CN202433542U - Wire grating polaroid and polarization optical splitter using wire grating polariod - Google Patents

Wire grating polaroid and polarization optical splitter using wire grating polariod Download PDF

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Publication number
CN202433542U
CN202433542U CN2011202770116U CN201120277011U CN202433542U CN 202433542 U CN202433542 U CN 202433542U CN 2011202770116 U CN2011202770116 U CN 2011202770116U CN 201120277011 U CN201120277011 U CN 201120277011U CN 202433542 U CN202433542 U CN 202433542U
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China
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wire grid
grid polarizer
concaveconvex structure
beam splitter
protuberance
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CN2011202770116U
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杉村昌治
山本裕二郎
杉山大
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Asahi Kasei Corp
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Asahi Chemical Co Ltd
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Abstract

The utility model provides a wire grating polaroid adopting adhesive material to cover the conductor of the wire grating polaroid, and also provides a polarization optical splitter using wire grating polariod. The wire grating polaroid and the polarization optical splitter can reduce the decrease of parallel transmissivity and polarization separating performance, thereby providing good parallel transmissivity and polarization separating performance. The wire grating polariod provided by the utility model is provided with a substrate and the conductor. The substrate is provided with a concave-convex structure extending in a predetermined direction at an interval less than 150 nm. The conductor is arranged on a side face of a concave part of the concave-convex structure in an inclined manner. The wire grating polariod is characterized in that the thickness of a concave part of the substrate at a position lowering 1/10 along the height direction from the top of the convex parts of the concave-convex structure is 0.45 times of the thickness of a concave part of the substrate at a position rising 1/10 along the height direction from the bottom of concave parts in the surface of the substrate.

Description

Wire grid polarizer and the polarizing beam splitter that uses this wire grid polarizer
Technical field
The utility model relates to a kind of embedding of cohesiveness material electric conductor, the wire grid polarizer that the decline of optical characteristics is also less and polarizing beam splitter that uses this wire grid polarizer of promptly using.
Background technology
As the existing reflective liquid crystal projection apparatus that utilizes reflection type liquid crystal display element of the projector of projection type image display apparatus.Owing in reflective liquid crystal projection apparatus, utilize polarized light, need make the light of light source produce polarization.Therefore, used polarizing beam splitter as polarization separation parts that constitute reflective liquid crystal projection apparatus.
Bond and cube type polarizing beam splitter that forms as the existing prism of polarizing beam splitter two triangular columns.Cube type polarizing beam splitter in the past, its adhesive surface has the structure that is cascaded by the multilayer dielectric body thin film, carries out polarization separation through utilizing Brewster angle.But such cube type polarizing beam splitter has the incident angle interdependence, and promptly the polarization separation characteristic can bigger variation take place corresponding to the incident angle of light, therefore must make the bigger light of F number, and the light that promptly is similar to directional light incides polarizing beam splitter.Therefore, can only use big, the darker lens of F number as the projecting lens that constitutes reflective liquid crystal projection apparatus.
As a kind of method of the incident angle interdependence of improving this polarization separation characteristic (interdependence is diminished), proposed to use the scheme (for example, with reference to patent documentation 1) of cube type polarizing beam splitter of wire grid polarizer.This scheme is good with the polarization separation characteristic, used on cube type polarizing beam splitter with respect to the less wire grid polarizer of variation of the polarization separation characteristic of incident angle.But during with the electric conductor of cohesiveness material embedding wire grid polarizer in the past, the polarization separation characteristic can decline to a great extent.Therefore; As described in the patent documentation 1; Polarization separation characteristic through the prism of two triangular columns of cohesiveness material bonding and cube type polarizing beam splitter that wire grid polarizer is made into is relatively poor, also produces harmful effect for the incident angle interdependence of polarization separation characteristic.That is to say, up to the present, use cube type polarizing beam splitter of the good and wire grid polarizer that the incident angle interdependence polarization separation characteristic is less of polarization separation characteristic, still can't make.
In addition, wire grid polarizer has concaveconvex structure at substrate surface, and electric conductor is located at protuberance one side's of concaveconvex structure side partially.If with the electric conductor of this wire grid polarizer of cohesiveness material embedding, parallel transmitance will significantly descend.That is, if with the electric conductor of this wire grid polarizer of cohesiveness material embedding, the polarization separation characteristic will significantly descend with parallel transmitance.
Relative therewith, proposed electric conductor, but the optics that will comprise triangular prism etc. is laminated to the scheme (for example, with reference to patent documentation 2) of the wire grid polarizer on the conductor construction face of wire grid polarizer without cohesiveness material embedding wire grid polarizer.This scheme only makes the top ends of the electric conductor of wire grid polarizer adhere mutually with the optical sheet with adhesive coating.That is,, prevent the electric conductor of the complete embedding wire grid polarizer of adhesive coating, the decline that consequently can alleviate polarization property through the flowability and the clinging power of control adhesive coating.But in this way, when under the environment of temperature and humidity variation, using for a long time, optical sheet might peel off.The adhesive coating that flowability and the clinging power of adhesive coating have been controlled in utilization prevents under the situation of complete embedding of electric conductor of wire grid polarizer; Adhesive coating shows weak stickability easily; And then; Under the environment that temperature and humidity change, because wire grid polarizer and optical sheet be with respect to expansile difference hot, moisture, adhesive coating peels off from the electric conductor of wire grid polarizer easily.That is, the possibility that has problems of long-term reliability can not exist in the negative.
Patent documentation
Patent documentation 1
Japanese Patent Laid is opened the 2003-131212 communique
Patent documentation 2
Japanese Patent Laid is opened the 2008-96677 communique
The utility model content
The problem that utility model will solve
The utility model is developed in view of the above problems; Its purpose is; Promptly use the electric conductor of cohesiveness material embedding wire grid polarizer; Also can reduce the decline of parallel transmitance and polarization separation characteristic (degree of polarization), thereby good wire grid polarizer of parallel transmitance and polarization separation characteristic (degree of polarization) and the polarizing beam splitter that uses this wire grid polarizer are provided.
Solve the means of problem
The inventor has accomplished the utility model in order to solve above-mentioned problem; Invented a kind of wire grid polarizer; Have base material and electric conductor; Said base material has with the side upwardly extending concaveconvex structure of the interval below the 150nm in regulation, and said electric conductor is located at a side the side of the protuberance of said concaveconvex structure partially, with the perpendicular face of the bearing of trend of the concaveconvex structure of said base material in; From the highest of the protuberance of concaveconvex structure along the descend thickness of base material protuberance of 1/10 position of short transverse, be below 0.45 times with respect to the thickness of the base material protuberance of 1/10 the position of rising from the lowest part of the recess of substrate surface along short transverse.
The wire grid polarizer of the utility model is preferably; Have base material and electric conductor; Said base material has with the side upwardly extending concaveconvex structure of the interval below the 150nm in regulation; Said electric conductor is located at a side the side of the protuberance of said concaveconvex structure partially, and said wire grid polarizer is characterised in that, with the perpendicular face of the bearing of trend of the concaveconvex structure of said base material in; From the highest of the protuberance of concaveconvex structure along the descend thickness of base material protuberance of 1/10 position of short transverse, be below 0.45 times with respect to the thickness of the base material protuberance of 1/10 the position of rising from the lowest part of the recess of substrate surface along short transverse.
The wire grid polarizer of the utility model is preferably, with the perpendicular face of the bearing of trend of said concaveconvex structure in, the concaveconvex structure of substrate surface is a sine wave shape.
The wire grid polarizer of the utility model is preferably; The top of the protuberance through said concaveconvex structure and along the protuberance axle of the upright set direction of protuberance; With top through said electric conductor and different along the conduction axon of upright set direction, at least a portion of said electric conductor is positioned at the top at top of the protuberance of said concaveconvex structure.
The wire grid polarizer of the utility model is preferably; With the perpendicular face of the bearing of trend of said concaveconvex structure in; With respect to from the highest of the protuberance of the concaveconvex structure of said substrate surface along the descend thickness of protuberance of 1/3 position of short transverse, the thickness of electric conductor is identical with it or be more than it.
The wire grid polarizer of the utility model is preferably; With the perpendicular face of the bearing of trend of said concaveconvex structure in; The side of electric conductor of top at top of protuberance that is positioned at the concaveconvex structure of said substrate surface tilts with respect to the vertical direction of substrate surface, said electric conductor be shaped as that the top is tapered, the sharp shape similar with triangle.
The wire grid polarizer of the utility model is preferably; With the perpendicular face of the bearing of trend of concaveconvex structure in; Rise on 1/10 the position in descend 1/10 position and short transverse of the highest short transverse from the protuberance of the concaveconvex structure of substrate surface from the lowest part of the recess of concaveconvex structure along protuberance along protuberance; Horizontal direction along base material is drawn straight line, connect in 4 intersection points of said straight line and the profile of electric conductor near the straight line of two intersection points of the protuberance of concaveconvex structure and to connect the symbol of slope of straight line of all the other two intersection points identical.
The wire grid polarizer of the utility model is preferably, and said base material is a resin.
The wire grid polarizer of the utility model is preferably, and the conductor construction face of wire grid polarizer is provided with the cohesiveness material, and through said cohesiveness material, the concaveconvex structure face and the optics of said wire grid polarizer are bonding.
The wire grid polarizer of the utility model is preferably; The conductor construction face of wire grid polarizer and the reverse side of said conductor construction are provided with the cohesiveness material; Through said cohesiveness material, at least one face and optics in the conductor construction face of said wire grid polarizer and the reverse side of conductor construction are bonding.
The wire grid polarizer of the utility model is preferably, and said cohesiveness material is the adhesion sheet.
The polarizing beam splitter of the utility model; The conductor construction face of described wire grid polarizer and the reverse side of said conductor construction are provided with the cohesiveness material; Through said cohesiveness material, the prism of the conductor construction face of said wire grid polarizer and the reverse side of said conductor construction and triangular column is bonding.
The polarizing beam splitter of the utility model is preferably, and the refringence of the whole component parts except that wire grid polarizer between said prism and the said prism is in 0.1.
The polarizing beam splitter of the utility model is preferably, and the refractive index of cohesiveness material of conductor construction face side that the refractive index ratio of said prism is arranged at said wire grid polarizer is low.
The polarizing beam splitter of the utility model is preferably, and is arranged in the cohesiveness material of reverse side of conductor construction face and said conductor construction of wire grid polarizer, and at least one side's cohesiveness material is the adhesion sheet.
The polarizing beam splitter of the utility model is preferably, and is arranged in the cohesiveness material of reverse side of conductor construction face and said conductor construction of wire grid polarizer, and at least one side's cohesiveness material is a gel-type resin.
The polarizing beam splitter of the utility model is preferably; Utilize in the prism of the bonding triangular column of the reverse side of conductor construction face and said conductor construction of cohesiveness material and wire grid polarizer, the prism of at least one side's triangular column is the prism of the triangular column that is formed from a resin.
The polarizing beam splitter of the utility model is preferably; Utilize in the prism of the bonding triangular column of the reverse side of conductor construction face and said conductor construction of cohesiveness material and wire grid polarizer, the prism of at least one side's triangular column is the prism of the triangular column processed by glass.
The polarizing beam splitter of the utility model is preferably, and at least one face of polarizing beam splitter, has optical functional layer.
The polarizing beam splitter of the utility model is preferably, and the photoelastic constant of prism is below 1.5 * 10-11Pa-1.
The projection type image display apparatus of the utility model has described polarizing beam splitter; Light source; And reflection type liquid crystal display element; Through making the light that sends from said light source carry out polarization separation in said polarizing beam splitter transmission and reflection; See through polarized light said polarizing beam splitter or that reflected by said polarizing beam splitter and incide said reflection type liquid crystal display element; Outgoing after modulation again, thereby then at said polarizing beam splitter reflection or transmission projected image.
The projection type image display apparatus of the utility model is preferably, and the incident angle scope of the light directive polarizing beam splitter that sends from light source is a center angle ± more than 10 degree.
The utility model effect
According to the utility model; Promptly use cohesiveness material embedding electric conductor also can reduce the decline of parallel transmitance and polarization separation characteristic (degree of polarization), good wire grid polarizer of parallel transmitance and polarization separation characteristic (degree of polarization) and the polarizing beam splitter that uses this wire grid polarizer can be provided.
Description of drawings
Fig. 1 is the diagrammatic cross-section of the related wire grid polarizer of the example of the utility model.
Fig. 2 is the figure of an appearance attitude of concrete example of the related polarizing beam splitter of example of expression the utility model.
Fig. 3 is the key diagram of shape of the electric conductor of the related wire grid polarizer of the example of the utility model.
Symbol description
1,22 wire grid polarizers
2 polarizing beam splitters
11 base materials
The 11a protuberance
11b, 12a side
The highest portion of 11c
The 11d recess
The 11e lowest part
12 electric conductors
21a, 21b prism
22a conductor construction face
The reverse side of 22b conductor construction face
Embodiment
Below, be elaborated with reference to the example of accompanying drawing to the utility model.(wire grid polarizer)
The related wire grid polarizer of the utility model comprises base material and electric conductor, and said base material has with the interval below the 150nm (spacing) the upwardly extending concaveconvex structure in side in regulation, and said electric conductor is located at protuberance one side's of concaveconvex structure side partially.In addition; With the perpendicular face of the bearing of trend of the concaveconvex structure of base material (below be called " bearing of trend ") (below be called " section ") on; From the highest of the protuberance of concaveconvex structure along the descend thickness of base material protuberance of 1/10 position of short transverse; With respect to the thickness of the base material protuberance of 1/10 the position of rising from the lowest part of the recess of substrate surface along short transverse, be below 0.45 times.Below, with reference to Fig. 1 one example of the related wire grid polarizer of the example of the utility model is described.
Fig. 1 is the diagrammatic cross-section of the related wire grid polarizer of the example of the utility model.In addition, Fig. 1 representes the diagrammatic cross-section with the perpendicular face of the bearing of trend of the concaveconvex structure of the base material 11 of wire grid polarizer 1.As shown in Figure 1, the related wire grid polarizer 1 of this example is included in a side the electric conductor 12 of side 11b that the surface has the base material 11 of concaveconvex structure and is located at the protuberance 11a on base material 11 surface partially.
The protuberance 11a of base material 11 is set up with the spacing P1 of regulation.Among this protuberance 11a; Height between the highest the 11c of the protuberance 11a of base material 11 and the lowest part 11e of recess 11d is H; From the thickness T h of the position of the highest 11c decline 1/10H, be below 0.45 times with respect to thickness T l from the position of lowest part 11e rising 1/10H.In addition, preferred situation is, electric conductor 12 optionally is arranged on a certain side's the side 11b of protuberance 11a of the concaveconvex structure that is had on the base material 11.
The concaveconvex structure on base material 11 surfaces, from the section view, preferred situation is for being sine wave shape.Sine wave shape is meant the curve part that repeat alternately to form, that curvature gently changes as para-curve by recess 11d and protuberance 11a, and it also can be the sine wave shape of trapezoidal shape, rectangular shape, square shape, semicircle shape etc.Get final product so long as the curve part of these section shapes is crooked curve, for example, the shape that attenuates in the middle of the protuberance 11a also is contained in the sine wave shape described here.Through the shape of concaveconvex structure, from the top of the protuberance 11a of the lip-deep concaveconvex shape of base material 11 until on the side's bottom, protuberance 11a of recess 11d the side 11b, utilize the oblique evaporation method can easily form continuous electric conductor.In addition, for the shape of concaveconvex structure, form electric conductor 12 through utilizing oblique evaporation method and isotropic etching, the vertical direction on the relative base material of the side 12a of the electric conductor 12 of the top at the top of the protuberance 11a at section visual angle 11 surfaces tilts.Therefore, electric conductor 12 can form the tapered shape in top, thus can easily form end shape for the electric conductor 12 of the similar sharp shape of triangle.Through forming such electric conductor 12, the parallel transmitance in the time of can suppressing with the embedding of cohesiveness material and the decline of degree of polarization.
In addition; Electric conductor 12 about the related wire grid polarizer 1 of this example; Shape through said concaveconvex structure; Electric conductor 12 is tilted with respect to the vertical direction on base material 11 surfaces, the good wire grid polarizer 1 of parallel transmitance during through the making oblique incidence, thus the polarizing beam splitter that presents good characteristic can be provided.
In addition; Through above-mentioned method for making; From the section view; In descend 1/3 position of the highest 11c from the protuberance 11a of the concaveconvex structure on base material 11 surface; With respect to the thickness T m of protuberance 11a (this thickness T m be meant with the parallel direction in base material 11 surfaces on the thickness of base material 11) the thickness T (being meant the thickness of the electric conductor 12 on the direction parallel in this thickness T) of electric conductor 12 with base material 11 surfaces can easily make identically or for more than the Tm with Tm, thus, can increase the volume of the electric conductor 12 of wire grid polarizer 1.Change with the effective refractive index of the conductor layer under the situation of cohesiveness material embedding volume corresponding to electric conductor; The refringence between itself and cohesiveness material or the base material can be increased through the volume that increases electric conductor, thereby the decline of polarization characteristic can be suppressed.In addition; Thickness T for thickness T m and the electric conductor 12 of protuberance 11a; Observe concaveconvex structure and the shape of electric conductor 12 on base material 11 surfaces at section visual angle with scanning electron microscope (SEM) or infiltration type electron microscope (TEM); The thickness of parallel direction on base material 11 surface of measuring the protuberance 11a relevant with optional 3 protuberance 11a and being located at the electric conductor 12 of protuberance 11a partially uses its mean value.
Preferable case is to constitute; From the section view; The top of protuberance 11a through concaveconvex structure, along the protuberance axle A1 (with reference to the dot-and-dash line of Fig. 1) of the upright set direction of protuberance 11a and the top through electric conductor 12, along the conduction axon A2 (with reference to two dot-and-dash lines of Fig. 1) (not overlapping) inequality of upright set direction.Thus, can increase the contact area of electric conductor 12 and base material 11, thereby can prevent peeling off of electric conductor 12, in addition, owing to can easily form highly higher electric conductor 12, thus can improve the polarization separation characteristic of wire grid polarizer 1.
In addition, preferred situation is to constitute, and at least a portion of electric conductor 12 is positioned at the top at top of the protuberance 11a of concaveconvex structure, and preferred situation is that the top of electric conductor 12 is positioned at the top more than 1.1 times with respect to the height H of protuberance 11a.The top at the top of the protuberance 11a through electric conductor 12 being arranged to extend to base material 11 can increase the volume of electric conductor 12, and consequently the polarization separation characteristic of wire grid polarizer 1 is improved, and can reduce the loss of light.In addition, the shape of electric conductor 12 is so long as get final product to the outstanding shape in top from the top of the protuberance 11a of base material 11 at least, can be at the volume that can increase electric conductor 12, improve change in time in the scope of polarization separation characteristic.
(base material)
As base material 11, for example, can use the inorganic material or the resin material of glass etc.Particularly, form base material 11, have and to utilize roll process (English: roll process through using resin material; Japanese: ロ ー Le プ ロ セ ス), and can make wire grid polarizer 1 have the advantage of pliability (bendability) etc., therefore more satisfactory.The resin that can use as base material 11; For example have; Amorphism thermoplastic resins such as polymethacrylate resin, polycarbonate resin, polystyrene resin, cyclic olefin resins (COP), cross-linked polyethylene resin, Corvic, polyacrylate resin, polyphenylene oxide resin, sex change polyphenylene oxide resin, polyetherimide resin, polyethersulfone resin, polysulfone resin, polyether ketone resin; Perhaps the crystalline thermoplastic resin of polyethylene terephthalate (PET) resin, PEN resin, polyvinyl resin, acrylic resin, polybutylene terephthalate resin, aromatic polyester resins, polyformaldehyde resin, polyamide etc., perhaps ultraviolet ray (UV) gel-type resin or the thermohardening type resin of acrylic compounds, epoxies, polyurethanes etc.In addition, also can be that UV gel-type resin or the inorganic substrate of thermohardening type resin and glass etc., said thermoplastic resin, triacetate resin combination are used, perhaps make separately and be used for constituting base material 11.In addition, also can on the surface of base material 11, be provided for improving the film of the tack of base material 11 and electric conductor 12.
In addition, as base material 11, can use the base material 11 that on the surface that is formed with electric conductor 12 (below be called " conductor construction face "), is provided with concaveconvex structure.In addition, as stated, preferable case is that from the section view of base material 11, concaveconvex structure is a sine wave shape.In addition, base material 11 is as long as transparent in fact in the target wavelength zone.In addition, on the direction of regulation, extends and be meant,, do not need the recess 11d of concaveconvex structure and protuberance 11a strictly to extend in parallel separately as long as concaveconvex structure extends in fact in the direction of stipulating.In addition, the interval of concaveconvex structure is preferably below the 150nm, and equally spaced situation is comparatively desirable.In addition, uniformly-spaced be meant,, can allow the deviation that goes up to about ± 10% as long as in fact uniformly-spaced.
The manufacturing approach that the surface has the base material 11 of concaveconvex structure is not limited especially.For example, can be the applicant's the applying date this patent manufacturing approach that No. 4147247 communique is put down in writing.According to No. 4147247 communique of Jap.P.; Utilization has the metal stamping and pressing of adopting the concaveconvex structure of interfering exposure method and making; Concaveconvex structure heat is transferred on the thermoplastic resin, and on the direction that the bearing of trend with the concaveconvex structure of the thermoplastic resin of having given concaveconvex structure parallels, implements one of free end and extend processing.Consequently, the spacing that is transferred to the concaveconvex structure on the thermoplastic resin is dwindled, and can access the resin plate (after extending completion) with fine concaveconvex structure.Then,, utilize methods such as electrochemical plating, make metal stamping and pressing with fine concaveconvex structure by the resin plate that obtains (after extending completion) with fine concaveconvex structure.Utilize this metal stamping and pressing, transfer printing on base material 11 surfaces, the fine concaveconvex structure of formation can access the base material 11 with concaveconvex structure thus.In addition, also exist using silicon is the method for substrate etc., and said silicon is that substrate is that fine concaveconvex structure is made in the photoetching of using the semiconductor manufacturing.For example, the silicon that will have fine concaveconvex structure be substrate as mold, make the resin plate that has fine concaveconvex structure on the surface.Can adopt methods such as electrochemical plating by resin plate, make metal stamping and pressing with fine concaveconvex structure.
Adopt the metal stamping and pressing that is shaped as rectangular shape of the concaveconvex structure of section view; Concaveconvex structure heat is transferred on the thermoplastic resin; On the direction that the bearing of trend with the concaveconvex structure of the thermoplastic resin of having given concaveconvex structure parallels, implement extension of free end and add man-hour; Along with by extending the variation of processing the concaveconvex structure that causes, can make the section shape of concaveconvex structure become sine wave shape.At this; By the resin plate that obtains (extend accomplish after) with fine concaveconvex structure; Utilize methods such as electrochemical plating; Making has under the situation of metal stamping and pressing of fine concaveconvex structure, and the shape that can make concaveconvex structure that can transfer printing section visual angle becomes the metal stamping and pressing of the concaveconvex structure of sine wave shape.
As the method for making of metal stamping and pressing that sine wave shape and thickness T h are the shape of the concaveconvex structure below 0.45 times with respect to thickness T l that is shaped as that can transfer printing section visual angle, for example, can enumerate following such method.Said thickness T h is the thickness from the highest the 11c of the protuberance 11a of the concaveconvex structure at section visual angle along the protuberance 11a of the base material 11 of the position of short transverse decline 1/10H, and said thickness T l is the thickness from the lowest part 11e of the recess 11d on base material 11 surfaces along the protuberance 11a of the base material 11 of the position of short transverse rising 1/10H.
At first; Utilize the metal stamping and pressing that is shaped as rectangular shape of the concaveconvex structure at section visual angle; Concaveconvex structure heat is transferred on the thermoplastic resin, on the direction that the bearing of trend with the concaveconvex structure of the thermoplastic resin of having given concaveconvex structure parallels, implements one of free end and extend processing.Then, on the concaveconvex structure face on the resin plate that obtains (extend accomplish back) surface, implement to utilize the surface treatment of UV-ozone, utilize method making such as electrochemical plating to have the metal stamping and pressing of fine concaveconvex structure afterwards with fine concaveconvex structure.So; Can process the metal stamping and pressing of the shape of can transfer printing following such concaveconvex structure; Promptly; The concaveconvex structure at section visual angle be shaped as sine wave shape, and thickness T h is below 0.45 with respect to thickness T l, said thickness T h sees that from the section visual angle the highest the 11c of protuberance 11a of concaveconvex structure on base material 11 surfaces is along the thickness of the protuberance of the position of short transverse decline 1/10H.Said thickness T l is the thickness from the lowest part 11e of recess 11d along the protuberance 11a of the position of short transverse rising 1/10H.
In addition, do not limit, can use methods such as UV-ozone method, corona discharge method, plasma method, dry etching method as the concaveconvex structure face of resin plate with fine concaveconvex structure (extend and accomplish the back) is implemented the surface-treated method.In addition; The method for making that has the metal stamping and pressing of desirable concaveconvex structure from the section view; Also be not limited to above-mentioned method, can also easily expect following such method, for example; Change to metal stamping and pressing with implementing the surface-treated object by the resin plate with micro concavo-convex structure (after extending completion); The concaveconvex structure face of metal stamping and pressing is carried out the such method of surface treatment, or microfabrication through photoetching, make and have the mold of desirable concaveconvex shape, thereby need not carry out the such method of surface treatment.
(electric conductor)
Electric conductor 12 is set on the face with concaveconvex structure in the surface of base material 11 (below be called " concaveconvex structure face ").As above-mentioned, when on the surface is formed with the base material 11 of concaveconvex structure, electric conductor 12 being set, the side 11b that preferably is arranged to the side of electric conductor and protuberance 11a joins, and the top of electric conductor extends to the top at top of the protuberance 11a of base material 11.
Electric conductor 12; Be formed linearity with protuberance 11a almost parallel ground with the interval (cycle) of stipulating at the concaveconvex structure on the surface of the upwardly extending base material 11 in side of regulation; Under the little situation of the period ratio wavelength of visible light of the electric conductor 12 of this linearity, can become the polarization spectro parts of the polarized component that polarized component that reflection vibrates with respect to electric conductor 12 and transmission vibrate in vertical direction on parallel direction.Can use aluminium, silver, copper, platinum, gold as electric conductor 12, perhaps be the alloy of major component with these metals, and can form through oblique metallikon, oblique evaporation method.Particularly, can reduce the absorption of visible light loss through using aluminium or silver to form electric conductor, therefore comparatively desirable.
In general the polaroid that has wire grid construction, the interval of electric conductor 12 (spacing P2) more little then to present good polarization characteristic more in the broad wavelength region may.Contact with air (refractive index is 1.0) at electric conductor 12, under the situation of not bonded property material embedding; Be made as as 1/4～1/3 of the light wavelength of object through spacing P2 electric conductor 12; The polarization characteristic that can present abundant practicality; Yet under the situation with cohesiveness material embedding electric conductor, consider the influence of the refractive index of cohesiveness material, more excellent situation is for being made as spacing P2 as 1/5～1/4 of the light wavelength of object.Therefore, under the situation of the light of considering to utilize the visible region, be preferably spacing P2 is made as below the 150nm, more preferably be made as below the 130nm, highly preferred situation is for being made as below the 100nm.
< electric conductor formation method >
Consider throughput rate, optical characteristics etc., the formation method of electric conductor 12 preferably adopts the direction that tilts from the vertical direction with respect to the surface of the base material with concaveconvex structure 11 to carry out the oblique evaporation method of vapor deposition.The oblique evaporation method is meant, from the section view of base material 11, vapor deposition source with respect to the vertical direction on base material 11 surfaces with the incident angle vapor deposition of regulation, the method for lamination metal.Incident angle decides preferred range by the section shape of the electric conductor 12 of the protuberance 11a of concaveconvex structure and made, in general, is preferably 5 °～45 °, more preferably 5 °～35 °.Further, consider the drop shadow effect of the metal of lamination in the vapor deposition, little by little reduce or increase incident angle, be suitable for controlling the section shapes such as height of electric conductor 12.In addition, under the situation of base material 11 surface curvatures, also can carry out vapor deposition from the direction that tilts with respect to base material 11 normal to a surface directions.
Specifically; Base material 11 has on the surface at the concaveconvex structure of specific direction with the spacing almost parallel ground extension of regulation; With respect to base material 11 surface the center of vapor deposition source is being set on less than 45 ° direction by the vertical direction at the center in vapor deposition zone more than 5 °, thereby on concaveconvex structure, form electric conductor 12.Further be preferably, with respect to base material 11 surface by the vertical direction at the center in vapor deposition zone at the center that vapor deposition source is set on less than 35 ° angle direction more than 5 °.Thus, can electric conductor 12 be arranged on a certain side side 11b of protuberance 11a of concaveconvex structure on base material 11 surface selectively.In addition, transmitting on the limit under the situation of base material 11 limit vapor depositions, also can be to be carried out vapor deposition by the state that above-mentioned condition is satisfied at the center of the center in vapor deposition zone and vapor deposition source in a flash at certain.
Utilize under the situation of said oblique evaporation method, the protuberance 11a of the concaveconvex structure on base material 11 surfaces is identical with the bearing of trend of electric conductor 12.For the metal evaporation amount of the shape of reaching electric conductor 12 is decided by the shape of the protuberance 11a of concaveconvex structure,
In general, average vapor deposition thickness is about 50nm～200nm.Here said average thickness is meant, supposes at the thickness of the vapor deposition thing from the perpendicular direction evaporation material of glass time the on the smooth glass substrate, uses as the reference value of metal evaporation amount.
In addition, from the viewpoint of optical characteristics, be preferably through etching and remove unnecessary electric conductor.Have no particular limits for lithographic method; Do not bring harmful effect so long as can not give base material 11, dielectric layer; The method that can remove electric conductor selectively gets final product, and the viewpoint from the shape of throughput rate or electric conductor 12 is controlled is preferably isotropic etching; For example, can preferably be impregnated into alkalescence the WS in lithographic method.
(dielectric)
In this embodiment, the wire grid shown Pian vibration plate 1, in order to improve the material constituting the substrate 11 between the conductor 12 and the adhesion between the two can be suitably used both adhesion containing both a high dielectric material of the dielectric layer.For example, can use perhaps their potpourri of single component of oxide, nitride, halogenide, the carbonide of the metal that single component or its potpourri (in the dielectric single component, sneaking into the dielectric of other elements, single component or compound), aluminium (Al), chromium (Cr), yttrium (Y), zirconium (Zr), tantalum (Ta), titanium (Ti), barium (Ba), indium (In), tin (Sn), zinc (Zn), magnesium (Mg), calcium (Ca), cerium (Ce), the copper (Cu) of oxide, nitride, halogenide, the carbonide of silicon (Si) such as silicon dioxide waits.As long as the dielectric material obtains to see through in the wavelength region may of polarization property transparent in fact at needs.Lamination method to the dielectric material has no particular limits, and for example, can suitably use physical vapor depositions such as vacuum vapour deposition, metallikon, ion plating method.
(substrate)
Portion's material as the base material that keeps having concaveconvex structure can use substrate.As substrate, can use inorganic material, resin materials such as glass, be preferably use and can make wire grid polarizer 1 and tabular resin material easy and other opticses bondings through roll process.
Can select for use as resin material; For example, polymethacrylate resin (PMMA), polycarbonate resin, polystyrene resin, cyclic olefin resins (COP), cross-linked polyethylene resin, Corvic, polyacrylate resin, polyphenylene oxide resin, sex change polyphenylene oxide resin, polyetherimide resin, polyethersulfone resin, polysulfone resin, polyether ketone resin, polyethylene terephthalate (PET) resin, PEN resin, polyvinyl resin, acrylic resin, polybutylene terephthalate resin, aromatic polyester resins, polyformaldehyde resin, polyamide, triacetyl cellulose are ultraviolet ray (UV) gel-type resin or the thermohardening type resin of resin (TAC) etc. or acrylic compounds, epoxies, polyurethanes etc.In addition, also can combinations such as the inorganic substrate of UV gel-type resin or thermohardening type resin and glass etc., thermoplastic resin be used, perhaps use separately.
Phase differential in the face of substrate, low for fear of degree of polarization, be preferably reduction with respect to phase differential in the face of provision wavelengths, when for example considering to utilize visible light, the value that is preferably with respect to the phase differential of wavelength 550nm is below the 30nm.More preferred situation is below the 15nm.In addition; For the degree of polarization that prevents the polarization that wire grid polarizer 1 causes inhomogeneous in face; Need manage any 2 phase difference value in the real estate; When for example considering to utilize visible light, being preferably with respect to phase difference value in the face of wavelength 550nm is below the 10nm, and more preferred situation is below the 5nm.As the substrate with characteristic like this, preferably using triacetyl cellulose is resin (TAC), cyclic olefin resins (COP), polycarbonate resin (PC), polymethacrylate resin resin materials such as (PMMA).
(cohesiveness material)
In the utility model; In order to go up the electric conductor 12 that forms in base material 11 surfaces that are embedded in wire grid polarizer 1 with the cohesiveness material; Be preferably on the conductor construction face of wire grid polarizer 1 the cohesiveness material be set, the concaveconvex structure face through cohesiveness material bonding wire grid polarizer 1 with after the optics stated.Thus, can reach the effect of the scuffing that prevents electric conductor 12 etc., can realize the range upon range of of optics etc. and wire grid polarizer in addition, thereby can easily make cube type polarizing beam splitter that uses wire grid polarizer.In addition; Be preferably; At the conductor construction face of wire grid polarizer 1 and the reverse side of conductor construction face the cohesiveness material is set, bonds through the face and the optics of cohesiveness material with at least one side in the reverse side of the conductor construction face of wire grid polarizer 1 and conductor construction face.
In addition; During with cohesiveness material embedding electric conductor 12; So long as get final product with cohesiveness material embedding electric conductor 12 in fact; For example, if after with non-adhesive material embedding electric conductor 12, use cohesiveness material embedding non-adhesive material again, can be regarded as with cohesiveness material embedding electric conductor 12.Have no particular limits as the cohesiveness material, so long as in the target wavelength zone transparent in fact getting final product.For example, can use the UV curable resin that will solidify through UV irradiation, the thermohardening type resin that solidifies through heat treated, the adhesion sheet that sticker is processed sheet.In addition, also can use the cohesiveness material that is called as bonding sheet, said bonding sheet appears before cured and the identical proterties of adhesion sheet, changes through the cured cross-linking density and solidifies.
In addition, be provided with on electric conductor 12 structural planes under the situation that the cohesiveness material comes embedding electric conductor 12, be preferably use does not contain acid as far as possible in the cohesiveness material material.Through coat the electric conductor 12 of wire grid polarizer 1 with the material that does not contain acid as far as possible, can reduce to occur the possibility of the deterioration of the electric conductor 12 that causes by the acid that the cohesiveness material contains.Perhaps, for example, on electric conductor 12 structural planes of wire grid polarizer, be pre-formed the good restraining barrier of light transmission, it also is comparatively effective that the cohesiveness material is set again.
When the conductor construction face through cohesiveness material bonding wire grid polarizer 1 and the reverse side of conductor construction face and optics etc., the cohesiveness material that is preferably at least one side is the sheet of adhering.This be because, through the stress of the contraction using the adhesion sheet to relax to produce when the bonding etc., the rising of the birefraction of the cohesive body that can suppress to process.As the adhesion sheet, the clinging power that is preferably with respect to glass is more than the 1.5/25mm, further to be preferably more than the 5.0N/25mm.Thus, through the environment long-term use down that changes in temperature and humidity, the adhesion sheet also is difficult for peeling off, so can access long-term reliability fully.In addition, be that resin, polyurethane series resin, polyester based resin, epoxy are the adhesion sheet that the resin of resin etc. constitutes by acrylic resin, silicon, comparatively desirable from the viewpoint of optical characteristics, cohesive force, cost etc.
In addition, during with bondings such as the reverse side of the conductor construction face of wire grid polarizer and conductor construction face and opticses, the cohesiveness material that is preferably at least one side is a gel-type resin through the cohesiveness material.This be because; For example; Optics in bonding is all under the situation of rigid body; Can be under common environment (under the atmospheric pressure) implement coating as the gel-type resin of liquid state, do not make bubble make cured resin solidify such operation after will be as the optics of rigid body range upon range of with sneaking into, thereby the raising operability.In addition, as gel-type resin,, be preferably and use the UV gel-type resin from the viewpoint of viscosity and solidification processing method.Volumetric shrinkage before and after the cured of UV gel-type resin is preferably below 10%, and more preferably volumetric shrinkage is below 5%.Viscosity is preferably below the 5000MPas (temperature 25 degree) in addition, more preferably below the 1000MPas (temperature 25 degree).
(optics)
As having no particular limits through cohesiveness material and the bonding optics of wire grid polarizer, so long as in the target wavelength zone transparent in fact getting final product, for example, can use flat board, prism, lens, film etc.In addition; Also can use the surface to have the optics of the functional layer of giving special optical characteristics; For example, through embodying the film of diffusive at the surface working concaveconvex structure, through on the surface range upon range of fine concaveconvex structure, dielectric given the film etc. of preventing property of reflection.
For example, use the prism of two bottom surfaces,, can access a cube type polarizing beam splitter through the wire grid polarizer that bonds on the face that joins at hypotenuse with the end face of prism and bottom surface as the triangular column of isosceles right triangle.That is, the prism through using triangular column can be made a cube type polarizing beam splitter as optics.In addition,, can change the shape of the prism of use, in addition, also can freely select the material that uses in order to make polarizing beam splitter with desirable shape.In addition, a cube type is meant, through reverse side and the prism bonding shape that form of cohesiveness material with the conductor construction face and the conductor construction face of wire grid polarizer, might not be rendered as cubic shaped.
(polarizing beam splitter)
Then, with reference to Fig. 2 the related polarizing beam splitter of the example of the utility model is described.Fig. 2 is the synoptic diagram of the related cube type polarizing beam splitter of the example of the utility model.Polarizing beam splitter 2 shown in Figure 2 has prism 21a, 21b and the wire grid polarizer 22 of two triangular columns.On the reverse side of the conductor construction face 22a of wire grid polarizer 22 and conductor construction face; Cohesiveness material (not shown) is set respectively; Through this cohesiveness material that conductor construction face 22a and prism 21a is bonding, and the reverse side 22b and the prism 21b of conductor construction face is bonding.So, through utilizing the cohesiveness material that prism 21a, 21b and wire grid polarizer 22 is bonding, can make the polarizing beam splitter 2 that uses wire grid polarizer 22.
In general the cubical polarizing beam splitter of on market, selling; Prism by two bottom surfaces triangular column that is isosceles right triangle constitutes with the polarization member that forms the polarization separation layer; Polarization member is clamped on the face that the hypotenuse with the end face of prism and bottom surface joins; But make under the situation of same polarizing beam splitter at the wire grid polarizer that adopts the utility model to relate to 22, polarization member is a wire grid polarizer 22.Using under the situation of wire grid polarizer 22 as polarization member; Can freely select the bearing of trend D1 of the electric conductor (not shown) of wire grid polarizer 22; Yet from wire grid polarizer 22 and use the polarization of cube type polarizing beam splitter of this wire grid polarizer 22 to see through the viewpoint of characteristic and reflection of polarization characteristic; Be preferably, the bearing of trend D1 of the electric conductor of wire grid polarizer is configured to, and the bottom surface that with respect to the bottom surface is the prism of isosceles right triangle is vertical relation.
Cube type polarizing beam splitter that the example of the utility model is related is preferably, and the refringence of the whole component parts except that wire grid polarizer between prism and the said prism is in 0.1.Utilize Brewster angle to carry out polarization separation as cube type polarizing beam splitter that the polarization separation layer uses the range upon range of film of dielectric.The key element that determines its polarization separation properties is by the thickness of the refringence between the range upon range of dielectric and each dielectric.Therefore, when incident angle changes, the thickness on apparent will change, thereby produce the problem that bigger variation takes place polarization separation properties.In addition, when the dielectric film forming, consider the influence of the heat that prism is applied, being preferably photoelastic constant is 1.5 * 10 -12Pa -1Below, the most of refractive indexes of such prism are that price is higher more than 1.80.Because wire grid polarizer is through carrying out polarization separation at the upwardly extending electric conductor of certain party, so the variation of the polarization separation properties that is caused by the variation of incident angle is less.Therefore, be used for the polarization separation layer, can make the less cube type polarizing beam splitter of variation by the caused polarization separation properties of variation of incident angle through the wire grid polarizer that the example of the utility model is related.Further; Used in cube type polarizing beam splitter of the related wire grid polarizer of the example of the utility model; Owing to do not need the operation of the range upon range of film of dielectric film forming on prism; And the formation of the stress when the cohesiveness material that can make bonding prism and wire grid polarizer uses the mitigation of adhesion plate etc. to bond is so the photoelastic constant of prism can be 1.5 * 10 -12Pa -1More than.Therefore, the refractive index that can use prism is the cheap prism below 1.80, in addition, need not to utilize Brewster angle during owing to polarization separation, and the refractive index of component parts also can freely be adjusted beyond the prism.Therefore; Can reduce the refringence between prism and other the component parts; Through said refringence is controlled in 0.1, the reduction of the transmitance that can prevent to cause by boundary reflection, and can make the incident angle scope that can the carry out polarization separation broad that becomes.
In addition, in the related cube type polarizing beam splitter of the example of the utility model, the refractive index of cohesiveness material of conductor construction face of refractive index ratio bonding wire grid polarizer that is preferably prism is low.Since from the highest of the protuberance of the concaveconvex structure of the related wire grid polarizer of the example of the utility model along the descend thickness of base material protuberance of 1/10 position of short transverse; Thickness with respect to the base material protuberance of 1/10 the position of rising from the lowest part of the recess of substrate surface along short transverse is below 0.45 times, so electric conductor is relatively tilted with respect to relief structured surface.In the related cube type polarizing beam splitter of the utility model, because the influence of such inclination of electric conductor, it is that 35 degree reach the such incident angle interdependence of peak value between 40 degree the time that parallel transmitance has incident angle at directive polarization separation layer.Usually, consider boundary reflection, in the time of can carrying out the influencing of incident angle scope of polarization separation, be preferably the refringence that makes the component parts between prism and the prism and approach 0 as much as possible.Yet; In the related cube type polarizing beam splitter of the utility model, because the influence of described incident angle interdependence, said refringence is 0.1 with under the interior situation; 0 the situation of approaching with refringence is compared; So that optimize incident angle, can not damage the incident angle scope that to carry out polarization separation through the adjustment refractive index, can further improve parallel transmitance.Cube type polarizing beam splitter that the utility model is related; Owing to can freely adjust the refractive index of the component parts between prism and the prism; Low through the bond refractive index of cohesiveness material of conductor construction face of said wire grid polarizer of the refractive index ratio that makes prism; Said incident angle scope in the time of can making incident angle approach parallel transmitance for maximum, thus parallel transmitance can be improved.
In addition, when wire grid polarizer 22 being bonded on the prism of triangular column, the refractive index of cohesiveness material of electric conductor (not shown) that is preferably embedding wire grid polarizer 22 is lower.Thus, can improve the polarization separation characteristic of cube type polarizing beam splitter that uses wire grid polarizer 22.In addition, the cohesiveness material of the electric conductor of embedding wire grid polarizer 22 preferably by the lower resin of cross-linking density, or the sheet of adhering constitute.The breakage of the electric conductor of incidental wire grid polarizer such as in the time of thus, can preventing to bond.
As stated, the polarization separation layer of the related polarizing beam splitter 2 of the utility model forms through wire grid polarizer 22.In the cross section view of wire grid polarizer 22, the shape of adjacent conductive body (not shown) is approximate each other, lists equally spaced one and arranges, and this is more satisfactory for the polarization separation characteristic.The polarization separation layer of polarizing beam splitter 2; Owing to the conductive material direction roughly the same in roughly the same face upper edge that the electric conductor by wire grid polarizer 22 comes extended; Therefore, same, on the perpendicular face of the direction of extending with conductive material; The shape of adjacent conductive property material is approximate each other, can list one and equally spaced arrange electric conductor.
In addition; Be preferably; In the cross section view of wire grid polarizer; In rise 1/10 the position of 1/10 position and short transverse that descends of the highest short transverse from the protuberance of the concaveconvex structure of substrate surface from the lowest part of the recess of concaveconvex structure along protuberance along protuberance; On the direction parallel, draw two straight lines with respect to substrate surface, connect in 4 intersection points of said two straight lines and the profile of electric conductor near the straight line of two intersection points of the protuberance of concaveconvex structure and to connect the symbol of slope of straight line of all the other two intersection points identical.In addition; The implication of said slope is following; Is to handle cross section view as the x-y plane coordinates; During as the y direction of principal axis, each straight line that connects intersection point can be expressed as the linear function that the x-y planimetric coordinates is fastened to direction that will be parallel with this substrate surface as x direction of principal axis, its vertical direction, and said slope just means the slope of the linear function that shows this each straight line.Below, with reference to Fig. 3 the shape of the electric conductor of the related employed wire grid polarizer of polarizing beam splitter of the example of the utility model is elaborated.
Fig. 3 is the key diagram of shape of the electric conductor of the related wire grid polarizer of the example of the utility model.Fig. 3 representes the figure with the perpendicular section of the bearing of trend of the concaveconvex structure of wire grid polarizer.As shown in Figure 3; Can understand like this according to connecting near the straight line L1 of two intersection points of the protuberance of concaveconvex structure and the direction that connects this two straight line of straight line L2 of all the other two intersection points; The electric conductor of the substrate surface that is positioned at wire grid polarizer in the cross section view; With respect to the direction parallel, extend to vertical relatively direction, or relative tilt ground extends with substrate surface.That is, under the straight line L1 situation consistent with the symbol of the slope of straight line L2, the electric conductor relative tilt in the cross section view, this vergence direction are the direction shown in two straight line L1, the L2.
The wire grid polarizer that this example is related; In cross section view; The protuberance that is positioned at the concaveconvex structure of substrate surface is that the situation of the tapered shape in top is comparatively preferred; Yet a side the electric conductor of side of being located at protuberance partially is with respect to the direction that is parallel to substrate surface, easily relative tilt.Wire grid polarizer; Corresponding to incident angle to the light of the electric conductor incident on surface; Height (thickness) on electric conductor apparent changes, and the parallel transmitance and the polarization characteristic of situation of direction incident that uprises (thickening) from the height (thickness) of electric conductor is higher relatively.Therefore; The wire grid polarizer that this example is related; Vertical direction with respect to the base material in the cross section view; Can be improved from the parallel transmitance and the polarization characteristic of the light of the direction oblique incidence that connects two straight line L1 near two intersection points of the protuberance of concaveconvex structure and remaining two intersection point, L2, can be used in polarizing beam splitter ideally to the polarization layer oblique incidence.In addition; The shape of the electric conductor in the cross section view; Thickness with respect to the electric conductor of the direction that parallels with substrate surface at the top of the protuberance of concaveconvex structure; The rise thickness of electric conductor of the direction that parallels with substrate surface of 1/10 position of short transverse from the lowest part of recess along protuberance is more than 0.9 times, can improve the parallel transmitance and the polarization characteristic of the light of oblique incidence thus, thereby can more desirably be used in this polarizing beam splitter.
On the contrary, corresponding to the incident angle to the light of the electric conductor incident on surface, the parallel transmitance and the polarization characteristic of the situation of the direction incident of height (thickness) step-down (attenuation) from electric conductor apparent are relatively low.That is, in the cross section view of wire grid polarizer, under the situation of electric conductor relative tilt, being asymmetry as the angle interdependence performance of the parallel transmitance of the wire grid polarizer at center with respect to the vertical direction of substrate surface (incident angle is 0 degree).For example, in the cross section view of wire grid polarizer, with respect to the vertical direction of substrate surface as incident angle 0 degree, from any setting+the parallel transmitance of the situation of 45 degree incidents is with to spend the parallel transmitance of situation of incidents from-45 different.
Know from above-mentioned; For example; Through utilizing the cohesiveness material with the prism and the bonding cube type polarizing beam splitter of processing of wire grid polarizer of two bottom surfaces for the triangular column of isosceles right triangle; Present following such characteristic; That is,, inequality with parallel transmitance on the face of adjacency from the light of the provision wavelengths of vertical direction incident from the parallel transmitance of the light of the provision wavelengths of vertical direction incident with respect to the face arbitrarily that can the light of incident be carried out polarization separation in the face that polarizing beam splitter had.
In addition; From the parallel transmitance that sees through light and the viewpoint of polarization characteristic; The incident direction that is preferably direction that polarizing beam splitter is configured to connect two straight line L1 near two intersection points of the protuberance of the concaveconvex structure of wire grid polarizer and all the other two intersection points, L2 and the light that incides polarization layer is same direction with respect to the vertical direction of polarization layer, and said wire grid polarizer forms the polarization layer of polarizing beam splitter.
In addition, polarizing beam splitter can be provided with wire grid polarizer on light incident or exit facet.In the optical system of reflection type projector, between light source and polarizing beam splitter, have preceding polaroid, between polarizing beam splitter and projecting lens, have the purification polaroid.On the surface of the light incident exit facet through wire grid polarizer being arranged on polarizing beam splitter, do not need the antireflection layer of light incident exit facet, and can improve the utilization factor again that does not see through the light of polarizing beam splitter.
In addition, polarizing beam splitter can be provided with optical functional layer on the face of light incident or outgoing.As optical functional layer; Light wavelength that has absorbed for the concaveconvex structure, the antireflection layer of going into emergent light that embody lens effect, the light absorbing zone, the conversion that absorb unwanted light and luminous luminescent layer, absorb the non-polarisation of light sheet etc. that sees through, can select these functions or compound use according to the method for application of polarizing beam splitter.Thus, can improve brightness, the contrast of the image light of the reflection type projector that uses polarizing beam splitter, can be with the optical system miniaturization of reflection type projector.
In addition, for the not restriction of material of the prism that constitutes polarizing beam splitter, can use glass, resin etc.But for the birefringence that suppresses to be caused by temperature variation etc. changes, photoelastic constant is preferably 1.5 * 10 -11Pa -1Below, and in the face of prism and the phase difference value of thickness direction hour more satisfactory.
(projection type image display apparatus)
As the existing reflective liquid crystal projection apparatus that utilizes reflection type liquid crystal display element of the projector of projection type image display apparatus.The related polarizing beam splitter of the utility model can be applied to reflective liquid crystal projection apparatus.Reflective liquid crystal projection apparatus; Have the related polarizing beam splitter of the utility model, light source and reflection type liquid crystal display element; Make the light that sends from said light source carry out polarization separation thus in said polarizing beam splitter transmission and reflection; To incide said reflection type liquid crystal display element through polarized light said polarizing beam splitter or that be reflected at said polarizing beam splitter, in further modulation back outgoing, thereby then at said polarizing beam splitter reflection or transmission projected image.Can use the polarizing beam splitter of cube type that adopts the related wire grid polarizer of the utility model and make as this polarizing beam splitter.
Polarizing beam splitter preferably is configured to; In the cross section view of wire grid polarizer; Rise on 1/10 the position in descend 1/10 position and short transverse of the highest short transverse from the protuberance of the concaveconvex structure of substrate surface from the lowest part of the recess of concaveconvex structure along protuberance along protuberance; The straight line that draws two horizontal directions; Connect in 4 intersection points of said two straight lines and the profile of electric conductor near the straight line of two intersection points of the protuberance of concaveconvex structure and the symbol of slope that is connected the straight line of all the other two intersection points, identical with the symbol of the slope of the incident direction of the light of the polarizing layer that incides polarizing beam splitter.This be because; The cross section view of wire grid polarizer is being handled as x-y plane coordinates system; The direction that will parallel with this substrate surface is as the x direction of principal axis, and its vertical direction as the y direction of principal axis, is connected with the linear function performance under the situation of incident direction of each straight line and light of intersection point; Slope through making each linear function is identical, can improve parallel transmitance and polarization characteristic through light.
In addition, when adopting polarizing beam splitter to make reflective liquid crystal projection apparatus, the viewpoint from the quality that improves projected image becomes the light transmission polarizing beam splitter projected image from the outgoing of reflective polarizing liquid crystal display cells thereby be preferably with design of Optical System.
In addition, the wire grid polarizer that the utility model is related promptly uses the decline of cohesiveness material embedding electric conductor optical characteristics also less, so the polarization separation characteristic good of polarizing beam splitter, and can reduce the angle interdependence of polarization separation characteristic.Therefore, even the incident angle scope of the light of directive polarizing beam splitter is center angle ± above wide-angle of 10 degree, the decline of polarization separation characteristic can not take place yet.The incident angle scope of the light through making the directive polarizing beam splitter becomes wide-angle, and it is many that the selection of the projecting lens of reflective liquid crystal projection apparatus becomes, thereby can improve the Design for optical system degree of freedom of reflective liquid crystal projection apparatus.In addition, the incident angle scope is meant that the light intensity of the incident angle that the incident light intensity is the highest was made as at 100 o'clock, and intensity is the angular range more than 50.
In addition; The related wire grid polarizer of the utility model can not damage optical characteristics ground in the zone of visible light, near infrared light and infrared light and uses, and therefore can be used in the image that adopts the zone and show fields such as purposes, pick-up purposes, sensor applications.Yet the utility model is not limited to described example, can implement various changes to each example.In addition, the material of said example, quantity etc. are merely an example, possibly suitably change.In addition, can in the scope of the technical thought that does not exceed the utility model, suitably change.
Embodiment
Below, through embodiment the utility model is elaborated, but the utility model is not limited by following these embodiment.At first, the measuring method to the measured value among the embodiment describes.
The measurement of＜transmitance and the computing method of degree of polarization＞
Utilize the VAP-7070 of Japanese beam split Co., Ltd. system to measure parallel transmitance and vertical transmitance.Measurement mechanism has measuring polarizing elements near light source, when the parallel transmitance of measurement wire grid polarizer and vertical transmitance, be configured to the substrate surface incident with concaveconvex structure from wire grid polarizer.
Will be with respect to the transmitance of the light of the wavelength X of the parallel vibration of electric conductor as Imin, as IMax, the degree of polarization P ' that obtains wavelength X through following relational expression (1) is (λ) in the transmitance of the light of the wavelength X of vertical vibration.
P’（λ）=[（ＩMax－Ｉmin）／（ＩMax＋Ｉmin）]×100％…（1）
The measurement of phase difference value in the＜face＞
As the measuring equipment of phase difference value in the face, used the KOBRA-WR of prince's instrumentation machine Co., Ltd. system, this equipment is the polarization resolver that utilizes parallel Nicol method.The measurement light wavelength is 550nm, is that 0 phase difference value when spending is as phase difference value in the face with incident angle.
The cohesive strength measuring method of＜adhesion sheet＞
The cohesive strength of adhesion sheet except breadboard is changed to the glass plate from the SUS steel plate, is all measured according to the JIS-Z-0237 standard.It is 25mm that the adhesion sheet that the two sides is had a stripping film is cut into width, the face of one of which side is fitted on the PET film and processes test film, and this test film is fitted on the glass plate as breadboard.Fit on the breadboard, after at room temperature placing 20 minutes, utilize cupping machine (condition is 180 ° of peeling rate 300mm/ branch, peel angle) to measure the cohesive force between glass and the sticker.
The measuring method of refractive index
The measurement of refractive index utilizes the laser refraction appearance Model2010 of Metricon corporate system, in 24 hours, the constant temperature enclosure of 25 degree, process the sample of measuring object after, refractive Index Measurement.According to the measurement result of the refractive index of the wavelength 532nm, 632.8nm and the 824nm that obtain by same device, utilize Cauchy dispersion formula to try to achieve the wavelength dispersion figure of refractive index, thereby obtain the refractive index of wavelength 589nm.In addition, for gel-type resin, after being solidified, gel-type resin carries out refractometry again.
(method for making of wire grid polarization spare)
Then, the method for making of the employed wire grid polarizer of present embodiment is carried out following explanation.
(making of mould)
Concaveconvex structure extends in one direction, and the concaveconvex structure in the cross section view is a rectangular shape, and the photoetching technique making spacing of using the semiconductor manufacturing is that each silicon of 160nm, 145nm, 130nm, 100nm is substrate.Go up the about 3 μ m acrylic acid series UV gel-type resins (refractive index 1.52) of coating at PET film (A-4300: Co., Ltd.'s system is spun by Japan), silicon is that the concaveconvex structure face and the UV gel-type resin of substrate joins, and is stacked together.Operation center's wavelength is the UV lamp of 365nm, carries out 1000mJ/cm from PET film side 2UV irradiation, thereby be that the concaveconvex structure of substrate is transferred on the PET film with silicon.On the concaveconvex structure face of the PET film that obtains, as the conductionization processing, cover concaveconvex structure with the platinum palladium through metallikon, electronickelling afterwards, thus make the nickel pressing mold that the surface has concaveconvex structure.The nickel pressing mold of record made in below table 1.
Table 1
The nickel pressing mold Spacing
A 145nm
B 160nm
C 145nm
D 100nm
E 130nm
F 130nm
In the nickel pressing mold of said table 1, nickel pressing mold A and nickel pressing mold D are as the mould A, the mould D that are used to make the transfer film that the surface has concaveconvex structure.In addition, utilizing nickel pressing mold B, C, E and F, is the surface transfer concaveconvex structure of cyclic olefin resins (the following COP that the slightly is called) plate of 0.5mm through hot punch press method at thickness, makes the COP plate that the surface has concaveconvex structure.
The COP plate in order to dwindle spacing through extension, at the surface coated silicone oil of COP plate, was placed 30 minutes in about 80 ℃ circulating air-oven.Then,,, under this state, will extend with the COP plate and in temperature is adjusted to 113 ± 1 ℃ circulating air-oven, place 10 minutes as the chuck fixation of C OP plate of bearing of trend with the bearing of trend of concaveconvex structure with elongator.Then, the speed extending that divides with 250mm/ makes the interval (spacing) of concaveconvex structure become the spacing of the regulation shown in the below table 2.After extending end, take out at ambient temperature and extend the COP plate that is over, under the state of keeping the distance between the chuck, the COP plate that extension is over cools off.
Then, the concaveconvex structure on the surface of transfer printing nickel pressing mold B, C and F has the COP plate of concaveconvex structure and COP plate that the extension that obtains is over for extensional surface, and this concaveconvex structure face is carried out the surface treatment of UV-ozone.Utilizing ultraviolet surface processing device (PHoTo SurFace PrOcessor, model: PM906N-2, SEN special light sources Co., Ltd. system), is 34mW/cm to the illumination of concaveconvex structure face illumination wavelength 254nm 2UV30 second.
Observe above extension the be over surface of COP plate and the concaveconvex structure in the cross section view, the spacing of the concaveconvex structure of each COP plate B, C, E and F such as 2 records of below table with SEM.
Table 2
The COP plate Spacing
B 145nm
C 130nm
E 100nm
F 100nm
Then, on the concaveconvex structure face of COP plate surface B, C, E and F,, cover concaveconvex structure with the platinum palladium through metallikon as the conductionization processing, electronickelling respectively afterwards, thus make the nickel pressing mold that the surface has concaveconvex structure.With them as mould B, mould C, mould E and mould F.
(surface of use UV gel-type resin has the making of the transfer film of concaveconvex structure)
Utilize said each mould A to F, make the transfer film that the surface has concaveconvex structure.Base material is the TAC film (TD80UL-H: film Co., Ltd. of Fuji system), be 3.5nm with respect to phase difference value in the face of wavelength 550nmTAC film that resin constitutes for the triacetyl cellulose by thickness 80 μ m.The about 3 μ m acrylic acid series UV gel-type resins (refractive index 1.52) of coating on the TAC film are arranged to the MD direction (coiling direction of film or moving direction) of TAC film with the bearing of trend of the concaveconvex structure of mould perpendicular, and mould superposes on the TAC film.Operation center's wavelength is the UV lamp of 365nm, carries out 1000mJ/cm from TAC film side 2UV irradiation, thereby the concaveconvex structure of mould is transferred on the UV gel-type resin.The TAC film is peeled off from mould, thus the transfer film of concaveconvex structure that has been formed in the substrate surface transfer printing that constitutes by the UV gel-type resin.Each mould is carried out above operation, process the transfer film A to F shown in the below table 3.Below table 3 is the results with the concaveconvex structure of the surface of each transfer film of SEM observation and cross section view, the shape of the concaveconvex structure in " concaveconvex structure " expression cross section view of below table 3." spacing " is the interval (spacing) of concaveconvex structure; " (ア) " does; In cross section view, and (from the highest of the protuberance of the concaveconvex structure of substrate surface along the descend thickness of protuberance of 1/10 position of short transverse)/(at the thickness of the protuberance of 1/10 the position of rising from the lowest part of the recess of concaveconvex structure along short transverse).
Table 3
Transfer film Concaveconvex structure Spacing （ア）
A Rectangular shape 145nm 0.76
B Sine wave shape 145nm 0.30
C Sine wave shape 130nm 0.35
D Rectangular shape 100nm 0.62
E Sine wave shape 100nm 0.56
F Sine wave shape 100nm 0.33
(using the formation of the dielectric layer of metallikon)
Then on the substrate surface with concaveconvex structure of each transfer film, through metallikon with the silicon dioxide film forming as dielectric layer.The coating apparatus condition is Ar gaseous tension 0.2Pa, spraying plating power 770W/cm 2, coverage speed 0.1nm/s, film forming makes that the dielectric body thickness conversion form flat film on the transfer film is 3nm.
(utilizing the formation of the electric conductor of oblique evaporation method)
Then, on the substrate surface with concaveconvex structure of each transfer film, through vacuum evaporation with aluminium (Al) film forming.The vapor deposition condition of Al is under the normal temperature, vacuum tightness 2.0 * 10 -3Pa, evaporation rate 40nm/s.In order to measure the thickness of Al, the glass substrate and the transfer film of surface smoothing is inserted in the device simultaneously, with the Al thickness on the smooth glass substrate as the Al average thickness.With the plane of the bearing of trend square crossing of the concaveconvex structure of base material in; Normal with respect to substrate surface with concaveconvex structure; The vapor deposition angle is set at 20 degree; Make that to each transfer film evaporating Al the Al average thickness of transfer film A and B is 120nm, the Al average thickness of transfer film C is 100nm, and the Al average thickness of transfer film D, E and F is 90nm.In addition, be meant that the thickness at the vapor deposition thing from the perpendicular direction evaporation material of glass time the on the smooth glass substrate uses as the reference value of vapor deposition amount at this said average thickness.
(removal of unnecessary Al)
Then in order to remove unnecessary Al, with vapor deposition each transfer film of Al at room temperature impregnated in 70 seconds in the sodium hydrate aqueous solution of 0.1 weight %, washing immediately is dry with film then.So, the wire grid polarizer that will be obtained by each transfer film shows in below table 4 as wire grid polarizer A to F.
Observe concaveconvex structure and the shape of electric conductor at the section visual angle of each wire grid polarizer through SEM; Electric conductor is located at a side the side of the protuberance of the concaveconvex structure on the base material partially; The part of electric conductor is positioned at the top at top of the protuberance of concaveconvex structure; The top of the protuberance through the concaveconvex structure on the base material, along the protuberance axle of the upright set direction of protuberance, with top through electric conductor, inequality along the conduction axon of upright set direction.In addition, below table 4 is the table of the shape of the concaveconvex structure at the section visual angle of having put down in writing each wire grid polarizer of observing with SEM and electric conductor." concaveconvex structure " of below table 4 is the shape of the concaveconvex structure at section visual angle; " spacing " is the interval (spacing) of concaveconvex structure; " (ア) " is in cross section view; The thickness of protuberance of 1/10 position of the height of protuberance falls from the highest subordinate of the protuberance of the concaveconvex structure of substrate surface; With respect to the ratio from the thickness of 1/10 locational protuberance of the height of the lowest part rising protuberance of the recess of concaveconvex structure, " (イ) " is in cross section view, with respect to the thickness of the electric conductor of the thickness of 1/3 locational protuberance of the height that falls protuberance the highest subordinate from the protuberance of the concaveconvex structure of substrate surface.
Table 4
Wire grid polarizer Concaveconvex structure Spacing （ア） （イ）
A Rectangular shape 145nm 0.76 Thin
B Sine wave shape 145nm 0.30 Thick
C Sine wave shape 130nm 0.35 Thick
D Rectangular shape 100nm 0.62 Thin
E Sine wave shape 100nm 0.56 Thick
F Sine wave shape 100nm 0.33 Thick
In addition; Being shaped as of the electric conductor of the top at the top of the protuberance of the concaveconvex structure of the substrate surface that is arranged in cross section view of wire grid polarizer B, C and F; The side of the electric conductor of the top at the top of protuberance tilts with respect to the vertical direction of base material, and it is shaped as the top and is tapered, is similar to leg-of-mutton sharp shape.
(embodiment 1, embodiment 2, comparative example 1～comparative example 3)
Use the wire grid polarizer A and the B that are spaced apart 145nm of the concaveconvex structure at section visual angle; With the wire grid polarizer D, E and the F that are spaced apart 100nm of concaveconvex structure, measure through parallel transmitance before and after the cohesiveness material embedding electric conductor and vertical transmitance.In addition, the incident angle of the measuring light of directive wire grid polarizer is the vertical direction with respect to wire grid polarizer.At first; Measure after the parallel transmitance and vertical transmitance of each wire grid polarizer; (the RA-600N: the Sumiron of Co., Ltd. system), fitted into the MD direction of TAC film and the direction of principal axis that sees through of wire grid polarizer and become vertical relation of applying acrylic acid series adhesion sheet on the conductor construction face of wire grid polarizer.Afterwards, preserved 1 day down, be placed on the test desk of VAP-7070 from the to have fitted wire grid polarizer of adhesion sheet of the state of the TAC film incident of fitting, measure parallel transmitance and vertical transmitance with measuring light at room temperature 25 degree environment.In addition, (RA-600N: the refractive index Sumiron of Co., Ltd. system) is 1.47 to acrylic acid series adhesion sheet, and clinging power is 6.8N/25mm.In addition, measuring wavelength is the wavelength 555nm that human eye can sense the degree of light strongly.
Below table 5 does, the wire grid polarizer A that is spaced apart 145nm of concaveconvex structure and B, adhesion sheet and the TAC film parallel transmitance before and after fitting and the gradient of the degree of polarization that calculates.The gradient (%) of the polarized light after the applying before " parallel transmitance " expression in the below table 5 is fitted with respect to adhere sheet and TAC film, " degree of polarization " represented the gradient (%) with respect to the degree of polarization after the applying before the applying of adhesion sheet and TAC film.Wire grid polarizer B compares with wire grid polarizer A, can be reduced with the parallel transmitance of the situation of cohesiveness material embedding electric conductor and the fall of degree of polarization.
Table 5
Wire grid polarizer Concaveconvex structure （ア） （イ） Parallel transmitance Degree of polarization
A (comparative example 1) Rectangular shape 0.76 Thin -13.5 -1.8
B (embodiment 1) Sine wave shape 0.30 Thick -8.2 -0.6
Below table 6 does, the wire grid polarizer D, E and the F that are spaced apart 100nm of concaveconvex structure, adhesion sheet and the TAC film parallel transmitance before and after fitting and the gradient of the degree of polarization that calculates.Wire grid polarizer E and F compare with wire grid polarizer D, can be reduced with the fall of the parallel transmitance of the situation of cohesiveness material embedding electric conductor.Yet wire grid polarizer E does not have to suppress the decline of degree of polarization, and wire grid polarizer F can reduce the fall of degree of polarization.
Table 6
Wire grid polarizer Concaveconvex structure （ア） （イ） Parallel transmitance Degree of polarization
D (comparative example 2) Rectangular shape 0.62 Thin -14.1 -0.8
E (comparative example 3) Sine wave shape 0.56 Thick -10.1 -0.8
F (embodiment 2) Sine wave shape 0.33 Thick -8.4 -0.3
The concaveconvex structure of the substrate surface at the section visual angle of wire grid polarizer B and F is a sine wave shape, has preferred " (ア) " (0.45 below) and preferably " (イ) " (thicker, perhaps equal thickness).In addition; Be positioned at being shaped as of electric conductor of top at top of protuberance of concaveconvex structure of the substrate surface at section visual angle; The side of the electric conductor of the top at the top of protuberance tilts with respect to the vertical direction of base material, and it is shaped as the top and is tapered, is similar to leg-of-mutton sharp shape.As stated, because wire grid polarizer B and F have the shape of preferred concaveconvex structure and electric conductor, so can suppress reduction with caused parallel transmitance of cohesiveness material embedding electric conductor and degree of polarization.
In addition, the interval of the concaveconvex structure of wire grid polarizer B (spacing) is 145nm, and the spacing of wire grid polarizer D is 100nm.The degree of polarization of wavelength 555nm after adhesion sheet and TAC film are fitted, wire grid polarizer B is 99.2%, and wire grid polarizer D is 99.0%, and the degree of polarization of the wire grid polarizer B that the spacing of concaveconvex structure the is bigger wire grid polarizer D more less than spacing is more good.In the past, the polaroid polarization characteristic with wire grid construction was that the effect of the interval of electric conductor (spacing) is bigger; Spacing is more little then to demonstrate good polarization characteristic more; Yet, can know through this result, under the situation of embedding electric conductor; Spacing not only; The shape of concaveconvex structure and electric conductor also will become important key element, and it is below 0.45 that the concaveconvex structure at the section visual angle through the related wire grid polarizer of adjustment the utility model and the shape of electric conductor make (ア), the remarkable result that the degree of polarization that can be inhibited reduces.
(embodiment 3, embodiment 4, embodiment 5)
Wire grid polarizer B, C or F use the bottom surface to make polarizing beam splitter as the prism that is made up of the PMMA resin of the triangular column of isosceles right triangle, have calculated degree of polarization according to the measurement result of its parallel transmitance and vertical transmitance.Use two bottom surfaces to be one in the prism of the triangular column of isosceles right triangle and the wire grid polarizer; The Sumiron of Co., Ltd. system), the real estate of wire grid polarizer is through UV gel-type resin (LCR0643: Toagosei Co., Ltd's system) be bonded in the face that the hypotenuse with the end face of prism and bottom surface joins, process a cube type polarizing beam splitter conductor construction face of wire grid polarizer is through acrylic acid series adhesion sheet (RA-600N:.In addition; The bottom surface is that the prism of isosceles right triangle is cutting PMMA resin plate (カ Na セ ラ イ ト 1300 Network リ ア: Kanase Industrial Co., Ltd system) process; The bearing of trend of the electric conductor of wire grid polarizer is configured to, and is vertical relation with respect to its bottom surface (isosceles right triangle shape face).In addition, (LCR0643: refractive index Toagosei Co., Ltd's system) is 1.49 to the UV gel-type resin.
In cube type polarizing beam splitter of processing, the polarizing beam splitter that uses wire grid polarizer B is as polarizing beam splitter B, and the polarizing beam splitter that uses wire grid polarizer C is as polarizing beam splitter C, and the polarizing beam splitter that uses wire grid polarizer F is as polarizing beam splitter F.
Below table 7 does, measures the parallel transmitance and the vertical transmitance at wavelength 465nm, 555nm and 630nm of each polarizing beam splitter, thus the result of the polarisation of light degree of each wavelength that sees through each polarizing beam splitter that calculates.In addition, the incident angle of the measuring light of the polarization layer of directive polarizing beam splitter for roughly 45 the degree.In the following table 7; " spacing " is the interval (spacing) of concaveconvex structure at the section visual angle of the employed wire grid polarizer of polarizing beam splitter; " 465nm " is the degree of polarization of wavelength 465nm, and " 555nm " is the degree of polarization of wavelength 555nm, and " 630nm " is the degree of polarization of wavelength 630nm.
Table 7
Polarizing beam splitter Spacing 465nm 555nm 630nm
B (embodiment 3) 145nm 97.2 99.3 99.6
C (embodiment 4) 130nm 98.8 99.6 99.8
F (embodiment 5) 100nm 99.5 99.8 99.9
The concaveconvex structure at the section visual angle of polarizing beam splitter B, C or employed each wire grid polarizer of F and electric conductor are to be adapted to the shape of the electric conductor of wire grid polarizer being carried out embedding with the cohesiveness material, but their spacing is different.Shown in above-mentioned table 7; Aspect spacing big or small; The polarisation of light characteristic of the short wavelength side of wavelength 465nm demonstrates bigger difference; Polarization characteristic difference between spacing 145nm and the spacing 130nm is bigger, and in addition, the polarization characteristic between spacing 130nm and the spacing 100nm also has bigger difference.Use the polarization separation characteristic good of spacing as light wavelength 555nm polarizing beam splitter, that the human eye perception is comparatively strong of the wire grid polarizer of the utility model of 145nm; Therefore; Can use as polarizing beam splitter; But preferably use the wire grid polarizer of spacing, more preferably use the wire grid polarizer of spacing as the utility model below the 100nm as the utility model below the 130nm.Spacing is 100nm when following, almost can restrain the decline of the degree of polarization of the wavelength 465nm that is caused by the cohesiveness material fully.
(embodiment 6, comparative example 4)
Use wire grid polarizer B and two prisms that constitute by synthetic quartz (refractive index 1.46) or pyrex (BK7) (refractive index 1.52); The bottom surface of said prism is isosceles right triangle, on the face that joins with both sides except the hypotenuse of bottom surface, implemented reflection prevents plated film; (LCR0643: Toagosei Co., Ltd's system) real estate of (refractive index 1.49), said wire grid polarizer is through acrylic acid series adhesion sheet (RA-600N: the Sumiron of Co., Ltd. system) be bonded in the face that the hypotenuse with the end face of said prism and bottom surface joins, process a cube type polarizing beam splitter through the UV gel-type resin for the conductor construction face of said wire grid polarizer.In addition, the reflection of each prism being implemented prevents that plated film is designed under the situation of the vertical direction incident of face, have identical reflectivity.Said cube of type polarizing beam splitter of the prism of use synthetic quartz or BK7 is respectively as cube type polarizing beam splitter B 2(using the synthetic quartz prism) and cube type polarizing beam splitter B 3(using the BK7 prism).In addition, the bearing of trend of the electric conductor of said wire grid polarizer is configured to, and is vertical relation with respect to the bottom surface (isosceles right triangle shape face) of said prism.Table 8 is to the incident angle of the polarization layer of each polarizing beam splitter of directive and the result who measures in the parallel transmitance of wavelength 465nm, 555nm and 630nm.
Table 8
Polarizing beam splitter Incident angle 465nm 555nm 630nm
B 2(embodiment 6) 43.9 degree 77.8 83.8 84.7
B 3(comparative example 4) 46.2 degree 75.8 83.2 84.1
Can know that through table 8 incident angle of directive polarization layer is 43.9 cube type polarizing beam splitter B when spending 2Demonstrate than a cube type polarizing beam splitter B at whole wavelength 3High transmitance.At 465nm, transmitance significantly improves especially.According to this result, through using the related wire grid plate of the utility model, its conductor construction face of embedding also can improve parallel transmitance.
Utilize possibility on the industry
According to the utility model; Promptly use cohesiveness material embedding electric conductor also can reduce the decline of parallel transmitance and polarization separation characteristic (degree of polarization); Effect with the wire grid polarizer that can realize that parallel transmitance and polarization separation characteristic (degree of polarization) are all good; For example, can be applicable to reflective liquid crystal projection apparatus.

Claims (22)

1. wire grid polarizer; It is characterized in that; Have base material and electric conductor; Said base material has with the side upwardly extending concaveconvex structure of the interval below the 150nm in regulation, and said electric conductor is located at a side the side of the protuberance of said concaveconvex structure partially, with the perpendicular face of the bearing of trend of the concaveconvex structure of said base material in; From the highest of the protuberance of concaveconvex structure along the descend thickness of base material protuberance of 1/10 position of short transverse, be below 0.45 times with respect to the thickness of the base material protuberance of 1/10 the position of rising from the lowest part of the recess of substrate surface along short transverse.
2. wire grid polarizer as claimed in claim 1 is characterized in that, with the perpendicular face of the bearing of trend of said concaveconvex structure in, the concaveconvex structure of substrate surface is a sine wave shape.
3. according to claim 1 or claim 2 wire grid polarizer; It is characterized in that; The top of the protuberance through said concaveconvex structure and along the protuberance axle of the upright set direction of protuberance; With top through said electric conductor and different along the conduction axon of upright set direction, at least a portion of said electric conductor is positioned at the top at top of the protuberance of said concaveconvex structure.
4. according to claim 1 or claim 2 wire grid polarizer; It is characterized in that; With the perpendicular face of the bearing of trend of said concaveconvex structure in; With respect to from the highest of the protuberance of the concaveconvex structure of said substrate surface along the descend thickness of protuberance of 1/3 position of short transverse, the thickness of electric conductor is identical with it or be more than it.
5. according to claim 1 or claim 2 wire grid polarizer; It is characterized in that; With the perpendicular face of the bearing of trend of said concaveconvex structure in; The side of electric conductor of top at top of protuberance that is positioned at the concaveconvex structure of said substrate surface tilts with respect to the vertical direction of substrate surface, said electric conductor be shaped as that the top is tapered, the sharp shape similar with triangle.
6. according to claim 1 or claim 2 wire grid polarizer; It is characterized in that; With the perpendicular face of the bearing of trend of concaveconvex structure in; Rise on 1/10 the position in descend 1/10 position and short transverse of the highest short transverse from the protuberance of the concaveconvex structure of substrate surface from the lowest part of the recess of concaveconvex structure along protuberance along protuberance; Horizontal direction along base material is drawn straight line, connect in 4 intersection points of said straight line and the profile of electric conductor near the straight line of two intersection points of the protuberance of concaveconvex structure and to connect the symbol of slope of straight line of all the other two intersection points identical.
7. according to claim 1 or claim 2 wire grid polarizer is characterized in that said base material is a resin.
8. according to claim 1 or claim 2 wire grid polarizer is characterized in that the conductor construction face of wire grid polarizer is provided with the cohesiveness material, and through said cohesiveness material, the concaveconvex structure face and the optics of said wire grid polarizer are bonding.
9. according to claim 1 or claim 2 wire grid polarizer; It is characterized in that; The conductor construction face of wire grid polarizer and the reverse side of said conductor construction are provided with the cohesiveness material; Through said cohesiveness material, at least one face and optics in the conductor construction face of said wire grid polarizer and the reverse side of conductor construction are bonding.
10. wire grid polarizer as claimed in claim 8 is characterized in that, said cohesiveness material is the adhesion sheet.
11. wire grid polarizer as claimed in claim 9 is characterized in that, said cohesiveness material is the adhesion sheet.
12. polarizing beam splitter; It is characterized in that; The conductor construction face of any described wire grid polarizer in the claim 1 to 11 and the reverse side of said conductor construction are provided with the cohesiveness material; Through said cohesiveness material, the prism of the conductor construction face of said wire grid polarizer and the reverse side of said conductor construction and triangular column is bonding.
13. polarizing beam splitter as claimed in claim 12 is characterized in that, the refringence of the whole component parts except that wire grid polarizer between said prism and the said prism is in 0.1.
14. polarizing beam splitter as claimed in claim 13 is characterized in that, the refractive index of cohesiveness material of conductor construction face side that the refractive index ratio of said prism is arranged at said wire grid polarizer is low.
15. any described polarizing beam splitter as in the claim 12 to 14 is characterized in that, is arranged in the cohesiveness material of reverse side of conductor construction face and said conductor construction of wire grid polarizer, at least one side's cohesiveness material is the adhesion sheet.
16. like any described polarizing beam splitter in the claim 12 to 14; It is characterized in that; Be arranged in the cohesiveness material of reverse side of conductor construction face and said conductor construction of wire grid polarizer, at least one side's cohesiveness material is a gel-type resin.
17. like any described polarizing beam splitter in the claim 12 to 14; It is characterized in that; Utilize in the prism of the bonding triangular column of the reverse side of conductor construction face and said conductor construction of cohesiveness material and wire grid polarizer, the prism of at least one side's triangular column is the prism of the triangular column that is formed from a resin.
18. like any described polarizing beam splitter in the claim 12 to 14; It is characterized in that; Utilize in the prism of the bonding triangular column of the reverse side of conductor construction face and said conductor construction of cohesiveness material and wire grid polarizer, the prism of at least one side's triangular column is the prism of the triangular column processed by glass.
19. any described polarizing beam splitter as in the claim 12 to 14 is characterized in that at least one face of polarizing beam splitter, having optical functional layer.
20. any described polarizing beam splitter as in the claim 12 to 14 is characterized in that the photoelastic constant of prism is 1.5 * 10 -11Pa -1Below.
21. a projection type image display apparatus is characterized in that, has like any described polarizing beam splitter in the claim 12 to 20; Light source; And reflection type liquid crystal display element; Through making the light that sends from said light source carry out polarization separation in said polarizing beam splitter transmission and reflection; See through polarized light said polarizing beam splitter or that reflected by said polarizing beam splitter and incide said reflection type liquid crystal display element; Outgoing after modulation again, thereby then at said polarizing beam splitter reflection or transmission projected image.
22. projection type image display apparatus as claimed in claim 21 is characterized in that, the incident angle scope of the light directive polarizing beam splitter that sends from light source is a center angle ± more than 10 degree.
CN2011202770116U 2010-07-30 2011-08-01 Wire grating polaroid and polarization optical splitter using wire grating polariod Expired - Lifetime CN202433542U (en)

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