CN202465948U - Converting and interlocking device for czochralski silicon single crystal inert shielding gas - Google Patents
Converting and interlocking device for czochralski silicon single crystal inert shielding gas Download PDFInfo
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- CN202465948U CN202465948U CN2011205574146U CN201120557414U CN202465948U CN 202465948 U CN202465948 U CN 202465948U CN 2011205574146 U CN2011205574146 U CN 2011205574146U CN 201120557414 U CN201120557414 U CN 201120557414U CN 202465948 U CN202465948 U CN 202465948U
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Abstract
The utility model relates to the technical field of the production of czochralski single crystal silicon, in particular to a converting and interlocking device for czochralski silicon single crystal inert shielding gas. The converting and interlocking device comprises an argon inflating device, a nitrogen inflating device and a mechanical interlocking device, wherein the argon inflating device is composed of two argon flowmeters connected in parallel and an argon controlling ball valve for controlling the two argon flowmeters to be opened simultaneously; the nitrogen inflating device is composed of nitrogen flowmeters and a nitrogen controlling ball valve for controlling the opening of the nitrogen flowmeters; and the mechanical interlocking device enables only either the argon inflating device or the nitrogen inflating device to be opened at the same time. According to the utility model, the nitrogen is used for replacing the argon in the partial stages during the single crystal growing process, so that the production cost is lowered; a U-shaped clamping groove is adopted, so that only one of the two controlling ball valves can be opened at the same time, and the conversion between the nitrogen and the argon can be realized safely and accurately.
Description
Technical field
The utility model relates to the pulling of silicon single crystal production technical field, and the device of mishandle is changed and prevented to the inert protective gas in particularly a kind of czochralski silicon monocrystal process of growth.
Background technology
The nitrogen atmosphere of czochralski silicon monocrystal belongs to the semiconductor material manufacturing technology.In vertical pulling (czochralski therapy) silicon single-crystal technology, use the shielding gas of argon gas usually as crystal pulling, used purity of argon is more than 99.999%; Argon gas is in inflated condition always in single crystal growth process; Argon gas in crystal growing process, play protection graphite thermal field at high temperature not oxidized with take away crystallization latent heat, make the monocrystalline can smooth growth, but the argon gas price be high; And restricted by empty branch producer of steel mill, therefore should reduce the consumption of argon gas as far as possible.Through finding that relatively nitrogen is the ideal replacer, can use purity is the nitrogen more than 99.99%, stop utilizing high pure nitrogen to substitute argon gas after the heating in high temperature material and ending, entering silicon single-crystal furnace inner nitrogen flow be the 20-50 liter/minute.Because the nitrogen source is abundant, cheap, can reduce the silicon single-crystal cost significantly, produces positive effect.Owing to be to use nitrogen replacement argon gas, therefore need carry out the conversion of argon gas and nitrogen in the part stage of single crystal growth process.In the crystal pulling process, reach argon gas and nitrogen and require artificial the switching, guarantee in the single crystal growing furnace stove, accurately to irritate, produce the qualified monocrystalline of high-quality towards pure gas in different processes.
Summary of the invention
The technical problem that the utility model will solve provides a kind of can reducing cost, and the safety of nitrogen and argon gas is switched in the realization crystal pulling process, guarantees that accurate filling is towards the gas conversion and the interlock of pure gas in stove.
For solving the problems of the technologies described above; The technical scheme that the utility model is taked is: conversion of a kind of czochralski silicon monocrystal inert protective gas and interlock comprise the argon gas inflation mechanism that the argon gas control ball valve opened simultaneously by two argon flow amount meters of argon flow amount meter and control of two parallel connections is formed; It is characterized in that: also comprise by nitrogen flow meter and the nitrogen that control nitrogen flow meter is opened and control the nitrogen inflation mechanism that ball valve is formed, and make said two inflation mechanisms can only use one mechanical interlock at synchronization.
Said mechanical interlock is the U-shaped draw-in groove, has a ball valve handle rotation mouth on two sides of U-shaped draw-in groove, and the bottom surface of U-shaped draw-in groove is provided with slideway, and the arm pivot post of argon gas control ball valve and nitrogen control ball valve is positioned at slideway.
Adopt the beneficial effect that technique scheme produced to be: nitrogen replacement argon gas is used in the part stage of single crystal growth process in (1), has reduced production cost; (2) adopt draw-in groove, guarantee that controlling ball valves for two can only open one at synchronization, has realized safe, the accurate switching of nitrogen and argon gas.
Description of drawings
Fig. 1 is the front view of the utility model;
Fig. 2 is that the A-A of Fig. 1 is to view;
Among the figure, 1, argon gas control ball valve, 2, nitrogen control ball valve, 3, the argon flow amount meter, 4, the nitrogen flow meter, 5, the U-shaped draw-in groove, 6, ball valve handle rotation mouthful.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is done further detailed explanation.
As shown in Figure 1, conversion of a kind of czochralski silicon monocrystal inert protective gas and interlock comprise that the argon gas of being opened simultaneously by two argon flow amount meters 3 of argon flow amount meter 3 and control of two parallel connections controls the argon gas inflation mechanism that ball valve 1 is formed; It is characterized in that: also comprise by nitrogen flow meter 4 and the nitrogen that control nitrogen flow meter 4 is opened and control the nitrogen inflation mechanism that ball valve 2 is formed, and make said two inflation mechanisms can only use one mechanical interlock at synchronization.
Argon flow amount meter 3 adopts proton crossing current argon flow amount meter, and nitrogen flow meter 4 adopts proton crossing current nitrogen flow meter.
Said mechanical interlock is a U-shaped draw-in groove 5, has ball valve handle rotation mouth 6 on two sides of U-shaped draw-in groove 5, and the bottom surface of U-shaped draw-in groove 5 is provided with slideway, and argon gas control ball valve 1 is positioned at slideway with the arm pivot post of nitrogen control ball valve 2.
Argon gas control ball valve 1 is installed in the custom-designed U-shaped draw-in groove 5 with nitrogen control ball valve 2 levels; Be designed with special ball valve handle rotation mouth 6 on the side of U-shaped draw-in groove 5; As shown in Figure 2; This rotation mouth is to reserve according to the rotating diameter of a ball valve handle, so synchronization can only allow a handle Unscrew.Following two ball valves of standard state all are in closing condition, and ball valve handle is akinesia all.Have only when the artificial ball valve handle rotation mouth 6 with U-shaped draw-in groove 5 moves to the anastomosing control ball valve handle of needs position; This ball valve handle ability Unscrew; And another ball valve still is in closing condition; Can accomplish like this to prevent that two kinds of gases from palming off as in the stove simultaneously, guarantee equally accurately and timely to switch argon gas and nitrogen.
Specific operation process:
When inactive, argon gas control ball valve 1 all is in closing condition with nitrogen control ball valve 2, and two handles are stuck among the U-shaped draw-in groove 5 simultaneously, and handle can not rotate; When needs during towards argon gas; U-shaped draw-in groove 5 is moved, let ball valve handle rotation mouthful 6 aligning argon gas control ball valves 1, the handle of argon gas control this moment ball valve 1 can rotate freely to be opened; Towards argon gas, and the handle of nitrogen control ball valve 2 is stuck in the U-shaped draw-in groove 5 non-rotatable in stove; As need be in stove during inflated with nitrogen, earlier argon gas is controlled ball valve 1 and closes, move U-shaped draw-in groove 5, let ball valve handle rotation mouthfuls 6 aim at the handle of nitrogen control ball valves 2, the handle of nitrogen control this moment ball valve 2 can rotate freely to be opened, in stove towards nitrogen.
Claims (2)
1. czochralski silicon monocrystal inert protective gas conversion and interlock comprise by the argon flow amount meter (3) of two parallel connections and control the argon gas inflation mechanism that ball valve (1) is formed with the argon gas that two argon flow amount meters of control (3) are opened simultaneously; It is characterized in that: also comprise the nitrogen inflation mechanism of forming by the nitrogen control ball valve (2) of nitrogen flow meter (4) and control nitrogen flow meter (4) unlatching, and make said two inflation mechanisms can only use one mechanical interlock at synchronization.
2. czochralski silicon monocrystal inert protective gas conversion according to claim 1 and interlock; It is characterized in that: said mechanical interlock is U-shaped draw-in groove (5); Have a ball valve handle rotation mouthful (6) on two sides of U-shaped draw-in groove (5); The bottom surface of U-shaped draw-in groove (5) is provided with slideway, and the arm pivot post of argon gas control ball valve (1) and nitrogen control ball valve (2) is positioned at slideway.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205574146U CN202465948U (en) | 2011-12-28 | 2011-12-28 | Converting and interlocking device for czochralski silicon single crystal inert shielding gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205574146U CN202465948U (en) | 2011-12-28 | 2011-12-28 | Converting and interlocking device for czochralski silicon single crystal inert shielding gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202465948U true CN202465948U (en) | 2012-10-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205574146U Expired - Fee Related CN202465948U (en) | 2011-12-28 | 2011-12-28 | Converting and interlocking device for czochralski silicon single crystal inert shielding gas |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202465948U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109695056A (en) * | 2019-01-28 | 2019-04-30 | 内蒙古中环光伏材料有限公司 | A kind of nitrogen crystal pulling pipeline and nitrating crystal-pulling technique |
-
2011
- 2011-12-28 CN CN2011205574146U patent/CN202465948U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109695056A (en) * | 2019-01-28 | 2019-04-30 | 内蒙古中环光伏材料有限公司 | A kind of nitrogen crystal pulling pipeline and nitrating crystal-pulling technique |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121003 Termination date: 20161228 |