CN202329574U - Elliptical polarization three-dimensional scanning device - Google Patents
Elliptical polarization three-dimensional scanning device Download PDFInfo
- Publication number
- CN202329574U CN202329574U CN2011204506993U CN201120450699U CN202329574U CN 202329574 U CN202329574 U CN 202329574U CN 2011204506993 U CN2011204506993 U CN 2011204506993U CN 201120450699 U CN201120450699 U CN 201120450699U CN 202329574 U CN202329574 U CN 202329574U
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- microscope
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- polarizer
- analyzer
- scanning device
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Abstract
The utility model relates to an elliptical polarization three-dimensional scanning device, which comprises a microscope, wherein a cylindrical lens, a polarizer and a light source are sequentially arranged above an objective table of the microscope; the polarizer is connected with a first motor through a belt wheel; the first motor adjusts an angle of the polarizer under the control of a computer; an analyzer and a compensator are sequentially arranged below a charge coupled device (CCD) camera of the microscope; the analyzer is connected with a second motor through the belt wheel; the second motor adjusts an angle of the analyzer under the control of the computer; and the CCD camera transmits acquired data to the computer. The utility model has the advantages that: 1, the elliptical polarization three-dimensional scanning device has a simple structure and is convenient to implement; and 2, the elliptical polarization three-dimensional scanning device can scan an object in all directions at a large scale and guarantee the quality of a scanned image.
Description
Technical field
The utility model relates to a kind of three-dimensional scanner, relates in particular to a kind of ellipse polarisation three-dimensional scanner, and this scanister is used for microcosmic three-dimensional appearance and pattern texture are scanned.
Background technology
Horizontal longitudinal scanning is adopted in existing three-dimensional appearance scanning; Only carry out longitudinal scanning to observing sample; Can not comprehensive large scale three-dimensional surface be scanned, and often receive the resolution of microscope, the restriction of visual field and two dimensional surface, cause that resolution is low, the generation of color distortion phenomenon.Such as: laser scanning confocal microscopy adopts three kinds of laser to scan respectively and obtains color of object surface, so distortion easily.Simple microscope receives the restriction of five aspects again: 1) resolution limit; 2) focal plane restriction; 3) visual field restriction; 4) restriction of three dimensional viewing; 5) receive the superficial makings restriction.Because these restrictions, restricted simple microscope carries out Measurement and analysis to the microcosmic three-dimensional appearance under large scale application.Therefore, we press for a kind of three-dimensional scanner, can large scale is omnibearing scan, and can guarantee the quality of scan image again.
The utility model content
The utility model technical matters to be solved provides a kind of can large scale is omnibearing scanning, can guarantee the ellipse polarisation three-dimensional scanner of the quality of scan image again.
The technical scheme that the utility model adopted is: a kind of ellipse polarisation three-dimensional scanner; Include microscope; Above microscopical objective table, be provided with cylindrical lens, polarizer and light source successively; Polarizer is connected with first motor through belt pulley, and first motor is adjusted the angle of polarizer under the control of computing machine; Under microscope CCD camera, be provided with analyzer and compensator successively, analyzer is connected with second motor through belt pulley; Second motor is adjusted the angle of analyzer under the control of computing machine; The CCD camera is passed to computing machine with the data of gathering.
Press such scheme, the upper surface of described microscopical objective table is the inclined-plane.
Press such scheme, described microscope is a wide visual field microscope.
Press such scheme, described first motor is a stepper motor, and described second motor is a servomotor.
The utility model adopts the elliptic polarization method to combine with microscopic method, and with polarized light oblique illumination sample, and then reception and reflected light are angled obtains axial high resolving power.Ellipse polarisation imaging system has kept traditional ellipsometry thickness measure has been had highly sensitive characteristics; And have that survey area is big, sample rate is fast, lateral resolution is high and advantage such as visual result; Its plane precision can reach 1 μ m; Axial resolution has been brought up to 0.01 μ m, has also improved solid objects surface scattering processing horizontal in addition.Tiltedly the focal plane is scanned three-dimensional appearance; Be that focal plane and sample level direction of scanning are angled; Make images acquired one-component all arranged at vertical and horizontal; When measuring the transversal scanning process, can detect the variation of vertical image, satisfy comprehensive large scale three-dimensional surface scanning, obtain large scale focal plane video image and micro-multi-layer image.Through several 3-D views under the different scenes are spliced reconstruct, obtain the more three-dimensional vision of large scale, and then improve the transverse observation scope.So handle through the reconstruct splicing; Can overcome the restriction of microscopical resolution, visual field and two dimensional surface; Improve the resolution of image and the validity of color; The range scale of microscope depth of focus is expanded to the millimeter level from 0.5 μ m～100 μ m, can resolution be brought up to 0.1 μ m through oblique scanning.
Serve as theme with the scanning of oblique focal plane, set up the integrated article carrying platform of photoelectricity machine, realize that control, collection, tracking, the signal Processing of article carrying platform measured; Through Flame Image Process reach 3D imaging, altogether positioning analysis, deconvolute, picture mosaic, dynamic data schema, dynamic tracing focal plane; And even ellipse polarisation measurement data is accomplished from low precision and is set up to high-precision data chainning, passes through data processing again; The image of several different scanning bands is carried out three-dimensional splicing reconstruct; Obtain wider 3-D view pattern, last, accomplish large scale microcosmic measuring three-dimensional morphology.
The beneficial effect of the utility model is: 1, simple in structure, be convenient to realize.2, can large scale is omnibearing scan, can guarantee the quality of scan image again.
Description of drawings
Fig. 1 is the structural representation of an embodiment of the utility model.
Fig. 2 is the utility model optical section scanning survey method principle of work synoptic diagram.
Fig. 3 is the ellipse polarization control system frame diagram of the utility model.
Wherein: 1, CCD camera; 2, stepping motor; 3, polarizer; 4, light source; 5, objective table; 6, Z axle servomotor; 7, analyzer; 8, servomotor; 9, microscope lens body; 10, compensator; 11, X axle servomotor; 12, Y axle servomotor; 13, belt pulley; 14, cylindrical lens; 15, polarized light optical section; 16, Measuring Object.
Embodiment
Further specify the embodiment of the utility model below in conjunction with accompanying drawing.
Referring to Fig. 1, Fig. 2 and Fig. 3; A kind of ellipse polarisation three-dimensional scanner; Include wide visual field microscope; Wide visual field microscopical X axle servomotor 11 and Y axle servomotor 12 move through tooth belt 13 control objective tables 5 horizontal directions, the moving of the vertical direction of wide visual field microscopical Z axle servomotor 6 through tooth belt control objective table 5; The upper surface of the microscopical objective table 5 in wide visual field is the inclined-plane; Above the microscopical objective table 5 in wide visual field, be provided with cylindrical lens 14, polarizer 3 and light source 4 successively; Described cylindrical lens 14, polarizer 3 and light source 4 are fixed on to be looked on the microscopical microscope lens body 9 in wide field; Polarizer 3 is connected with stepper motor 2 through belt pulley 13, and stepper motor 2 is adjusted the angle of polarizer 3 under the control of computing machine; Be provided with analyzer 7 and compensator 10 for 1 time successively at microscopical CCD camera, analyzer 7 is connected with servomotor 8 through belt pulley 13; Servomotor 8 is adjusted the angle of analyzer 7 under the control of computing machine; CCD camera 1 is passed to computing machine with the data of gathering.
Computer-controlled stepper motor and servomotor; And then the angle of control polarizer and analyzer; So that the polarized light optical section 15 of polarizer is through after the surface reflection of Measuring Object 16; Can arrive compensator and analyzer through object lens, arrive camera CCD at last, computing machine is through the anglec of rotation of polarizer, the anglec of rotation of analyzer and the height of the view data calculating object being measured that camera obtains.When scanning, need to soak one deck oil film on the surface of Measuring Object 16.
The utility model adopts oblique focal plane to the three-dimensional appearance transversal scanning, makes the image of gathering at vertical and horizontal one-component arranged all, in the process of measuring transversal scanning; Can detect simultaneously the variation of vertical image; Vertically regulating the focal plane through servomotor to adapt to three-dimensional surface in the what comes into a driver's scope, satisfy comprehensive large scale three-dimensional surface is scanned, obtain the focal plane video image of large scale; Obtain micro-multi-layer image; Through the super-resolution detection technique of Flame Image Process and analytical technology and micro-image, the 3-D view splicing reconstruct under several different scenes obtains the more three-dimensional vision of large scale; Through the 3-D view band of transversal scanning being with and being with the large scale splicing, improve the transverse observation scope once more again.So it is technological through twice image mosaic and reconstruction processing; Can overcome the restriction of microscopical resolution, visual field and two dimensional surface; Improve the resolution of image, the validity of color, the range scale of microscope depth of focus is expanded to more than the millimeter level from 0.5 μ m～100 μ m.Adopt wide visual field microscope to obtain the true picture color of grain more easily.Through technology transplant, also can be applied to the continuous and discontinuous surface profile of large-scale rotary body, the contactless ultra precise measurement of high spud angle surface profile.
The above; Only being the preferred embodiment of the utility model, is not that the utility model is done any pro forma restriction, and those skilled in the art utilize the technology contents of above-mentioned announcement to make a little simple modification; Equivalent variations or modification all drop in the protection domain of the utility model.
Claims (4)
1. an ellipse polarisation three-dimensional scanner includes microscope, it is characterized in that: above microscopical objective table, be provided with cylindrical lens, polarizer and light source successively, polarizer is connected with first motor through belt pulley; Under microscope CCD camera, be provided with analyzer and compensator successively, analyzer is connected with second motor through belt pulley.
2. ellipse polarisation three-dimensional scanner as claimed in claim 1 is characterized in that: the upper surface of described microscopical objective table is the inclined-plane.
3. according to claim 1 or claim 2 ellipse polarisation three-dimensional scanner, it is characterized in that: described microscope is a wide visual field microscope.
4. ellipse polarisation three-dimensional scanner as claimed in claim 1 is characterized in that: described first motor is a stepper motor, and described second motor is a servomotor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204506993U CN202329574U (en) | 2011-11-15 | 2011-11-15 | Elliptical polarization three-dimensional scanning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204506993U CN202329574U (en) | 2011-11-15 | 2011-11-15 | Elliptical polarization three-dimensional scanning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202329574U true CN202329574U (en) | 2012-07-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204506993U Expired - Fee Related CN202329574U (en) | 2011-11-15 | 2011-11-15 | Elliptical polarization three-dimensional scanning device |
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| Country | Link |
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| CN (1) | CN202329574U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107860945A (en) * | 2017-10-30 | 2018-03-30 | 天津大学 | Scan the multi-functional coupling in-situ measuring method of probe elliptical polarization |
| CN107884599A (en) * | 2017-10-30 | 2018-04-06 | 天津大学 | Scan the multi-functional coupling in-situ measurement device of probe elliptical polarization |
-
2011
- 2011-11-15 CN CN2011204506993U patent/CN202329574U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107860945A (en) * | 2017-10-30 | 2018-03-30 | 天津大学 | Scan the multi-functional coupling in-situ measuring method of probe elliptical polarization |
| CN107884599A (en) * | 2017-10-30 | 2018-04-06 | 天津大学 | Scan the multi-functional coupling in-situ measurement device of probe elliptical polarization |
| CN107860945B (en) * | 2017-10-30 | 2020-05-08 | 天津大学 | Scanning probe-elliptical polarization multifunctional coupling in-situ measurement method |
| CN107884599B (en) * | 2017-10-30 | 2020-07-10 | 天津大学 | Scanning probe-elliptic polarization multifunctional coupling in-situ measuring device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120711 Termination date: 20131115 |