CN202599839U - Non-contact test device for light emitting diode (LED) epitaxial wafer - Google Patents
Non-contact test device for light emitting diode (LED) epitaxial wafer Download PDFInfo
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- CN202599839U CN202599839U CN 201220185922 CN201220185922U CN202599839U CN 202599839 U CN202599839 U CN 202599839U CN 201220185922 CN201220185922 CN 201220185922 CN 201220185922 U CN201220185922 U CN 201220185922U CN 202599839 U CN202599839 U CN 202599839U
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Abstract
The utility model relates to the field of semiconductor test, and relates to a synchronous measurement device for laser excitation fluorescence and white light reflection of a semiconductor material, in particular to a non-contact test device for a light emitting diode (LED) epitaxial wafer. The non-contact test device comprises a spectrograph (3) fixed on a supporting plate (2), a light receiving device (4), a laser device assembly frame (5), a laser device (6), a light splitter device (7), a light filter device (8), a central perforated reflector (9), a light focusing device (10), a white light source (11), a sample assembly frame (12) and a light path assembly seat (13). By the technical scheme, compared with the prior art, the non-contact test device has the advantages that the test efficiency is obviously improved, and high economic benefit can be achieved.
Description
Technical field
The utility model relates to the semiconductor test field, relates to a kind of LASER Excited Fluorescence of semiconductor material and the synchronous measuring apparatus of white light reflection, relates to LED epitaxial wafer non-contact testing device in particular.
Background technology
Since the sixties in last century, LED (Light Emitting Diode) is with its intrinsic characteristics, and characteristics such as, applying flexible fast like pollution-free, energy-conservation, vibration resistance, response speed are by the increasing various fields in life that is used for.But for a long time, the detection to the basic material photoelectric semiconductor material of producing LED does not all have desirable checkout equipment, and the height of detectability has become the important determinative of manufacturers produce ability.Given this, propose a kind of to the semiconductor embedded photoluminescent material fast, effectively, low-cost, lossless detection method and equipment, will be very urgent.Along with scientific research personnel and engineering technical personnel's joint efforts, obtained certain achievement in the industry.For photoelectric semiconductor material, the important means of estimating its performance and understanding its inner various mechanism is the photoluminescence test.The principle of photoluminescence: when short wavelength's illumination was mapped on certain embedded photoluminescent material, the electronics that is on the low-lying level was excited to high level behind the energy that absorbs a photon.Because it is unsettled being in the electronics of high level, it can and send a photon simultaneously to the low-lying level transition, and therefore when with shortwave irradiation sample, sample has the photoluminescence phenomenon; The wavelength of fluorescence is directly relevant with some other physical property with the band structure of sample with intensity.Though what people utilized in epitaxial wafer uses is electroluminescent effect and since spectral distribution only with sample can have the pass, so photoluminescence is consistent with electroluminescent spectrum; Influence electroluminescence simultaneously owing to influence the factor of material photoluminescence simultaneously, so can represent the electroluminescence intensity of embedded photoluminescent material with measuring the semiconductor material photoluminescence intensity.White light is surveyed the thickness principle: after semiconductor material is gone in existing a branch of white light oblique fire; Have reflected light in surface reflection; Part anaclasis gets into the film back reflection, and the light of reflection has the effect of a stack through reflecting back and first reflection light partly once more, and the spectrum after the stack just becomes light and dark striped through video picture; After the spectrometer beam split, can see the periodic curve that crest and trough are arranged.The cycle T that different thickness is measured is different, and cycle T can obtain the measured value of thickness through transforming to convert.Disclose the utility model patent technology that a kind of name is called " photoluminescence spectrum scanning imaging instrument " notification number CN2340001 on 09 22nd, 1999 Chinese patent documentations, this technology is made up of computer control circuit, laser instrument, condenser lens, catoptron, scan table, sucker, vacuum pump, spectrometer and display.Condenser lens and catoptron place between laser instrument and the scan table; Condenser lens places between spectrometer and the catoptron, and computer control circuit places between display and the spectrometer, and scan table is by step motor driven; Sucker is fixed on the scan table, and vacuum pump links to each other with sucker.This technological defective is loosely organized, is unfavorable for the adjusting of light path, and this device only accomplished and utilize the test of laser to semiconductor samples, and white light needs an other cover light path or an another one device to the result of semiconductor sample test if desired.This device had both been lost time and also had been unfavorable for the analysis of data, had had a strong impact on the efficient of test.
The utility model content
The utility model proposes a kind of proving installation to semiconductor material according to the weak point of above-mentioned prior art, and incident to semiconductor material the time is gathered when realizing measurement data through white light and laser.
The utility model purpose realizes being accomplished by following technical scheme:
The utility model device mainly comprises: the spectrometer of on back up pad 2, fixing 3, receipts electro-optical device 4, laser instrument erecting frame 5, laser instrument 6, spectroscopic apparatus 7, optical filter device 8, central openings catoptron 9, beam condensing unit 10, white light source 11, sample 12 erecting frames, light path mount pad 13; The light-emitting window of said white light source connects optical fiber, the collimation camera lens in the said filtering apparatus of another termination of optical fiber; The light inlet of said spectrometer 3 connects optical fiber; Receipts light fiber fixed seat in the said receipts electro-optical device 4 of another termination of optical fiber; Laser instrument erecting frame 5 vertical fixing are on the light path mount pad; Make laser beam axis become 45 ° of angles with spectroscopical surface; Filtering apparatus 8 horizontal fixed are on light path mount pad 13; Make and behind optical filter, to intersect and become 45 ° of angles that spectroscopic apparatus 7 is fixed on the light path mount pad 13, make the light hole of spectroscope base and the light shaft coaxle of laser instrument with the spectroscope surface with the spectroscope center from the come in axis of white light of optical fiber; And through the laser of spectroscope transmission with through the center light hole that passes central openings catoptron 9 behind the optical filter again through the spectroscope reflected white light simultaneously; Beam condensing unit 10 is installed on the light path mount pad 13, makes that central openings catoptron 9 is between spectroscopic apparatus 7 and beam condensing unit 10 perpendicular to a certain normal on the collector lens surface of beam condensing unit 10 and the medium pore dead in line of central openings catoptron 9; See through spectroscopical laser axis and become 45 ° of angles with the central openings mirror surface by spectroscope reflected white light axis; And the two meets at the tapping of central openings reflector apparatus, receives electro-optical device 4 and is fixed on the light path mount pad 13, makes that receiving electro-optical device 4 is positioned on a certain axis that becomes 45 ° with central openings catoptron 9 surfaces; Optical filter device comprises: white light holder 801, optical filter pressure ring 802, optical filter 803, collimation microscope base 804, collimation camera lens 805, optical fiber 806; Optical fiber 806 is installed in the collimation camera lens (805) and by its locking, and collimation camera lens 805 is installed on an end of white light holder 801 and by 801 lockings of white light holder, optical filter 803 is installed on the inside of white light holder 801 other ends; And be fixed by being threaded by the optical filter pressure ring, make the axis of the white light of coming in from optical fiber with through optical filter 803 surfaces and coaxial perpendicular to the surperficial a certain normal of optical filter; Said spectroscopic apparatus 7 comprises: spectroscope base 701, spectroscope 702, spectroscope pressure ring 703, spectroscope 702 are installed in the groove of spectroscope pressure ring 703, and spectroscope pressure ring 703 is fixed in spectroscope base 701 and compresses spectroscope 702; Said beam condensing unit comprises: register pin 101, mirror holder spring 102, no oily lining 103, collector lens pressure ring 104, collector lens 105, collector lens cover 106, collector lens flange 107; Collector lens 105 is installed in the groove of collector lens cover 106 and by collector lens pressure ring (104) and compresses; Said no oily lining 103 is installed on collector lens and overlaps in the aperture of 106 both sides; Collector lens cover 106 has external thread; Collector lens flange 107 has internal thread, and collector lens cover 106 and laser lens flange 107 be by being threaded, and register pin 101 passes mirror holder spring 102 and passes no oily lining 106 again and be fixed on the light path mount pad 13; Make that collector lens cover 106 can move up and down when rotation collector lens flange 107 under the guide effect of register pin 101; Said central openings catoptron 9 devices comprise: central openings catoptron holder 901, central openings catoptron 902, high precision double-screw bolt 903, high precision nut 904, extension spring fixedly bumping post 905, extension spring 906, central openings catoptron move seat 907; Central openings catoptron holder 901 is fixed on the light path mount pad 13; The central openings catoptron be fixed in the central openings catoptron move the seat groove in; Respectively there is an extension spring at extension spring 906 two ends, and fixedly bumping post 905 is fixing with its stretching; High precision nut 904 is installed on the central openings catoptron and moves in the two ends unthreaded hole of seat 907, and the bottom of high precision double-screw bolt 903 contacts with central openings catoptron holder 901; Said receipts electro-optical device comprises: optical fiber 401, receipts light fiber fixed seat 402, collector lens 403, collector lens pressure ring 404; Wherein, Optical fiber 401 is installed on an end of receipts light fiber fixed seat 402 and by its locking, collector lens (403) is installed in the groove of the other end of receiving light fiber fixed seat 402, and the groove inwall has internal thread; Said collector lens pressure ring (404) has external thread, and utilizing is threaded compresses collector lens 403; Described laser instrument is together with being installed on a spectroscopical side in laser instrument erecting frame level; And make laser beam axis meet at spectroscopical center and become 45 ° with spectroscope surface; Optical filter device vertically is installed on spectroscopical top, and makes the white light optical axis behind optical filter meet at spectroscopical center and become 45 ° with the spectroscope surface.
The utility model has the advantages that owing to adopted technique scheme, the utility model compared with prior art, testing efficiency obviously improves, and has good economic benefit.
Description of drawings
Fig. 1 is the overall stereographic map of the utility model device;
Fig. 2 is the filtering apparatus explosive view among Fig. 1;
Fig. 3 is the spectroscopic apparatus explosive view among Fig. 1;
Fig. 4 is the beam condensing unit explosive view among Fig. 1;
Fig. 5 is the central openings reflector apparatus among Fig. 1;
Fig. 6 is the receipts electro-optical device explosive view among Fig. 1.
Embodiment
The utility model characteristic and correlated characteristic thereof are further specified through embodiment below in conjunction with accompanying drawing:
Like accompanying drawing 1-8 signal, the label among the figure is represented respectively: 1--support post, 2--back up pad, 3-spectrometer, 4-receive electro-optical device, 401-optical fiber, 402-and receive light fiber fixed seat, 403-collector lens, 404-collector lens pressure ring 5-laser instrument erecting frame, 6-laser instrument, 7-spectroscopic apparatus, 701-spectroscope base, 702-spectroscope, 703-spectroscope pressure ring, 8-optical filter device, 801-white light holder, 802-optical filter pressure ring, 803-optical filter, 804-collimation microscope base, 805-collimation camera lens, 806-optical fiber, 9-central openings reflector apparatus, 901-central openings catoptron holder, 902-central openings catoptron, 903-high precision double-screw bolt, 904-high precision nut, 905-extension spring fixedly bumping post, 906-extension spring, 907-central openings catoptron move seat, 10-beam condensing unit, 101-register pin, 102-mirror holder spring, 103-and do not have oily lining, 104-collector lens pressure ring, 105-collector lens, 106-collector lens cover, 107-collector lens flange, 11-white light source, 12-sample, 13-light path mount pad.
The utility model mainly comprises: support post 1, back up pad 2, spectrometer 3, receipts electro-optical device 4, laser instrument erecting frame 5, laser instrument 6, spectroscopic apparatus 7, optical filter device 8, central openings reflector apparatus 9, beam condensing unit 10, white light source 11, sample 12, light path mount pad 13; Wherein, said optical filter device 8 comprises: white light holder 801, optical filter pressure ring 802, optical filter 803, collimation microscope base 804, collimation camera lens 805, optical fiber 806 (being a termination of optical fiber among the figure).Said optical fiber is installed in the collimation camera lens 805 and by its locking; Collimation camera lens 805 is installed on an end of white light holder 801 and by 801 lockings of white light holder; Optical filter 803 is installed on the inside of white light holder 801 other ends; And be fixed by being threaded by optical filter pressure ring 802, the axis of the white light that this structure has guaranteed to come in from optical fiber with through optical filter 803 surfaces and coaxial perpendicular to a certain normal on optical filter surface.Wherein optical filter 803 is wave bands of wanting in the elimination white light with laser excited fluorescent spectra overlapping on measure and monitor the growth of standing timber material; Guarantee mutually noninterfere when analyzing the band characteristic of white light and LASER Excited Fluorescence, therefore selected optical filter 803 will according to laser measure and monitor the growth of standing timber and expect that attend institute's excited fluorescent wave band decides; Said spectroscopic apparatus comprises: spectroscope base 701, spectroscope 702, spectroscope pressure ring 703; Said spectroscope 702 is installed in the groove of spectroscope pressure ring 703, and said spectroscope pressure ring 703 is fixed in spectroscope base 701 and compresses spectroscope 702, and wherein spectroscope is a kind of optics window; Its surface is coated with translucent specular film; It can be decomposed into two bundles with Ray Of Light, and then with the reflection of part incident light energy, absorbs less relatively part amount; With remaining energy transmission, how many how many reflections of concrete transmission are looked the character of plated film and are decided.What utilize is transmissive part laser and reflecting part white light here, and specifically what spectroscope of selective transmittance is looked the characteristic of tested semiconductor material and decided; Said beam condensing unit 10 comprises: register pin 101, mirror holder spring 102, no oily lining 103, collector lens pressure ring 104, collector lens 105, collector lens cover 106, collector lens flange 107; Said collector lens 105 is installed in the groove of collector lens cover 106 and by collector lens pressure ring 104 and compresses; Said no oily lining 103 is installed on collector lens and overlaps in the aperture of 106 both sides; Collector lens cover 106 has external thread; Collector lens flange 107 has internal thread, and collector lens cover 106 and laser lens flange 107 be by being threaded, and said register pin 101 passes mirror holder spring 102 and passes no oily lining 106 again and be fixed on the light path mount pad 13.When rotation collector lens flange 107, collector lens cover 106 can move up and down under the guide effect of register pin 101.Utilize this structure; Can well regulate the focus height of collector lens 105; And the focus that guarantees laser lens 105 is moved on same vertical line all the time; Mirror holder spring 102 can be eliminated the thread pitch between collector lens cover 106 and the laser lens flange 107, the variation of collector lens 105 focus height when having avoided mechanism vibrations; Said central openings reflector apparatus comprises: central openings catoptron holder 901, central openings catoptron 902, high precision double-screw bolt 903, high precision nut 904, extension spring fixedly bumping post 905, extension spring 906, central openings catoptron move seat 907; Said central openings catoptron holder 901 is fixed on the light path mount pad 13; Said central openings catoptron be fixed in the central openings catoptron move the seat groove in; Respectively there is an extension spring at said extension spring 906 two ends, and fixedly bumping post 905 is fixing with its stretching; Said high precision nut 904 is installed on the central openings catoptron and moves in the two ends unthreaded hole of seat 907; The bottom of said high precision double-screw bolt 903 contacts with central openings catoptron holder 901; Rotate said high precision double-screw bolt 903, under the effect of extension spring 906, can well regulate the angle of central openings catoptron 902; Said receipts electro-optical device comprises: optical fiber 401 (what show among the figure is a termination of optical fiber), receipts light fiber fixed seat 402, collector lens 403, collector lens pressure ring 404; Said optical fiber 401 is installed on an end of receiving light fiber fixed seats (402) and by its locking; Said collector lens 403 is installed in the groove of the other end of receiving light fiber fixed seat 402; The groove inwall has internal thread; Said collector lens pressure ring 404 has external thread, and utilizing is threaded compresses collector lens 403; Said light path mount pad 13 is fixed on the back up pad 2, and said spectrometer 3 also is fixed on the back up pad 2 with white light source 11 simultaneously, and said back up pad 2 is supported by four support posts, and said support column 1 is fixed on the workbench; What said white light source 11 sent is standard light, and the light-emitting window of white light source 11 connects optical fiber, the collimation camera lens 805 in the said filtering apparatus 8 of another termination of optical fiber; The light inlet of said spectrometer 3 connects optical fiber, the receipts light fiber fixed seat 402 in the said receipts electro-optical device 4 of another termination of optical fiber.Adopt fiber optic conduction here, increased the dirigibility of the fixed position of white light source 11 and spectrometer 3, also reduced the interference of outer bound pair light path simultaneously; Said laser instrument 6 is fixed on the laser holder 5; Said laser holder 5 vertical fixing are on light path mount pad 13; And guarantee that laser beam axis becomes 45 ° of angles with the surface of spectroscope 702; The emission wavelength ranges of said laser instrument 6 is selected according to the characteristic of tested semiconductor material, like the band gap of semiconductor material, epitaxial structure etc., thereby improves the photoluminescence power of test and changes measurement sensitivity; Said filtering apparatus 8 horizontal fixed and guarantee from the come in axis of white light of optical fiber crossing with the spectroscope center and become 45 ° of angles with spectroscope 702 is surperficial through optical filter 803 after on light path mount pad 13; Said spectroscopic apparatus 7 is fixed on the light path mount pad 13; And guarantee the light hole of spectroscope base 702 and the light shaft coaxle of laser instrument 6, and through the laser of spectroscope 702 transmissions with through the center light hole that passes central openings catoptron 902 behind the optical filter 803 again through spectroscope 702 reflected white light simultaneously; Said beam condensing unit 10 is installed on the light path mount pad 13, and guarantees perpendicular to a certain normal on collector lens 105 surfaces and the medium pore dead in line of central openings catoptron 902; Said central openings reflector apparatus 9 is between spectroscopic apparatus 7 and collector lens device 10; See through the laser axis of spectroscope 702 and become 45 ° of angles with central openings catoptron 902 surfaces, and the two meets at the tapping of central openings catoptron 902 devices by spectroscope 702 reflected white light axis; Said receipts electro-optical device 4 is fixed on the light path mount pad 13; And guarantee to receive electro-optical device 4 and be positioned on a certain axis that becomes 45 ° with central openings catoptron 902 surfaces, promptly guaranteed the axis coaxle of collector lens 105 in the fluorescence of central openings catoptron 902 reflections and white light axis and receipts electro-optical device 4; Said sample 12 is positioned on the diaxon transfer table (not shown) and is positioned under the back up pad 2 (have light hole on the back up pad, show among the figure), and the upper surface of sample 13 is positioned at the focal plane of collector lens 105.In this device, because of all light path part structures all are installed on the light path mount pad 13, so this device has consistance preferably; Reduced the time that light path is regulated; When testing identical semiconductor material, only need to regulate once and fix, need not later on to regulate.
Further specify as follows: the epitaxial wafer with test CaN Sapphire Substrate is the example explanation; Laser instrument is selected semi-conductor type; Institute's emission wavelength is 405nm, and optical filter is selected the optical filter of the following wave band of elimination 600nm, and spectroscope selects reflection and transmission respectively to account for 50% spectroscope.The epitaxial wafer sample is positioned on the diaxon transfer table, regulates the diaxon transfer table and make on the focus that wherein is positioned at condenser lens on the epitaxial wafer sample; Open laser instrument and white light source; Laser vertical shines spectroscopical center and transmissive part laser; White light through fiber optic conduction to the collimation camera lens, the spectroscopical center of glancing incidence behind the following wave band of optical filter elimination 600nm again, the part white light that under the spectroscope effect, reflects and the laser of projection pass the center pit of central openings catoptron simultaneously; Through behind the collector lens with white light and laser focusing to sample; Laser radiation inspires fluorescence to sample, white light reflects to sample, and fluorescence that is excited on the sample and reflected white light change transmission direction and get into after the central openings mirror reflects receives electro-optical device.Through fiber optic conduction, the fluorescence that is excited and reflected white light get into spectrometer, and epitaxial wafer sample data are wherein promptly gathered like this, and in diaxon transfer table mobile, the data of whole epitaxial wafer sample are promptly by the pointwise collection.Spectrometer is with the data that collect (the integration light intensity, peak wavelength, half-breadth, the predominant wavelength that obtain like laser testing; The thickness that white light test obtains, reflectivity, DBR etc.) import computer system processor and can test result be shown in the spectrum; Because wavelength of fluorescence is different with the reflected white light wavelength; So the result of the result of laser testing and white light test will belong to different wave bands and be shown in the waveform image, measure when having realized laser and white light to the epitaxial wafer sample.
]Need to prove; The utility model also can be made following change: laser instrument is together with being installed on a spectroscopical side in laser instrument erecting frame level; And guarantee that laser beam axis meets at spectroscopical center and becomes 45 ° with the spectroscope surface; Optical filter device vertically is installed on spectroscopical top, and guarantees that the white light optical axis behind optical filter meets at spectroscopical center and becomes 45 ° with the spectroscope surface.Device after the change can obtain identical test effect equally.
Though below with reference to accompanying drawing to having done to elaborate according to the design of the utility model purpose; But those skilled in the art will recognize that; Under the precondition that does not break away from the claim limited range; Still can make various improvement and conversion to the utility model, and this improvement and conversion still should belong to the protection domain of the utility model.
Claims (7)
1.LED epitaxial wafer non-contact testing device; It is characterized in that; Mainly comprise: go up fixing spectrometer (3) in back up pad (2), receive electro-optical device (4), laser instrument erecting frame (5), laser instrument (6), spectroscopic apparatus (7), optical filter device (8), central openings catoptron (9), beam condensing unit (10), white light source (11), sample (12) erecting frame, light path mount pad (13); Wherein, The light-emitting window of white light source (11) connects optical fiber; Collimation camera lens in another termination optical filter device (8) of optical fiber, the light inlet of spectrometer (3) connects optical fiber, and the other end of optical fiber receives the receipts light fiber fixed seat in the electro-optical device (4); Laser instrument erecting frame (5) vertical fixing is on the light path mount pad; And guaranteeing that laser beam axis becomes 45 ° of angles with spectroscopical surface, filtering apparatus (8) horizontal fixed makes from the come in axis of white light of optical fiber crossing with the spectroscope center and become 45 ° of angles with spectroscope is surperficial behind optical filter on light path mount pad (13); Spectroscopic apparatus (7) is fixed on the light path mount pad (13); Make the light hole of spectroscope base and the light shaft coaxle of laser instrument, and pass the center light hole of central openings catoptron (9) more simultaneously through the spectroscope reflected white light through the laser of spectroscope transmission with after seeing through optical filter, beam condensing unit (10) is installed on the light path mount pad (13); Make perpendicular to a certain normal on collector lens surface and the medium pore dead in line of central openings catoptron; Central openings catoptron (9) is positioned between spectroscopic apparatus (7) and the collector lens device (10), see through spectroscopical laser axis and become 45 ° of angles with the central openings mirror surface by spectroscope reflected white light axis, and the two meets at the tapping of central openings reflector apparatus; Receive electro-optical devices (4) and be fixed on the light path mount pad (13), make that receiving electro-optical device is positioned on a certain axis that becomes 45 ° with the central openings mirror surface.
2. LED epitaxial wafer non-contact testing device as claimed in claim 1; It is characterized in that; Said optical filter device comprises: white light holder (801), optical filter pressure ring (802), optical filter (803), collimation microscope base (804), collimation camera lens (805), optical fiber (806); Optical fiber (806) is installed in the collimation camera lens (805) and by its locking; Collimation camera lens (805) is installed on an end of white light holder (801) and by white light holder (801) locking; Optical filter (803) is installed on the inside of white light holder (801) other end, and is fixed by being threaded by the optical filter pressure ring, make the axis of the white light of coming in from optical fiber with through optical filter (803) surface and coaxial perpendicular to the surperficial a certain normal of optical filter.
3. LED epitaxial wafer non-contact testing device as claimed in claim 1; It is characterized in that; Said spectroscopic apparatus (7) comprising: spectroscope base (701), spectroscope (702), spectroscope pressure ring (703); Spectroscope (702) is installed in the groove of spectroscope pressure ring (703), and spectroscope pressure ring (703) is fixed in spectroscope base (701) and compresses spectroscope (702).
4. LED epitaxial wafer non-contact testing device as claimed in claim 1; It is characterized in that; Said beam condensing unit comprises: register pin (101), mirror holder spring (102), do not have oily lining (103), collector lens pressure ring (104), collector lens (105), collector lens cover (106), collector lens flange (107); Collector lens (105) is installed in the groove of collector lens cover (106) and by collector lens pressure ring (104) and compresses; Said no oily lining (103) is installed in the aperture of collector lens cover (106) both sides; Collector lens cover (106) has external thread; Collector lens flange (107) has internal thread, and collector lens cover (106) and laser lens flange (107) be by being threaded, and register pin (101) passes mirror holder spring (102) and passes no oily lining (106) again and be fixed on the light path mount pad (13); Make that collector lens cover (106) can move up and down when rotation collector lens flange (107) under the guide effect of register pin (101).
5. LED epitaxial wafer non-contact testing device as claimed in claim 1; It is characterized in that; Said central openings catoptron (9) device comprises: central openings catoptron holder (901), central openings catoptron (902), high precision double-screw bolt (903), high precision nut (904), extension spring fixedly bumping post (905), extension spring (906), central openings catoptron move seat (907); Central openings catoptron holder (901) is fixed on the light path mount pad (13); The central openings catoptron be fixed in the central openings catoptron move the seat groove in; Respectively there is an extension spring at extension spring (906) two ends, and fixedly bumping post (905) is fixing with its stretching; High precision nut (904) is installed on the central openings catoptron and moves in the two ends unthreaded hole of seat (907), and the bottom of high precision double-screw bolt (903) contacts with central openings catoptron holder (901).
6. LED epitaxial wafer non-contact testing device as claimed in claim 1; It is characterized in that said receipts electro-optical device comprises: optical fiber (401), receipts light fiber fixed seat (402), collector lens (403), collector lens pressure ring (404), wherein; Optical fiber (401) is installed on an end of receiving light fiber fixed seats (402) and by its locking;, collector lens (403) is installed in the groove of the other end of receiving light fiber fixed seat (402), and the groove inwall has internal thread; Said collector lens pressure ring (404) has external thread, and utilizing is threaded compresses collector lens (403).
7. LED epitaxial wafer non-contact testing device as claimed in claim 1; It is characterized in that; Described laser instrument is together with being installed on a spectroscopical side in laser instrument erecting frame level; And make laser beam axis meet at spectroscopical center and become 45 ° that optical filter device vertically is installed on spectroscopical top, and makes white light optical axis behind optical filter meet at spectroscopical center and become 45 ° with spectroscope is surperficial with spectroscope surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220185922 CN202599839U (en) | 2012-04-27 | 2012-04-27 | Non-contact test device for light emitting diode (LED) epitaxial wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220185922 CN202599839U (en) | 2012-04-27 | 2012-04-27 | Non-contact test device for light emitting diode (LED) epitaxial wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202599839U true CN202599839U (en) | 2012-12-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220185922 Expired - Lifetime CN202599839U (en) | 2012-04-27 | 2012-04-27 | Non-contact test device for light emitting diode (LED) epitaxial wafer |
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| CN (1) | CN202599839U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102636472A (en) * | 2012-04-27 | 2012-08-15 | 北京中拓机械有限责任公司 | Non-contact testing device of LED (light-emitting diode) epitaxial wafer |
| CN104801851A (en) * | 2015-03-31 | 2015-07-29 | 山西南烨立碁光电有限公司 | Silicon-based LED chip cutting method and optical splitter for cutting silicon-based LED chips |
| CN105203305A (en) * | 2015-11-03 | 2015-12-30 | 山东华光光电子有限公司 | Nondestructive wavelength classifying and screening method for semiconductor laser |
| CN112858864A (en) * | 2021-01-18 | 2021-05-28 | 厦门大学 | Device and method for carrying out non-contact photoelectric detection on LED chip |
-
2012
- 2012-04-27 CN CN 201220185922 patent/CN202599839U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102636472A (en) * | 2012-04-27 | 2012-08-15 | 北京中拓机械有限责任公司 | Non-contact testing device of LED (light-emitting diode) epitaxial wafer |
| CN102636472B (en) * | 2012-04-27 | 2014-09-17 | 北京中拓机械有限责任公司 | Non-contact testing device of LED (light-emitting diode) epitaxial wafer |
| CN104801851A (en) * | 2015-03-31 | 2015-07-29 | 山西南烨立碁光电有限公司 | Silicon-based LED chip cutting method and optical splitter for cutting silicon-based LED chips |
| CN104801851B (en) * | 2015-03-31 | 2019-01-18 | 山西南烨立碁光电有限公司 | Optical splitter is used in silicon substrate LED chip cutting method and its cutting |
| CN105203305A (en) * | 2015-11-03 | 2015-12-30 | 山东华光光电子有限公司 | Nondestructive wavelength classifying and screening method for semiconductor laser |
| CN112858864A (en) * | 2021-01-18 | 2021-05-28 | 厦门大学 | Device and method for carrying out non-contact photoelectric detection on LED chip |
| CN112858864B (en) * | 2021-01-18 | 2022-02-18 | 厦门大学 | Device and method for carrying out non-contact photoelectric detection on LED chip |
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Owner name: BEIJING CHN-TOP MACHINERY GROUP CO., LTD. Free format text: FORMER NAME: BEIJING CHN-TOP MACHINERY CO., LTD. |
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| CP03 | Change of name, title or address |
Address after: Beijing Longxiang Industrial Park 102208 Changping District City, Huilongguan No. 3 hospital Beijing chn-top machinery Refco Group Ltd Patentee after: Co., Ltd of mechanical group is opened up in Beijing Address before: Beijing Longxiang Industrial Park 102208 Changping District City, Huilongguan No. 3 hospital Beijing chn-top machinery limited liability company Patentee before: Beijing Chn-Top Machinery Co., Ltd. |
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