred technical scheme is that described cold ultraviolet light lamp is arranged in the light gathering reflective housing 7, and described cold ultraviolet light lamp top arranges exhaust fan 8.Light gathering reflective housing 7 is fixed with housing 3 inner upper inwalls, and described exhaust fan 8 is installed in described housing top.The effect that light gathering reflective housing 7 is set is the light that the cold ultraviolet light lamp sends to be converged and reflexes to housing 3 is interior that exposing material on the exposure desk 5 is shone, and shortens the time shutter, improves the exposure output efficiency.And the effect of exhaust fan 8 is that the heat that the cold ultraviolet light lamp distributes is drained, and avoids the cold ultraviolet light lamp overheated.The bottom that further preferred technical scheme is described light gathering reflective housing 7 and the distance of described housing 3 bottoms are equal to or greater than the height of described exposure desk 5.When the distance of the bottom of light gathering reflective housing 7 and described housing 3 bottoms equaled the height of described exposure desk 5, after exposure desk 5 pushed housing, the light that light gathering reflective housing 7 distributes all exposers all reflexed to exposure desk 5 surfaces, further improves exposure efficiency.And when the distance of the bottom of light gathering reflective housing 7 and described housing 3 bottoms during greater than the height of described exposure desk 5, light gathering reflective housing 7 is positioned at exposure desk 5 tops, and light is reflexed on the exposure desk 5, only has part to leak, but the rate that leaks is lower.Guarantee exposure efficiency.
Above-mentionedly only several specific embodiments in the utility model are illustrated; but can not be as protection domain of the present utility model; every equivalence variation of having done according to the design spirit in the utility model or modification or equal proportion zoom in or out etc., all should think to fall into protection domain of the present utility model.
Claims (8)
1. novel exposure device, it is characterized in that: comprise board and the exposure region device that is arranged on the described board, described exposure region device comprises housing and is arranged on the exposer of described enclosure interior top, but described exposure region device both sides arrange respectively a surface level and slip into or skid off the interior exposure desk of described housing, described exposure desk comprises base plate, be arranged on the glass table top on the base plate, one end is articulated in the loam cake on the described base plate, described loam cake lower surface has overlayed anti-membrane, arrange in the described base plate and vacuumize conduit, described cover rim and described bottom edge are tightly connected, the described conduit that vacuumizes is connected with vacuum extractor, described vacuum extractor comprises vacuum pump and vacuum air storage tank, described vacuum pump is connected with described vacuum air storage tank, and described vacuum air storage tank is connected with the described conduit that vacuumizes respectively.
2. a kind of novel exposure device according to claim 1 is characterized in that: described vacuum air storage tank and described vacuumize all to arrange to take out between the conduit let out control device.
3. a kind of novel exposure device according to claim 2, it is characterized in that: described taking out let out control device and comprised and vacuumize pedal control switch and let out the vacuum pedal control switch, the described pedal control switch that vacuumizes is connected with vacuum air storage tank, describedly lets out the vacuum pedal control switch and vacuumizes conduit and be connected.
4. according to claim 1 and 2 or 3 described a kind of novel exposure devices, it is characterized in that: described cover rim and described bottom edge arrange respectively O-ring seal and sealing gasket, described loam cake and described base plate cover, described O-ring seal and described sealing gasket jam-packed are at described loam cake and described bottom edge place, and the surface elasticity of described O-ring seal and described sealing gasket offsets.
5. a kind of novel exposure device according to claim 4, it is characterized in that: described O-ring seal is the soft rubber O-ring seal, described sealing gasket is rubber gasket.
6. it is characterized in that: be connected through the hinge between described loam cake and the described base plate according to claim 1 and 2 or 3 described a kind of novel exposure devices.
7. according to claim 1 and 2 or 3 described a kind of novel exposure devices, it is characterized in that: described exposer is the cold ultraviolet light lamp.
8. a kind of novel exposure device according to claim 7, it is characterized in that: described cold ultraviolet light lamp is arranged in the light gathering reflective housing, and described cold ultraviolet light lamp top arranges exhaust fan.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201220487400 CN202794851U (en) | 2012-09-21 | 2012-09-21 | Novel exposing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201220487400 CN202794851U (en) | 2012-09-21 | 2012-09-21 | Novel exposing device |
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CN202794851U true CN202794851U (en) | 2013-03-13 |
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CN 201220487400 Expired - Fee Related CN202794851U (en) | 2012-09-21 | 2012-09-21 | Novel exposing device |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108051986A (en) * | 2017-12-26 | 2018-05-18 | 重庆渝州印务厂 | A kind of efficient printer |
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2012
- 2012-09-21 CN CN 201220487400 patent/CN202794851U/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108051986A (en) * | 2017-12-26 | 2018-05-18 | 重庆渝州印务厂 | A kind of efficient printer |
CN108051986B (en) * | 2017-12-26 | 2020-04-14 | 重庆渝州印务厂 | High-efficient sunning trigger |
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Legal Events
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20160921 |