CN202443959U - 晶圆清洗刷和晶圆清洗装置 - Google Patents
晶圆清洗刷和晶圆清洗装置 Download PDFInfo
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- CN202443959U CN202443959U CN 201220066406 CN201220066406U CN202443959U CN 202443959 U CN202443959 U CN 202443959U CN 201220066406 CN201220066406 CN 201220066406 CN 201220066406 U CN201220066406 U CN 201220066406U CN 202443959 U CN202443959 U CN 202443959U
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CN 201220066406 CN202443959U (zh) | 2012-02-27 | 2012-02-27 | 晶圆清洗刷和晶圆清洗装置 |
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CN 201220066406 CN202443959U (zh) | 2012-02-27 | 2012-02-27 | 晶圆清洗刷和晶圆清洗装置 |
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CN202443959U true CN202443959U (zh) | 2012-09-19 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105983546A (zh) * | 2015-02-13 | 2016-10-05 | 中芯国际集成电路制造(上海)有限公司 | 晶圆清洗方法 |
CN113020035A (zh) * | 2021-03-04 | 2021-06-25 | 长江存储科技有限责任公司 | 清洗装置 |
CN113118100A (zh) * | 2019-12-31 | 2021-07-16 | 清华大学 | 一种晶圆清洗装置及清洗方法 |
CN113118951A (zh) * | 2019-12-31 | 2021-07-16 | 清华大学 | 一种空化射流喷嘴及具有该喷嘴的晶圆处理装置 |
CN115312436A (zh) * | 2022-08-12 | 2022-11-08 | 智程半导体设备科技(昆山)有限公司 | 一种自动上料的晶圆清洗装置 |
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2012
- 2012-02-27 CN CN 201220066406 patent/CN202443959U/zh not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105983546A (zh) * | 2015-02-13 | 2016-10-05 | 中芯国际集成电路制造(上海)有限公司 | 晶圆清洗方法 |
CN113118100A (zh) * | 2019-12-31 | 2021-07-16 | 清华大学 | 一种晶圆清洗装置及清洗方法 |
CN113118951A (zh) * | 2019-12-31 | 2021-07-16 | 清华大学 | 一种空化射流喷嘴及具有该喷嘴的晶圆处理装置 |
CN113118100B (zh) * | 2019-12-31 | 2022-09-06 | 清华大学 | 一种晶圆清洗装置及清洗方法 |
CN113020035A (zh) * | 2021-03-04 | 2021-06-25 | 长江存储科技有限责任公司 | 清洗装置 |
CN115312436A (zh) * | 2022-08-12 | 2022-11-08 | 智程半导体设备科技(昆山)有限公司 | 一种自动上料的晶圆清洗装置 |
CN115312436B (zh) * | 2022-08-12 | 2023-09-05 | 苏州智程半导体科技股份有限公司 | 一种自动上料的晶圆清洗装置 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130424 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
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TR01 | Transfer of patent right |
Effective date of registration: 20130424 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120919 Termination date: 20190227 |
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CF01 | Termination of patent right due to non-payment of annual fee |