CN202531443U - High-performance compound molecular pump - Google Patents
High-performance compound molecular pump Download PDFInfo
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- CN202531443U CN202531443U CN2012200815600U CN201220081560U CN202531443U CN 202531443 U CN202531443 U CN 202531443U CN 2012200815600 U CN2012200815600 U CN 2012200815600U CN 201220081560 U CN201220081560 U CN 201220081560U CN 202531443 U CN202531443 U CN 202531443U
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- molecular pump
- turbine
- rotor body
- draft stage
- composite molecular
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Abstract
The utility model discloses a high-performance compound molecular pump, which includes a pump case, a rotor block, a chassis, an oil tank base and the like, wherein the rotor block is fixedly connected with a motor main shaft, and the molecular pump is formed by sequentially connecting a turbine blade grade and a cylinder traction grade in series from an air inlet to an air outlet; the turbine blade grade includes turbine moving blades arranged on the rotor block and the turbine static blades arranged on an isolating ring; the cylinder traction grade includes a spiral diversion trench arranged between the rotor block and the traction grade stator; and the isolating ring and the traction grade stator are fixed on the pump case. By adopting the high-performance compound molecular pump, the high pumping speed and the high compression ratio can be achieved at the same time, the stronger preceding stage compression resistance can be realized, and the high vacuum and the ultrahigh vacuum can be obtained.
Description
Technical field
The utility model relates to a kind of pumping equipment, relates in particular to a kind of high-performance composite molecular pump.
Background technique
Along with development of science and technology, the particularly development of semicon industry requires molecular pump to have big pumping speed, high compression ratio and stronger prime anti-pressure ability.
Molecular pump of the prior art mainly contains two types: a kind of is turbomolecular pump, and a kind of is dish-type turbine composite molecular pump.
Turbomolecular pump (the patent No.: 85101627) have bigger pumping speed; But can only be to work under the molecular flow condition at gas, when gas pressure intensity was higher than 1Pa, pumping speed be very low; And some semi-conductor industries require big rate of air sucked in required in this pressure, and turbomolecular pump is difficult to be fit to.
Dish-type turbine composite molecular pump is mainly formed (the patent No.: CN87103994) by turbine blade level and disc type draft stage.This kind pump has been gathered the advantage of turbine pump and disc type traction pump, takes on a new look to some extent on pumping speed and compression ratio than turbomolecular pump.But there is following shortcoming in this kind pump: (1) gas flows for axial flow between the turbine stage blade, becomes Radial Flow to the disc type draft stage, has increased flow resistance, causes a large amount of gas reflux; (2) dish-type draft stage pumping efficiency is lower, and is relatively poor with turbine stage blade matching, is prone to cause gas reflux; (3) multistage draft stage stator and moving plate alternate combinations because dish-type foozle and assembly error cause the gas conduction nonuniformity, influence pumping performance.
In a word, molecular pump of the prior art can obtain bigger pumping speed separately or obtain big compression ratio, but is difficult to have both simultaneously big pumping speed and high compression ratio.
The model utility content
The purpose of the utility model provides a kind of high-performance composite molecular pump with big pumping speed, high compression ratio and stronger prime anti-pressure ability.
The purpose of the utility model realizes through following technological scheme:
The high-performance composite molecular pump of the utility model comprises pump case, rotor body, and said rotor body is fixedly connected with electric machine main shaft, and this molecular pump is in series by turbine blade level and cartridge type draft stage from suction port to relief opening;
Said turbine blade level comprises the turbine moving blade of being located on the said rotor body and is located at the turbine stator vane on the isolating ring;
Said cartridge type draft stage comprises the spiral stream guidance groove of being located between said rotor body and the draft stage stator;
Said isolating ring and said draft stage stator are fixed on the said pump case.
Technological scheme by above-mentioned the utility model provides can be found out; The high-performance composite molecular pump that the utility model provides; Because this molecular pump is in series by turbine blade level and cartridge type draft stage from suction port to relief opening; Can have both big pumping speed and high compression ratio simultaneously, and have stronger prime anti-pressure ability, can obtain high vacuum and ultrahigh vacuum.
Description of drawings
The high-performance composite molecular pump schematic representation that Fig. 1 provides for the utility model embodiment;
Fig. 2 is the embodiment's one of the utility model a rotor body master TV structure schematic representation;
Fig. 3 a is that the embodiment's one of the utility model cartridge type draft stage master partly looks the form structure schematic representation;
Fig. 3 b is the embodiment's one of the utility model the cross section structure schematic representation of the guiding gutter degree of depth of cartridge type draft stage part;
Fig. 3 c is the embodiment's one of the utility model a cartridge type draft stage expansion schematic representation partly;
Fig. 4 a is the embodiment's two of the utility model a cartridge type draft stage partial cross section structural representation;
Fig. 4 b is the embodiment's two of the utility model the structural representation of draft stage stator.
Among the figure: 1, filter screen, 2, pump case, 3, rotor body, 4, turbine stator vane, 5, isolating ring; 6, electric machine main shaft, 7, the bearing support gland, 8, upper bearing (metal), 9, bearing support, 10, the draft stage stator; 11, chassis, 12, motor, 13, lower bearing, 14, the relief opening flange, 15, the oil sump seat.
Embodiment
To combine accompanying drawing that the utility model embodiment is done to describe in detail further below.
The high-performance composite molecular pump of the utility model, its preferable embodiment is:
Comprise pump case, rotor body, said rotor body is fixedly connected with electric machine main shaft, and this molecular pump is in series by turbine blade level and cartridge type draft stage from suction port to relief opening;
Said turbine blade level comprises the turbine moving blade of being located on the said rotor body and is located at the turbine stator vane on the isolating ring;
Said cartridge type draft stage comprises the spiral stream guidance groove of being located between said rotor body and the draft stage stator;
Said isolating ring and said draft stage stator are fixed on the said pump case.
Said turbine moving blade is one or more levels, and said turbine moving blade and turbine stator vane are alternately arranged vertically.
Said spiral stream guidance groove is located on the said rotor body or is located on the said draft stage stator.
Said spiral stream guidance groove has one or more;
The degree of depth of said spiral stream guidance groove is for waiting dark or shoaling gradually from inlet end to exhaust end;
The width of said spiral stream guidance groove is wide or narrows down gradually from inlet end to exhaust end.
The rotor body of said turbine blade level and cartridge type draft stage divides the rotor body of body structure to be connected fixing with pin through screw for dividing body structure or overall structure.
Said electric machine main shaft is installed on the chassis, and said chassis is fixed on the said pump case, is provided with the relief opening flange between said chassis and the said pump case.
The bottom on said chassis is fixed with the oil sump seat.
Said suction port is provided with filter screen.
The high-performance composite molecular pump of this model utility; Be composited by turbine blade level and cartridge type draft stage; Have big pumping speed, high compression ratio and stronger prime anti-pressure ability; Can under 100Pa, turn round for a long time, and bigger pumping speed is arranged, be widely used in fields such as semi-conductor industry, Aero-Space simulator, plasma etching equipment.
Specific embodiment one:
As shown in Figure 1, be a kind of embodiment's of the utility model overall structure schematic representation.Rotor body 3 is composited by turbine moving blade and cartridge type draft stage, and turbine moving blade is positioned at cartridge type draft stage top, and turbine moving blade and turbine stator vane 4 are alternately arranged vertically.Turbine stator vane 4 structures are one or more, are specifically confirmed by design, and turbine stator vane 4 is fixing through isolating ring 5.Rotor body 3 is also fixing through cone match with electric machine main shaft 6.Electric machine main shaft 6 is through upper bearing (metal) 8 and lower bearing 13 supports and location.Upper bearing (metal) 8 is loaded in the bearing support 9, and fixing with chassis 11 through bearing support gland 7.Lower bearing 13 is directly fixing through chassis 11.Draft stage stator 10 forms matching gap with the cartridge type draft stage of rotor body 3, and fixing through pump case 2 with isolating ring 5.Pump case 2 passes through bolt with chassis 11.Oil sump seat 15 is fixing with chassis 11, contains constituent in the oil sump seat 15.
Pumping process: drive down at motor 12, electric machine main shaft 6 and rotor body 3 high speed rotating, and with energy transfer to gas molecule.Gas molecule is under the turbine moving blade and turbine stator vane 4 interactions of rotor body 3; By the cartridge type draft stage place of suction port row to rotor body 3; Under the cartridge type draft stage effect of rotor body 3; The bleed-off passage that forms along spiral stream guidance groove and draft stage stator 10 by the cartridge type draft stage is compressed to relief opening flange 14 step by step, takes away through forepump system.Whole gas flow all is along axial conductance in turbine blade level and cartridge type draft stage place shown in arrow and dotted line among the figure, has reduced flow resistance, and entire pump can obtain bigger pumping speed.
As shown in Figure 2, the rotor body master TV structure schematic representation for the embodiment one of the utility model comprises turbine stage moving vane 3a and cartridge type draft stage 3b.Rotor body is structure as a whole, and the turbine stage moving vane contains 9 grades altogether, and wherein: I, II level are the level of bleeding, and can obtain big exhaust capacity; III to V level is a transstage, plays the effect of forming a connecting link of gas conduction; VI to IX level is a compression stage, has big compression ratio, with gas compression to cartridge type draft stage 3b place.
Shown in Fig. 3 a, 3b, 3c, be the schematic representation of the cartridge type draft stage of the embodiment's one of the utility model rotor body.Wherein Fig. 3 a is that cartridge type draft stage master looks the form structure schematic representation, and Fig. 3 b is the cross section structure schematic representation of the guiding gutter degree of depth, and Fig. 3 c launches schematic representation for the cartridge type draft stage.The cartridge type draft stage of present embodiment contains 5 spiral stream guidance grooves, and the spiral stream guidance cavity feature is for becoming groove depth and becoming groove width.Become groove depth shown in Fig. 3 b, guiding gutter degree of depth h1＞h2, concrete change in depth is decided by designing and calculating.Become groove width shown in Fig. 3 c, k1＞k2＞k3＞k4.Grooved is made up of the straightway of different amount.The spiral stream guidance groove is divided into A, B, and three sections of C: the A section is the section of bleeding, and this section guiding gutter passage is bigger, and venting capacity is strong, finely is connected with the turbine blade compression stage, guarantees the admittance property of gas; The B section is a changeover portion, and this section plays the effect of forming a connecting link of gas conduction; The C section is the compressing section, and this section guiding gutter passage is narrower, guarantees the gas high compression ratio, reduces gas reflux.The structural feature of this spiral chute guiding gutter has finely solved turbine blade level and draft stage matching problem, and has had both the characteristics of big pumping speed and high compression ratio.
Specific embodiment two:
The rotor body of cartridge type draft stage is the light tube, and the spiral stream guidance groove is opened on stator.Shown in Fig. 4 a, 4b, wherein Fig. 4 a is the cartridge type draft stage cross section structure schematic representation of rotor body, and Fig. 4 b is a draft stage stator structure schematic representation.Guiding gutter on the draft stage stator can by 1, form more than 2 or 2, the guiding gutter degree of depth can be identical, also can be different.
The high-performance composite molecular pump of the utility model adopts turbine blade level and cartridge type draft stage serial connection technology; Particularly the change groove depth of the spiral stream guidance groove of cartridge type draft stage and the structural feature that becomes groove width; The fine matching problem that has solved turbine blade level and draft stage; Thereby this pump has big pumping speed, high compression ratio and stronger characteristics such as prime anti-pressure ability, is a kind of high-performance composite molecular pump.
The technical parameter of a kind of instance of this pump is: the bore of bleeding is the 160mm composite molecular pump; The speed of exhaust can reach 850 liters/second (other kind roughly the same bore pump speed of exhaust is generally 400 liters/second----700 liters/second); Ultimate vacuum can reach 2 * 10-7Pa, and (fore pump is a mechanical pump; Record under the metallic seal test condition), can stablize proper functioning at forepressure during for 100Pa.
The above; Be merely the preferable embodiment of the utility model; But the protection domain of the utility model is not limited thereto; Any technician who is familiar with the present technique field is in the technical scope that the utility model discloses, and the variation that can expect easily or replacement all should be encompassed within the protection domain of the utility model.Therefore, the protection domain of the utility model should be as the criterion with the protection domain of claims.
Claims (8)
1. a high-performance composite molecular pump comprises pump case, rotor body, and said rotor body is fixedly connected with electric machine main shaft, it is characterized in that, this molecular pump is in series by turbine blade level and cartridge type draft stage from suction port to relief opening;
Said turbine blade level comprises the turbine moving blade of being located on the said rotor body and is located at the turbine stator vane on the isolating ring;
Said cartridge type draft stage comprises the spiral stream guidance groove of being located between said rotor body and the draft stage stator;
Said isolating ring and said draft stage stator are fixed on the said pump case.
2. high-performance composite molecular pump according to claim 1 is characterized in that, said turbine moving blade is one or more levels, and said turbine moving blade and turbine stator vane are alternately arranged vertically.
3. high-performance composite molecular pump according to claim 1 is characterized in that, said spiral stream guidance groove is located on the said rotor body or is located on the said draft stage stator.
4. high-performance composite molecular pump according to claim 3 is characterized in that, said spiral stream guidance groove has one or more;
The degree of depth of said spiral stream guidance groove is for waiting dark or shoaling gradually from inlet end to exhaust end;
The width of said spiral stream guidance groove is wide or narrows down gradually from inlet end to exhaust end.
5. according to each described high-performance composite molecular pump of claim 1 to 4, it is characterized in that the rotor body of said turbine blade level and cartridge type draft stage divides the rotor body of body structure to be connected fixing with pin through screw for dividing body structure or overall structure.
6. high-performance composite molecular pump according to claim 5 is characterized in that said electric machine main shaft is installed on the chassis, and said chassis is fixed on the said pump case, is provided with the relief opening flange between said chassis and the said pump case.
7. high-performance composite molecular pump according to claim 6 is characterized in that the bottom on said chassis is fixed with the oil sump seat.
8. high-performance composite molecular pump according to claim 7 is characterized in that said suction port is provided with filter screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200815600U CN202531443U (en) | 2012-03-06 | 2012-03-06 | High-performance compound molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200815600U CN202531443U (en) | 2012-03-06 | 2012-03-06 | High-performance compound molecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202531443U true CN202531443U (en) | 2012-11-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200815600U Expired - Fee Related CN202531443U (en) | 2012-03-06 | 2012-03-06 | High-performance compound molecular pump |
Country Status (1)
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| CN (1) | CN202531443U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102536853A (en) * | 2012-03-06 | 2012-07-04 | 北京北仪创新真空技术有限责任公司 | High-performance compound molecular pump |
| CN104747465A (en) * | 2013-12-25 | 2015-07-01 | 株式会社岛津制作所 | Vacuum pump |
| CN105324578A (en) * | 2013-07-05 | 2016-02-10 | 埃地沃兹日本有限公司 | Vacuum pump |
| CN108412785A (en) * | 2018-02-26 | 2018-08-17 | 北京海斯德电机技术有限公司 | A kind of composite molecular pump |
| CN108412786A (en) * | 2018-02-26 | 2018-08-17 | 北京海斯德电机技术有限公司 | A kind of composite molecular pump |
-
2012
- 2012-03-06 CN CN2012200815600U patent/CN202531443U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102536853A (en) * | 2012-03-06 | 2012-07-04 | 北京北仪创新真空技术有限责任公司 | High-performance compound molecular pump |
| CN102536853B (en) * | 2012-03-06 | 2014-07-09 | 北京北仪创新真空技术有限责任公司 | High-performance compound molecular pump |
| CN105324578A (en) * | 2013-07-05 | 2016-02-10 | 埃地沃兹日本有限公司 | Vacuum pump |
| EP3018354A4 (en) * | 2013-07-05 | 2017-03-15 | Edwards Japan Limited | Vacuum pump |
| CN105324578B (en) * | 2013-07-05 | 2018-05-15 | 埃地沃兹日本有限公司 | Vacuum pump |
| US10260509B2 (en) | 2013-07-05 | 2019-04-16 | Edwards Japan Limited | Vacuum pump |
| CN104747465A (en) * | 2013-12-25 | 2015-07-01 | 株式会社岛津制作所 | Vacuum pump |
| CN108412785A (en) * | 2018-02-26 | 2018-08-17 | 北京海斯德电机技术有限公司 | A kind of composite molecular pump |
| CN108412786A (en) * | 2018-02-26 | 2018-08-17 | 北京海斯德电机技术有限公司 | A kind of composite molecular pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121114 Termination date: 20150306 |
|
| EXPY | Termination of patent right or utility model |