CN202433544U - Wire gating polarizer - Google Patents

Wire gating polarizer Download PDF

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Publication number
CN202433544U
CN202433544U CN2011204951366U CN201120495136U CN202433544U CN 202433544 U CN202433544 U CN 202433544U CN 2011204951366 U CN2011204951366 U CN 2011204951366U CN 201120495136 U CN201120495136 U CN 201120495136U CN 202433544 U CN202433544 U CN 202433544U
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China
Prior art keywords
base material
wire grid
resin
resin coating
polarizer
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CN2011204951366U
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Chinese (zh)
Inventor
田中裕二
横山宏
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Asahi Kasei Corp
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Asahi Chemical Co Ltd
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Abstract

As the former wire gating polarizer is produced by adopting the method of semiconductor technology based on the traditional glass substrate, the former wire gating polarizer lacks productivity, and the wire gating polarizer of the glass substrate has the disadvantages of having high thickness and large weight, and being easy to be broken. Besides the wire gating polarizer based on the resin film base material containing PC and the like has the problems of being resolved, deformed and discolored by the influence of heat, humidity and light. The wire gating polarizer provided by the utility model comprises a base material, a resin film formed on the base material, a metal line formed on the resin film. The wire gating polarizer can separate the base material from the wire gating polarizer under the state of maintaining the structure of the metal wire.

Description

Wire grid polarizer
Technical field
The utility model relates to a kind of wire grid polarizer that can desirable be used in LCD etc.
Background technology
Because the prosperity of photoetching technique in recent years can form the microtexture pattern with other spacing of light wavelength level.Member, goods with pattern of so very little spacing are not only at semiconductor applications, and it utilizes scope also relatively wider at optical field, is very useful.
For example; Thereby the electric conductor line that is made up of metal etc. becomes clathrate to constitute wiregrating with specific spacing arrangement; If its spacing be than incident light little the spacing (for example below 1/2nd) of Duoing; The light of the electric field intensity composition that vibrates with respect to the electric conductor line parallel is all reflected, the light of the electric field intensity composition vertical with respect to the electric conductor line is all seen through, therefore can use as the polaroid that sends single polarized light.The light that wire grid polarizer owing to can reflect does not see through also utilizes it again, therefore considers from the viewpoint of effective utilization of light, and on the purposes of the light supply apparatus of display etc., be very desirable.
In recent years, developing the wire grid polarizer of glass substrate with very narrow clathrate concaveconvex structure of cycle.
For example; Following content is disclosed in patent documentation 1: the film of transparent dielectric is deposited on the surface of transparent glass substrate, next, uses the holographic interference photoetching on photoresist, to form fine trellis; Next; Through ion beam etching or reactive ion etching this structure is transferred on the metal film, on said substrate, forms the array of parallel grid conducting element, thereafter; This grid conducting element is carried out etching as mask to substrate, make thus and support rib conducting element, that have very narrow periodic clathrate concaveconvex structure of cycle.But the manufacturing approach of using semiconductor technology at glass substrate has the such shortcoming of the throughput rate of shortage.Again, the wire grid polarizer of glass substrate has big, heavy, break the shortcoming in such use easily of thickness.
Such method below having proposed in the patent documentation 2; That is, on the PC of thickness 100 μ m (polycarbonate) film substrate, through the UV nanometer embossing; Adopt light-cured resin (Japan Synesis Company system, model PAK01) to form the method that resin coating is made wire grid polarizer; But the method that adopts patent documentation 2 to be disclosed just has following problem: because the viscosity of light-cured resin is high, the resin thickness of light-cured resin becomes inhomogeneous easily when being close to pressing mold; Produce many defectives in the nano impression operation, but also can be made at transmitance, above the polarization property in deviation or batch between the big goods of deviation.And the wire grid polarizer that comprises the resin molding base material of PC etc. also has film base material owing to the problem in the use that influence is decomposed, is out of shape or variable color is such of heat, humidity, light etc.
A kind of wire grid polarizer has been proposed in the patent documentation 3; It comprises: resin base material, be formed on thickness on the said base material be 0.01 μ m to 20 μ m scope resin coating and be formed on the metal wire on the said resin coating; With the TAC film of excellent in te pins of durability or COP film as base material; Will be to the impregnability of these base materials high light-cured resin is as the raw material of resin coating; Make base material and resin coating firmly bond, a kind of little wire grid polarizer of deterioration under hot and humid is provided thus.And such wire grid polarizer comprises under the situation that the resin molding base material coats with patent documentation 2 identically, and the characteristic of film base material is owing to the influence of heat, humidity, light etc. is decomposed, distortion or the such problem of variable color can't be avoided.Again, on slim liquid crystal purposes such as mobile phone, require the polaroid have thickness extremely thin, but also exist the thickness of film base material to determine the problem of lower limit of the thickness of wire grid polarizer.
The prior art document
Patent documentation
Patent documentation 1: Japanese Patent Laid table 2003-502708 communique
Patent documentation 2: Japanese Patent Laid is opened the 2008-145581 communique
Patent documentation 3: Japanese Patent Laid is opened the 2010-151850 communique
The utility model content
The problem that utility model will solve
The purpose of the utility model is to provide a kind of and compares with the wire grid polarizer in the past of above-mentioned that kind, aspect optical property, low defective aspect is all good and can separation substrate and the good wire grid polarizer of processability reliability of resin coating.
Solve the means of problem
The utility model the person study; The result finds on specific base material, to form specific resin coating; The wire grid polarizer that on this resin coating, forms metal wire and constitute has improved the problem in the nano impression operation of above-mentioned that kind; Can also be from wire grid polarizer separation substrate and overlay film under the state of the structure of keeping said metal wire, can be extremely thin, large tracts of land and excellent processability, wire grid polarizer that reliability is good with stable quality manufacturing, thus reached the utility model.
That is, the utility model is described below.
1, a kind of wire grid polarizer; It includes base material, is formed on the resin coating on the said base material; Metal wire with being formed on the said resin coating is characterized in that, said wire grid polarizer can separate said base material from this wire grid polarizer under the state of the structure of keeping said metal wire.
Like 1 described wire grid polarizer, it is characterized in that 2, said resin coating is the thickness of 0.005 μ m to 3 μ m, the peeling force of said base material and said resin coating is below the 5N/25mm.
3, a kind of wire grid polarizer; This wire grid polarizer is that formation thickness is the resin coating of the scope of 0.005 μ m to 3 μ m on base material, and the formation metal wire is made on said resin coating, it is characterized in that; This wire grid polarizer is processed through following method; That is, will be from applied the light-cured resin that becomes resin coating after solidifying at base material, to the time till light-cured resin generation ultraviolet curing is reacted was made as in 2 seconds.
The effect of utility model
The wire grid polarizer of the utility model aspect optical property, low defective aspect is all good, thin and light weight and can make in large area, can separation substrate and the good wire grid polarizer of processability reliability of resin coating.The wire grid polarizer of the utility model can be used in the small-sized LCD that requires the light weight slimming ideally, is the purposes of necessary vehicle-mounted or outdoor application equipment or projection arrangement etc. for the reliability of the height of heat, humidity, light etc.
Description of drawings
Fig. 1 is a schematic cross-section of having removed the shape of metal wire from the example of the utility model.
Fig. 2 is the schematic cross-section of the related wire grid polarizer of the example of the utility model.
Fig. 3 is the schematic cross-section of the related duplexer of the example of the utility model.
Fig. 4 is the schematic cross-section of the related wire grid polarization film of the example of the utility model.
Symbol description
1 is prone to fissility PET film
2 adhesive layers
3 resin coated retes
4 TAC resin molding base materials
5 metal line layers
6 carrier-free adhesive films heavily peel off the side separation layer
The adhesive coating of 7 carrier-free adhesive films.
Embodiment
The wire grid polarizer of the utility model is to include base material, be formed on the resin coating on the said base material and be formed on the wire grid polarizer of the metal wire on the said resin coating, is the wire grid polarizer that can be under the state of the structure of keeping said metal wire separates said base material from this wire grid polarizer.Such method of application below such wire grid polarizer for example can adopt, that is, the wire grid polarization film that only will comprise metal wire and resin coating spreads on the article of the glass of liquid crystal display cells etc., and base material separates and removes from wire grid polarization film.
As the base material that constitutes wire grid polarizer, be preferably temporarily to carry and hold resin coating, can be adjusted into the base material below the 5N/25mm separating the wire grid polarization film and the operation resin coating of base material and the peeling force of base material.
The form of base material does not have special qualification, the such shape of film or the sheet of the such shape of conveyer belt, roller shape, upright and outspoken and smooth thin slice (piece leaf) shape, softness is arranged for example and have the lamella shape etc. of bendability.The material of base material has the inorganic material of the such metal of iron, stainless steel, titanium or resin, glass, pottery etc. for example.In these materials, aspect intensity, permanance, the base material of metal belt shape is comparatively desirable, aspect the operational ease of the easness of the manufacturing of large-area wire grid polarizer, wire grid polarizer, then is that the plastic film substrate of film shape is more satisfactory.As plastic film substrate, be preferably transparent and the uniform material of thickness.
From price, consider with the fissility aspect of base material; Be preferably; For example polyethylene (PE) resin, acrylic resin (PP), cross-linked polyethylene resin, Corvic, cycloolefin (COP) resin, cyclic olefine copolymer (COC) resin, polystyrene (PST) resin, pet resin (PET), polybutylene terephthalate (PBT) resin (PBT), PEN (PEN) resin, polyarylate (PAR) resin, Merlon (PC) resin, polyamide (PA), polyimides (PI) resin, PEI (PEI) resin, polyphenylene oxide resin, modified polyphenylene ether resin, polyether sulfone (PES) resin, polysulfone resin, polyether ketone resin, acetal resin (POM), plexiglass, Triafol T (TAC) resin etc.; Consider that from processability, intensity, excellent heat resistance aspect PET, PC, COP, COC, TAC are more preferably.
Its material of the thickness of base material is all not special to be limited; Usually can use the base material of the scope of 4 μ m~2mm, but consider that from easy, the operating aspect made the scope of 8 μ m~500 μ m is more satisfactory; Consider that from continuous throughput rate aspect then the scope of 15 μ m~200 μ m is desirable especially.
Be selected from the manufacturing process of wire grid polarizer, keeping operation, transporting the sprawling in the more than one operation in the operation of operation, wire grid polarization film; Base material can temporarily carry holds resin coating; In the operation of separating wire grid polarization film and base material, need to keep the structure of metal wire.The structure of keeping metal wire is meant, before and after the operation of separating wire grid polarization film and base material, does not give the damage of degree that the performance of wire grid polarization film is impacted in the unexpected part of wire grid polarization film.Unexpected part is meant, for example the shear line when shearing wire grid polarization film according to purposes wittingly and it is made desirable shape and, the place near the zone that is not used in this purposes in the shear line and the outside.So-called damage is meant, for example diameter is crossed damaged, the pollution of the wire grid polarization film of 500 μ m size, the diagonal distortion of metal wire etc.
In order under the state of the structure of keeping metal wire like this, to separate polarizing coating and base material, the peeling force that is preferably resin coating and base material can be adjusted into the base material below the 5N/25mm.In order in the shorter time, to carry out the separation circuit of wire grid polarization film and base material more efficiently, be preferably peeling force and can be adjusted into the base material below the 3N/25mm.Method of adjustment as peeling force; Peeling force in the operation before the operation of separating wire grid polarization film and base material is under the situation below the peeling force in the operation of separating wire grid polarization film and base material; Hold resin coating though can temporarily stably carry, for this reason, the peeling force of wire grid polarization film and base material is more satisfactory more than the 0.1N/25mm; In order in the shorter time, to carry out the operation of front efficiently, the peeling force of wire grid polarization film and base material is desirable more more than the 0.5N/25mm.
Concrete grammar as such adjustment peeling force; Have for example: (first) to be soaked into the physical bond power that waits and adjusted in order to utilize for the method utilizing chemical bond power to adjust to import or remove functional group with the adhesion of the face of the resin coating of base material bonding, (second), and the reinforcement of the immersion conditions of the resin coating material of composition through being prone to bonding coating, corona treatment, surface roughening processing, resin coating material or temperature, time, pressure etc. waits the method for strengthening adhesion.Perhaps, through the coating of difficulty bonding, burin-in process, surface densification handle, the composition of resin coating material or temperature, constantly, the mitigation of the immersion conditions of the resin coating material of pressure etc. waits the method that reduces adhesion.(the third) method etc. that the means that can carry out outside adjustment are adjusted the peeling force of base material and resin coating such as controls through static, magnetic force, vacuum suction, machinery.
In these methods; Through the coating of difficulty bonding, burin-in process, surface densification handle, the composition of resin coating material or temperature, hour, the mitigation of the immersion conditions of the resin coating material of pressure etc. waits the method that reduces adhesion more satisfactory; Especially; To on base material film, become the time that makes after the light-cured resin of resin coating till its ultraviolet curing reaction behind the coating curing was made as in 2 seconds; Because it is can adjust amounts of saturation lower, so more satisfactory to the light-cured resin of base material film.Further, be made as 1 second with interior then desirable more.In addition, said here curing reaction is meant, after curing reaction, becomes the reaction that can be used as the state of resin coating, and Photocurable resin composition can 100% curing.Again, be made as-20 ℃~150 ℃, can bring into play adhesion as purpose through the delivery temperature that will make light-cured resin ultraviolet curing when reaction.Better is 0 ℃~60 ℃.
With respect to this method, patent documentation 3 disclosed contents do, base material and resin coating are firmly bondd, and the deterioration that is suppressed under hot and humid is one of purpose.Based on this thought, just do not have imagination that light-cured resin is not fully soaked at it and before base material, solidify such transport condition.
An aspect, technological thought and solution thereof that the peeling force with base material and resin coating of the utility model keeps lowlyer are to be conceived to base material is separated such problem with resin coating in the utility model, are therefore found first.
On the other hand; Under the situation of peeling force in the operation of separating wire grid polarization film and base material less than the peeling force in the operation before the operation of separating wire grid polarization film and base material; Concrete grammar as that kind adjustment peeling force; The method that peeling force in the operation of separating wire grid polarization film and base material is improved through following method is arranged for example; Promptly to the material at the interface of base material or resin coating or base material and resin coating, (fourth) adopts the resin of the such ease of solubility that is soluble in solvent of PST resin, through with the method that contacts the adjustment peeling force of solvent, the resin that (penta) adopts the such easy pyrolytic of POM resin; Method, (own) through heating adjustment peeling force adopt photosensitive material, adjust the method for peeling force etc. through exposure.Except that these, also have for example: the official post interface of (heptan) expansion coefficient through utilizing base material and resin coating produces the method for adjusting peeling force in the crack, (suffering) are controlled etc. the peeling force of means adjustment base material and resin coating that can outside adjustment through static, magnetic force, vacuum suction, machinery method etc.
The preferably processing of the peeling force of the adjustment of the above-mentioned that kind of enforcement and resin coating on base material; For example; In order to strengthen the adhesion with the face of resin coating bonding, implement to be used to make that chemical bond becomes possible functional group's processing, coating processing, the easy bonding coating of the physical bond that is used to soak into etc., priming paint (プ ラ イ マ one) processing, corona treatment, plasma treatment, high-energy ray treatment with irradiation, surface roughening processing, poriness processing etc. are more satisfactory.Again; As the means that are adjusted at the peeling force in the operation of separating wire grid polarization film and base material, implement to be used to import ease of solubility, be prone to decomposability, photonasty, static, magnetic force, vacuum suction, machinery are controlled etc. can be carried out comparatively ideal such as the coating of the means of outside adjustment, the processing of machinery.
On base material, cooperate plastifier, anti-oxidant, ultraviolet light absorber, dyestuff, pigment, fire retardant, have gas barrier materials with function, sticker etc. according to purpose; Perhaps with they compound duplexers that turns to, it also is more satisfactory using the material that so obtains.
As resin coating; Thickness is that the resin coating that constitutes of the formed body by light-cured resin of the scope of 0.01 μ m~3 μ m is more satisfactory, and on the surface of this resin coating, having highly is that the scope of 0.01 μ m~20 μ m, the spacing of extending at specific direction are the well-regulated concaveconvex structure of the scope of 0.01 μ m~20 μ m.Through obtaining such structure, on the sag and swell of resin coating, form metal wire and become easy.
As the characteristic of wire grid polarizer, known have: for accessing sufficient polarization property as 1/4th of the light wavelength of object when following, further, spacing is more little in the spacing of metal wire, and polarization property can improve more.
The sag and swell on resin coating surface and the spacing of metal wire are below the 20 μ m, can be apparent in the polarization characteristic of Terahertz bandwidth, and spacing is below the 150nm, also can manifest the characteristic till the visibility region, and be therefore more satisfactory.Further, spacing is below the 120nm, can have in the lump near the polarization characteristic of the short-wavelength light the 400nm; Be the words about 10nm; Can have polarization characteristic in the lump to ultraviolet region, therefore especially desirable, corresponding with the situation of dwindling spacing like this; Extinction ratio in any wavelength region may also all increases, and is therefore desirable more.
Remain the purpose that necessarily has full intensity securely from the purpose of the layer that constitutes the ambient air that comprises metal wire in order to improve optical property and for interval with metal wire; The height of the concaveconvex structure on the surface of resin coating is 0.5 times~2.0 times a scope of the spacing of this concaveconvex structure, and especially 1.0 times~2.0 times scope is more satisfactory.
The not restriction of the cross sectional shape of the concaveconvex structure on resin coating surface.These cross sectional shapes can be the sine wave shapes of trapezoidal, rectangle, square, prism-like or semicircle etc.At this, sine wave shape is meant to have the curve part that is repeated alternately to form by recess and protuberance.Curve part is that crooked curve gets final product, and for example, the shape that attenuates in the middle of the protuberance also is contained in the sine wave shape.Again, from the protuberance of the easy covering resin overlay film of dielectric layer with and the purpose of at least a portion of side, preferable case is that the end of said shape or summit, paddy portion are the shape with mild curvature bending.
The thickness of resin coating is thin more, can confirm following these desirable effects more: (a) can suppress the absorption of resin coating to light, improve transmitance; (b) can reduce volatility residual component amount in the resin coating, the pollution that causes such as prevent to ooze out; (c) reduce the crimping that cure shrinkage produced, improve the planarity of wire grid polarizer because of light-cured resin; (d) can improve the bendability of resin coating, be suppressed at the generation in the crack when making the wire grid polarizer distortion; The following of the stress (ying power ス ト レ ス) that the interlayer at resin coating and resin base material or metal fine that (e) causes for the variation by temperature, humidity produces improves the steady production rate in the manufacturing process, the reliability increase in the environment for use etc.
On the contrary; If adopt nanometer embossing make resin coating the thickness attenuation and make the words of transfer printing thing; The problem that can have following these decrease in yield: (f) the small foreign matter in sneaking into light-cured resin or swim when the small foreign matter around the production equipment is blended into transfer surface produces the frequency gets higher of lenticular defective around foreign matter; (g) owing to unfavorable conditions such as sudden and violent muscle (being coated with the り muscle) or liquid contraction, it is difficult that light-cured resin is coated on the resin base material equably, therefore produces the frequency gets higher of transfer printing defective; (h) light-cured resin is subjected to oxygen easily and hinders the frequency gets higher of the residual generation transfer printing of unreacted component defective; (i) in the operation of separating wire grid polarization film and base material, on wire grid polarization film, produce defective etc. easily.
The thickness of the resin coating that wire grid polarizer comprised of the utility model is not special to be limited, but on the purposes of the slim liquid crystal of mobile phone, is more satisfactory below the 80 μ m.The more desirable thickness of resin coating is the scope of 0.001 μ m~3 μ m, and the composition of the specific light-cured resin through the utility model and the most suitableization of transfer printing process can be adjusted into such thickness range and make.
The thinner thickness of the resin coating of the support metal wire of the wire grid polarizer of the utility model is below the 3 μ m, has therefore improved the bending with respect to wire grid polarizer, the permanance of cutting out the pressure of processing, differential contraction stress etc.Can the damage of the degree of performance that influences wire grid polarization film in the operation of separating wire grid polarization film and base material be suppressed to bottom line again.In these areas, the thickness of resin coating is desirable more below the 2 μ m.
Consider that from the fully thin flatness that makes wire grid polarization film of the resin coating this respect that improves the thickness of resin coating is also desirable more below the 1 μ m, is especially desirable below the 0.5 μ m.On the other hand, under the extremely thin situation of resin coating, the problem that exists the operability in the separation circuit of wire grid polarization film and base material to worsen, from this point consideration, the thickness of resin coating is more satisfactory more than the 0.001 μ m.
Like this; The pressure of the stress the when wire grid polarizer of the utility model is stood bending, vibration or cut-out etc.; Cut off also than being easier to, cut off line around the breaking, fracture and also can not enlarge of resin coating, therefore can cutting be shape or several millimeters square small pieces arbitrarily.Again, owing to can make the thinner thickness of resin coating, the wire grid polarizer that therefore can confirm the utility model also has high reliability for the variation of temperature, humidity.In general; Under the situation that the specific surface area of material increases, have the tendency of reliability decrease, but if under the situation of the wire grid polarizer of the utility model; Can infer; General improved in the following of resin coating, consequently increased reliability on the contrary with the stress of the interlayer generation of resin base material, metal fine owing to make the thickness attenuation of resin coating.
In order to make the thickness attenuation of resin coating, and reduce the generation of transfer printing defective, require the viscosity of employed light-cured resin low, good from the release property of pressing mold, good with the cohesiveness of resin base material.
Employed light-cured resin is preferably the composition that meets the following conditions simultaneously in the utility model; That is: (A) contains the monomer more than a kind with the scope of 20~60 weight %, and said monomer more than a kind contains acryl and/or the metering system aldehyde radical more than 3 in 1 molecule; (B) be that the composition of solid is more than the 98 weight % through the photocuring reaction be combined into; (C) viscosity 25 ℃ the time is below the 10mPas.Further be preferably, (D) contain the monomer of promising N-vinyl compound with the scope of 5~40 weight %, (E) scope with 0.1~10 weight % contains the silicon compound that comprises acryl and/or metering system aldehyde radical.(F) from the adjustment of viscosity and, the purpose of the physical property of adjustment solidfied material, further cooperate other monomer then even more ideal.(G) match ratio that is engaged to the Photoepolymerizationinitiater initiater of Photocurable resin composition is that the scope of 0.1~5.0 weight % is more satisfactory.(H) foreign matter in the Photocurable resin composition (particle) preferably removes through methods such as filtrations.During filtration, using the minimum grain size that can catch is that the following filtrator of 1 μ m is more satisfactory, the yield rate when having made the resin coating attenuation in order to improve, and the minimum grain size that can catch is that the filtrator below the 0.5 μ m is then desirable more.No matter be which kind of minimum grain size, the capturing efficiency of filtrator is preferably more than 99.9%.
As Photoepolymerizationinitiater initiater; Have for example: 2; 2-dimethoxy-1,2-diphenyl ethyl ketone, 1-hydroxy-cyclohexyl phenyl ketone, 2-hydroxy-2-methyl-1-phenyl-1-acetone, benzophenone, 1-hydroxy-cyclohexyl phenyl ketone, 1-[4-(2-hydroxy ethoxy)-phenyl]-2-hydroxy-2-methyl-1-acetone, 2-hydroxyl-1-{4-[4-(2-hydroxy-2-methyl propiono)-benzyl]-phenyl }-2-methylpropane, phenyl glyoxalic acid methylester, 2-methyl isophthalic acid-[4-(methyl mercapto) phenyl]-2-morpholinyl-1-acetone, 2-benzyl-2-dimethylamino-1-(4-morpholinyl phenyl) butanone, 1,2-dimethylamino-2-(4-methyl-benzyl)-1-(4-morpholine-4-base-phenyl) butanone, two (2; 4; The 6-trimethylbenzoyl) phenyl phosphine oxide, two (2,4, the 6-trimethylbenzoyl) phenyl phosphine oxide, (2; 4; The 6-trimethylbenzoyl) diphenyl phosphine oxide, two (η 5-2,4-cyclopentadiene-1-yl)-two (2,6-two fluoro-3-(1H-pyrroles-1-yl)-phenyl) titanium, 1; 2-octane diketone, 1-[4-(thiophenyl)-2-(O-benzoyl oxime)] ethyl ketone, 1-[9-ethyl-6-(2-methyl benzoyl)-9H-carbazole-3-yl]-1-(O-acetyl oxime) etc.Especially, in the present invention, consider from the viewpoint of adjustment fissility; Preferred (2,4, the 6-trimethylbenzoyl) diphenyl phosphine oxide that uses with high sensitivity, low volatility; 1; 2-octane diketone, 1-[4-(thiophenyl)-2-(O-benzoyl oxime)] ethyl ketone, 1-[9-ethyl-6-(2-methyl benzoyl)-9H-carbazole-3-yl]-1-(O-acetyl oxime) etc.
These Photoepolymerizationinitiater initiaters can use separately, also can make up more than 2 kinds and use.Also can make up uses such as other known photopolymerization promoter and sensitizer.
In Photocurable resin composition; In the scope of not damaging original purpose; The additive in the past that can contain other as required, for example mobile adjustment agent, levelling agent, organic and inorganic dyestuff and pigment, extender, plastifier, lubricant, reinforcing agent, anti-oxidant, xanthochromia prevent that agent, ultraviolet light absorber, blueing agent, deposition from preventing agent, foam-breaking agent, abrasion performance imparting agent, low friction compound, electrostatic prevention agent interfering, antifoggant etc.
The nano imprint lithography that resin coating is preferably through rolling (Japanese: ロ one Le プ ロ セ ス) operation is shaped.For example, Photocurable resin composition is flow into have in the mold of concaveconvex structure of upset shape of the concaveconvex structure that becomes the resin coating surface, and make its photocuring, be shaped thus.As making Photocurable resin composition flow into the method in the mold; Have for example with the Photocurable resin composition film like be coated on the base material after; Base material is contacted with mold; The method of filling between the concaveconvex structure of mold and the base material, or with the Photocurable resin composition film like be coated in the surface of mold after, contact the method for between the sag and swell of mold and resin base material, filling with base material through making mold.
Apply the not special restriction of method of Photocurable resin composition, rolling method, (little) gravure rubbing method, airblade coating method, scraper plate coating (Block レ one De コ one タ one) method, cutter coating (Na イ Off コ one タ one) method, bar type rubbing method, curtain (stream) formula rubbing method, engagement rubbing method, drop rubbing method, curtain coating coating (キ ヤ ス ト コ one タ one) method, rotary screen printing (ロ one タ リ one ス Network リ one ソ) method, immersion coating method, gap nozzle type coating (ス ロ Star ト is リ Off イ ス コ one タ one) method, scraper rubbing method, spraying process, spin-coating method, extrusion coated, spray formula rubbing method are for example arranged for example.
Which kind of method no matter, it all is very important not making bubble sneak in the concaveconvex structure of mold and reduce to remain on the thickness of the Photocurable resin composition between mold and the resin base material irregular.
Preferred situation is that the temperature of mold is retained as in 25 ℃~100 ℃ scope necessarily.The temperature of mold is more than 25 ℃ the time, owing to have the effect that the release property from mold after the curing reaction of effect that the cohesive force of flowability raising and resin coating and the resin base material of light-cured resin improves, resin coating improves, and therefore ideal comparatively.Again, the temperature of mold is below 100 ℃ the time, and the thermal deformation of base material is little, and is therefore comparatively desirable.30 ℃~80 ℃ scope is better, and 35 ℃~70 ℃ scope is also desirable more, and 40 ℃~65 ℃ scope is especially desirable.
The thickness of resin coating can through Photocurable resin composition to the loading of mold and push base material and the pressure of mold is adjusted.
Again, the cleanliness of transfer apparatus periphery are comparatively desirable more than 10000 grades, are better more than 1000 grades, are also desirable more more than 100 grades, are especially desirable more than 10 grades.
In order to improve the adaptation of resin coating and metal wire, be preferably before forming metal wire, be provided with dielectric layer with the protuberance on covering resin overlay film surface, with and at least a portion of side surface part.The material that the closing force of the metal of the dielectric employing of formation dielectric layer and resin coating and formation metal wire is strong is comparatively desirable; For example can use; The single component of the oxide of the single component of the oxide of silicon (Si), nitride, halogenide, carbonide or their potpourri or aluminium (Al), chromium (Cr), yttrium (Y), zirconium (Zr), tantalum (Ta), titanium (Ti), barium (Ba), indium (In), tin (Sn), zinc (Zn), magnesium (Mg), calcium (Ca), cerium (Ce), copper metals such as (Cu), nitride, halogenide, carbonide or their potpourri (in the dielectric single component, sneaking into the dielectric of other element, single component or compound).
As the metal of formation metal wire, not special the qualification for example is preferably by aluminium (Al), silver or their alloy formation.Consider from the viewpoint of cost and permanance, constitute desirable more by Al or its alloy.
Metal wire is formed on the resin coating; Be preferably formed in the protuberance that is pre-formed to the covering resin overlay film, with and the dielectric layer of at least a portion of side surface part on method do not have special qualification; For example; Be preferably physical vapor depositions such as vacuum vapour deposition, cathode vacuum metallikon, ion plating method, especially be preferably, can be optionally with metal stacking at protuberance, or metal selective ground is partial to the such method in a side side that is layered in protuberance; For example, vacuum vapour deposition is arranged for example.
Consider that from the viewpoint of the structural strength of optical characteristics and wiregrating the width of metal wire is that 0.2 times to 0.6 times the scope of spacing of concaveconvex structure on surface of resin coating is more satisfactory.Again, the optical characteristics of wire grid polarizer, the structural strength of wiregrating and the closing force of metal wire and concaveconvex structure are taken in, the height of metal wire is that the scope of 20nm to 220nm is comparatively desirable, for the scope of 50nm to 200nm desirable more.Again, metal wire is set to extend to the top at protuberance top on the surface of resin coating, is more satisfactory on optical characteristics.
From wire grid polarization film is spread over the purpose on the desirable article, preferred situation is that the wire grid polarizer of the utility model is formed with adhering agent layer or adhesive layer on the surface of metal wire.Be formed with protective seam from making polaroid have antifouling and purpose spatter property, being preferably on the surface of metal wire again.Do not limit the layer with function that is selected from these adhering agent layers, adhesive layer, protective seam is special; Can use existing material known; But for the performance of the polaroid in the environment for use that is suppressed at hot and humid degree reduces, the acid number of these layers is comparatively desirable below the 5.0mgKOH/g.On the surface of metal wire, form in these layers; On the optical property this point of exhibit excellent; Being sandwiched in metal wire zone each other is not to use the material of the layer that forms these to fill up; But fill up more satisfactoryly with the little material of material that air or refractive index ratio form these layers, and manifesting on the good permanance this point of wire grid polarizer, be sandwiched in metal wire zone each other and fill up comparatively desirable with the material of the layer that forms these.
Cooperate plastifier, anti-oxidant, ultraviolet light absorber, dyestuff, pigment, fire retardant, have the adjustment agent of gas barrier materials with function, refractive index etc. having on the layer of these functions according to purpose; Perhaps with they compound duplexers that changes into, it also is more satisfactory using the material that so obtains.Under the situation that adopts protective seam,, be preferably formation dielectric film or moth ocular structure on the surface from the purpose of control light reflectivity again.
The wire grid polarizer of the utility model can create through being included in the method that forms the operation of resin coating on the base material and on said resin coating, form the operation of metal wire as previously mentioned.Further, include the wire grid polarization film that is formed on the metal wire on the resin coating through comprising the method for separating the operation of said base material from this wire grid polarizer, can producing.
Not special qualification of method of separating said base material from wire grid polarizer; Have for example; For example offer the user as wire grid polarizer, make wire grid polarization film spread over the stage of desirable article, the user forms adhering agent layer on the surface of metal wire; And be bonded on the desirable article; Next separate to remove the method for the base material of wire grid polarizer, or the wire grid polarizer that will on the surface of the metal wire of wire grid polarizer, be formed with the layer with function that is selected from adhering agent layer, adhesive layer, sealer offers the user, the user is bonded in them on desirable article; The method of next separating the base material of removing wire grid polarizer; Or will on the surface of the metal wire of wire grid polarizer, form be selected from adhering agent layer, cementing agent once, the layer with function of sealer, next will separate the resultant wire grid polarization film of the base material of removing wire grid polarizer and offer the user, the user directly is used in it method etc. of desirable purposes.
To make the method for wire grid polarization film can implement through (バ Star チ) mode in batches from the wire grid polarizer separation substrate, also can implement through the continuation mode of having used roll milling technology etc.Will be from the wire grid polarizer separation substrate under the state of the structure of keeping metal wire; If the peeling force of base material and resin coating is adjusted into below the 5N/25mm; Then can mechanically peel off,, can use existing known tenter frame apparatus, coiler gear etc. as stripping off device.Perhaps the material at the interface of base material or resin coating or base material and resin coating uses the resin of the such ease of solubility that is soluble in solvent of PST resin as above-mentioned; Through with the contacting of solvent; Peeling force is adjusted into the value that is significantly less than 5N/25mm, thus peel off almost non-loadedly, or the dissolving method etc. of removing base material also be fine.
Separate the removal base material through the wire grid polarizer from the utility model, the interface of resin coating and base material is exposed to the surface of wire grid polarization film.Can directly use the new surface that comes across this wire grid polarization film like this, can also on new surface, further form adhesive coating, tack coat, thereby use on article bonding ground arbitrarily with other.Also can sealer be set on new surface, from the purpose of control light reflectivity, also more satisfactory at new surface formation dielectric film or moth eye structure.
[embodiment]
According to embodiment the utility model is described.
In addition, the main measured value among the embodiment is measured through following method.
(measurement of viscosity)
Adopt E type viscosity meter (eastern machine industry corporate system model RE550L), 1.0ml estimates with the test portion amount.The measurement of viscosity is carried out under 25 ℃ temperature all.
(peeling force of resin coating and base material)
For the base material that is formed with resin coating; Perhaps on resin coating, be formed with the surface applied cementing agent of metal wire on the surface of resin coating; After the coat side that fits in the easy bonding PET film that disbonded test uses (Japan weaving system model A4100); Be cut to the oblong-shaped of length 100mm, width 10mm, produce the test portion of peeling force evaluation usefulness.Adopt tension tester (A&D corporate system model RTG-1210), the speed of under room temperature (23 ℃), dividing with 1m/ is carried out 90 degree disbonded tests to this test portion, and estimates.
(measurement of transmitance, degree of polarization)
For the wire grid polarizer of embodiment, comparative example, adopt spectrophotometer (Japanese beam split corporate system model V-7100) to measure degree of polarization and light transmittance., measure the light intensity that sees through under the parallel-nicol with respect to linearly polarized light, the vertical Niccol state here, degree of polarization, light penetration are calculated according to following formula.Again, measuring wavelength is 550nm.
Degree of polarization=[(Imax-Imin)/(Imax+Imin)] * 100%
Light penetration=[(Imax+Imin)/2] * 100%
, see through light intensity when Imax is parallel-nicol here, see through light intensity when Imin is vertical Niccol.
(measurement of acid number)
Sticker for adhering agent layer is estimated.Add the 3.0g sticker N of 100mL to, in the dinethylformamide, stir an evening, make its dissolving.Add the phenolphthalein solution put down in writing among the several JIS-K-8001, or the thymol blue of 0.1g is dissolved in adds water in the 50ml ethanol to the resulting thymol blue solution of 100ml.The sample solution that makes sticker dissolving is through adopting potassium hydroxide (KOH) ethanolic solution of the 0.1mol/l that is put down in writing among the JIS-K-0070, carries out acid-base titration and measures acid number while stir.What KOH solution used is following such solution; It carries out acid-base titration, the concentration ratio (coefficient) of having obtained the concentration of the KOH that calculates according to the lysed amount of reality and having calculated according to the result who is obtained by above-mentioned titration through the hydrochloric acid that adopts the known 0.1mol/l of coefficient (Off ア Network タ one).About the terminal point of titration, under the situation that adopts phenolphthalein, be as terminal point with lasting 30 seconds point of light red.Because the cause of sticker when being dissolved in DMF, lurid material can occur being colored as, at this moment,, therefore used thymol blue based on the judgement of the terminal point of the variable color of the phenolphthalein difficulty that becomes.Using under the situation of thymol blue, the point that yellow green is continued 30 seconds is as terminal point.Again, in sticker, contain under the situation of UV absorbing agent etc.,, produce the lurid situation that is colored as sometimes, therefore used thymol blue owing to be dissolved to DMF.The judgement of terminal point be buff is continued 30 seconds point as terminal point, the formula below acid number adopts is calculated.
A=B×f×5.611/S
A: acid number (mgKOH/g)
B: the amount (ml) of the employed 0.1mol/l KOH of titration ethanolic solution
The coefficient of f:0.1mol/l KOH ethanolic solution
S: the quality of sticker (g)
(embodiment 1)
(manufacturing of wire grid polarizer)
As the monomer for the acrylate compounds more than the trifunctional, the N-vinyl of 32 quality %-2-Pyrrolidone conduct is the monomer of N-vinyl compound, 1 of 33 quality % with the trimethylolpropane triacrylate that is combined with 32 quality %; 9-nonanediol diacrylate is as other monomers; 2,4 of 2 quality %, 6-trimethylbenzoyl-diphenyl-phosphine oxide is as Photoepolymerizationinitiater initiater; And the material of the silicon diacrylate of 1 quality % filters, and concocts to be light-cured resin 1.Its viscosity is 7.9mPas.
Thickness be 80 μ m, width be 250mm, length be apply above-mentioned light-cured resin 1 continuously on the TAC resin molding of roller shape of 200m after; Make on one side after 0.2 second its with the surface on have a fine grid pattern roller die contact; Make its ultraviolet curing on one side, come replicated fine grid pattern continuously thus.After the cross section through this transfer film of electron microscope observation, confirming the upset shape accurately that is shaped as roller die to fine grid pattern, is that spacing is 100nm, highly is the line & spatial configuration of 105nm.The thickness of resin coating is 0.4 μ m.Continuous film forming apparatus through continuous manufacturing transfer film has formed silicon nitride film in the transfer surface side of transfer film.Next, on silicon nitride film, form the metal wire of aluminium, make wire grid polarizer 1 thus.
(the peeling force evaluation of resin coating)
About transfer film, in its transfer printing apply above-mentioned light-cured resin 1 as sticker with the thickness of 1 μ m on the face of fine grid pattern one side, and fit in the easy bonding PET film that disbonded test is used, produce the test portion 1 (with reference to Fig. 1) of peeling force evaluation usefulness.Again,, on the face of the metal wire that is formed with aluminium one side, apply sticker similarly, make the test portion 2 (with reference to Fig. 2) of peeling force evaluation usefulness, respectively peeling force is separately estimated for wire grid polarizer 1.The result of test is that in whole scope of test portion, test portion 1 is all peeled off at the interface of resin coated rete and base material with test portion 2 smoothly.Under the situation of test portion 1 and test portion 2, the peeling force of resin coating and base material all is 4.6N/25mm.Can be with the reason that the peeling force at the interface of resin coated rete and base material is adjusted lowlyer like this; Through applying behind the light-cured resin to making the time set till its ultraviolet curing reaction is 0.2 second such short time, can light-cured resin be soaked into and adjust lowlyer in the amount of TAC resin molding.
In addition, measured before the disbonded test respectively and transmitance and degree of polarization after the disbonded test for test portion 2, these characteristics are all kept.Again, on one side see through the test portion 2 after the disbonded test with natural light light source and polarized light source, observing through 10 times magnifier on one side has zero defect, but all not have to find to peel off at the whole face of release surface caused damaged, distortion etc. wire grid polarization film unusually.These results are shown in the table 1.
(comparative example 1)
(manufacturing of wire grid polarizer)
During the resin coating of fine grid pattern that on the TAC base material, formed transfer printing; On the TAC resin molding, apply continuously after the above-mentioned light-cured resin 1; Under the state that has applied light-cured resin; Under 20 ℃, the standard environment of 50%RH, the TAC resin molding is transported 5 seconds, make its ultraviolet curing while the roller die that makes TAC resin molding and surface have fine grid pattern afterwards contacts, thus; Except the fine grid pattern of continuously transfer printing, likewise make wire grid polarizer 2 with embodiment 1.
(the peeling force evaluation of resin coating)
Likewise make test portion 3 that the disbonded test of producing from transfer film uses and the test portion of using from the disbonded test that wire grid polarizer 2 is produced 4 with embodiment 1; Estimated peeling force separately respectively; But during 5 seconds till the coated back of light-cured resin to the ultraviolet curing reaction; Because light-cured resin soaks into dearly in the TAC resin molding; Therefore whichever test portion, the peeling force of resin coating and base material is all extremely strong, and the interface portion of the easy PET of the bonding film that TAC resin molding base material can be these interface peels before splits, perhaps partly uses in cementing agent and disbonded test with wire grid polarization film is peeled off.Adopt the method for such comparative example, can't be from wire grid polarizer 2 separation substrates.These results are shown in the table 1.
(comparative example 2)
(manufacturing of wire grid polarizer)
Light-cured resin is replaced with the Photocurable resin composition of selling on the market (trade name PAK-01 Japan Synesis Company system), likewise attempt carrying out the manufacturing of wire grid polarizer with embodiment 1.The viscosity of this resin combination is 72.0mPas.But in the operation of continuously transfer printing, because the applied thickness of resin is inhomogeneous, bubble gets into easily when contacting with roller die, and after having begun transfer printing, roller die can be polluted by the residue that adheres to of resin at once.Therefore; Abandoned manufacturing, but adopted scraping strip coating machine on the foursquare TAC resin molding of thickness 80 μ m, width 200mm, length 200mm, to apply PAK-01 again, then based on continuous processing; After 5 seconds, make on one side it and surperficially have the width 100mm of fine grid pattern, the flat pressing mold of length 100mm contacts; Make its ultraviolet curing on one side, come the replicated fine grid pattern thus, but partly on pressing mold, produced the residue that adheres to of resin.After the cross section through this transfer film of electron microscope observation; Confirm to be roughly the upset shape of roller die to the shape of fine grid pattern; Be that spacing is 100nm, highly is the line & spatial configuration of 105nm; But on pressing mold, produced the place of adhering to residue of resin, having many mean diameters is the zone that does not have fine grid pattern of 200~2000 μ m.Again, the thickness of resin coating has the inhomogeneous of a little, in the scope of 5~8 μ m.Except using batch-type to make the batch-wise film forming apparatus of this transfer film, likewise form silicon nitride film in the transfer surface side of transfer film with embodiment 1.Next, on silicon nitride film, form the metal wire of aluminium, make wire grid polarizer 3 thus.
(the peeling force evaluation of resin coating)
Likewise make test portion 5 that the disbonded test of producing from transfer film uses and the test portion of using from the disbonded test that wire grid polarizer 3 is produced 6 with embodiment 1; Estimated peeling force separately respectively; The whichever test portion; The peeling force of resin coating and base material is all extremely strong; TAC resin molding base material can before these interface peels with wire grid polarization film split, or the interface portion of the easy bonding PET film partly used in cementing agent and disbonded test peel off, perhaps owing to when transfer printing, partly on pressing mold, produced the residue that adheres to of resin, so the resin coated rete is that the cohesion breakage takes place at the center with the defective part of the resin coated rete that produced.Adopt the method for such comparative example, can't be from wire grid polarizer 3 separation substrates.These results are shown in the table 1.
(embodiment 2)
(manufacturing of wire grid polarizer)
As the monomer for the acrylate compounds more than the trifunctional, the N-vinyl of 15 quality %-2-Pyrrolidone conduct is the monomer of N-vinyl compound, 1 of 57 quality % with the trimethylolpropane triacrylate that is combined with 25 quality %; 9-nonanediol diacrylate is as other monomers; 2,4 of 2 quality %, 6-trimethylbenzoyl-diphenyl-phosphine oxide is as Photoepolymerizationinitiater initiater; And the filtration of the material of the silicon diacrylate of 1 quality %, be mixed into light-cured resin 2.Its viscosity is 8.8mPas.
Except using this light-cured resin 2, likewise make wire grid polarizer 4 with embodiment 1.
(the peeling force evaluation of resin coating)
Likewise make test portion 7 that the disbonded test of producing from transfer film uses and the test portion of using from the disbonded test that wire grid polarizer 4 is produced 8 with embodiment 1, estimated peeling force separately respectively.The result of test is that in whole scope of test portion, test portion 7 is all peeled off at the interface of resin coated rete and base material with test portion 8 smoothly.Under the situation of test portion 7 and test portion 8, the peeling force of resin coating and base material all is 1.3N/25mm.
In addition, measured before the disbonded test respectively and transmitance and degree of polarization after the disbonded test for test portion 8, these characteristics are all kept.Again, on one side see through the test portion 8 after the disbonded test with natural light light source and polarized light source, observing through 10 times magnifier on one side has zero defect, but all not have to find to peel off at the whole face of release surface caused damaged, distortion etc. wire grid polarization film unusually.These results are shown in the table 1.
(manufacturing of wire grid polarization film 4)
On the TAC resin molding base material of the reel shape of thickness 80 μ m, width 250mm, length 200m, cross over the total length of base material and form wire grid polarizer 4 with the width of 200mm.Utilize the carrier-free adhesive film 1 (trade name " WT#5402A ": ponding chemical industrial company system), adopt volume to volume (Japanese: ロ one Le Star one ロ one Le of this wire grid polarizer 4 and the reel shape of width 250mm, length 200m; English: the laminating machine of mode Roll to Roll), make the duplexer 1 (with reference to Fig. 3) that the aluminum steel face of the light release surface of carrier-free adhesive film and wire grid polarizer 4 has been fitted continuously.Measure the acid number of the adhesive coating of carrier-free adhesive film 1, be 0.8mgKOH/g.Next, peel off removal TAC film base material continuously from duplexer 1, thereby be manufactured on the wire grid polarization film 4 (with reference to Fig. 4) that is formed with adhesive coating on the aluminum steel face continuously.When peeling off the TAC film base material, on whole of wire grid polarizer 4, all peel off smoothly at the interface of resin coated rete and base material.
In addition, measure transmitance and degree of polarization for the duplexer of peeling off before the base material 1 respectively with the wire grid polarization film of having peeled off after the base material 4, these characteristics are all kept.Again, on one side see through wire grid polarization film 4 with natural light light source and polarized light source, observing through 10 times magnifier on one side has zero defect, but the whole face of release surface all not have to find to peel off caused damaged, distortion etc. unusually.The wire grid polarization film 4 that on this aluminum steel face, is formed with adhesive coating can adopt scissors or cutting tool etc. to cut into desirable shape, and the separation layer of the heavy release surface of adhesive coating is peeled off, and can make it be fitted in the desirable article of glass plate etc.
(manufacturing of wire grid polarizer film 5)
Except using carrier-free adhesive film 2 (trade names " EW1500 ": ェ リ ェ one Le テ Network セ Le corporate system), likewise make duplexer 2 and wire grid polarization film 5 continuously with wire grid polarizer film 4.Measure the acid number of the adhesive coating of carrier-free adhesive film 2, be 6.0mgKOH/g.When peeling off the TAC film base material, on whole of wire grid polarizer 5, all peel off smoothly at the interface of resin coated rete and base material.In addition, measure transmitance and degree of polarization for the duplexer of peeling off before the base material 2 respectively with the wire grid polarization film of having peeled off after the base material 5, these characteristics are all kept.Again, on one side see through wire grid polarization film 5 with natural light light source and polarized light source, observing through 10 times magnifier on one side has zero defect, but the whole face of release surface all not have to find to peel off caused damaged, distortion etc. unusually.The wire grid polarization film 5 that on this aluminum steel face, is formed with adhesive coating can adopt scissors or cutting tool etc. to cut into desirable shape, and the separation layer of the heavy release surface of adhesive coating is peeled off, and can make it be fitted in the desirable article of glass plate etc.
(reliability evaluation of wire grid polarization film)
Respectively wire grid polarization film 4 and wire grid polarization film 5 are cut into the square shape of 1cm, and it is fitted on the glass plate, after about 24 hours of 25 ℃, the indoor placement of 50%RH, optical property and outward appearance are estimated.Put it into constant temperature and humidity cabinet (style: μ one 2002 い The
Figure BDA0000115272910000161
are made institute's corporate system); With the environment set in the groove is 85 ℃, 85%RH, carries out constant temperature and moisture test 500 hours.After the test, after about 24 hours of 25 ℃, the indoor placement of 50%RH, estimate its optical property and outward appearance once more.Identical before the degree of polarization of the wire grid polarization film 4 after the test and the test, but the degree of polarization of the wire grid polarization film 5 after the test with test before compare, characteristic has reduced by 20%.Again, the tone of the test portion after the test has yellow hue before test.
[table 1]
Figure BDA0000115272910000171
Utilizability on the industry
The wire grid polarizer of the utility model can be used in the small-sized LCD that requires the light weight slimming ideally, is the purposes of necessary vehicle-mounted or outdoor application equipment or projection arrangement etc. for the reliability of the height of heat, humidity, light etc.

Claims (2)

1. wire grid polarizer; It includes base material, is formed on the resin coating on the said base material; Metal wire with being formed on the said resin coating is characterized in that, said wire grid polarizer can separate said base material from this wire grid polarizer under the state of the structure of keeping said metal wire.
2. wire grid polarizer as claimed in claim 1 is characterized in that, said resin coating is the thickness of 0.005 μ m to 3 μ m, and the peeling force of said base material and said resin coating is below the 5N/25mm.
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