CN202583692U - Sagging preventive mask framework and sagging preventive mask component - Google Patents
Sagging preventive mask framework and sagging preventive mask component Download PDFInfo
- Publication number
- CN202583692U CN202583692U CN 201220016279 CN201220016279U CN202583692U CN 202583692 U CN202583692 U CN 202583692U CN 201220016279 CN201220016279 CN 201220016279 CN 201220016279 U CN201220016279 U CN 201220016279U CN 202583692 U CN202583692 U CN 202583692U
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- mask
- frame
- support bar
- sagging
- mask plate
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Abstract
The utility model relates to a sagging preventive mask framework and a sagging preventive mask component. The sagging preventive mask framework comprises a side frame and a support bar, and the side frame and the support bar are formed in an integral molding form; the corresponding mask component comprises the sagging preventive mask framework and a mask plate, and the mask framework is welded with the mask plate. The mask framework and the anti-sagging mask component provided by the utility model effectively prevent pattern deformation of the mask plate caused by the gravity of the mask plate on the mask component during evaporation, effectively improve the evaporation precision, are low in production cost and high in efficiency, and have a wide market prospect.
Description
Technical field
The utility model relates to and a kind ofly prevents sagging mask frame and prevent sagging mask assembly, belongs to the mask plate application.
Background technology
MASK (mask): the single-chip microcomputer mask is meant that routine data made reticle, in the process of single-chip microcomputer production, does into program.Advantage is: program is reliable, cost is low.Shortcoming: require in batches greatly, each update routine just need be done photolithography plate again, and distinct program can not be produced simultaneously, and delivery cycle is long.
In semiconductor is made; Many chip technology steps adopt photoetching technique; The figure " egative film " that is used for these steps is called mask (being also referred to as " mask "); Its effect is: on silicon chip, in the selected zone an opaque graphics template is hidden, corrosion below then or diffusion be the zone beyond the selected zone of influence only.
In the conventional deposition equipment of the dull and stereotyped real device of using traditional mask assembly, in deposition process, the substrate center section maybe be crooked to mask assembly owing to the weight of substrate.So, the pattern mask of mask assembly can be pushed and can be out of shape by substrate, thereby causes that out of true on substrate is arranged and the deposition of material.
The utility model content
The technical matters that the utility model will solve provides a kind of sagging mask frame and corresponding mask assembly of preventing, can solve mask plate because of gravity cause sagging, and impact position precision not also can be protected mask plate in transit.
In order to solve the problems of the technologies described above, the technical scheme that the utility model is taked is following:
A kind ofly prevent sagging mask frame, it is characterized in that comprise frame and support bar, said frame and support bar are one-body molded.
Vertically perhaps laterally be parallel to each other between the said support bar.
Gapped between the said support bar.
Gap between the said support bar is more than or equal to the opening of mask plate graphics field; The width of said support bar is less than or equal to the gap between the opening of mask plate graphics field.
Preferably, support bar and the said vertical or horizontal support bar square crossing that is parallel to each other that said mask frame also is provided with laterally or vertically is parallel to each other form many grids.
The size of said grid is more than or equal to the size of mask plate graphics field opening, and the width of said support bar is less than or equal to the gap between the opening of mask plate graphics field.
Said support bar and said frame are on the same surface level.
Have on the frame of said mask frame and satisfy the structural design that evaporated device requires, the assurance mask assembly can directly be gone up evaporated device, and need not mask plate is disassembled from mask frame, has improved the serviceable life of mask plate.
A kind ofly prevent sagging mask assembly, it is characterized in that, comprise above-mentioned mask frame and mask plate, said mask frame and the welding of said mask plate.
Aliging to the gap, graphics field in length and breadth with said mask plate to support bar in length and breadth of said mask frame; Aliging to the gap, graphics field in length and breadth with said mask plate to support bar in length and breadth of said mask frame; On the support bar center line and between the gap, mask plate graphics field pad is arranged; Between mask frame frame edge zone and the mask plate edge pad is arranged also, said mask frame frame edge zone is meant that mask frame frame center line is to the zone between the mask frame frame outer edge.
Said support bar is identical with the manufacturing materials of said mask plate.
What the utility model provided prevents sagging mask frame and prevents sagging mask assembly; The pattern deformation of the mask plate that has effectively prevented in the deposition evaporate process, to cause by the weight of the mask plate on the mask assembly; Effectively improve vapor deposition accuracy; Production cost is low, and efficient is high, has vast market prospect.
Description of drawings
Below in conjunction with accompanying drawing the embodiment of the utility model is done further detailed explanation.
Fig. 1 is the sagging mask frame that prevents that has only the longitudinal bracing bar;
Fig. 2 is the sagging mask frame that prevents that the vertical and horizontal support bar is arranged;
Fig. 3 is the partial enlarged drawing of Fig. 2 A part;
Fig. 4 is the stretch-out view that prevents sagging mask assembly;
1 is frame among the figure, and 2 is support bar, and 3 is grid, and 4 is mask frame frame center line, and 5 for satisfying the structural design of evaporated device, and 11 is mask plate, and 12 is the opening on the mask plate.
Embodiment
Embodiment: 1
As shown in Figure 1, a kind ofly prevent sagging mask frame, comprise frame 1 and support bar 2, said frame 1 is one-body molded with support bar 2, is on the same surface level.Said support bar 2 is parallel to each other, and vertically arranges.Between the said support bar 2 space is arranged, and this void size is more than or equal to the size of mask plate graphics field opening, the width of said support bar is less than or equal to the gap between the opening of mask plate graphics field.The space equates between the said support bar 2.
As shown in Figure 4, a kind ofly prevent sagging mask assembly, comprise above-mentioned sagging mask frame and the mask plate of preventing, saidly prevent sagging mask frame and the welding of said mask plate.The longitudinal bracing bar of said mask frame aligns with gap, the vertical graphics field of said mask plate; On the support bar center line and between the gap, mask plate graphics field pad is arranged; Between mask frame frame edge zone and the mask plate edge pad is arranged also, said mask frame frame edge zone is meant that mask frame frame center line is to the zone between the mask frame frame outer edge.The said longitudinal bracing bar of sagging mask frame that prevents aligns with gap, the vertical graphics field of said mask plate, and promptly the longitudinal bracing interspace is corresponding with the mask plate longitudinal opening.Said support bar is identical with the manufacturing materials of said mask plate.Has the structural design 5 that satisfies evaporated device on the said mask frame.
Embodiment 2:
As shown in Figure 2, a kind ofly prevent sagging mask frame, comprise frame 1 and support bar 2, said frame 1 is one-body molded with support bar 2, is on the same surface level.Said support bar intersects vertically in length and breadth, and support bar 2 is parallel to each other longitudinally, and horizontal support bar 2 also is parallel to each other, and said support bar intersects formation grid 3 in length and breadth.The size of said grid 3 is more than or equal to the size of mask plate graphics field opening.The size of said grid 3 is consistent.Guarantee that said support bar 2 can not block the opening of mask plate graphics field.
A kind ofly prevent sagging mask assembly, comprise above-mentioned prevent sagging mask frame and mask plate, said mask frame and the welding of said mask plate.Aliging to the gap, graphics field in length and breadth with said mask plate to support bar in length and breadth of said mask frame; On the support bar center line and between the gap, mask plate graphics field pad is arranged; Between mask frame frame edge zone and the mask plate edge pad is arranged also, said mask frame frame edge zone is meant that mask frame frame center line is to the zone between the mask frame frame outer edge.Said support bar is identical with the manufacturing materials of said mask plate.Has the structural design 5 that satisfies evaporated device on the said mask frame.
Above embodiment purpose is to explain the utility model, and the protection domain of unrestricted the utility model, all application that come by the utility model simple change all drop in the protection domain of the utility model.
Claims (9)
1. one kind prevents sagging mask frame, it is characterized in that, comprises frame and support bar, and said frame and support bar are one-body molded.
2. mask frame according to claim 1 is characterized in that, vertical or horizontal being parallel to each other between the said support bar.
3. mask frame according to claim 2 is characterized in that, and is gapped between the said support bar.
4. mask frame according to claim 3 is characterized in that the gap between the said support bar is more than or equal to the opening of mask plate graphics field; The width of said support bar is less than or equal to the gap between the opening of mask plate graphics field.
5. mask frame according to claim 2 is characterized in that, the support bar and the said vertical or horizontal support bar square crossing that is parallel to each other that also are provided with laterally or vertically are parallel to each other form many grids.
6. mask frame according to claim 5 is characterized in that, the size of said grid is more than or equal to the size of mask plate graphics field opening, and the width of said support bar is less than or equal to the gap between the opening of mask plate graphics field.
7. according to each described mask frame of claim 1-6, it is characterized in that said support bar and said frame are on the same surface level.
8. one kind prevents sagging mask assembly, it is characterized in that, comprises each described sagging mask frame and mask plate of preventing of claim 1-8, and said sagging mask frame and the said mask plate of preventing welds.
9. according to claim 8ly prevent sagging mask assembly; It is characterized in that; Aliging to the gap, graphics field in length and breadth with said mask plate to support bar in length and breadth of said mask frame; On the support bar center line and between the gap, mask plate graphics field pad is arranged, between mask frame frame edge zone and the mask plate edge pad is arranged also, said mask frame frame edge zone is meant that mask frame frame center line is to the zone between the mask frame frame outer edge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220016279 CN202583692U (en) | 2012-01-16 | 2012-01-16 | Sagging preventive mask framework and sagging preventive mask component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220016279 CN202583692U (en) | 2012-01-16 | 2012-01-16 | Sagging preventive mask framework and sagging preventive mask component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202583692U true CN202583692U (en) | 2012-12-05 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220016279 Expired - Fee Related CN202583692U (en) | 2012-01-16 | 2012-01-16 | Sagging preventive mask framework and sagging preventive mask component |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202583692U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103207518A (en) * | 2012-01-16 | 2013-07-17 | 昆山允升吉光电科技有限公司 | A sagging preventive mask framework and a sagging preventive mask assembly |
| WO2017032248A1 (en) * | 2015-08-22 | 2017-03-02 | 昆山允升吉光电科技有限公司 | Small-opening mask plate for evaporation |
| CN108761998A (en) * | 2018-06-20 | 2018-11-06 | 京东方科技集团股份有限公司 | Technique that mask plate throws the net frame and mask plate is thrown the net |
-
2012
- 2012-01-16 CN CN 201220016279 patent/CN202583692U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103207518A (en) * | 2012-01-16 | 2013-07-17 | 昆山允升吉光电科技有限公司 | A sagging preventive mask framework and a sagging preventive mask assembly |
| WO2017032248A1 (en) * | 2015-08-22 | 2017-03-02 | 昆山允升吉光电科技有限公司 | Small-opening mask plate for evaporation |
| CN108761998A (en) * | 2018-06-20 | 2018-11-06 | 京东方科技集团股份有限公司 | Technique that mask plate throws the net frame and mask plate is thrown the net |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20190808 Granted publication date: 20121205 |
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| PP01 | Preservation of patent right | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20220116 Granted publication date: 20121205 |
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| PD01 | Discharge of preservation of patent | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121205 Termination date: 20200116 |
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| CF01 | Termination of patent right due to non-payment of annual fee |