CN202758028U - Device for automatically detecting needle pricking - Google Patents
Device for automatically detecting needle pricking Download PDFInfo
- Publication number
- CN202758028U CN202758028U CN 201220316567 CN201220316567U CN202758028U CN 202758028 U CN202758028 U CN 202758028U CN 201220316567 CN201220316567 CN 201220316567 CN 201220316567 U CN201220316567 U CN 201220316567U CN 202758028 U CN202758028 U CN 202758028U
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- under test
- acupuncture treatment
- test
- element under
- support
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Abstract
The utility model provides a device for automatically detecting needle pricking. The device comprises a support, a needle pricking unit, a first component under test, a second component under test, a resistor, a measuring instrument and a statistical unit. The first component under test is connected with the second component under test through the resistor, the first component under test and the second component under test are arranged on the support, the needle pricking unit is arranged at one side of one end of the support, the measuring instrument is arranged at one side of the other end of the support and the measuring instrument is connected with the statistical unit. The device utilizes a specially-produced test module group structure in a program test and the determination of the test result to automatically identify that whether the contact of needle insertion is good or not. The time cost by manual determination is saved, the risk of manual determination is reduced, and the product efficiency is increased.
Description
Technical field
The utility model belongs to microelectronics manufacturing and semiconductor test field, relates to a kind of checkout equipment, relates in particular to a kind of equipment of automatic detection acupuncture treatment.
Background technology
In the current wafer manufacturing process, need to test the electrical parameter of wafer, before test, for the accuracy that guarantees to test, need the step by the examination acupuncture treatment, this is after pricking the test module with the probe examination, the position that artificial naked eyes are judged acupuncture treatment whether pin trace correct and the acupuncture treatment point whether contact well (the naked eyes criterion: the pin trace whether in Pad or pin trace size approaching), to guarantee the correctness of official testing, the people works and judges wrongheaded risk and the increase manual work time of having like this.
Therefore those skilled in the art is devoted to develop a kind of equipment of automatic detection acupuncture treatment.
The utility model content
In view of above-mentioned the problems of the prior art, technical problem to be solved in the utility model is that existing technology lacks the equipment that robotization detects acupuncture treatment.
The equipment of a kind of automatic detection acupuncture treatment of the present utility model, comprise support, acupuncture treatment device, the first element under test, the second element under test, resistance, measuring instrument and statistic device, described the first element under test is connected with described the second element under test by described resistance, the first element under test and the second element under test are located on the described support, described acupuncture treatment device is located at a side of described support one end, described measuring instrument is located at a side of the described support other end, and described measuring instrument is connected with described statistic device.
In a preferred embodiments of the present utility model, described element under test is wafer.
In another preferred embodiments of the present utility model, described measuring instrument is the resistance instrument.
In another preferred embodiments of the present utility model, described statistic device is programmable logic controller (PLC).
In another preferred embodiments of the present utility model, described programmable logic controller (PLC) links to each other with described acupuncture treatment device.
In another preferred embodiments of the present utility model, described programmable logic controller (PLC) comprises processor and display device.
In another preferred embodiments of the present utility model, described support is connected with described programmable logic controller (PLC).
The present invention utilizes the special test modular structure of programming test, and by the judgement to test result, whether the contact of automatically identifying acupuncture treatment is good.Save the spent time of artificial judgment, reduced the risk of artificial judgment, increased production efficiency.
Description of drawings
Fig. 1 is the structural representation of embodiment of the present utility model;
Fig. 2 is implementing procedure synoptic diagram of the present utility model.
Embodiment
Below with reference to drawings and Examples the utility model is done concrete explaination.
The equipment of a kind of automatic detection acupuncture treatment of embodiment of the present utility model as shown in Figure 1 comprises support 1, acupuncture treatment device 2, the first element under test 3, the second element under tests 4, resistance 5, measuring instrument 6 and statistic device 7.The first element under test 3 is connected with the second element under test 4 by resistance 5, the first element under test 3 and the second element under test 4 are located on the described support 1, described acupuncture treatment device 2 is located at a side of described support 1 one ends, described measuring instrument 6 is located at a side of described support 1 other end, and described measuring instrument 6 is connected with described statistic device 7.
The present invention utilizes the special test modular structure of automatic test by contact resistance between two element under tests being formed the test modular structure, and by the judgement to test result, whether the contact of automatically identifying acupuncture treatment is good.Save the spent time of artificial judgment, reduced the risk of artificial judgment, increased production efficiency.
In embodiment of the present utility model, element under test is wafer.Measuring instrument is the resistance instrument.Statistic device is programmable logic controller (PLC).Programmable logic controller (PLC) links to each other with described acupuncture treatment device, support.Programmable logic controller (PLC) comprises processor and display device.Whether testing process as shown in Figure 2 coincide by the numerical value of judging resistance and original resistance between two element under tests after the test acupuncture treatment, or approaching, such as 90 ~ 1100% of former numerical value, judges whether operational excellence of acupuncture treatment program.And as coincideing the program operational excellence; As it is wrong to misfit operation, and machine automatically stops test and reports to the police.
More than specific embodiment of the utility model is described in detail, but it is as example, the utility model is not restricted to specific embodiment described above.To those skilled in the art, any equivalent modifications that this practicality is carried out and substituting also all among category of the present utility model.Therefore, not breaking away from impartial conversion and the modification of doing under the spirit and scope of the present utility model, all should be encompassed in the scope of the present utility model.
Claims (7)
1. one kind is detected the equipment of having an acupuncture treatment automatically, it is characterized in that, comprise support, acupuncture treatment device, the first element under test, the second element under test, resistance, measuring instrument and statistic device, described the first element under test is connected with described the second element under test by described resistance, the first element under test and the second element under test are located on the described support, described acupuncture treatment device is located at a side of described support one end, described measuring instrument is located at a side of the described support other end, and described measuring instrument is connected with described statistic device.
2. the equipment of automatic detection acupuncture treatment as claimed in claim 1 is characterized in that described element under test is wafer.
3. the equipment of automatic detection acupuncture treatment as claimed in claim 1 is characterized in that described measuring instrument is the resistance instrument.
4. the equipment of automatic detection acupuncture treatment as claimed in claim 1 is characterized in that described statistic device is programmable logic controller (PLC).
5. the equipment of automatic detection acupuncture treatment as claimed in claim 4 is characterized in that described programmable logic controller (PLC) links to each other with described acupuncture treatment device.
6. the equipment of automatic detection acupuncture treatment as claimed in claim 4 is characterized in that described programmable logic controller (PLC) comprises processor and display device.
7. the equipment of automatic detection acupuncture treatment as claimed in claim 4 is characterized in that described support is connected with described programmable logic controller (PLC).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220316567 CN202758028U (en) | 2012-07-03 | 2012-07-03 | Device for automatically detecting needle pricking |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220316567 CN202758028U (en) | 2012-07-03 | 2012-07-03 | Device for automatically detecting needle pricking |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202758028U true CN202758028U (en) | 2013-02-27 |
Family
ID=47737200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220316567 Expired - Lifetime CN202758028U (en) | 2012-07-03 | 2012-07-03 | Device for automatically detecting needle pricking |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202758028U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103336256A (en) * | 2013-06-26 | 2013-10-02 | 上海华力微电子有限公司 | WAT probe card intelligent processing system and method |
| CN110187255A (en) * | 2019-04-15 | 2019-08-30 | 上海华力集成电路制造有限公司 | A method of amount of overdrive is determined when establishing probe test formula |
-
2012
- 2012-07-03 CN CN 201220316567 patent/CN202758028U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103336256A (en) * | 2013-06-26 | 2013-10-02 | 上海华力微电子有限公司 | WAT probe card intelligent processing system and method |
| CN103336256B (en) * | 2013-06-26 | 2016-03-30 | 上海华力微电子有限公司 | WAT probe intelligent processing system and method |
| CN110187255A (en) * | 2019-04-15 | 2019-08-30 | 上海华力集成电路制造有限公司 | A method of amount of overdrive is determined when establishing probe test formula |
| CN110187255B (en) * | 2019-04-15 | 2021-10-15 | 上海华力集成电路制造有限公司 | Method for determining overdrive amount during probe test program establishment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130227 |
|
| CX01 | Expiry of patent term |