CN202743929U - Silicon slice automatic blanking device - Google Patents
Silicon slice automatic blanking device Download PDFInfo
- Publication number
- CN202743929U CN202743929U CN 201220415728 CN201220415728U CN202743929U CN 202743929 U CN202743929 U CN 202743929U CN 201220415728 CN201220415728 CN 201220415728 CN 201220415728 U CN201220415728 U CN 201220415728U CN 202743929 U CN202743929 U CN 202743929U
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- belt conveyor
- silicon chip
- connecting gear
- return idler
- sensor
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Abstract
The utility model discloses a silicon slice automatic blanking device which comprises a first conveying organization which is used for conveying a silicon slice which is from a wet processing equipment, a first conveyor belt arranged in the first conveying organization, a second conveyor belt and a third conveyor belt which are identical to the first conveying organization in the conveying direction and are respectively connected with the first conveyor belt in butted mode, a second conveying organization which is connected with the third conveyor belt in butted mode, is identical to the third conveyor belt in the conveying direction, and is used for conveying the silicon slice to a blanking area, a first sensor which is used for inducting when the silicon slice arrives at the second conveyor belt and the third conveyor belt, a second sensor which is used for inducting when the silicon slice arrives at a corner conveying device, a third sensor which is used for inducting when the silicon slice arrives at the second conveying organization. The silicon slice automatic blanking device has the advantages of improving greatly productivity, reducing the labor intensity, also reducing the cost, and being easy to manufacture and install at the same time.
Description
Technical field
The utility model relates to the blanking equipment on the silicon chip manufacturing line, relates in particular to a kind of silicon chip automatic blanking equipment of realizing multiple tracks.
Background technology
The most silicon slice charging all is artificial blanking, and not only efficient is low, lavish labor on, and fragile silicon chip and affect the silicon chip battery conversion ratio, a lot of silicon slice charging machine production capacities is low besides.Blanking machine of the prior art as shown in Figure 1, when 5 road silicon chips are sent to tail end from the starting end of conveyer A along arrow a, at this time silicon chip divides both direction (arrow b direction), collect Carrier box by transferring machine B to the both sides transmission, then Carrier box passes to the upper strata (lower floor of C is empty Carrier box rest area) of blanking machine C, waits for manually and taking out.When 5 silicon chips were received the Carrier box the inside, 5 silicon chips next time also began transmission from A, have so just formed an endlessly process.Whole process time is very long, and production capacity is very low, can not satisfy the need of production of extensive silicon chip, and easily produces fragment.
The utility model content
Technical problem to be solved in the utility model provides a kind of silicon chip automatic blanking equipment, can greatly improve production capacity, and efficient is high, has reduced labour intensity, has also reduced cost, and this equipment is easy to make and install simultaneously.
In order to solve the problems of the technologies described above, the utility model provides a kind of silicon chip automatic blanking equipment, comprising:
The first connecting gear, described the first connecting gear comprise at least two groups the first belt conveyor that all is on the same level face, and every group of described first belt conveyor is for dock to transmit the silicon chip that comes from wet process equipment with wet process equipment;
The second belt conveyor and the 3rd belt conveyor that direction of transfer is identical with described the first connecting gear, described the second belt conveyor and the 3rd belt conveyor dock with two groups of described first belt conveyor respectively, described the second belt conveyor and the 3rd belt conveyor below are provided with the corner conveyer, described corner conveyer comprises lifting mechanism, three driving faces that the section gap that is connected with lifting mechanism arranges, three described driving faces are on the same level face and with described the second belt conveyor be used for vertical with the transmission direction of the 3rd belt conveyor the silicon chip on described the second belt conveyor are transferred to described the 3rd belt conveyor, and the gap that described the second belt conveyor of confession or the 3rd belt conveyor wear after being formed on described lifting mechanism between adjacent two described driving faces and promoting;
Second connecting gear identical with described the 3rd belt conveyor docking and direction of transfer is used for silicon chip is delivered to discharging area;
First sensor, described first sensor are arranged on described the second belt conveyor and the 3rd belt conveyor and the position that described the first belt conveyor docks and are used for sending the primary importance signal when silicon chip arrive described the second belt conveyor and the 3rd belt conveyor;
The second sensor, described the second sensor setting is in be used for sending second place signal on the position of described corner conveyer when silicon chip arrives described corner conveyer;
The 3rd sensor, described the 3rd sensor setting is used for sending three position singal when silicon chip arrives described the second connecting gear on described the 3rd belt conveyor and position that described the second connecting gear docks.
As preferably, described discharging area comprises outside gear mechanism, unloader structure and four-sensor, wherein:
Described outside gear mechanism comprises transfer station and lower transfer station, described upper transfer station is provided with for the 4th belt conveyor that transmits fully loaded silicon wafer bearing box, be on the same level face with described the second connecting gear and direction of transfer identical, described lower transfer station is provided be used to the 5th belt conveyor that transmits unloaded silicon wafer bearing box and its direction of transfer opposite with described the 4th belt conveyor;
Described unloader structure is arranged at described the second connecting gear along the end of direction of transfer, comprise the first bay-lift, be provided with on described the first bay-lift can dock with described the 4th belt conveyor respectively at different lifting position places with the fully loaded silicon wafer bearing box of the described transmission of support or with described the 5th belt conveyor and dock the 6th belt conveyor that transmits described unloaded silicon wafer bearing box with support;
Described four-sensor is arranged on the position of described unloader structure, and the zero load/full signal of induction silicon wafer bearing box is used for controlling the action of described the first bay-lift and described the 6th belt conveyor.
As preferably, be provided with buffer memory mechanism between described unloader structure and the second connecting gear, described buffer memory mechanism comprises the silicon chip Cache Framework that the second bay-lift and two sides connect, described the second connecting gear vertically runs through described silicon chip Cache Framework, and described the second bay-lift is connected with described silicon chip Cache Framework and is used for the described silicon chip Cache Framework of lifting on perpendicular to the direction of transfer of described the second connecting gear.
As preferably, described the second connecting gear comprises support, support platform, be located at a plurality of rollers of support platform both sides, be divided on the roller of described support platform both sides and be used for the 7th belt conveyor of transmission silicon chip, and is used for driving the motor that described roller rotates,
Described support platform is comprised of fixed part and pars contractilis, and described fixed part is captiveed joint with support, is connected by cylinder between described fixed part and the pars contractilis, and the flexible direction of described cylinder is consistent with the direction of transfer of described the 7th belt conveyor;
Described roller arranges in pairs, and two rollers that consist of every pair roller are divided into support platform both sides accordingly, and described roller comprises a pair of live roller, a pair of the first return idler, a pair of the second return idler and a pair of the 3rd return idler at least; A pair of described live roller is individually fixed in the two ends of a transmission shaft, and described transmission shaft is located at the end of fixed part one side of support platform, and described transmission shaft is connected with motor;
A pair of described the first return idler is located at the two ends of the first wheel shaft, the first round is located in the end of pars contractilis one side of support platform, a pair of described the second return idler is located at the two ends of the second wheel shaft, described second takes turns an end that is located in the close described fixed part of described pars contractilis, a pair of described the 3rd return idler is located at the two ends of third round axle, described third round is located on the support of described pars contractilis below, described third round axle is lower than described the second wheel shaft, described the second wheel shaft is lower than described the first wheel shaft, and described the second wheel shaft is compared to described the first wheel shaft and the most close described fixed part of third round axle;
Described the 7th belt conveyor is walked around respectively live roller, the first return idler, the second return idler and the 3rd return idler of described support platform both sides successively, makes described the 7th belt conveyor respectively through circuitous formation multistage folded section after being positioned at described second return idler of the same side and the 3rd return idler.
Compared with prior art, the beneficial effect of silicon chip automatic blanking equipment of the present utility model is:
1, by between the second belt conveyor and the 3rd belt conveyor, the corner conveyer being set, so that silicon chip is transformed into one output by the twice input in transport process, improve production capacity, and be applied to the device that can save mouth repetition in the prior art in the channel blanking equipment;
2, outside gear mechanism is realized automatically turnover Carrier box operation, manually unloaded silicon wafer bearing box is placed in lower floor's transmission of outside gear mechanism, takes fully loaded silicon wafer bearing box above the transmission of upper strata away, has reduced artificial labour intensity, has further increased production capacity simultaneously.
Description of drawings
Fig. 1 is the structural representation of blanking machine in the prior art;
Fig. 2 is the planar structure scheme drawing of the silicon chip automatic blanking equipment of embodiment of the present utility model;
Fig. 3 is the structural representation of corner conveyer of the silicon chip automatic blanking equipment of embodiment of the present utility model;
Fig. 4 is the structural representation of unloader structure of the silicon chip automatic blanking equipment of embodiment of the present utility model;
Fig. 5 is the unloader structure of silicon chip automatic blanking equipment of embodiment of the present utility model and the scheme drawing one of outside gear mechanism cooperating;
Fig. 6 is the unloader structure of silicon chip automatic blanking equipment of embodiment of the present utility model and the scheme drawing two of outside gear mechanism cooperating;
Fig. 7 is the structural representation of buffer memory mechanism of the silicon chip automatic blanking equipment of embodiment of the present utility model;
Fig. 8 is the structural representation of the second connecting gear of the silicon chip automatic blanking equipment of embodiment of the present utility model;
Fig. 9 is the inner structure scheme drawing of the second connecting gear of the silicon chip automatic blanking equipment of embodiment of the present utility model.
Main description of reference numerals
The fully loaded silicon wafer bearing box of the unloaded silicon wafer bearing box 200-of 100-
1-the first belt conveyor 2-the second belt conveyor
3-the 3rd belt conveyor 4-the 4th belt conveyor
5-the 5th belt conveyor 6-unloader structure
61-the 6th belt conveyor 62-the first bay-lift
7-the second connecting gear 71-support
72-the 7th belt conveyor 73-drive wheel
74-cylinder 75-live roller
76-the first return idler 77-the second return idler
78-the 3rd return idler 701-pars contractilis
The cover plate 702-fixed part of 7011-pars contractilis
The cover plate 703-folded section of 7021-fixed part
8- corner conveyer 81,82,83-driving face
801,802-gap 9-buffer memory mechanism
91-silicon chip Cache Framework 92-the second bay-lift
10-first sensor 20-the second sensor
30-the 3rd sensor 40-four-sensor
11-outside gear mechanism 751-transmission shaft
761-the first wheel shaft 771-the second wheel shaft
781-third round axle
The specific embodiment
Below in conjunction with the drawings and specific embodiments silicon chip automatic blanking equipment of the present utility model is described in further detail, but not as to restriction of the present utility model.
Fig. 1 is the structural representation of blanking machine in the prior art; Fig. 2 is the planar structure scheme drawing of the silicon chip automatic blanking equipment of embodiment of the present utility model; Fig. 3 is the structural representation of corner conveyer of the silicon chip automatic blanking equipment of embodiment of the present utility model; Fig. 4 is the structural representation of unloader structure of the silicon chip automatic blanking equipment of embodiment of the present utility model; Fig. 5 is the unloader structure of silicon chip automatic blanking equipment of embodiment of the present utility model and the scheme drawing one of outside gear mechanism cooperating; Fig. 6 is the unloader structure of silicon chip automatic blanking equipment of embodiment of the present utility model and the scheme drawing two of outside gear mechanism cooperating; Fig. 7 is the structural representation of buffer memory mechanism of the silicon chip automatic blanking equipment of embodiment of the present utility model; Fig. 8 is the structural representation of the second connecting gear of the silicon chip automatic blanking equipment of embodiment of the present utility model; Fig. 9 is the inner structure scheme drawing of the second connecting gear of the silicon chip automatic blanking equipment of embodiment of the present utility model.To shown in Figure 9, the blanking machine that becomes 3 road silicon chip outputs take 5 road silicon chip inputs is the example explanation such as Fig. 2, and the silicon chip automatic blanking equipment of embodiment of the present utility model comprises:
The first connecting gear, described the first connecting gear comprises at least two groups the first belt conveyor 1 that all is on the same level face, 5 road silicon chip input structures have been provided in the present embodiment, namely, the first connecting gear comprises 5 group of first belt conveyor 1, and every group of first belt conveyor 1 docks with wet process equipment and be used for transmitting the silicon chip that comes from wet process equipment;
The second belt conveyor 2 that direction of transfer is identical with the first connecting gear and the 3rd belt conveyor 3, the second belt conveyor 2 and the 3rd belt conveyor 3 dock with two group of first belt conveyor 1 respectively, the second belt conveyor 2 and the 3rd belt conveyor 3 belows are provided with corner conveyer 8, corner conveyer 8 comprises that lifting mechanism is (not shown, all can realize the equipment of elevating function can to adopt lift cylinder etc.), three driving faces 81 that the section gap that is connected with lifting mechanism arranges, 82,83, three driving faces 81,82,83 are on the same level face and with the second belt conveyor 2 be used for vertical with the transmission direction of the 3rd belt conveyor 3 silicon chip on the second belt conveyor 2 are transferred to the 3rd belt conveyor 3, and adjacent two driving faces, it is driving face 81, between 82 and driving face 82, between 83, the gap 801 of formation, 802 wear for the second belt conveyor 2 and the 3rd belt conveyor 3 respectively;
Second connecting gear 7 identical with 3 docking of the 3rd belt conveyor and direction of transfer is used for silicon chip is delivered to discharging area;
Second place signal when the second sensor 20, the second sensors 20 are arranged at and are used for the induction silicon chip on the position of corner conveyer 8 and arrive corner conveyer 8; The 3rd sensor 30, the three sensors 30 are arranged on the 3rd belt conveyor 3 and the position that the second connecting gear 7 docks and are used for the three position singal that the induction silicon chip arrives the second connecting gear 7.According to this second place signal and three position singal, control the running state of the second belt conveyor 2, the 3rd belt conveyor 3 and corner conveyer 8.Wherein, silicon chip on the 3rd belt conveyor 3 will directly be sent on the second connecting gear 7, when the silicon chip on the second belt conveyor 2 arrives corner conveyer 8 position, the lifting mechanism of corner conveyer 8 promotes, the second belt conveyor 2 and the 3rd belt conveyor 3 gap 801 of submerging, in 802, driving face 81,82,83 are promoted to and exceed the second belt conveyor 2 and the 3rd belt conveyor 3, after holding up silicon chip it is transferred on the 3rd belt conveyor 3, then 8 declines of corner conveyer reset, silicon chip namely is placed on the 3rd belt conveyor 3, finish turning to of silicon chip, next silicon chip is transmitted by the 3rd belt conveyor 3.Corner conveyer 8 waits for that lower a slice silicon chip arrives.After the second belt conveyor 2, the 3rd belt conveyor 3 are finished the transmission of front a collection of silicon chip, reset to the state that receives the next group silicon chip.
As improvement, the discharging area of the silicon chip automatic blanking equipment of embodiment of the present utility model comprises outside gear mechanism, unloader structure and four-sensor, wherein:
Outside gear mechanism 11 comprises transfer station and lower transfer station, upper transfer station is provided with for the 4th belt conveyor 4 that transmits fully loaded silicon wafer bearing box, be on the same level face with the second connecting gear 7 and direction of transfer identical, lower transfer station is provided be used to the 5th belt conveyor 5 that transmits unloaded silicon wafer bearing box and its direction of transfer opposite with the 4th belt conveyor 4;
Such as Fig. 2, Fig. 5 and shown in Figure 6, four-sensor 40 is arranged on the position of unloader structure 6, and the zero load/full signal of induction silicon wafer bearing box is used for the action of control the first bay-lift 62 and the 6th belt conveyor 61.The first bay-lift 62 drops to as shown in Figure 5 position, under the signal control that four-sensor 40 is sensed, the 6th belt conveyor 61 direction of transfers are identical with the direction of transfer of the 5th belt conveyor 5, receive unloaded silicon wafer bearing box 100, then the first bay-lift 62 rises, the unloaded silicon wafer bearing box 100 of the 6th belt conveyor 61 support under four-sensor 40 actuated signal controls is taken in the silicon chip that the second connecting gear 7 is sent here, then adjust to as shown in Figure 6 position, the 6th belt conveyor 61 direction of transfers are identical with the direction of transfer of the 4th belt conveyor 4, will be fully loaded with silicon wafer bearing box 200 and deliver to the final blanking of the 4th belt conveyor 4 realization silicon chips.
As further improvement, be provided with buffer memory mechanism 9 between unloader structure 6 and the second connecting gear 7, buffer memory mechanism 9 comprises the silicon chip Cache Framework 91 that the second bay-lift 92 and two sides connect, the second connecting gear 7 vertically runs through silicon chip Cache Framework 91, the second bay-lift 92 is connected with silicon chip Cache Framework 91, be used for lifting silicon chip Cache Framework 91 on perpendicular to the direction of transfer of the second connecting gear 7, cooperate one by one with the second connecting gear 7 silicon chip Cache Framework 91 is carried out inserted sheet, this structure belongs to prior art, repeats no more.
As further improving, the second connecting gear 7 comprises support 71, support platform, be located at a plurality of rollers of support platform both sides, be divided on the roller of support platform both sides and be used for the 7th belt conveyor 72 of transmission silicon chip, and is used for driving the motor (not shown) that roller rotates;
The support platform is comprised of fixed part 702 and pars contractilis 701, and fixed part 702 is captiveed joint with support 71, is connected by cylinder 74 between fixed part 702 and the pars contractilis 701, and the flexible direction of cylinder is consistent with the direction of transfer of the 7th belt conveyor 72; Roller arranges in pairs, and two rollers that consist of every pair roller are divided into support platform both sides accordingly, and roller comprises a pair of live roller 75, a pair of the first return idler 76, a pair of the second return idler 77 and a pair of the 3rd return idler 78 at least; A pair of live roller 75 is individually fixed in the two ends of a transmission shaft 751, and transmission shaft 751 is located at the end of fixed part 702 1 sides of support platform, and transmission shaft 751 is connected with motor; A pair of the first return idler 76 is located at the two ends of the first wheel shaft 761, the first wheel shaft 761 is located at the end of pars contractilis 701 1 sides of support platform, a pair of the second return idler 77 is located at the two ends of the second wheel shaft 771, the second wheel shaft 771 is located at pars contractilis 701 near an end of fixed part 702, a pair of the 3rd return idler 78 is located at the two ends of third round axle 781, third round axle 781 is located on the support of pars contractilis 701 belows, third round axle 781 is lower than the second wheel shaft 771, the second wheel shaft 771 is lower than the first wheel shaft 761, and the second wheel shaft 771 is compared to the first wheel shaft 761 and third round axle 781 the most close fixed parts 702; The 7th belt conveyor 72 is walked around respectively live roller 75, the first return idler 76, the second return idler 77 and the 3rd return idler 78 of support platform both sides successively, makes the 7th belt conveyor 72 respectively through circuitous formation multistage folded section 703 after being positioned at second return idler 77 of the same side and the 3rd return idler 78.
Above embodiment is exemplary embodiment of the present utility model only, is not used in restriction the utility model, and protection domain of the present utility model is defined by the claims.Those skilled in the art can make various modifications or be equal to replacement the utility model in essence of the present utility model and protection domain, this modification or be equal to replacement and also should be considered as dropping in the protection domain of the present utility model.
Claims (4)
1. a silicon chip automatic blanking equipment is characterized in that, comprising:
The first connecting gear, described the first connecting gear comprise at least two groups the first belt conveyor that all is on the same level face, and every group of described first belt conveyor is for dock to transmit the silicon chip that comes from wet process equipment with wet process equipment;
The second belt conveyor and the 3rd belt conveyor that direction of transfer is identical with described the first connecting gear, described the second belt conveyor and the 3rd belt conveyor dock with two groups of described first belt conveyor respectively, described the second belt conveyor and the 3rd belt conveyor below are provided with the corner conveyer, described corner conveyer comprises lifting mechanism, three driving faces that the section gap that is connected with lifting mechanism arranges, three described driving faces are on the same level face and with described the second belt conveyor be used for vertical with the transmission direction of the 3rd belt conveyor the silicon chip on described the second belt conveyor are transferred to described the 3rd belt conveyor, and the gap that described the second belt conveyor of confession or the 3rd belt conveyor wear after being formed on described lifting mechanism between adjacent two described driving faces and promoting;
Second connecting gear identical with described the 3rd belt conveyor docking and direction of transfer is used for silicon chip is delivered to discharging area;
First sensor, described first sensor are arranged on described the second belt conveyor and the 3rd belt conveyor and the position that described the first belt conveyor docks and are used for sending the primary importance signal when silicon chip arrive described the second belt conveyor and the 3rd belt conveyor;
The second sensor, described the second sensor setting is in be used for sending second place signal on the position of described corner conveyer when silicon chip arrives described corner conveyer;
The 3rd sensor, described the 3rd sensor setting is used for sending three position singal when silicon chip arrives described the second connecting gear on described the 3rd belt conveyor and position that described the second connecting gear docks.
2. silicon chip automatic blanking equipment according to claim 1 is characterized in that described discharging area comprises outside gear mechanism, unloader structure and four-sensor, wherein:
Described outside gear mechanism comprises transfer station and lower transfer station, described upper transfer station is provided with for the 4th belt conveyor that transmits fully loaded silicon wafer bearing box, be on the same level face with described the second connecting gear and direction of transfer identical, described lower transfer station is provided be used to the 5th belt conveyor that transmits unloaded silicon wafer bearing box and its direction of transfer opposite with described the 4th belt conveyor;
Described unloader structure is arranged at described the second connecting gear along the end of direction of transfer, comprise the first bay-lift, be provided with on described the first bay-lift can dock with described the 4th belt conveyor respectively at different lifting position places with the fully loaded silicon wafer bearing box of the described transmission of support or with described the 5th belt conveyor and dock the 6th belt conveyor that transmits described unloaded silicon wafer bearing box with support;
Zero load/full signal that described four-sensor is arranged at induction silicon wafer bearing box on the position of described unloader structure is used for controlling the action of described the first bay-lift and described the 6th belt conveyor.
3. silicon chip automatic blanking equipment according to claim 2, it is characterized in that, be provided with buffer memory mechanism between described unloader structure and the second connecting gear, described buffer memory mechanism comprises the silicon chip Cache Framework that the second bay-lift and two sides connect, described the second connecting gear vertically runs through described silicon chip Cache Framework, and described the second bay-lift is connected with described silicon chip Cache Framework and is used for the described silicon chip Cache Framework of lifting on perpendicular to the direction of transfer of described the second connecting gear.
4. silicon chip automatic blanking equipment according to claim 1, it is characterized in that, described the second connecting gear comprises support, support platform, be located at a plurality of rollers of support platform both sides, be divided into the 7th belt conveyor that is used for the transmission silicon chip on the roller of described support platform both sides, and the motor that is used for driving described roller rotation
Described support platform is comprised of fixed part and pars contractilis, and described fixed part is captiveed joint with support, is connected by cylinder between described fixed part and the pars contractilis, and the flexible direction of described cylinder is consistent with the direction of transfer of described the 7th belt conveyor;
Described roller arranges in pairs, and two rollers that consist of every pair roller are divided into support platform both sides accordingly, and described roller comprises a pair of live roller, a pair of the first return idler, a pair of the second return idler and a pair of the 3rd return idler at least; A pair of described live roller is individually fixed in the two ends of a transmission shaft, and described transmission shaft is located at the end of fixed part one side of support platform, and described transmission shaft is connected with motor;
A pair of described the first return idler is located at the two ends of the first wheel shaft, the first round is located in the end of pars contractilis one side of support platform, a pair of described the second return idler is located at the two ends of the second wheel shaft, described second takes turns an end that is located in the close described fixed part of described pars contractilis, a pair of described the 3rd return idler is located at the two ends of third round axle, described third round is located on the support of described pars contractilis below, described third round axle is lower than described the second wheel shaft, described the second wheel shaft is lower than described the first wheel shaft, and described the second wheel shaft is compared to described the first wheel shaft and the most close described fixed part of third round axle;
Described the 7th belt conveyor is walked around respectively live roller, the first return idler, the second return idler and the 3rd return idler of described support platform both sides successively, makes described the 7th belt conveyor respectively through circuitous formation multistage folded section after being positioned at described second return idler of the same side and the 3rd return idler.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220415728 CN202743929U (en) | 2012-08-21 | 2012-08-21 | Silicon slice automatic blanking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220415728 CN202743929U (en) | 2012-08-21 | 2012-08-21 | Silicon slice automatic blanking device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202743929U true CN202743929U (en) | 2013-02-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220415728 Expired - Fee Related CN202743929U (en) | 2012-08-21 | 2012-08-21 | Silicon slice automatic blanking device |
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| CN (1) | CN202743929U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106276282A (en) * | 2016-09-14 | 2017-01-04 | 中国电子科技集团公司第四十八研究所 | Silicon chip material fetching mechanism and method for fetching thereof and silicon test screening installation |
| CN105109983B (en) * | 2015-07-21 | 2017-08-11 | 佛山市捷泰克机械有限公司 | Long tubing sequence feeder and the method for feeding of sorting |
| CN107119318A (en) * | 2016-02-25 | 2017-09-01 | 赫姆洛克半导体运营有限责任公司 | Conveyer material or the surfacing for contacting surface |
-
2012
- 2012-08-21 CN CN 201220415728 patent/CN202743929U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105109983B (en) * | 2015-07-21 | 2017-08-11 | 佛山市捷泰克机械有限公司 | Long tubing sequence feeder and the method for feeding of sorting |
| CN107119318A (en) * | 2016-02-25 | 2017-09-01 | 赫姆洛克半导体运营有限责任公司 | Conveyer material or the surfacing for contacting surface |
| CN106276282A (en) * | 2016-09-14 | 2017-01-04 | 中国电子科技集团公司第四十八研究所 | Silicon chip material fetching mechanism and method for fetching thereof and silicon test screening installation |
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Granted publication date: 20130220 Termination date: 20130821 |