CN202651132U - 一种硅薄膜太阳电池 - Google Patents

一种硅薄膜太阳电池 Download PDF

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CN202651132U
CN202651132U CN 201220102349 CN201220102349U CN202651132U CN 202651132 U CN202651132 U CN 202651132U CN 201220102349 CN201220102349 CN 201220102349 CN 201220102349 U CN201220102349 U CN 201220102349U CN 202651132 U CN202651132 U CN 202651132U
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depositing
silicon film
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cell
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罗云荣
羊亿
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Hunan Normal University
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Hunan Normal University
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Abstract

本实用新型公开了一种硅薄膜太阳电池,其特征在于,在n型晶体硅片的两面分别沉积本征多晶硅薄膜,在正面本征多晶硅薄膜上沉积p型氢化非晶硅薄膜,在背面本征多晶硅薄膜上沉积n+型氢化非晶硅薄膜,再在两面分别沉积FTO透明导电薄膜,然后在正面、背面丝网印刷金属电极。本实用新型可增强界面的钝化效果,降低缺陷态密度和暗电流,提高载流子迁移率,增加对太阳光的吸收范围,提高电池的转换效率和稳定性。

Description

一种硅薄膜太阳电池
技术领域
本实用新型涉及一种硅薄膜太阳电池的结构。
背景技术
HIT(hetero junction with intrinsic thin-layer)异质结本征薄膜太阳能电池最早是由日本三洋公司提出的,它是在晶体硅与a-Si:H薄膜之间沉积一层很薄的本征非晶硅薄膜(大约几个纳米),一方面由于a-Si:H薄膜的存在使得本征非晶硅薄膜的钝化作用下降,衬底中的少子穿过本征非晶硅薄膜而和a-Si:H薄膜中的缺陷态相互作用,形成载流子的复合通道,使硅薄膜电池的暗电流增加;另一方面由于a-Si:H薄膜和晶体硅中杂质的扩散,使得如此薄的本征非晶硅薄膜对反向漏电流的抑制效果不明显,影响硅薄膜电池的转换效率。本实用新型的目的是为了提高硅薄膜太阳电池的转换效率。
发明内容
为解决前述提高硅薄膜太阳电池转换效率的问题,本实用新型提供一种硅薄膜太阳电池,该电池的结构是:在n型晶体硅片的两面分别沉积本征多晶硅薄膜,在正面本征多晶硅薄膜上沉积p型氢化非晶硅薄膜,在背面本征多晶硅薄膜上沉积n+型氢化非晶硅薄膜,再在两面分别沉积FTO透明导电薄膜,然后在正面、背面丝网印刷金属电极。本实用新型的优点是用本征多晶硅薄膜(ipoly-si)取代本征非晶硅薄膜(i α-si)。本征多晶硅薄膜(i poly-si)相对于本征非晶硅薄膜(i α-si)钝化效果好,缺陷态密度低,暗电流低,迁移率高,非晶硅薄膜/多晶硅薄膜的叠层结构更有利于充分吸收太阳光,提高硅薄膜太阳电池转换效率,且使用多晶硅薄膜,电池的稳定性也得到了一定程度的改善。
附图说明
附图是本实用新型的层结构示意图。
附图标号说明:
1--是Al金属栅线正电极;
2--是正面掺氟氧化锡透明导电薄膜(FTO);
3--是P型氢化非晶硅薄膜(p α-si:H);
4--是正面的本征多晶硅薄膜(i poly-si);
5--是N型基底层晶体硅片(n c-si);
6--是背面的本征多晶硅薄膜(i poly-si);
7--是N型重掺杂氢化非晶硅薄膜(n+α-si:H);
8--是背面的掺氟氧化锡透明导电薄膜(FTO);
9--是背面的Al金属栅线负电极。
具体实施方式
本实用新型按附图各层结构,它包括从下至上依次分布的Al金属栅线负电极9、背面的掺氟氧化锡透明导电薄膜8、N型重掺杂氢化非晶硅薄膜7、背面的本征多晶硅薄膜6、N型基底层晶体硅片5、正面的本征多晶硅薄膜4、P型氢化非晶硅薄膜3、正面掺氟氧化锡透明导电薄膜2、Al金属栅线正电极1。本实施例中,沉积正面和背面的本征多晶硅薄膜均采用喷涂法、丝网印刷法、化学气相沉积法或物理气相沉积法中的一种,厚度均为5-100μm;沉积P型氢化非晶硅薄膜和N型重掺杂氢化非晶硅薄膜均采用等离子体增强化学气相沉积法,厚度均为5-25nm;沉积正面和背面的掺氟氧化锡透明导电薄采用超声喷雾法、磁控溅射法中的一种,厚度均为50-200nm。

Claims (1)

1.一种硅薄膜太阳电池,其特征是,在n型基底晶体硅片的两面分别沉积本征多晶硅薄膜,在正面本征多晶硅薄膜上沉积p型氢化非晶硅薄膜,在背面本征多晶硅薄膜上沉积n+型氢化非晶硅薄膜。 
CN 201220102349 2012-03-19 2012-03-19 一种硅薄膜太阳电池 Expired - Fee Related CN202651132U (zh)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106471625A (zh) * 2014-06-27 2017-03-01 道达尔销售服务公司 利用晶体硅对太阳能电池光接收表面进行钝化

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106471625A (zh) * 2014-06-27 2017-03-01 道达尔销售服务公司 利用晶体硅对太阳能电池光接收表面进行钝化

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