CN202616182U

CN202616182U - Device for monitoring manufacture of multi-alkali photocathode of image intensifier

Info

Publication number: CN202616182U
Application number: CN 201220160973
Authority: CN
Inventors: 李晓峰; 瞿利平; 杨文波; 其他发明人请求不公开姓名
Original assignee: North Night Vision Technology Co Ltd
Current assignee: North Night Vision Technology Co Ltd
Priority date: 2011-12-16
Filing date: 2012-04-17
Publication date: 2012-12-19
Anticipated expiration: 2022-04-17

Abstract

The utility model discloses a device for monitoring manufacture of a multi-alkali photocathode of an image intensifier, which is mainly used for fluorescent monitoring on manufacture of the multi-alkali photocathode of a low-light-level image intensifier. The main technical solution adopted by the utility model is that: in a box body, a tail end of an optical fiber component is outward and extends out of an opening of the box body; an output end of a laser is connected with a beginning end of a laser incident optical fiber; a tail end of the laser incident optical fiber combines with a beginning end of a fluorescent emergent optical fiber to form a tail end of the optical fiber component; and the fluorescent emergent optical fiber is connected with a holographic filter lens, a diffraction grating, a CCD detector and a computer in sequence. A trial application of the device proves that phenomena of unstable quality and low production efficiency are overcome fundamentally, and effects of effectively improving the sensitivity of the multi-alkali photocathode, reducing loss of defective products, and stabilizing the quality of the image intensifier are achieved.

Description

A kind of supervising device that is used for the making of image intensifier multialkali photocathode

Technical field

The utility model belongs to a kind of supervising device to the vacuum Fabrication of Optoelectronic Devices, is mainly used in the fluorescence monitoring that the gleam image intensifier multialkali photocathode is made, and also can be used for the monitoring of similar photoelectric tube, the making of photomultiplier photocathode.

Background technology

Na ₂KSb (Cs) multialkali photocathode (being called for short the polybase negative electrode) has a wide range of applications in gleam image intensifier, photoelectric tube, photomultiplier equal vacuum opto-electronic device.Be characterized in that manufacturing process is simple, can be in the making various on glass of different shape, the photocathode manufactured size has reached more than the 10 English inch.Although various novel semi-conductor detectors therefore occurred; But in many acquisition of signal and imaging field, still using various traditional vacuum devices, is example with gleam image intensifier and photomultiplier; Up to the present, the making of polybase negative electrode remains the home built mode that adopts.Manufacturing process mostly is employed under the situation of excessive Na, steams K and Sb repeatedly, finally Na ₂, K and Sb ratio adjust to 2: 1: 1, be commonly called as and reach balance, thereby obtain maximum sensitivity.Normally used typical process is: K is steamed in (1).Under 160 ℃ of temperature, evaporation K when leakage current reaches capacity, begins to steam antimony, obtains maximum until photoelectric current, makes K and Sb film generation chemical reaction generate K ₃Sb; (2) steam Na.Under 220 ℃ of temperature, with K ₃Sb is exposed in the Na steam, makes K gradually by the Na displacement, observes the variation of its photoelectric current, when photoelectric current rises to maximum and has downward trend, shows that Na is excessive; (3) Sb, K steam altogether.When temperature drops to 160 ~ 180 ℃, steam Sb and K repeatedly, up to obtaining needed thicknesses of layers, this process it is generally acknowledged formed Na after accomplishing ₂The K of KSb rete, Na stoichiometric proportion are 2: 1; (4) Sb, Cs steam altogether.Temperature remains to 160 ℃, steams Sb and Cs repeatedly, up to obtaining maximum photoelectric current, thinks Na this moment by rule of thumb ₂KSb (Cs) multialkali photocathode completes.Because the characteristics of polybase negative electrode manufacture craft are to make by hand, therefore be difficult to accurately judge the stoichiometric proportion of Na, K, Sb.The polybase negative electrode quality of manufacturing is unstable, not necessarily obtains maximum sensitivity; Complex process owing to be that experience is judged, steam repeatedly Sb and K several times just determine whether qualified; Because quality is unstable, image intensifier is through vibrating, drench with rain, produced after five experiments such as impact the waste product of some.Under vacuum condition, also can measure Na with Optical Analysis Method ₂The stoichiometric proportion of KSb rete, but on production equipment, realize very difficulty, and cost an arm and a leg, should not invest.

Summary of the invention

Technical problem underlying and purpose that the utility model will solve are: lack monitoring means in making to existing polybase negative electrode, can't obtain Na ₂The defective of KSb rete exact chemical metering ratio.According to Na in rete ₂: the stoichiometric proportion of K: Sb reaches at 2: 1: 1 o'clock; The peak wavelength of fluorescence Spectra reaches 899nm; Intensity of fluorescence reaches maximum this rule simultaneously, designs the fluorescence supervising device that a kind of image intensifier multialkali photocathode is made, and is used for polybase negative electrode manufacturing process is monitored in real time.Fundamentally overcome the phenomenon that complex process, quality are unstable, production efficiency is low.Reach the sensitivity, the minimizing loss due to spoiled work that improve the polybase negative electrode effectively, stablize the quality of image intensifier.

The main technical schemes of the utility model: in casing; The end of optical fiber component outwards; And stretch out the opening part of casing; The output of laser is connected with the fine top of laser beam incident, and the end that forms optical fiber component is combined at the end that laser beam incident is fine and the top of fluorescence outgoing optical fiber, and fluorescence goes out optical fiber and is connected with the outer computer of holographic optical filtering, diffraction grating, ccd detector and casing successively.

The utility model proves through practical application: reach the development purpose fully, compare with former manufacturing process: the good frequency of polybase negative electrode manufacturing has improved more than 30%; Stability improves knows clearly more than 18%; Prolong useful life more than 32%; Production efficiency is improved significantly.

Description of drawings

Below in conjunction with accompanying drawing, the embodiment of the utility model is done to describe in further detail.

Fig. 1 is the primary structure sketch map of the utility model.

Fig. 2 is the structure enlarged diagram of the utility model optical fiber component 3.

Fig. 3 is that the utility model is applied to the monitoring sketch map in the polybase negative electrode manufacturing process.

Fig. 4 is the utility model monitoring Na ₂The fluorescence Spectra of KSb coating growth and the curve chart of fluorescence intensity.

Embodiment

Find in the practice, at Na ₂In the building-up process of KSb rete, along with the carrying out of technology, when rete from Na ₂K ₁Sb (Na is excessive) carries out the transition to Na ₂When reaching balance, the peak wavelength of rete fluorescence Spectra also moves to the long wave direction from shortwave KSb (the Na amount progressively equals 2 from being reduced to greater than 2), and fluorescence intensity is also from weak grow simultaneously.Promptly work as Na in the rete ₂: the stoichiometric proportion of K: Sb reaches at 2: 1: 1 o'clock, and the peak wavelength of fluorescence Spectra just reaches 899nm, and the luminous intensity of fluorescence reaches maximum simultaneously.Based on this rule, design a kind of fluorescence supervising device, to monitoring in real time in the polybase negative electrode manufacturing process.

With reference to Fig. 1,2, the main technical schemes of the utility model is described: the utility model is fine 2 by laser 1, laser beam incident, optical fiber component 3, fluorescence outgoing optical fiber 4, holographic optical filtering 5, diffraction grating 6, ccd detector 7 and computer 8 and casing 9 are formed.Its concrete structure is: in casing 9; The end of optical fiber component 3 outwards; And stretch out the opening part of casing 9; The top of the output of laser 1 and laser beam incident fine 2 is connected, and the end of laser beam incident fine 2 is combined formation optical fiber component 3 with the top of fluorescence outgoing optical fiber 4, and fluorescence outgoing optical fiber 4 is connected with holographic optical filtering 5, diffraction grating 6, detector 7 and casing computer 8 outward successively.

With reference to Fig. 2, described optical fiber component 3, by the fine 3-a of laser beam incident, fluorescence outgoing optical fiber 3-b, optical fiber outer material 3-c, shell 3-d forms, and has the function of input laser and outgoing fluorescence, engages specialized factory to make.

With reference to Fig. 1, laser 1, laser beam incident fibre 2, outgoing optical fiber 4, holographic optical filtering 5, diffraction grating 6, ccd detector 7 and computer 8 are GB electric elements and the communication material that can purchase in market.

With reference to Fig. 2,3,4, operation principle of the utility model and process: 1. preparation.(see figure 3) at first is placed in the polybase negative electrode with this device and makes on the platform, makes the terminal positive alignment of optical fiber component 3 and contacts the negative electrode input window surface of image intensifier 11.The evaporation source that (see figure 3) is made photocathode has four kinds of Na, K, Cs and Sb, and wherein Na, K, Cs three provenances are installed in the alkali source shell body 10, and the Sb source is installed in the antimony slide bar shell body 12; 2. the polybase negative electrode is made.The evaporation of four provenances all adopts the electrically heated method of direct current to carry out, and when making the polybase negative electrode, whole image intensifier is in the baking oven 14, by the manufacture craft of processing lamp 13 monitor optical electric currents with the control photocathode, is specifically undertaken by the typical process of front narration; 3. fluorescence monitoring.(see figure 3) is closed processing lamp 13; The laser 1 of device for opening sends the laser that wavelength is 785nm, and (see figure 2) incides the fibre faceplate input window 11-a of image intensifier through laser beam incident fine 2; Be transferred to photocathode rete 11-b and the photocathode rete that is in the vacuum is excited through fibre faceplate; The fluorescence that (see figure 3) photocathode rete sends is transferred to outgoing optical fiber 4 through optical fiber component 3, transfers to holographic optical filtering 5 through outgoing optical fiber, and holographic optical filtering filtering is the laser of 785nm with the wavelength that fluorescence is transferred to holographic optical filtering; Fluorescence transfers to diffraction grating 6 after through holographic optical filtering; Diffraction grating is with fluorescence beam split in 700nm to 1000nm scope, and the fluorescence of each wavelength transfers to ccd detector 7 and is received afterwards, passes through computer 8 samplings and demonstration at last; The peak wavelength that so just can measure fluorescence Spectra reaches 899nm and intensity of fluorescence reaches maximum, has realized Na ₂The KSb rete carries out the purpose that stoichiometric proportion is measured.The peak wavelength of fluorescence Spectra does not reach 899nm and intensity of fluorescence does not reach maximum if measure, and the operation (3) that so just repeats in the previous process is steamed Sb and K repeatedly, till peak wavelength reaches 899nm and intensity of fluorescence and reaches maximum.

With reference to Fig. 4, rete is from Na ₂K ₁Sb (Na excessive 50%), Na ₂K ₁Sb (Na excessive 35%) carries out the transition to Na ₂The fluorescence Spectra that the KSb rete reaches balance changes.The curve L that light intensity is the highest among the figure ₃Be Na ₂The fluorescence Spectra of KSb rete balance, secondly curve L ₂Be Na ₂K ₁The fluorescence Spectra of Sb (Na excessive 35%) rete, minimum curve L ₁Be Na ₂K ₁The fluorescence Spectra of Sb (Na excessive 50%) rete.Three curves from figure can obviously be found out along with Na amount constantly from Na excessive 50%, 35% to reaching " balance ", Na fully ₂The peak wavelength of KSb rete fluorescence constantly moves and near Na to the long wave direction ₂The peak wavelength 899nm of KSb rete fluorescence.This proves absolutely the Na with accurate stoichiometric proportion ₂The fluorescence Spectra peak value wavelength of KSb compound rete confirms that promptly there is characteristic peak in its fluorescence Spectra, can come according to the characteristic peak of its fluorescence Spectra its material is discerned.Simultaneously because Na ₂The photoluminescence peak of KSb rete changes along with the variation of stoichiometric proportion, therefore passes through Na ₂The measurement of KSb rete fluorescence Spectra just can be judged Na ₂Whether the stoichiometric proportion of KSb rete has reached " balance ".

Claims

1. one kind is used for the supervising device that the image intensifier multialkali photocathode is made; It is characterized in that: concrete structure is; In casing (9); The end of optical fiber component (3) is outside, and stretches out the opening part of casing (9), and the output of laser (1) is connected with the top of laser beam incident fine (2); The end of laser beam incident fine (2) and the top of fluorescence outgoing optical fiber (4) are combined and are formed optical fiber component (3), and fluorescence outgoing optical fiber (4) is connected with the outer computer (8) of holographic optical filtering (5), diffraction grating (6), detector (7) and casing (9) successively.