CN202338768U - Automatic filling device for electronic grade ultrapure ammonia - Google Patents
Automatic filling device for electronic grade ultrapure ammonia Download PDFInfo
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- CN202338768U CN202338768U CN2011203890312U CN201120389031U CN202338768U CN 202338768 U CN202338768 U CN 202338768U CN 2011203890312 U CN2011203890312 U CN 2011203890312U CN 201120389031 U CN201120389031 U CN 201120389031U CN 202338768 U CN202338768 U CN 202338768U
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Abstract
The utility model discloses an automatic filling device for electronic grade ultrapure ammonia, comprising an ultrapure ammonia storage tank, a filling pump, a steel bottle for storing ammonia and a cleaning pump, wherein a first main pipeline is arranged between the ultrapure ammonia storage tank and the filling pump for connection, while a second main pipeline is arranged between the filling pump and the steel bottle for storing ammonia for connection; a first branch pipeline is arranged on the second main pipeline and connected to an industrial ammonia recycling tank; a second branch pipeline is arranged on the second main pipeline and connected to the cleaning pump; a third branch pipeline is arranged between the cleaning pump and the industrial ammonia recycling tank for connection; a first valve is arranged on the first main pipeline; a second valve is arranged at a part which is located between the filling pump and the first branch pipeline; and a third valve is arranged on the first branch pipeline, while a fourth valve is arranged on the second branch pipeline. The automatic filling device for electronic grade ultrapure ammonia is simple and rational in structure, and convenient to manufacture and use; and during filling, no worker is required to be present; therefore, the automatic control of the filling process is realized.
Description
Technical field
The utility model relates to the charging device of special gas, particularly a kind of automatic charging device of electron level ultra-pure ammonia.
Background technique
In existing professional gas companies, gas is filled into this process of steel cylinder from storage tank, most of in the majority with manual operation, labour force's consume significant and labor strength are big in the whole process, and hazard level is high in the operating process.And in the production process of extraordinary electronic gas, if still adopt conventional artificial to fill, not only the hazard level of workman's operation increases, and the purity final to product can not guarantee.
The model utility content
The utility model problem to be solved just provides a kind of automatic charging device of electron level ultra-pure ammonia, and is simple and reasonable, makes easy to usely, need not the workman in the filling process on the scene, realizes the automatic control of filling process.
In order to solve the problems of the technologies described above; The utility model adopts following technological scheme: a kind of automatic charging device of electron level ultra-pure ammonia; Comprise ultra-pure ammonia storage tank, filling pump, storage ammonia steel cylinder and wash pump; It is characterized in that: be provided with first main line between said ultra-pure ammonia storage tank and the filling pump and be connected, be provided with second main line between filling pump and the storage ammonia steel cylinder and be connected, on second main line, be provided with first bye-pass and be connected to industrial ammonia recycling can; On second main line, be provided with second bye-pass and be connected to wash pump, be provided with the 3rd bye-pass between wash pump and the industrial ammonia recycling can and be connected; First main line is provided with first valve, and the part on second main line between the filling pump and first bye-pass is provided with second valve, and first bye-pass is provided with the 3rd valve, and second bye-pass is provided with the 4th valve.
Further, the part between first bye-pass and second bye-pass is provided with the 5th valve on said second main line.
Further, the part on said second main line between second bye-pass and storage ammonia steel cylinder is provided with the 4th bye-pass and is connected to outside helium gas source, and the 4th bye-pass is provided with the 6th valve.Before fill with after filling, can adopt helium to purge like this, make to fill pipeline and reach clean requirement filling pipeline.
Further, between the 5th valve and the 3rd bye-pass, be provided with the 5th bye-pass on said second main line, the 5th bye-pass is provided with the 7th valve.
Further, between the 6th valve and outside helium gas source, be provided with the 8th valve on said the 3rd bye-pass.
Further, the automatic charging device of above-mentioned electron level ultra-pure ammonia also comprises control system, and said first valve, second valve, the 3rd valve, the 4th valve, the 5th valve and the 6th valve are pneumatic valve and by the control system control switch.
Further, said the 7th valve and the 8th valve are manually-operated gate.
Further, said storage ammonia steel cylinder below is provided with weighing apparatus, and weighing apparatus is connected in the control system through signaling line.
Further, said weighing apparatus is an electronic weighbridge.
After adopting technique scheme; The utlity model has following advantage: the workman only needs to store up the ammonia steel cylinder and is fixed on the electronic weighbridge; And the joint that will store up the ammonia steel cylinder connects with the joint that fills pipeline; Confirm to leave the control room operation control system after errorless, guarantee in the filling process unmanned on the scenely, guarantee workman's personal safety; Read the rated weight that charges into ultra-pure ammonia in the storage ammonia steel cylinder through electronic weighbridge, realize intelligent control by control system again, guarantee that the pressure and the quality of ultra-pure ammonia in all storage ammonia steel cylinders that dispatch from the factory remains on certain limit; Before filling, the dead-space volume of using helium will fill pipeline and valve purges cleaning, improves the purity of ultra-pure ammonia greatly.
Description of drawings
Below in conjunction with accompanying drawing the utility model is described further:
Fig. 1 is a kind of embodiment's of the utility model a schematic representation.
Embodiment
A kind of embodiment's of the utility model as shown in Figure 1 schematic representation; A kind of automatic charging device of electron level ultra-pure ammonia; Comprise ultra-pure ammonia storage tank 1, filling pump 2, storage ammonia steel cylinder 3 and wash pump 4; Be provided with first main line 51 between said ultra-pure ammonia storage tank and the filling pump and be connected, be provided with second main line 52 between filling pump and the storage ammonia steel cylinder and be connected, on second main line, be provided with first bye-pass 61 and be connected to industrial ammonia recycling can 8; On second main line, be provided with second bye-pass 62 and be connected to wash pump, be provided with the 3rd bye-pass 63 between wash pump and the industrial ammonia recycling can and be connected; First main line is provided with on first valve, 71, the second main lines part between the filling pump and first bye-pass and is provided with second valve, 72, the first bye-passes and is provided with the 3rd valve 73, the second bye-passes and is provided with the 4th valve 74.
On the said structure basis, the 5th valve 75 is set in the part between first bye-pass and second bye-pass on second main line.In the part between second bye-pass and storage ammonia steel cylinder on second main line the 4th bye-pass 64 being set is connected to outside helium gas source 9, the four bye-passes and is provided with the 6th valve 76.The automatic charging device of above-mentioned electron level ultra-pure ammonia; Also comprise control system; Said first valve, second valve, the 3rd valve, the 4th valve, the 5th valve and the 6th valve are pneumatic valve and by the control system control switch, control the break-make that fills pipeline by control system and realize filling automatically.
In addition, be provided with the 7th valve 77 between the 5th valve and the 3rd bye-pass, being provided with the 5th bye-pass 65, the five bye-passes on second main line; Between the 6th valve and outside helium gas source, be provided with the 8th valve 78 on the 3rd bye-pass.The 7th valve and the 8th valve are manually-operated gate.These two valves are mainly used in to set and fill the ultra-pure ammonia flow in the pipeline.Before filling, with helium the dead-space volume that fills pipeline and valve is purged cleaning earlier, improve the purity of the ultra-pure ammonia that charges into storage ammonia steel cylinder with this.
In the foregoing description, storage ammonia steel cylinder below is provided with weighing apparatus 31, and weighing apparatus is connected in the control system through signaling line.Starting weight through weighing apparatus weighing storage ammonia steel cylinder judges in the control system with charging into the nominal-mass after the ultra-pure ammonia and transferring to whether storage ammonia steel cylinder fills completion.Preferred weighing apparatus is that this type of electronic weighbridge weighed scope with ratio of precision is higher, the reaction weighing apparatus of sensitivity relatively.
The job step of the utility model is following:
One, the workman will store up the ammonia steel cylinder and be put on the electronic weighbridge and fix, and will fill after pipe joint is connected with storage ammonia cylinder joint and confirms that connection is intact, close the 7th valve; Open the 8th valve, the workman leaves the theatre, under the original state; All pneumatic valves are closed, and the inlet valve of storage ammonia steel cylinder is closed;
Two, workman's operation control system is opened the 6th valve, keeps other valve closings, and the 4th bye-pass feeds helium and purges filling pipeline, opens the 3rd valve and makes helium enter industrial ammonia recycling can;
Three, workman's operation control system is closed the 6th valve, opens first valve, keeps other valve closings, waits for after ultra-pure ammonia is full of the pump chamber of filling pump starting filling pump;
Four, after the pressure in detection first main line reaches 1.5Mpa～2Mpa; Workman's operation control system is opened second valve, the 3rd valve and the 5th valve; Keep other valve closings; Ultra-pure ammonia directly enters industrial ammonia recycling can along second main line and first bye-pass, realizes filling the first cleaning of pipeline;
Five, workman's operation control system keeps first valve, second valve, the 5th valve opening; Close the 3rd valve; Open the 4th valve; Keep other valve closings, start wash pump and be delivered to industrial ammonia recycling can, realize filling the secondary cleaning of pipeline with useless ammonia extraction residual in second main line and second bye-pass and through the 3rd bye-pass;
Six, workman's operation control system keeps first valve, second valve and the 5th valve opening, keeps other valve closings, reading and recording electronic weighbridge gravimetric value, and the workman leaves the theatre after marching into the arena and opening the inlet valve that stores up the ammonia steel cylinder, and ultra-pure ammonia begins to charge into storage ammonia steel cylinder;
Seven, the variation of control system reading and recording electronic weighbridge gravimetric value; After reaching setting value; Workman's operation control system stops filling pump work, and the workman leaves the theatre after marching into the arena and closing the inlet valve that stores up the ammonia steel cylinder, and workman's operation control system is closed the 5th valve; Open the 4th valve, start wash pump and be delivered to industrial ammonia recycling can with useless ammonia extraction residual in second bye-pass and through the 3rd bye-pass;
Eight, workman's operation control system is opened the 6th valve; Keep the 4th valve open; Close first valve, second valve, the 3rd valve and the 5th valve, open outside helium gas source feeding helium and purge, detect and do not close the 6th valve after tail gas has ammonia filling pipeline;
Nine, the workman marches into the arena storage ammonia steel cylinder and fills pipeline and throws off, and ultra-pure ammonia fills completion.
Except that above-mentioned preferred embodiment; The utility model also has other mode of execution; Those skilled in the art can make various changes and distortion according to the utility model, only otherwise break away from the spirit of the utility model, all should belong to the defined scope of the utility model accompanying claims.
Claims (9)
1. the automatic charging device of an electron level ultra-pure ammonia; Comprise ultra-pure ammonia storage tank (1), filling pump (2), storage ammonia steel cylinder (3) and wash pump (4); It is characterized in that: be provided with first main line (51) between said ultra-pure ammonia storage tank and the filling pump and be connected; Being provided with second main line (52) between filling pump and the storage ammonia steel cylinder is connected; On second main line, be provided with first bye-pass (61) and be connected to industrial ammonia recycling can (8), on second main line, be provided with second bye-pass (62) and be connected to wash pump, be provided with the 3rd bye-pass (63) between wash pump and the industrial ammonia recycling can and be connected; First main line is provided with first valve (71), and the part on second main line between the filling pump and first bye-pass is provided with second valve (72), and first bye-pass is provided with the 3rd valve (73), and second bye-pass is provided with the 4th valve (74).
2. the automatic charging device of a kind of electron level ultra-pure ammonia according to claim 1 is characterized in that: the part on said second main line between first bye-pass and second bye-pass is provided with the 5th valve (75).
3. the automatic charging device of a kind of electron level ultra-pure ammonia according to claim 1; It is characterized in that: the part on said second main line between second bye-pass and storage ammonia steel cylinder is provided with the 4th bye-pass (64) and is connected to outside helium gas source (9), and the 4th bye-pass is provided with the 6th valve (76).
4. the automatic charging device of a kind of electron level ultra-pure ammonia according to claim 3 is characterized in that: between the 5th valve and the 3rd bye-pass, be provided with the 5th bye-pass (65) on said second main line, the 5th bye-pass is provided with the 7th valve (77).
5. the automatic charging device of a kind of electron level ultra-pure ammonia according to claim 3 is characterized in that: between the 6th valve and outside helium gas source, be provided with the 8th valve (78) on said the 3rd bye-pass.
6. according to the automatic charging device of claim 1,2,3,4 or 5 described a kind of electron level ultra-pure ammonia; It is characterized in that: also comprise control system, said first valve, second valve, the 3rd valve, the 4th valve, the 5th valve and the 6th valve are pneumatic valve and by the control system control switch.
7. according to the automatic charging device of claim 4 or 5 described a kind of electron level ultra-pure ammonia, it is characterized in that: said the 7th valve and the 8th valve are manually-operated gate.
8. the automatic charging device of a kind of electron level ultra-pure ammonia according to claim 1 is characterized in that: said storage ammonia steel cylinder below is provided with weighing apparatus (31), and weighing apparatus is connected in the control system through signaling line.
9. the automatic charging device of a kind of electron level ultra-pure ammonia according to claim 8 is characterized in that: said weighing apparatus is an electronic weighbridge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203890312U CN202338768U (en) | 2011-10-13 | 2011-10-13 | Automatic filling device for electronic grade ultrapure ammonia |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203890312U CN202338768U (en) | 2011-10-13 | 2011-10-13 | Automatic filling device for electronic grade ultrapure ammonia |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202338768U true CN202338768U (en) | 2012-07-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203890312U Expired - Lifetime CN202338768U (en) | 2011-10-13 | 2011-10-13 | Automatic filling device for electronic grade ultrapure ammonia |
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| CN (1) | CN202338768U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103007832A (en) * | 2012-12-21 | 2013-04-03 | 南京中锗科技股份有限公司 | Precise liquid ammonia adding method and device |
| CN105508872A (en) * | 2016-01-22 | 2016-04-20 | 池州森大轻工制品有限公司 | Device for recovery of residual gas in pipeline |
| CN105864630A (en) * | 2016-04-08 | 2016-08-17 | 海宁市英德赛电子有限公司 | High-purity ammonia filling system and filling method using filling system to fill high-purity ammonia |
| CN106287200A (en) * | 2016-09-30 | 2017-01-04 | 国网福建省电力有限公司 | The aerating device of a kind of GIS electrical equipment air chamber and inflation method |
| CN108843970A (en) * | 2018-09-12 | 2018-11-20 | 惠州凯美特气体有限公司 | A kind of automatic filling steel cylinder system and method |
-
2011
- 2011-10-13 CN CN2011203890312U patent/CN202338768U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103007832A (en) * | 2012-12-21 | 2013-04-03 | 南京中锗科技股份有限公司 | Precise liquid ammonia adding method and device |
| CN103007832B (en) * | 2012-12-21 | 2014-09-24 | 南京中锗科技股份有限公司 | Precise liquid ammonia adding method and device |
| CN105508872A (en) * | 2016-01-22 | 2016-04-20 | 池州森大轻工制品有限公司 | Device for recovery of residual gas in pipeline |
| CN105864630A (en) * | 2016-04-08 | 2016-08-17 | 海宁市英德赛电子有限公司 | High-purity ammonia filling system and filling method using filling system to fill high-purity ammonia |
| CN105864630B (en) * | 2016-04-08 | 2018-03-20 | 海宁市英德赛电子有限公司 | High-purity ammon charging system and fill the methods for filling of high-purity ammon using it |
| CN106287200A (en) * | 2016-09-30 | 2017-01-04 | 国网福建省电力有限公司 | The aerating device of a kind of GIS electrical equipment air chamber and inflation method |
| CN108843970A (en) * | 2018-09-12 | 2018-11-20 | 惠州凯美特气体有限公司 | A kind of automatic filling steel cylinder system and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20160321 Address after: 314400, No. 38, Lu an road, Jianshan New District, Jiaxing, Zhejiang, Haining Patentee after: HAINING INDUSAIR ELECTRONICS CO., LTD. Address before: Jiaxing City, Zhejiang Province, Haining City, 314400 yuan spent on the Bridge Industrial Park Company Patentee before: Zhou Ping |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 314400 No.38 Anjiang Road, Jianshan New District, Haining City, Jiaxing City, Zhejiang Province Patentee after: Zhejiang yingdesai semiconductor materials Co.,Ltd. Address before: 314400 No.38 Anjiang Road, Jianshan New District, Haining City, Jiaxing City, Zhejiang Province Patentee before: HAINING INDUSAIR ELECTRONICS Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120718 |
|
| CX01 | Expiry of patent term |