CN202688444U - Graphite boat - Google Patents
Graphite boat Download PDFInfo
- Publication number
- CN202688444U CN202688444U CN 201220306990 CN201220306990U CN202688444U CN 202688444 U CN202688444 U CN 202688444U CN 201220306990 CN201220306990 CN 201220306990 CN 201220306990 U CN201220306990 U CN 201220306990U CN 202688444 U CN202688444 U CN 202688444U
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- CN
- China
- Prior art keywords
- graphite
- boat
- graphite boat
- utility
- model
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Chemical Vapour Deposition (AREA)
Abstract
The utility model relates to the technical field of PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment, in particular to a graphite boat. The graphite boat comprises a boat body, graphite sheets, inserting holes, silicon sheet positioning areas and ceramic rods; the graphite sheets are arranged on the boat body; the inserting holes and the silicon sheet positioning areas are arranged in the graphite sheets; the ceramic rods are arranged in the inserting holes; and the silicon sheet positioning areas are hollowed out. The graphite boat provided by the utility model is simple, compact and reasonable in structure, convenient and quick to assemble, reliable to connect, capable of improving the safety in use, fast in film coating and depositing, and capable of improving the producing efficiency and the quality of the coated film and greatly improving the reliability in work. The graphite boat is easy for application and popularization.
Description
Technical field
The utility model relates to a kind of technical field of PECVD equipment, especially a kind of graphite boat.
Background technology
The security that existing graphite boat uses is lower, and the speed of the coated film deposition that slowed down has reduced production efficiency, has reduced simultaneously the quality of plated film, greatly reduces the reliability of graphite boat work, is easy to use promote.
The utility model content
In order to overcome the deficiency that existing graphite boat safety in utilization is low, coated film deposition is slow, production efficiency is low and coating quality is low, the utility model provides a kind of graphite boat.
The technical scheme that its technical problem that solves the utility model adopts is: a kind of graphite boat, comprise boat body, graphite flake, jack, silicon chip rest area and ceramic rod, the boat body is provided with graphite flake, and graphite flake is provided with jack and silicon chip rest area, is provided with ceramic rod in the jack.
According to another embodiment of the present utility model, comprise that further the silicon chip rest area is hollow type.
The beneficial effects of the utility model are, this graphite boat is simple in structure, compact and reasonable, easy to assembly quick, connect reliably, improved the security of using, coated film deposition is fast, improved production efficiency, improved simultaneously the quality of plated film, greatly improved the reliability of graphite boat work, be easy to use and promote.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is structural representation of the present utility model.
1. boat bodies among the figure, 2. graphite flake, 3. jack, 4. silicon chip rest area, 5. ceramic rod.
Embodiment
Structural representation of the present utility model such as Fig. 1, a kind of graphite boat, comprise boat body 1, graphite flake 2, jack 3, silicon chip rest area 4 and ceramic rod 5, boat body 1 is provided with graphite flake 2, graphite flake 2 is provided with jack 3 and silicon chip rest area 4, be provided with ceramic rod 5 in the jack 3, silicon chip rest area 4 is hollow type.
During use, boat body 1 is provided with graphite flake 2, and graphite flake has jack 3 on 2 four angles, and graphite flake 2 central authorities are provided with silicon chip rest area 4, and ceramic rod 5 inserts in the jack 3, and silicon chip rest area 4 is hollow type.This graphite boat is simple in structure, compact and rationally, easy to assembly quick, connection is reliable, improved the security of using, coated film deposition is fast, has improved production efficiency, improved simultaneously the quality of plated film, greatly improved the reliability of graphite boat work, be easy to use and promote.
Claims (2)
1. graphite boat, comprise boat body (1), graphite flake (2), jack (3), silicon chip rest area (4) and ceramic rod (5), it is characterized in that, boat body (1) is provided with graphite flake (2), graphite flake (2) is provided with jack (3) and silicon chip rest area (4), is provided with ceramic rod (5) in the jack (3).
2. graphite boat according to claim 1 is characterized in that, silicon chip rest area (4) is hollow type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220306990 CN202688444U (en) | 2012-06-28 | 2012-06-28 | Graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220306990 CN202688444U (en) | 2012-06-28 | 2012-06-28 | Graphite boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202688444U true CN202688444U (en) | 2013-01-23 |
Family
ID=47544091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220306990 Expired - Fee Related CN202688444U (en) | 2012-06-28 | 2012-06-28 | Graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202688444U (en) |
-
2012
- 2012-06-28 CN CN 201220306990 patent/CN202688444U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130123 Termination date: 20130628 |