CN202658265U - Crystal growing furnace - Google Patents
Crystal growing furnace Download PDFInfo
- Publication number
- CN202658265U CN202658265U CN 201220299670 CN201220299670U CN202658265U CN 202658265 U CN202658265 U CN 202658265U CN 201220299670 CN201220299670 CN 201220299670 CN 201220299670 U CN201220299670 U CN 201220299670U CN 202658265 U CN202658265 U CN 202658265U
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- CN
- China
- Prior art keywords
- crucible
- crystal growing
- growing furnace
- tungsten
- tungsten bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model discloses a crystal growing furnace. The crystal growing furnace comprises a crucible and a main heater, wherein the crucible and the main heater are sealed and fixed in a cavity; the main heater is arranged outside the crucible, and heat screens are arranged outside the crucible and the main heater; the main heater is connected with one end of each of tungsten bar electrodes through one of tungsten rings, and the other end of each of the tungsten bar electrodes is connected with one of water-cooling electrodes on the cavity. According to the crystal growing furnace, a set of complete loops is formed by electrode extracting structures on the side wall of a furnace body, and water-cooling sandwich layers are located in the inner cylinder and the outer cylinder of the cavity body; and the cooling water is not circulated in a vacuum cavity, and the leakage risk of the cooling water is avoided, so that the heating efficiency is improved, and the loss caused by the welding hidden danger in the traditional structure is avoided.
Description
Technical field
The utility model relates to a kind of process furnace, relates in particular to a kind of crystal growing furnace.
Background technology
Traditional squirrel-cage heater electrode generally is to adopt copper ring to be connected by fastening piece with the tungsten bar, water-cooling sandwich is arranged in the copper ring, be connected with the copper rod with water-cooling sandwich above the copper ring, copper rod generally stretches out from the bell top, be connected with the single crystal growing furnace power supply, thereby volts DS is imported on the well heater.A kind of like this structure has just caused in heat-processed, and water coolant can be taken away a large amount of heats, that is to say that the most thermal power of well heater all has been cooled water consumption.In addition, this structure enters vacuum cavity owing to introducing water coolant, has the risk of leaking, and the crystal that will cause so vacuum breaking, electric pole short circuit, molten state is met the Serious Accidents such as water projection, crucible damage in case the commissure that electrode is drawn leaks.Therefore be necessary existing crystal growing furnace is improved, improve heating efficiency, avoid revealing hidden danger.
The utility model content
Technical problem to be solved in the utility model provides a kind of crystal growing furnace, can improve heating efficiency, and avoids revealing hidden danger.
The utility model is to solve the problems of the technologies described above the technical scheme that adopts to provide a kind of crystal growing furnace, comprise that sealing is fixed on crucible and the primary heater in the cavity, described primary heater is located at the outside of crucible, described crucible and primary heater are provided with thermoscreen outward, wherein, described primary heater links to each other by an end of tungsten ring and tungsten bar electrode, and the other end of described tungsten bar electrode links to each other with water cooled electrode on the cavity.
Above-mentioned crystal growing furnace, wherein, described crucible top is provided with the lid screen, the bottom is by on the pillar stiffener, the bottom of described crucible also is provided with auxiliary heater, described primary heater is squirrel-cage tungsten bar well heater, and described auxiliary heater is positioned at the outside of primary heater, and described auxiliary heater links to each other with water cooled electrode on the cavity by the tungsten bar electrode.
Above-mentioned crystal growing furnace, wherein, an end of described tungsten bar electrode is with the molybdenum bolted or be welded on the tungsten ring; Described tungsten ring is two semicircular ring, is connected with a plurality of equally distributed tungsten bar electrodes on each semicircular ring.
Above-mentioned crystal growing furnace, wherein, the number of the tungsten bar electrode that connects on each semicircular ring is three.
Above-mentioned crystal growing furnace, wherein, described tungsten bar electrode sections is circle or rectangle.
The utility model contrast prior art has following beneficial effect: the crystal growing furnace that the utility model provides, utilize the tungsten ring to replace the copper ring of traditional structure, form the complete loop of a cover by the electrode deriving structure on the sidewall of the furnace body, water-cooling sandwich is arranged in the cavity inner/outer tube, do not have cooling water circulation in the vacuum cavity, the risk that does not have cooling water leakage, thus heating efficiency improved, the loss of having avoided traditional structure welding hidden danger to bring.
Description of drawings
Fig. 1 is the utility model crystal growing furnace structural representation.
Among the figure:
Thermoscreen on 1 tungsten bar electrode, the 2 tungsten rings 3
4 cavitys, 5 lid screens, 6 primary heaters
7 crucibles, 8 side thermoscreens, 9 water cooled electrodes
11 times thermoscreen 12 pillar stiffeners of 10 auxiliary heaters
Embodiment
The utility model will be further described below in conjunction with drawings and Examples.
Fig. 1 is the utility model crystal growing furnace structural representation.
See also Fig. 1, the crystal growing furnace that the utility model provides comprises that sealing is fixed on crucible 7 and the primary heater 6 in the cavity 4, primary heater 6 is located at the outside of crucible 7, crucible 7 and the primary heater 6 outer thermoscreens that are provided with, wherein, primary heater 6 links to each other by an end of tungsten ring 2 and tungsten bar electrode 1, and the other end of tungsten bar electrode 1 links to each other with water cooled electrode 9 on the cavity 4.Tungsten bar electrode 1 cross section is preferably circle or rectangle, and an end of tungsten bar electrode 1 is with the molybdenum bolted or be welded on the tungsten ring 2; Tungsten ring 2 is two semicircular ring, is connected with a plurality of equally distributed tungsten bar electrodes 1 on each semicircular ring; The number of the tungsten bar electrode 1 that connects on each semicircular ring is preferably three.
The crystal growing furnace that the utility model provides, crucible 7 tops are provided with lid screen 5, and the bottom is by on the pillar stiffener 12.For in crucible top and bottom formation temperature gradient, the bottom of crucible 7 can further arrange auxiliary heater 10, primary heater 6 is squirrel-cage tungsten bar well heater, described auxiliary heater 10 is positioned at the outside of primary heater 6, and auxiliary heater 10 links to each other with water cooled electrode 9 on the cavity 4 by tungsten bar electrode 1.
In sum, the utility model utilizes tungsten ring 2 to replace the copper ring of traditional structure, form the complete loop of a cover by the electrode deriving structure on the sidewall of the furnace body, water-cooling sandwich is arranged in cavity 4, do not have cooling water circulation in the vacuum cavity, the risk that does not have cooling water leakage, thus heating efficiency improved, the loss of having avoided traditional structure welding hidden danger to bring.
Although the utility model discloses as above with preferred embodiment; so it is not to limit the utility model; any those skilled in the art; within not breaking away from spirit and scope of the present utility model; when doing a little modification and perfect, therefore protection domain of the present utility model is worked as with being as the criterion that claims were defined.
Claims (5)
1. crystal growing furnace, comprise that sealing is fixed on crucible (7) and the primary heater (6) in the cavity (4), described primary heater (6) is located at the outside of crucible (7), the outer thermoscreen that is provided with of described crucible (7) and primary heater (6), it is characterized in that, described primary heater (6) links to each other by the end of tungsten ring (2) with tungsten bar electrode (1), and the other end of described tungsten bar electrode (1) links to each other with water cooled electrode (9) on the cavity (4).
2. crystal growing furnace as claimed in claim 1, it is characterized in that, described crucible (7) top is provided with lid screen (5), the bottom is by on the pillar stiffener (12), the bottom of described crucible (7) also is provided with auxiliary heater (10), described primary heater (6) is squirrel-cage tungsten bar well heater, and described auxiliary heater (10) is positioned at the outside of primary heater (6), and described auxiliary heater (10) links to each other with water cooled electrode (9) on the cavity (4) by tungsten bar electrode (1).
3. crystal growing furnace as claimed in claim 2 is characterized in that, an end of described tungsten bar electrode (1) is with the molybdenum bolted or be welded on the tungsten ring (2); Described tungsten ring (2) is two semicircular ring, is connected with a plurality of equally distributed tungsten bar electrodes (1) on each semicircular ring.
4. crystal growing furnace as claimed in claim 3 is characterized in that, the number of the tungsten bar electrode (1) that connects on each semicircular ring is three.
5. such as each described crystal growing furnace of claim 1～4, it is characterized in that, described tungsten bar electrode (1) cross section is circle or rectangle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220299670 CN202658265U (en) | 2012-06-25 | 2012-06-25 | Crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220299670 CN202658265U (en) | 2012-06-25 | 2012-06-25 | Crystal growing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202658265U true CN202658265U (en) | 2013-01-09 |
Family
ID=47453184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220299670 Expired - Lifetime CN202658265U (en) | 2012-06-25 | 2012-06-25 | Crystal growing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202658265U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107068222A (en) * | 2016-10-20 | 2017-08-18 | 核工业理化工程研究院 | Water-cooling structure no-welding-seam and the easily changeable atomic pile of calandria |
| CN113819755A (en) * | 2021-10-12 | 2021-12-21 | 中国科学院沈阳科学仪器股份有限公司 | Heater for high-temperature vacuum resistance furnace |
-
2012
- 2012-06-25 CN CN 201220299670 patent/CN202658265U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107068222A (en) * | 2016-10-20 | 2017-08-18 | 核工业理化工程研究院 | Water-cooling structure no-welding-seam and the easily changeable atomic pile of calandria |
| CN107068222B (en) * | 2016-10-20 | 2023-04-18 | 核工业理化工程研究院 | Atomic furnace with water-cooling structure without welding seam and easily replaced heating body |
| CN113819755A (en) * | 2021-10-12 | 2021-12-21 | 中国科学院沈阳科学仪器股份有限公司 | Heater for high-temperature vacuum resistance furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130109 |