CN202494933U - Anti-interference precision nanometer displacement trigger - Google Patents
Anti-interference precision nanometer displacement trigger Download PDFInfo
- Publication number
- CN202494933U CN202494933U CN2012200986820U CN201220098682U CN202494933U CN 202494933 U CN202494933 U CN 202494933U CN 2012200986820 U CN2012200986820 U CN 2012200986820U CN 201220098682 U CN201220098682 U CN 201220098682U CN 202494933 U CN202494933 U CN 202494933U
- Authority
- CN
- China
- Prior art keywords
- accurate
- nut
- nanometer
- trigger
- control system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Control Of Position Or Direction (AREA)
- Transmission Devices (AREA)
Abstract
The utility model discloses an anti-interference precision nanometer displacement trigger which comprises a control system, a micro-motor, and an actuating mechanism, wherein the control system, the micro-motor, and the actuating mechanism are connected in sequence. The control system comprises a correcting database, a sensor, and a discrimination circuit, wherein the correcting database is used for correcting errors of the trigger, the sensor detects movements of the trigger and transmits sensed information to a console, and the discrimination circuit adopts an interrupt signal when a kick occurs in current and voltage to prevent environmental electromagnetic interference. The actuating mechanism comprises a coupling, a screw-and-nut combination, a sliding table mechanism, and a displacement generator. The control system controls a micro-motor rotation setting angle, and transforms the micro-motor rotation setting angle into a nanometer amount displacement through the coupling and the screw-and-nut combination to realize controllable nanometer amount linear movement of an object. The nanometer displacement trigger provided by the utility model adopts the micro-motor with a speed reducer, outputs a larger torque by using smaller power and improves resolution ratio of displacement amount. The nanometer displacement trigger adopts a differential motion formed by combining a closely-pitched precision screw with 80 pitches per hour and a 0.35 metric thread, and the precision of movement amount is improved to a nanometer degree.
Description
Technical field
The utility model belongs to the displacement detecting technical field, relates to a kind of displacement trigger, relates in particular to a kind of jamming-proof accurate nanometer displacement trigger.
Background technology
Accurate nanometer displacement trigger is a kind of device that in complex electromagnetic environments, produces controlled accurate nanometer scale displacement, can be used for accurate control optical element, Precision Machining parts, the displacement of precision instrumentation.
Existing product is that the threaded guide rod of motor directly produces displacement, and its resolution is lower.When environment for use has electromagnetic interference (EMI), can produce misoperation.And if temperature variation is arranged when using because the polar expansion effect of temperature and the variation of lubricating oil viscosity can produce the increase friction stree, influenced precision greatly.
The utility model content
The utility model technical matters to be solved is: a kind of jamming-proof accurate nanometer displacement trigger is provided, can solves the weak point of prior art.
For solving the problems of the technologies described above, the utility model adopts following technical scheme:
A kind of jamming-proof accurate nanometer displacement trigger, said trigger comprise control system, micromotor, the topworks that connects successively;
Said control system comprises:
Correct database, in order to revise the error that trigger occurs; Said control system is transferred the correction of measuring in advance from correcting database, carries out control corresponding according to this correction;
Sensor, in order to moving of detection triggers, and the information of will experiencing is passed to control desk.
Judging circuit in order to when current/voltage has kick, to take look-at-me, prevents that environment electromagnetics from disturbing;
Said topworks comprises shaft coupling, bolt and nut combination, slide unit mechanism, moves generator; One end of said shaft coupling connects micromotor, and the other end connects said bolt and nut combination; Said bolt and nut combination is arranged in the slide unit mechanism, and shaft coupling, mobile generator are separately positioned on the two ends of slide unit mechanism;
Said control system control micromotor rotates set angle, through shaft coupling, bolt and nut combination being transformed into nanometer amount displacement, realizes linear the moving of controllable nano amount of object.
As a kind of preferred version of the utility model, said bolt and nut combination comprises the first accurate screw rod, first accurate nut, the second accurate screw rod, second accurate nut;
The said first accurate screw rod adopts inch screw thread every very little greater than 30 teeth, and the said second accurate screw rod adopts known thread pitch less than 0.8 closely-pitched.
As a kind of preferred version of the utility model, the said first accurate screw rod adopts every cun 80 teeth of inch screw thread, and the said second accurate screw rod adopts known thread pitch 0.35 closely-pitched.
As a kind of preferred version of the utility model, said first accurate nut is a travelling nut, and said second accurate nut is a hold-down nut.
As a kind of preferred version of the utility model, said slide unit mechanism comprises slide unit, the slide unit guide rail that cooperates with this slide unit.
As a kind of preferred version of the utility model, said micromotor and the motion of second accurate nut are for reverse, and the momentum of second accurate nut is the difference of two pitch.
A kind of preferred version as the utility model sends control signal by the Control Software of control system, and the control micromotor rotates set angle; Or/and the second accurate screw rod is transformed into the displacement of nanometer amount, realize linear the moving of controllable nano amount of file through the first accurate screw rod; After every mobile generator is processed, and calibrate, note in the course of work that trickle difference further improves precision as improving positive number between driving pulse and amount of movement with interferometer; All transfer wires all adopt anti-electromagnetic interference (EMI), and reject undesired signal with judging circuit.
The beneficial effect of the utility model is: the jamming-proof accurate nanometer displacement trigger that the utility model proposes, adopt the micromotor of being with speed reduction unit, and can use more miniwatt output than high pulling torque; And the resolution of displacement also improves greatly.Simultaneously, the utility model adopts accurate screw rod of the closely-pitched of 80 teeth when per and 0.35 metric thread to form differential and form differential screw rod and obtains very tiny amount of movement, and precision is brought up to nanometer.In the utility model, guide rod is connected with the commercialization shaft coupling with motor shaft, can prevent the extra-stress that caused by hot temperature variation to have reduced frictional dissipation.The utility model adopts shielding line and anti-interference differentiation to improve interference performance.In order to prevent that the lubricating oil viscosity that temperature variation causes from changing and the generation change in friction force, adopted from-70 ℃--300 ℃ all can keep the constant basically FOMBLIN ZLHT lubricating oil of viscosity.This trigger is if when (referring to below-25 ℃) under ultra-low temperature surroundings, and for preventing motor bearings, guide rail etc. are stuck because of temperature deformation, adopt special command, control and communication system gap, and guaranteed operate as normal.
Description of drawings
Fig. 1 is the structural representation of the accurate nanometer displacement trigger of the utility model.
Fig. 2 is the control principle figure of the accurate nanometer displacement trigger of the utility model.
Embodiment
Specify the preferred embodiment of the utility model below in conjunction with accompanying drawing.
Embodiment one
See also Fig. 1, Fig. 2, the utility model has disclosed a kind of jamming-proof accurate nanometer displacement trigger, and said trigger comprises control system, micromotor, the topworks that connects successively.
As shown in Figure 2, said control system comprises: correct database, sensor, judging circuit.Correct database and be used for revising the error that trigger occurs; As: said control system is transferred the correction of measuring in advance from correcting database, carries out control corresponding according to this correction.Sensor moves in order to detection triggers, and the information of will experiencing is passed to control desk.Judging circuit prevents that in order to when current/voltage has kick, to take look-at-me environment electromagnetics from disturbing.
As shown in Figure 1, said topworks comprises shaft coupling 4, bolt and nut combination, slide unit mechanism, moves generator 7; One end of said shaft coupling 4 connects micromotor 3, and the other end connects said bolt and nut combination.Said bolt and nut combination is arranged in the slide unit mechanism, and shaft coupling 4, mobile generator 7 are separately positioned on the two ends of slide unit mechanism.Said control system control micromotor 3 rotates set angle, through shaft coupling 4, bolt and nut combination being transformed into nanometer amount displacement, realizes linear the moving of controllable nano amount of object.
Said slide unit mechanism comprises slide unit 2, the slide unit guide rail 1 that cooperates with this slide unit 2.Said bolt and nut combination comprises the first accurate screw rod, first accurate nut, 6, the second accurate screw rod, second accurate nut 5.Said first accurate nut 6 is a travelling nut, can adopt inch screw thread every very little greater than 30 teeth; In the present embodiment, the said first accurate screw rod adopts every cun 80 teeth of inch screw thread.Said second accurate nut 5 is a hold-down nut, can adopt known thread pitch less than 0.8 closely-pitched; In the present embodiment, the said second accurate screw rod adopts known thread pitch 0.35 closely-pitched.
Said micromotor and 5 motions of second accurate nut are for reverse, and the momentum of second accurate nut 5 is the difference of two pitch.
Same micromotor adopts metric system 0.35 closely-pitched, and present resolution is revolution 0.35, and adopts the standard metric and English difference of the utility model trigger to be: 25.4/80=0.3175,0.35-0.3175=0.0325.
This shows that utilize the utility model trigger, the resolution of displacement has improved more than ten times, and ten times of also corresponding increases of motor thrust, adopt two shaft couplings and specific lubricating oil, can eliminate temperature stress.Calibration and employing improve to have and have improved precision, adopt shielding line and disturb discrimination technology, then can prevent outside electromagnetic interference.
The utility model trigger sends control signal by Control Software, and the control micromotor turns an angle.Through the differential screw rod of precision, be transformed into the displacement of nanometer amount, realize linear the moving of controllable nano amount of file.After every mobile generator is processed, and calibrate, note in the course of work that trickle difference further improves precision as improving positive number between driving pulse and amount of movement with interferometer.All transfer wires all adopt anti-electromagnetic interference (EMI), and reject undesired signal with judging circuit.
In sum, the jamming-proof accurate nanometer displacement trigger that the utility model proposes adopts the micromotor of being with speed reduction unit, can use more miniwatt output than high pulling torque; And the resolution of displacement also improves greatly.Simultaneously, the utility model adopts accurate screw rod of the closely-pitched of 80 teeth when per and 0.35 metric thread to form differential and form differential screw rod and obtains very tiny amount of movement, and precision is brought up to nanometer.In the utility model, guide rod is connected with the commercialization shaft coupling with motor shaft, can prevent the extra-stress that caused by hot temperature variation to have reduced frictional dissipation.The utility model adopts shielding line and anti-interference differentiation to improve interference performance.In order to prevent that the lubricating oil viscosity that temperature variation causes from changing and the generation change in friction force, adopted from-70 ℃--300 ℃ all can keep the constant basically FOMBLIN ZLHT lubricating oil of viscosity.This trigger is if when (referring to below-25 ℃) under ultra-low temperature surroundings, and for preventing motor bearings, guide rail etc. are stuck because of temperature deformation, adopt special command, control and communication system gap, and guaranteed operate as normal.
Here description of the utility model and application is illustrative, is not to want the scope of the utility model is limited in the above-described embodiments.Here the distortion of the embodiment that is disclosed and change are possible, and the replacement of embodiment is known with the various parts of equivalence for those those of ordinary skill in the art.Those skilled in the art are noted that under the situation of spirit that does not break away from the utility model or essential characteristic, and the utility model can be with other form, structure, layout, ratio, and realize with other assembly, material and parts.Under the situation that does not break away from the utility model scope and spirit, can carry out other distortion and change here to the embodiment that is disclosed.
Claims (6)
1. a jamming-proof accurate nanometer displacement trigger is characterized in that, said trigger comprises control system, micromotor, the topworks that connects successively;
Said control system comprises:
Correct database, in order to revise the error that trigger occurs; Said control system is transferred the correction of measuring in advance from correcting database, carries out control corresponding according to this correction;
Sensor, in order to moving of detection triggers, and the information of will experiencing is passed to control desk;
Judging circuit in order to when current/voltage has kick, to take look-at-me, prevents that environment electromagnetics from disturbing;
Said topworks comprises shaft coupling, bolt and nut combination, slide unit mechanism, moves generator; One end of said shaft coupling connects micromotor, and the other end connects said bolt and nut combination; Said bolt and nut combination is arranged in the slide unit mechanism, and shaft coupling, mobile generator are separately positioned on the two ends of slide unit mechanism;
Said control system control micromotor rotates set angle, through shaft coupling, bolt and nut combination being transformed into nanometer amount displacement, realizes linear the moving of controllable nano amount of object.
2. jamming-proof accurate nanometer displacement trigger according to claim 1 is characterized in that:
Said bolt and nut combination comprises the first accurate screw rod, first accurate nut, the second accurate screw rod, second accurate nut;
The said first accurate screw rod adopts inch screw thread every very little greater than 30 teeth, and the said second accurate screw rod adopts known thread pitch less than 0.8 closely-pitched.
3. jamming-proof accurate nanometer displacement trigger according to claim 2 is characterized in that:
The said first accurate screw rod adopts every cun 80 teeth of inch screw thread, and the said second accurate screw rod adopts known thread pitch 0.35 closely-pitched.
4. jamming-proof accurate nanometer displacement trigger according to claim 2 is characterized in that:
Said first accurate nut is a travelling nut, and said second accurate nut is a hold-down nut.
5. jamming-proof accurate nanometer displacement trigger according to claim 1 is characterized in that:
Said slide unit mechanism comprises slide unit, the slide unit guide rail that cooperates with this slide unit.
6. jamming-proof accurate nanometer displacement trigger according to claim 1 is characterized in that:
Said micromotor and the motion of second accurate nut are for reverse, and the momentum of second accurate nut is the difference of two pitch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200986820U CN202494933U (en) | 2012-03-15 | 2012-03-15 | Anti-interference precision nanometer displacement trigger |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200986820U CN202494933U (en) | 2012-03-15 | 2012-03-15 | Anti-interference precision nanometer displacement trigger |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202494933U true CN202494933U (en) | 2012-10-17 |
Family
ID=47001151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200986820U Expired - Fee Related CN202494933U (en) | 2012-03-15 | 2012-03-15 | Anti-interference precision nanometer displacement trigger |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202494933U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102591368A (en) * | 2012-03-15 | 2012-07-18 | 无锡瑞迪声科技有限公司 | Anti-interference accurate nanometer displacement trigger |
-
2012
- 2012-03-15 CN CN2012200986820U patent/CN202494933U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102591368A (en) * | 2012-03-15 | 2012-07-18 | 无锡瑞迪声科技有限公司 | Anti-interference accurate nanometer displacement trigger |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203416098U (en) | Power transmission device | |
| CN108204782A (en) | A kind of angle measurement and instruction device based on Archimedian screw disk | |
| CN103885463B (en) | The spacing arrestment mechanism of electromechanical of rotating machinery and installation thereof, method of adjustment | |
| CN101494405A (en) | Position tracking type deviation-rectifying servo executor | |
| CN103499927A (en) | Position control system of direct-current servo motor | |
| CN202494933U (en) | Anti-interference precision nanometer displacement trigger | |
| CN101706267B (en) | Indexing mechanism with large diameter, small angle and high precision | |
| CN104422468B (en) | Encoder | |
| CN204255280U (en) | A kind of transmission displacement feedback assembly of Long Distances leading screw | |
| CN102591368A (en) | Anti-interference accurate nanometer displacement trigger | |
| CN103273328A (en) | Large-stroke micro-drive precise two-dimensional worktable | |
| CN106094391B (en) | Focus control method applied to star loaded camera | |
| CN102385311B (en) | Electrohydraulic linear-velocity digital servo system and control method thereof | |
| US20150061471A1 (en) | Position sensing techniques | |
| CN202815509U (en) | Precision positioning device capable of eliminating backlash error by utilizing error correction closed loop | |
| CN202371099U (en) | Radial floated and linked lead-screw transmission mechanism | |
| CN207439426U (en) | A kind of absolute encoder | |
| CN201528254U (en) | Single-shaft servo control device | |
| CN103062349B (en) | A kind of driving mechanism of Double-side circulating toothed belt | |
| CN202012602U (en) | Ball screw mechanism | |
| CN104713465A (en) | Displacement measuring device and method based on spiral resistor | |
| CN203282189U (en) | Large-stroke micro drive precise two-dimension working table | |
| CN202122675U (en) | Novel lifting power driving device for dental chair | |
| CN201629371U (en) | Straight-line guide rod device | |
| CN110285290B (en) | Intelligent control support bracket |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121017 Termination date: 20140315 |