CN201292961Y - Horizontal type dry vacuum pump - Google Patents
Horizontal type dry vacuum pump Download PDFInfo
- Publication number
- CN201292961Y CN201292961Y CNU2008202187826U CN200820218782U CN201292961Y CN 201292961 Y CN201292961 Y CN 201292961Y CN U2008202187826 U CNU2008202187826 U CN U2008202187826U CN 200820218782 U CN200820218782 U CN 200820218782U CN 201292961 Y CN201292961 Y CN 201292961Y
- Authority
- CN
- China
- Prior art keywords
- rotor
- stator
- spiral
- traction
- vortex
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Abstract
A horizontal dry-type vacuum pump relates to the vacuum technology and solves the technical problem that the existing vacuum equipment cannot simultaneously satisfy the requirements of high vacuum and directly exhausting air. The horizontal dry-type vacuum pump comprises a main pump body, a motor, a rotor and a stator, wherein the stator consists of a towing stator and a swirl stator; the towing stator comprises a spiral rib and a spiral groove; the swirl stator is formed by two semicircular cavities which are in butt joint; the outermost grade of the swirl stator is provided with an exhaust passage; the rotor consists of a towing rotor, a spiral rotor and a swirl rotor; the towing rotor is in a disk shape, and a lug boss is arranged on the upper surface of the towing rotor; the outer side of the circumference of the lug boss is provided with an annular circular plate; the external surface of the spiral rotor is provided with radial spiral vanes; the swirl rotor is of impeller type, the circumference of the swirl rotor is provided with slots which are separated by thin plates. The pump is used for obtaining a vacuum environment, and can start to work at the atmospheric pressure until the environmental pressure is pumped as a high-vacuum segment, thereby avoiding a series problems caused by utilizing the vacuum machine set to obtain high-vacuum environment.
Description
Technical field
The utility model relates to and vacuumizes technical field, particularly a kind of horizontal type dry vacuum pump.
Background technique
Some dry vacuum pumps have been arranged in the market, and dry vacuum pump is easy to safeguard, easy and simple to handle and can obtain the vacuum environment of cleaning, so be widely used in many industries.In order to obtain high vacuum environment, domestic a large amount of uses now be the high vacuum unit, promptly reach main pump and need join fore pump, and when connecting, need a large amount of pipelines and valve.Adopt the high vacuum unit, not only need consider the range of working pressure of various vacuum pumps, and auxiliary element such as the vacuum pump in the system, connecting tube, valve, vacuum measuring instrument and their control unit make that this cover system cost is very high.Typical high vacuum system at least additionally needs three valves and a bypass line.In semiconductor factory, preevacuation pump generally all is installed in following one deck of manufacturing shop, makes the pumping speed loss of fore pump strengthen a lot, therefore must select pump expensive, that performance is good for use.In addition, some vacuum application occasions in modern industry, as solar cell device, semiconductor devices preparation, miniature precision experimental facilities etc., problem such as, troublesome maintenance huge by taking up room of bringing of vacuum pump unit, pumping efficiency loss has influenced the carrying out of technology.
The model utility content
For solving the deficiency of above device, the utility model provides a kind of vacuum pump that high vacuum and discharging directly into atmosphere need not fore pump that reaches.
The utility model structural design is to realize like this, a kind of horizontal type dry vacuum pump, comprise main pump body, motor, rotor and stator, stator is made up of traction stator and vortex stator, the traction stator comprises spiral ribbed steel wire and spiral chute, spiral ribbed steel wire is located on the traction stator inside and outside wall, constitutes the distinguished and admirable groove of traction between spiral ribbed steel wire, and spiral chute is distributed on the traction stator inside and outside wall, the vortex stator is made of two semicircular cavity butt joints, and the outermost level of vortex stator is provided with air outlet flue; Rotor is made up of traction rotor, helical rotor and vortex rotor, the traction rotor is a dish type, the last plane of traction rotor is provided with a boss, there is a through hole at the boss center, have one deck annular plectane at least on the plane of boss periphery, the helical rotor outer surface is provided with radially spiral leaf, and the vortex rotor is the impeller form, on the circumference of vortex rotor, be provided with groove, separate with thin plate between the groove.
Described vortex stator is made of two semicircular cavity butt joints, and cavity is " protruding " font, and the nearly stator outer wall of a bigger head rest is called pumping chamber; Less one passes to shaft core position, is used to install vane rotor, is called assembly cavity.
Described groove is rectangle or nearly quadrant shape or semicircle.
The blade profile of described radially spiral leaf is involute-type or Archimedes spiral type.
Compared with the prior art the utility model has following advantage: the dried pump of this kind can obtain high vacuum environment, and can start working from barometric pressure, and until external pressure being evacuated to the high vacuum section, degree of vacuum can reach 10
-3Pa has avoided using the vacuum unit to obtain a series of problems that high vacuum environment brought.
Description of drawings
Fig. 1 is the utility model structural representation;
Fig. 2 is the helical rotor structure schematic representation;
Fig. 3 is a vortex rotor structure schematic representation;
Fig. 4 is a traction rotor structure schematic representation;
Fig. 5 is a traction stator structure schematic representation;
Fig. 6 is a vortex stator structure schematic representation;
Among the figure: 1. gland, 2. inlet, 3. main pump body, 4. traction stator, 5. helical rotor, 6. traction rotor, 7. vortex rotor, 8. water cooling tube, 9. vortex stator, 10. relief opening, 11. lower margins, 12. bases, 13. fuel tanks, 14. main shaft, 15. motors, 16. electric machine casings, 17. discs, 18. the spiral leaf, 19. grooves, 20. annular plectanes, 21. boss, 22. spiral ribbed steel wire, 23. spiral chutes, 24. pumping chambers, 25. assembly cavities.
Embodiment
In conjunction with the accompanying drawings the utility model is described further:
This vacuum pump adopts horizontal type structure, includes the rotating part, the pump housing, motor 15, fuel tank 13 and the supporting part that are connected on the main shaft 14.Main shaft 14 adopts cantilever type, and promptly the strong point (bearing) is in a side of main shaft 14; Motor 15 adopts straight connection type with main shaft 14; The part that links to each other with main shaft 14 comprises helical rotor 5, traction rotor 6, vortex rotor 7; The pump housing partly comprises main pump body 3, traction stator 4 and vortex stator 9.Wherein main pump body 3 is a size the best part in the part, plays and supports and the effect that is connected, and the pump housing of other parts all is connected with it.One end of main pump body 3 is a bearing support, and the other end inwall is processed as the coaxial spiral chute 23 of bull, as the outermost surface of traction stator 4.Suction port is offered in the intermediate portion of main pump body 3.Vortex stator 9 is made as split type, promptly constitute by the butt joint of two semicircular cavity, the vortex stator along the circumferential direction on the annular bleed passage is arranged.Vortex stator 9 parts link to each other with main pump body 3, lay water cooling tube 8 on its outer wall.Vortex rotor 7 is assemblied in the low order end of main shaft 14, is the impeller form, evenly has the groove 19 of nearly quadrant shape on the circumference of vortex rotor 7, separates with thin plate between the groove 19.The circular groove of groove 19 and vortex stator 9 partly match and, impeller constantly stirs the gas in the circular groove when vortex rotor 7 high speed rotating, makes the gas in it form continuous eddy current, and flows along vortex rotor 7 sense of rotation.The another part that is connected on the main shaft 14 is traction rotor 6, and this rotor is made as dish type, is provided with two annular concentric plectanes 20 in its outer end, with the spiral chute 23 looping bleed-off passages of traction stator 4.Two annular plectanes 20 of traction stator 4 and traction rotor 6 match and, its outer wall all processes the form concentric spirals groove 23 of bull.On the main shaft 14 near the traction rotor 6 be helical rotor 5, its outer surface is provided with radially spiral leaf 18, blade profile is involute-type or Archimedes spiral type.Helical rotor 5 forms the spiral stream guidance passage with stationary part, and gas is along this channel downstream compression exhaust; Spiral chute 23 on drawing rotor 6 and drawing stator 4 is with gas-insulated many spiral air flows that become along the circumferential direction to go up, gas is directed at the inlet of downstream to the vortex level along the migration of traction rotor 6 sense of rotation with gas in the drive spiral chute 23 when traction rotor 6 high speed rotating; In the vortex level, atwirl impeller is given gas with Momentum Transfer, makes the eddy current of gas formation along the impeller sense of rotation, because gas constantly passes to gas with contacting repeatedly of impeller with energy and makes gas be compressed final discharge.
Claims (4)
1. horizontal type dry vacuum pump, comprise main pump body, motor, rotor and stator, it is characterized in that: stator is made up of traction stator and vortex stator, and the traction stator comprises spiral ribbed steel wire and spiral chute, and spiral ribbed steel wire is located on the traction stator inside and outside wall, constitute the distinguished and admirable groove of traction between spiral ribbed steel wire, spiral chute is distributed on the traction stator inside and outside wall, and the vortex stator is made of two semicircular cavity butt joints, and the outermost level of vortex stator is provided with air outlet flue; Rotor is made up of traction rotor, helical rotor and vortex rotor, the traction rotor is a dish type, the last plane of traction rotor is provided with a boss, there is a through hole at the boss center, have one deck annular plectane at least on the plane of boss periphery, the helical rotor outer surface is provided with radially spiral leaf, and the vortex rotor is the impeller form, on the circumference of vortex rotor, be provided with groove, separate with thin plate between the groove.
2. a kind of horizontal type dry vacuum pump according to claim 1 is characterized in that described vortex stator is made of two semicircular cavity butt joints, and cavity is " protruding " font.
3. a kind of horizontal type dry vacuum pump according to claim 1 is characterized in that described groove is rectangle or nearly quadrant shape or semicircle.
4. a kind of horizontal type dry vacuum pump according to claim 1, the blade profile that it is characterized in that described radially spiral leaf are involute-type or Archimedes spiral type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202187826U CN201292961Y (en) | 2008-10-31 | 2008-10-31 | Horizontal type dry vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202187826U CN201292961Y (en) | 2008-10-31 | 2008-10-31 | Horizontal type dry vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201292961Y true CN201292961Y (en) | 2009-08-19 |
Family
ID=41006438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008202187826U Expired - Lifetime CN201292961Y (en) | 2008-10-31 | 2008-10-31 | Horizontal type dry vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201292961Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103629146A (en) * | 2012-08-24 | 2014-03-12 | 株式会社岛津制作所 | Vacuum pump |
| CN108105121A (en) * | 2017-12-29 | 2018-06-01 | 东北大学 | A kind of multistage composite high vacuum dry pump |
-
2008
- 2008-10-31 CN CNU2008202187826U patent/CN201292961Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103629146A (en) * | 2012-08-24 | 2014-03-12 | 株式会社岛津制作所 | Vacuum pump |
| CN103629146B (en) * | 2012-08-24 | 2016-08-10 | 株式会社岛津制作所 | Vacuum pump |
| CN108105121A (en) * | 2017-12-29 | 2018-06-01 | 东北大学 | A kind of multistage composite high vacuum dry pump |
| CN108105121B (en) * | 2017-12-29 | 2020-03-24 | 东北大学 | Multistage composite high-vacuum dry pump |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20160281732A1 (en) | Impeller with offset splitter blades | |
| CN201723460U (en) | Variable frequency high speed wet-type submersible pump | |
| CN103225624A (en) | Double-casing symmetric type radial subdivision multiple-stage centrifugal pump | |
| CN102230480B (en) | Compact single-suction centrifugal fan | |
| EP3274592A1 (en) | Apparatus, system, and method for compressing a process fluid | |
| CN201292961Y (en) | Horizontal type dry vacuum pump | |
| CN203214340U (en) | Double-shell symmetric radially-split multistage centrifugal pump | |
| CN101392748B (en) | Horizontal type dry vacuum pump | |
| CN104895800A (en) | Multi-stage submersible pump system | |
| CN202228423U (en) | Centrifugal air blower of double-suction semi-open type impeller | |
| CN203114662U (en) | Corrosion-resisting molecular pump | |
| CN203214404U (en) | Single-case symmetrical radially-split multistage centrifugal pump | |
| CN101182845B (en) | Dry-type vacuum pump | |
| CN2756872Y (en) | Vertical split tubular centrafugal compressor | |
| CN113676014A (en) | MCL compression system connected with magnetic suspension motor drive through magnetic coupling | |
| CN201650801U (en) | Double-impeller centrifugal blower | |
| CN209586789U (en) | A kind of volute structure of new-type centrifuge | |
| CN110080999B (en) | Centrifugal blower | |
| CN103225623A (en) | Symmetric radial-splitting multistage centrifugal pump with single casing body | |
| CN203488432U (en) | Ternary-flow impeller of high-efficiency compressor | |
| CN202628534U (en) | Small-flow double-cylinder horizontal multiple-stage centrifugal pump | |
| CN207049074U (en) | A kind of Combined guide impeller structure | |
| CN201818527U (en) | Series low-flow high-pressure-head centrifugal blower | |
| CN204476808U (en) | Single double suction centrifugal ventilator with adjustable | |
| CN215871123U (en) | MCL compressor system with compressor directly connected with magnetic suspension motor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20090819 Effective date of abandoning: 20081031 |