CN202599977U - Twin-tube scanner linkage tracking type atomic force microscopy (AFM) detection system - Google Patents
Twin-tube scanner linkage tracking type atomic force microscopy (AFM) detection system Download PDFInfo
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- CN202599977U CN202599977U CN 201220275141 CN201220275141U CN202599977U CN 202599977 U CN202599977 U CN 202599977U CN 201220275141 CN201220275141 CN 201220275141 CN 201220275141 U CN201220275141 U CN 201220275141U CN 202599977 U CN202599977 U CN 202599977U
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- 238000004630 atomic force microscopy Methods 0.000 title abstract 9
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- 238000000034 method Methods 0.000 abstract description 5
- 238000003384 imaging method Methods 0.000 abstract description 4
- 238000000089 atomic force micrograph Methods 0.000 abstract description 2
- 239000002086 nanomaterial Substances 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 13
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Abstract
The utility model discloses a twin-tube scanner linkage tracking type atomic force microscopy (AFM) detection system, which is used for realizing the micro-nanostructure AFM detection and scan imaging of a sample by adopting methods of sample fixing, twin-tube scanner microprobe scanning and light beam linkage tracking. The twin-tube scanner linkage tracking type AFM detection system is provided with a twin-tube scanner linkage tracking type AFM probe and a scan imaging and feedback control system, wherein the twin-tube scanner linkage tracking type AFM probe consists of a twin-tube scanner, a probe seat, a microprobe, an L-shaped structure, a linkage lens, a laser, a photoelectric position detector, the sample, a sample bench and the like, and the scan imaging and feedback control system consists of a preamplifier, a scanning and feedback control unit, a computer and the like. The twin-tube scanner linkage tracking type AFM detection system has the advantages that the size and weight of the sample are not restricted, the light beam tracking during scanning is effectively realized by a light path system which is linkage with the twin-tube scanner, the distortion of spurious signals and AFM images caused by feedback is avoided due to the fact that a reflected light path and the Z feedback are consistent in direction of motion, and the image distortion resulted from coupling is eliminated by the twin-tube scanner with an upper layer structure and a lower layer structure which are in mutually-orthogonal bisection.
Description
Technical field
The utility model relates to a kind of two-tube scanner interlock following-up type atomic force micro detection system.
Background technology
In recent years, one of most important feature of every field such as modern science and technology, industry, agricultural and national defence is direction develop rapidly and the extension bigger towards capacity, that speed is faster, yardstick is littler, and human society really gets into information age and micro-nano epoch.In twentieth century end, the fast-developing cutting edge technology of earlier 2000s, each major country is all with the first develop field of micro-nano technology as the new century in the world just for micro-nano technology.And optical microscope, scanning electron microscope (SEM), transmission electron microscope (TEM) and scanning probe microscopy micro-nano detection and micro-imaging techniques such as (SPM) are the important foundations of micro-nano technical development.The most representative in the SPM family is PSTM (STM) and atomic force microscope (AFM); Wherein especially research and the application with AFM is more extensive; Because AFM does not receive the restriction of electric conductivity, magnetic and polymorphic material (solid-state, colloid, liquid state) of micro-nano sample etc.; Thereby bringing into play significant role at the other field of physics, chemistry, materialogy, microelectronics, optoelectronics, life science and micro-nano technology, greatly promoted the particularly development of micro-nano technology of science and technology.
Along with the development of micro-nano technology, also will inevitably new requirement be proposed to the AFM technology.At present, most in the world AFM, or be referred to as conventional AFM, its detecting head are the forms that adopts microprobe to fix, sample is scanned.These AFM instruments can be realized the scanning imagery among a small circle of little quality, undersized micro-nano sample preferably, but can not realize the scanning probe of the sample that size and weight are bigger, and it is obvious that, and the sample that size and weight are bigger is in the great majority.For this reason; Need overcome the limitation of conventional AFM; Research and development goes out novel probe scanning formula (sample is fixed) AFM technology; And this wherein, needs the interlock tracking of resolved beam and microprobe, the X that eliminates scanner and Y axle coupled interference and pattern distortion, elimination Z to key technical problems such as undesired signal of feeding back and image faults.
The method that employing is fixed on sample on the open sample stage, follows the tracks of light beam with two-tube scanner scans microprobe and interlock; Realize the micro nano structure detection and AFM scanning imagery of various samples; Overcome well conventional sample sweep type AFM and existing probe scanning formula AFM remain limitation; For undistorted, undistorted, the quick and micro-nano scanning imagery of high precision of realizing all kinds of micro-nano samples (size and weight are unrestricted) provides new technological approaches; Can be widely used in the every field of micro-nano technology, and then satisfy the national demand in fields such as Chinese national economy, social development, science and technology and national defence.
Summary of the invention
The purpose of the utility model is the deficiency that overcomes prior art, and a kind of two-tube scanner interlock following-up type atomic force micro detection system is provided.
Two-tube scanner interlock following-up type atomic force micro detection system comprises the micro-detecting head of two-tube scanner interlock following-up type atomic force, prime amplifier, scanning and feedback control unit, hardware interface, computing machine and display; Prime amplifier is connected with feedback control unit with photoelectric position detector and scanning, and scanning links to each other with two-tube scanner, hardware interface with feedback control unit, and hardware interface is connected with computing machine, and computing machine is connected with display.
The micro-detecting head of described two-tube scanner interlock following-up type atomic force comprises laser instrument, interlock lens, L shaped structure, voussoir, probe base, microprobe, photoelectric position detector, two-tube scanner, cushion block, assembling stand, guide rail, stand, coarse adjustment mechanism, fine adjustment mechanism, base, sample stage, sample; The interlock lens link to each other with two-tube scanner through L shaped structure and microprobe seat; Microprobe links to each other with two-tube scanner through probe base, and two-tube scanner is fixed on the assembling stand through cushion block, and laser instrument and photoelectric position detector are fixed on the assembling stand respectively; Assembling stand links to each other with guide rail; Guide rail is installed in the stand and through coarse adjustment mechanism and fine adjustment mechanism and does to move vertically, and stand and sample stage are separately fixed on the base, and sample is installed on the sample stage.
Described two-tube scanner comprises isolated packing ring, Y axle slot segmentation, Y electrode ground, Y positive electrode, X axle slot segmentation, X electrode ground, X positive electrode, Z positive electrode; Wherein, isolated packing ring separates the Y axle scanatron on upper strata and the X axle scanatron of lower floor, and the Y axle scanatron on upper strata is separated by the Y axle slot segmentation of two symmetrical distributions again; Form Y electrode ground and Y positive electrode, the X axle scanatron of lower floor is separated by the X axle slot segmentation of two symmetrical distributions, forms X electrode ground and X positive electrode; Article two, Y axle slot segmentation and two X axle slot segmentations, pairwise orthogonal, thus form double-decker, mutually orthogonal binary two-tube scanner up and down; Realize the micro-nano scanning of X axle and Y axle respectively; Both are independently of one another, do not produce coupling, and the afm image that scanning obtains can not produce distortion.
The utility model adopts probe scanning, the fixing mode of sample, and sample size and weight are unrestricted; Designed the light path system that links with two-tube scanner, the pencil tracing when having realized scanning dexterously; Adopt and the consistent reflected light path of Z feedback direction of motion false signal and the afm image distortion of effectively having avoided the feedback motion to cause; Designed double-decker, mutually orthogonal binary new type double tube scanner up and down, realized the micro-nano scanning of X axle and Y axle respectively, both are independently of one another, do not produce coupling, and the afm image that scanning obtains can not produce distortion.These characteristics and the innovation of the utility model; Overcome conventional AFM well in above-mentioned limitation aspect several, for undistorted, undistorted, the quick and micro-nano scanning imagery of high precision of realizing all kinds of micro-nano samples (size and weight are unrestricted) provides new technological approaches.
Description of drawings
Fig. 1 is two-tube scanner interlock following-up type atomic force micro detection system structural representation;
Fig. 2 is the micro-detecting head synoptic diagram of two-tube scanner interlock following-up type atomic force of the utility model;
Fig. 3 (a) is the two-tube scanner front elevation of the utility model;
Fig. 3 (b) is the two-tube scanner side view of the utility model;
Among the figure: the micro-detecting head of two-tube scanner interlock following-up type atomic force 1, prime amplifier 2, scanning and feedback control unit 3, hardware interface 4, computing machine 5 and display 6; Laser instrument 7, interlock lens 8, L shaped structure 9, voussoir 10, probe base 11, microprobe 12, photoelectric position detector 13, two-tube scanner 14, cushion block 15, assembling stand 16, guide rail 17, stand 18, coarse adjustment mechanism 19, fine adjustment mechanism 20, base 21, sample stage 22, sample 23, isolated packing ring 24, Y axle slot segmentation 25, Y electrode ground 26, Y positive electrode 27, X axle slot segmentation 28, X electrode ground 29, X positive electrode 30, Z positive electrode 31.
Embodiment
Two-tube scanner interlock following-up type atomic force micro-detecting method: adopt with sample be fixed on the open sample stage, with the method for two-tube scanner scans microprobe and interlock tracking light beam; Introduce one and follow the interlock lens that two-tube scanner scans together; XY scanning amount of movement and microprobe amount of movement are consistent; Microprobe is positioned on the focal plane of interlock lens all the time, when two-tube scanner, microprobe, tracking lens linked scan, from the laser facula that laser instrument is launched and process interlock lens focus forms; Can oblique all the time irradiation focus on the microprobe, thereby realize pencil tracing; Light beam from micro-probe reflection; Vertical irradiation is to photoelectric position detector; Because the optical axis coincidence of the Z of microprobe feedback direction of motion and folded light beam; Therefore the centre of gravity place of flare on photoelectric position detector can effectively not avoid feeding back false signal and the atomic force microscope images distortion that motion causes because of the feedback motion changes; Adopt double-decker, mutually orthogonal binary two-tube scanner up and down, realize the micro-nano scanning of X axle and Y axle respectively, both are independently of one another, do not produce coupling, therefore scan the afm image that obtains and can not produce distortion.
As shown in Figure 1, two-tube scanner interlock following-up type atomic force micro detection system comprises the micro-detecting head of two-tube scanner interlock following-up type atomic force 1, prime amplifier 2, scanning and feedback control unit 3, hardware interface 4, computing machine 5 and display 6; Prime amplifier 2 is connected with feedback control unit 3 with photoelectric position detector 13 and scanning, and scanning links to each other with two-tube scanner 14, hardware interface 4 with feedback control unit 3, and hardware interface 4 is connected with computing machine 5, and computing machine 5 is connected with display 6.
As shown in Figure 2, the micro-detecting head 1 of described two-tube scanner interlock following-up type atomic force comprises laser instrument 7, interlock lens 8, L shaped structure 9, voussoir 10, probe base 11, microprobe 12, photoelectric position detector 13, two-tube scanner 14, cushion block 15, assembling stand 16, guide rail 17, stand 18, coarse adjustment mechanism 19, fine adjustment mechanism 20, base 21, sample stage 22, sample 23; Interlock lens 8 link to each other with two-tube scanner 14 through L shaped structure 9 and microprobe seat 11; Microprobe 12 links to each other with two-tube scanner 14 through probe base 11; Two-tube scanner 14 is fixed on the assembling stand 16 through cushion block 15; Laser instrument 7 is fixed on respectively on the assembling stand 16 with photoelectric position detector 13, and assembling stand 16 links to each other with guide rail 17, and guide rail 17 is installed in the stand 18 and through coarse adjustment mechanism 19 and does to move vertically with fine adjustment mechanism 20; Stand 18 is separately fixed on the base 21 with sample stage 22, and sample 23 is installed on the sample stage 22.
The micro-detecting head 1 of two-tube scanner interlock following-up type atomic force adopts probe scanning, the fixing mode of sample, and sample size and weight are unrestricted; Designed the light path system that links with two-tube scanner, simple for structure, the pencil tracing when having realized scanning dexterously; Adopt and the consistent reflected light path of Z feedback direction of motion false signal and the afm image distortion of effectively having avoided the feedback motion to cause.
As shown in Figure 3, described two-tube scanner 14 comprises isolated packing ring 24, Y axle slot segmentation 25, Y electrode ground 26, Y positive electrode 27, X axle slot segmentation 28, X electrode ground 29, X positive electrode 30, Z positive electrode 31; Wherein, isolated packing ring 24 separates the Y axle scanatron on upper strata and the X axle scanatron of lower floor, and the Y axle scanatron on upper strata is separated by the Y axle slot segmentation 25 of two symmetrical distributions again; Form Y electrode ground 26 and Y positive electrode 27, the X axle scanatron of lower floor is separated by the X axle slot segmentation 28 of two symmetrical distributions, forms X electrode ground 29 and X positive electrode 30; Article two, Y axle slot segmentation 25 and two X axle slot segmentations 28, pairwise orthogonal, thus form double-decker, mutually orthogonal binary two-tube scanner 14 up and down; Realize the micro-nano scanning of X axle and Y axle respectively; Both are independently of one another, do not produce coupling, and the afm image that scanning obtains can not produce distortion.
The employing probe scanning of the utility model, the fixing mode of sample, sample size and weight are unrestricted; Designed the light path system that links with two-tube scanner, the pencil tracing when having realized scanning dexterously; Adopt and the consistent reflected light path of Z feedback direction of motion false signal and the afm image distortion of effectively having avoided the feedback motion to cause; Design double-decker, mutually orthogonal binary new type double tube scanner up and down, realized the micro-nano scanning of X axle and Y axle respectively, eliminated the distortion and the distortion of afm image.These characteristics and the innovation of the utility model; Overcome the limitation of conventional AFM well, for undistorted, undistorted, the quick and micro-nano scanning imagery of high precision of realizing all kinds of micro-nano samples (size and weight are unrestricted) provides new technological approaches.
Claims (3)
1. a two-tube scanner interlock following-up type atomic force micro detection system is characterized in that comprising the two-tube scanner interlock micro-detecting head of following-up type atomic force (1), prime amplifier (2), scanning and feedback control unit (3), hardware interface (4), computing machine (5) and display (6); Prime amplifier (2) is connected with feedback control unit (3) with photoelectric position detector (13) and scanning; Scanning links to each other with two-tube scanner (14), hardware interface (4) with feedback control unit (3); Hardware interface (4) is connected with computing machine (5), and computing machine (5) is connected with display (6).
2. a kind of two-tube scanner interlock following-up type atomic force micro detection system according to claim 1 is characterized in that the described two-tube scanner interlock micro-detecting head of following-up type atomic force (1) comprises laser instrument (7), interlock lens (8), L shaped structure (9), voussoir (10), probe base (11), microprobe (12), photoelectric position detector (13), two-tube scanner (14), cushion block (15), assembling stand (16), guide rail (17), stand (18), coarse adjustment mechanism (19), fine adjustment mechanism (20), base (21), sample stage (22), sample (23); Interlock lens (8) link to each other with two-tube scanner (14) through L shaped structure (9) and microprobe seat (11); Microprobe (12) links to each other with two-tube scanner (14) through probe base (11); Two-tube scanner (14) is fixed on the assembling stand (16) through cushion block (15); Laser instrument (7) and photoelectric position detector (13) are fixed on respectively on the assembling stand (16); Assembling stand (16) links to each other with guide rail (17); Guide rail (17) is installed in stand (18) and upward and through coarse adjustment mechanism (19) and fine adjustment mechanism (20) does to move vertically, and stand (18) and sample stage (22) are separately fixed on the base (21), and sample (23) is installed on the sample stage (22).
3. a kind of two-tube scanner interlock following-up type atomic force micro detection system according to claim 1 is characterized in that described two-tube scanner (14) comprises isolated packing ring (24), Y axle slot segmentation (25), Y electrode ground (26), Y positive electrode (27), X axle slot segmentation (28), X electrode ground (29), X positive electrode (30), Z positive electrode (31); Wherein, isolated packing ring (24) separates the Y axle scanatron on upper strata and the X axle scanatron of lower floor, and the Y axle scanatron on upper strata is separated by the Y axle slot segmentation (25) of two symmetrical distributions again; Form Y electrode ground (26) and Y positive electrode (27); The X axle scanatron of lower floor is separated by the X axle slot segmentation (28) of two symmetrical distributions, forms X electrode ground (29) and X positive electrode (30), two Y axle slot segmentations (25) and two X axle slot segmentations (28); Pairwise orthogonal; Thereby form double-decker, mutually orthogonal binary two-tube scanner (14) up and down, realize the micro-nano scanning of X axle and Y axle respectively, both are independently of one another; Do not produce coupling, the afm image that scanning obtains can not produce distortion.
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| CN 201220275141 CN202599977U (en) | 2012-06-12 | 2012-06-12 | Twin-tube scanner linkage tracking type atomic force microscopy (AFM) detection system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102707093A (en) * | 2012-06-12 | 2012-10-03 | 浙江大学 | Method and system for double-tube scanner linkage tracking type atomic force microscopic detection |
| CN103645347A (en) * | 2013-12-03 | 2014-03-19 | 中国科学院电工研究所 | Micro-nano scale dynamic coupling vibration single-point tracking measurement method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102707093A (en) * | 2012-06-12 | 2012-10-03 | 浙江大学 | Method and system for double-tube scanner linkage tracking type atomic force microscopic detection |
| CN102707093B (en) * | 2012-06-12 | 2013-12-04 | 浙江大学 | Method and system for double-tube scanner linkage tracking type atomic force microscopic detection |
| CN103645347A (en) * | 2013-12-03 | 2014-03-19 | 中国科学院电工研究所 | Micro-nano scale dynamic coupling vibration single-point tracking measurement method |
| CN103645347B (en) * | 2013-12-03 | 2016-08-17 | 中国科学院电工研究所 | The single-point tracking measurement method of micro-nano-scale Dynamic Coupling vibration |
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Granted publication date: 20121212 Termination date: 20140612 |