CN101392751B - Large pumping speed high vacuum dry vacuum pump - Google Patents
Large pumping speed high vacuum dry vacuum pump Download PDFInfo
- Publication number
- CN101392751B CN101392751B CN2008102284337A CN200810228433A CN101392751B CN 101392751 B CN101392751 B CN 101392751B CN 2008102284337 A CN2008102284337 A CN 2008102284337A CN 200810228433 A CN200810228433 A CN 200810228433A CN 101392751 B CN101392751 B CN 101392751B
- Authority
- CN
- China
- Prior art keywords
- rotor
- level
- vortex
- turbine stage
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The invention provides a high vacuum dry vacuum pump with high pumping speed, which relates to the technical field of vacuum. The high vacuum dry vacuum pump comprises a housing, a base, a rotor and a stator, wherein the rotor is fixed on a main shaft; the rotor consists of turbo level rotors and a rotor body, and the vortex rotor consisting of impellers is arranged on an upper part of the rotor body; the rotor body comprises drag molecular level rotors and vortex level rotors, and the vortex level rotors are positioned on the outer circumference of the drag molecular level rotors; blades of vortex level stators are arranged between the vortex level rotors; drag molecular level stators are arranged between the drag molecular level rotors; and the vortex level stators are arranged outside the vortex level rotors. With theories of dragging gas molecules to move, and turbo molecules and vortex to accelerate, the dry vacuum pump with high pumping speed, high vacuum capacity and direct discharge into atmosphere has the advantages of high efficiency, small volume and low cost.
Description
Technical field
The present invention relates to the vacuum technique field, particularly a kind of large pumping speed high vacuum dry vacuum pump.
Background technique
In recent years, people have developed polytype dried pump, are widely used in the every field that semi-conductor industry, analytical instrument, electronics industry and chemical industry equal vacuum are used.Dried pump or dried pump assembly are safeguarded simply, cleaning does not have oil, often are main pumps first-selected in the pumping equipment.Such as, in the vacuum chamber in the semicon industry, generally need reach 10
-3At this moment Pa or higher degree of vacuum just need dispose the high vacuum unit for them.
In general; in order to obtain to clean high vacuum; people can select high vacuum pump for use usually; as molecular pump, diffusion pump+cold-trap; but vacuum or high vacuum region during these high vacuum pumps are merely able to be operated in; must need extra vacuum pump to keep certain degree of vacuum in outlet, can not discharging directly into atmosphere, otherwise can cause molecular pump burn-down of electric motor, rotor blade to smash or accident such as diffusion pump oil oxidation.
Some can discharging directly into atmosphere the vacuum pump of acquisition clean vacuum, as pawl type pump, the dried pump of Roots, vortex pump, screw pump, reciprocating pump, diaphragm pump etc., general limiting vacuum can only reach 0.1～100Pa.If only use such vacuum pump, can not reach the requirement of high vacuum.
In order to obtain to clean high vacuum, the vacuum pump that needs many of series connection to be operated in the different pressures zone constitutes unit, finishes the task of bleeding.Typical high vacuum unit as " molecular pump+pawl type pump " or " molecular pump+screw pump " or the like, for shortening the pumpdown time, also can add suction boosters such as Roots pump between main pump and prime.Adopt the high vacuum unit, not only need consider various vacuum pumps range of working pressure, increase the difficulty of configuration-system, and auxiliary element such as many vacuum pumps in the system, connecting tube, valve, vacuum measuring instrument and their control unit make that this cover system cost is very high.At least additionally need three valves and a bypass line as typical high vacuum system.In addition, can not realize big pumping speed, influence efficient.
Summary of the invention
Can not to realize big pumping speed, inefficient defective in the above device in order solving, to the invention provides a kind of large pumping speed high vacuum dry vacuum pump.
Technological scheme of the present invention is achieved in that large pumping speed high vacuum dry vacuum pump, comprise housing, base, rotor and stator, rotor is fixed on the main shaft, rotor is made up of turbine stage rotor and rotor body, the turbine stage rotor is arranged on rotor body top, the turbine stage rotor is made up of impeller, rotor body comprises molecular drag level rotor and vortex level rotor, vortex level rotor is positioned on the excircle of molecular drag level rotor, be provided with the turbine stage stator vane between the turbine stage rotor, be provided with molecular drag level stator between the molecular drag level rotor, the vortex level rotor outside is provided with vortex level stator.
Described turbine stage rotor is made up of multi-stage impeller, each grade impeller is made up of a plurality of blades of turning round system or milling system of arranging along circumferencial direction, blade is parallel to each other, and becomes 10-50 ° of angles with horizontal plane, realizes bleeding function by cooperatively interacting of turbine stage rotor and stator.
Described rotor body excircle is provided with several bulge loops that increases gradually vertically, form distinguished and admirable groove between bulge loop and the bulge loop, bulge loop is inserted in the vortex groove of stator sleeve, distinguished and admirable groove communicates with relief opening, establish radial blade on the bulge loop, during gas process radial blade, between radial blade and radial blade, form gas swirl.
Described rotor body is one or split, is to say that molecular drag level rotor and vortex level rotor are one or split.One refers to molecular drag level rotor and vortex level rotor is as a whole, and split refers between molecular drag level rotor and the vortex level rotor and separates, and links together by screw, rivet etc.Molecular drag level rotor is made up of sleeve, per two sleeve wall inboards are provided with the traction sleeve of planting mutually with the rotor sleeve wall, and traction sleeve inside and outside wall is provided with spiral ribbed steel wire, constitute the distinguished and admirable groove of traction between spiral ribbed steel wire, its grooved is involute or Archimedes spiral type.
Described radial blade is a rectangle or arc.
Beneficial effect of the present invention: form by turbine stage rotor, molecular drag level rotor and vortex level rotor by rotor, the turbine stage rotor is made up of multi-stage impeller, the turbine stage rotor cooperates with stator, gas is discharged, thereby strengthen the effect of bleeding, it has compiled and has dragged gas molecule motion, the principle that turbo-molecular and vortex quicken, reach have big pumping speed, the dry vacuum pump of high vacuum ability and discharging directly into atmosphere performance, this pump has efficient height, volume is little, cost is low advantage.
Description of drawings
Fig. 1 is the general structure schematic representation of an embodiment of the present invention;
Fig. 2 is the structural representation of a kind of embodiment's of the present invention rotor;
Fig. 3 is an a kind of embodiment's of the present invention vortex level stator molecular drag level stator connection diagram;
Fig. 4 is the stator sleeve structural representation;
Among the figure: 1 intakeport, 2 intakeport flanges, 3 turbine stage rotors, 4 turbine stage stator vanes, 5 main shafts, 6 spacer rings, 7 pump cases, 8 upper bearing (metal)s, 9 molecular drag level stators, 10 motors, 11 rotor bodys, 12 stator sleeves, 13 water cooling tubes, 14 relief opening flanges, 15 pump seats, 16 oil sumps, 17 vortex level stators.
Embodiment
In conjunction with the accompanying drawings the present invention is described further:
As shown in Figure 1, general structure schematic representation for an embodiment of the present invention, comprise pump case 7, base, rotor and stator, rotor is fixed on the main shaft 5, and motor 10 links to each other with pump seat 15, pump seat 15 is provided with stator sleeve 12, stator sleeve 12 matches with rotor body 11, and rotor body 11 and turbine stage rotor 3 are connected by screw, and turbine stage rotor 3 is located by optical axis with main shaft 5, stator sleeve 12 outer pump case 7 inside are provided with water cooling tube 13, and air outlet flue links to each other with relief opening flange 14.Rotor is made up of turbine stage rotor 3 and rotor body 11, turbine stage rotor 3 is arranged on rotor body 11 tops, turbine stage rotor 3 is made up of the Pyatyi impeller, each grade impeller is made up of a plurality of blades of turning round system or milling system of arranging along circumferencial direction, blade is parallel to each other, and become 10-50 ° of angles with horizontal plane, turbine stage rotor 3 realizes bleeding function with cooperatively interacting of turbine stage stator.Rotor body 11 is structure as a whole, just molecular drag level rotor and vortex level rotor are connected as a single entity, vortex level rotor is positioned on the excircle of molecular drag level rotor, be provided with turbine stage stator vane 4 between the turbine stage rotor 3, be provided with molecular drag level stator 9 between the molecular drag level rotor, the vortex level rotor outside is provided with vortex level stator 17, and gas is entered in the pump by intakeport 1, is cooperated to bleed by turbine stage rotor 3 and turbine stage stator vane 4 and realizes bigger pumping speed.Gas compresses through molecular drag level stator 9 and rotor body 11.Last gas by rotor body 11 outsides vortex level rotor and stator sleeve between the distinguished and admirable groove that forms gas is discharged.
Another kind of embodiment of the present invention, turbine stage rotor 3 is seven grades, turbine stage rotor 3 is arranged vertically, rotor body 11 adopts and divides body structure, separate between molecular drag level rotor and the vortex level rotor, and connect with screw, vortex level rotor is positioned on the excircle of molecular drag level rotor.
Shown in Fig. 2,3,4, rotor body 11 comprises molecular drag level rotor and vortex level rotor, vortex level rotor is positioned on the excircle of molecular drag level rotor, form distinguished and admirable groove between the vortex level rotor in the outside of rotor body 11 and the stator sleeve, rotor body 11 outer disks are provided with bulge loop from the top down, form distinguished and admirable groove between bulge loop and the bulge loop, rotor body 11 outerplanar bulge loops are inserted in the vortex groove of stator sleeve 12, the distinguished and admirable groove that bulge loop and vortex groove form interconnects, the distinguished and admirable groove that is constituted communicates with relief opening flange 14, establishes radial blade on the bulge loop.The sleeve wall both sides of rotor body 11, be provided with molecular drag level stator 9 sleeves of planting mutually with rotor body 11 sleeve wall, sleeve on the molecular drag level stator 9, internal and external walls is provided with the distinguished and admirable groove of traction, and its grooved is involute or Archimedes spiral form, and wherein stator sleeve 12, its inside is provided with the vortex groove, stator sleeve 12 bottoms are provided with air outlet flue, the distinguished and admirable groove that forms between the vortex groove of stator sleeve 12, and gas ends by the detacher principle is unidirectional.
Claims (4)
1. large pumping speed high vacuum dry vacuum pump, comprise housing, base, rotor and stator, described rotor is fixed on the main shaft, rotor is made up of turbine stage rotor and rotor body, the turbine stage rotor is arranged on rotor body top, the turbine stage rotor is made up of impeller, be provided with the turbine stage stator vane between the turbine stage rotor, it is characterized in that rotor body comprises molecular drag level rotor and vortex level rotor, vortex level rotor is positioned on the excircle of molecular drag level rotor, be provided with molecular drag level stator between the molecular drag level rotor, the vortex level rotor outside is provided with vortex level stator, on described rotor body excircle, be provided with the bulge loop that increases gradually vertically, form distinguished and admirable groove between bulge loop and the bulge loop, establish radial blade on the bulge loop.
2. large pumping speed high vacuum dry vacuum pump according to claim 1, it is characterized in that described turbine stage rotor is at least one-level, the turbine stage rotor is made up of impeller, each grade impeller is made up of the blade of arranging along circumferencial direction, blade is parallel to each other, and becomes 10-50 ° of angle with horizontal plane.
3. large pumping speed high vacuum dry vacuum pump according to claim 1 is characterized in that described rotor body is one or split, is to say that molecular drag level rotor and vortex level rotor are one or split.
4. large pumping speed high vacuum dry vacuum pump according to claim 1 is characterized in that described radial blade is a rectangle or arc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102284337A CN101392751B (en) | 2008-10-31 | 2008-10-31 | Large pumping speed high vacuum dry vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102284337A CN101392751B (en) | 2008-10-31 | 2008-10-31 | Large pumping speed high vacuum dry vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101392751A CN101392751A (en) | 2009-03-25 |
| CN101392751B true CN101392751B (en) | 2011-10-26 |
Family
ID=40493217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008102284337A Expired - Fee Related CN101392751B (en) | 2008-10-31 | 2008-10-31 | Large pumping speed high vacuum dry vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101392751B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108431422A (en) * | 2015-11-03 | 2018-08-21 | 莱宝有限公司 | Dry vacuum pump |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107143506B (en) * | 2017-07-12 | 2019-05-24 | 东北大学 | A kind of Multi-stage high-vacuum dry pump |
| CN108953177B (en) * | 2018-07-27 | 2020-03-31 | 东北大学 | Transition structure for improving pumping speed of turbomolecular pump |
| CN114352553B (en) * | 2021-12-31 | 2024-01-09 | 北京中科科仪股份有限公司 | Vortex mechanism and compound molecular pump |
-
2008
- 2008-10-31 CN CN2008102284337A patent/CN101392751B/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108431422A (en) * | 2015-11-03 | 2018-08-21 | 莱宝有限公司 | Dry vacuum pump |
| CN108431422B (en) * | 2015-11-03 | 2019-07-23 | 莱宝有限公司 | Dry vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101392751A (en) | 2009-03-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100529414C (en) | Pumping arrangement | |
| US6709228B2 (en) | Vacuum pumps | |
| CN100575710C (en) | A kind of multistage turbine vacuum machine and use the method that it extracts multi-stage vacuum | |
| CN101052809B (en) | Pump device | |
| JP6046885B2 (en) | Turbomachine with hybrid flow stage and method thereof | |
| ES2620178T3 (en) | Gas-tolerant underwater pump. | |
| EP2481077B1 (en) | Mass spectrometer system | |
| RU2544398C2 (en) | Reverse system of gas input and output for rotation machines handling fluid | |
| JP2007507656A5 (en) | ||
| CN100439717C (en) | Double suction microminiature type vane pump with no spindle drive | |
| US20040013514A1 (en) | Friction vacuum pump | |
| CN101392751B (en) | Large pumping speed high vacuum dry vacuum pump | |
| EP0445855A1 (en) | Improved turbomolecular pump | |
| TW201837310A (en) | Pumping unit and use thereof | |
| JP2001027195A (en) | Vacuum pump | |
| CN201292944Y (en) | Large pumping speed type high vacuum dry vacuum pump | |
| JP2002310092A (en) | Vacuum pump | |
| CN101457758B (en) | Enhancement air exhaust composite molecular pump | |
| CN206368831U (en) | VPSA atm number centrifugal vacuum pumps | |
| CN101182845A (en) | Dry-type vacuum pump | |
| CN110770444A (en) | Multi-stage rotary piston pump | |
| CN115066557A (en) | Axial vacuum pump with curved rotor and stator blades | |
| JP2001090690A (en) | Vacuum pump | |
| AU2020399072B2 (en) | Compressor with a system for removing liquid from the compressor | |
| CN201292960Y (en) | Enhancement exhausting composite molecular pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111026 Termination date: 20121031 |