CN202786516U - Quartz tube waste gas exhaust device - Google Patents
Quartz tube waste gas exhaust device Download PDFInfo
- Publication number
- CN202786516U CN202786516U CN 201220208392 CN201220208392U CN202786516U CN 202786516 U CN202786516 U CN 202786516U CN 201220208392 CN201220208392 CN 201220208392 CN 201220208392 U CN201220208392 U CN 201220208392U CN 202786516 U CN202786516 U CN 202786516U
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- China
- Prior art keywords
- waste gas
- pipe
- quartz tube
- waste
- thermostatic bath
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a diffusion machine in photovoltaic industry, and in particular relates to a quartz tube waste gas exhaust device. According to the technical scheme, the quartz tube waste gas exhaust device mainly comprises a main exhaust duct, a ball valve, a waste gas pipe, waste liquid bottles, a large quartz tube, a thermostatic bath, a gas inlet pipe and a gas outlet pipe, wherein phosphorus oxychloride is arranged in the thermostatic bath; the thermostatic bath is communicated with the large quartz tube through the gas inlet pipe; the gas outlet pipe of the large quartz tube is connected with a plurality of waste liquid bottles; the tail ends of the waste liquid bottles are connected to the main exhaust duct through the waste gas pipe; and the ball valve is arranged between the waste gas pipe and the main exhaust duct. The quartz tube waste gas exhaust device has the beneficial effects that the exhaust air rate can be effectively controlled in the diffusion process, sometimes the air exhaust is instable, the exhaust air rate is reduced to minimum, electric energy and amount of water and HF are reduced, and the cost is saved.
Description
Technical field
The utility model relates to the diffusion machine in a kind of photovoltaic industry, particularly a kind of silica tube waste gas exhaust device.
Background technology
The develop rapidly of current photovoltaic cell industry, market is more and more higher to the requirement of quality product, and product competition is more and more fierce, wants to base oneself upon in market competition heel, must and reduce cost and make an effort from quality product.Existing diffusion machine in use, air draft control is unstable, product is little when large during air draft in technological process; Waste pipe is too thick, and valve can not effectively be controlled air draft work too greatly, thereby wastes POCL3 electric energy, silicon chip; In addition, because POCL3 belongs to severe toxicity, need also to guarantee that the waste gas needs discharge fully.
Summary of the invention
The purpose of this utility model is exactly in view of the foregoing defects the prior art has, and a kind of silica tube waste gas exhaust device is provided, and can effectively control exhaust air rate in diffusion process, the time air draft unstable, reduce to minimum.The saves energy film source.
Its technical scheme is: mainly be comprised of main exhaust duct, ball valve, waste pipe, waste liquid bottle, large silica tube, thermostatic bath, inlet pipe and escape pipe, be provided with phosphorus oxychloride in the thermostatic bath, thermostatic bath is communicated with large silica tube by inlet pipe, the escape pipe of large silica tube connects a plurality of waste liquid bottles, the end of waste liquid bottle is connected in the main exhaust duct by waste pipe, is provided with ball valve between described waste pipe and main exhaust duct.
Above-mentioned waste liquid bottle is provided with two groups or three groups, forms two-stage or three grades of waste gas filterings.
The beneficial effects of the utility model are: in diffusion process, can effectively control exhaust air rate, the time air draft unstable, reduce to minimum, reduced simultaneously electric energy, the use of water, HF etc. provides cost savings.
Description of drawings
Accompanying drawing 1 is structural representation of the present utility model;
Among the upper figure: main exhaust duct 1, ball valve 2, waste pipe 3, waste liquid bottle 4, large silica tube 5, thermostatic bath 6, inlet pipe 7 and escape pipe 8, aperture 9.
Embodiment
By reference to the accompanying drawings 1, the utility model will be further described:
The utility model mainly is comprised of main exhaust duct 1, ball valve 2, waste pipe 3, waste liquid bottle 4, large silica tube 5, thermostatic bath 6, inlet pipe 7 and escape pipe 8, is provided with phosphorus oxychloride in the thermostatic bath 6, and thermostatic bath 6 is communicated with large silica tube 5 by inlet pipe 7.The escape pipe of large silica tube 5 inner chambers is provided with a plurality of apertures 9, and the escape pipe 8 in the large silica tube outside connects two groups of waste liquid bottles 4 or three groups of waste liquid bottles 4, forms two-stage or three grades of waste gas filterings; The end of waste liquid bottle 4 is connected in the main exhaust duct 1 by the waste pipe 3 of 8 millimeters of diameters, is provided with ball valve 2 between described waste pipe 3 and main exhaust duct 1, by the adjusting of ball valve, diffusion technique is better played a role; The problem of the waste silicon chip that minimizing causes because of the air draft shakiness has reduced electric energy, the use of water, HF simultaneously.
Claims (2)
1. silica tube waste gas exhaust device, it is characterized in that: mainly by main exhaust duct (1), ball valve (2), waste pipe (3), waste liquid bottle (4), large silica tube (5), thermostatic bath (6), inlet pipe (7) and escape pipe (8) form, thermostatic bath is provided with phosphorus oxychloride in (6), thermostatic bath (6) is communicated with large silica tube (5) by inlet pipe (7), the escape pipe (8) of large silica tube (5) connects a plurality of waste liquid bottles (4), the end of waste liquid bottle (4) is connected in the main exhaust duct (1) by waste pipe (3), is provided with ball valve (2) between described waste pipe (3) and main exhaust duct (1).
2. silica tube waste gas exhaust device according to claim 1, it is characterized in that: described waste liquid bottle (4) is provided with two groups or three groups, forms two-stage or three grades of waste gas filterings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220208392 CN202786516U (en) | 2012-05-10 | 2012-05-10 | Quartz tube waste gas exhaust device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220208392 CN202786516U (en) | 2012-05-10 | 2012-05-10 | Quartz tube waste gas exhaust device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202786516U true CN202786516U (en) | 2013-03-13 |
Family
ID=47813812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220208392 Expired - Fee Related CN202786516U (en) | 2012-05-10 | 2012-05-10 | Quartz tube waste gas exhaust device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202786516U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103374757A (en) * | 2013-07-23 | 2013-10-30 | 英利能源（中国）有限公司 | Improved exhaust gas emission device for diffusion furnace |
-
2012
- 2012-05-10 CN CN 201220208392 patent/CN202786516U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103374757A (en) * | 2013-07-23 | 2013-10-30 | 英利能源（中国）有限公司 | Improved exhaust gas emission device for diffusion furnace |
| CN103374757B (en) * | 2013-07-23 | 2015-11-04 | 英利能源（中国）有限公司 | A kind of modified version tail gas of diffusion furnace discharge equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20130510 |