CN202307806U - Device for marking crystalline grains on manual probe station - Google Patents
Device for marking crystalline grains on manual probe station Download PDFInfo
- Publication number
- CN202307806U CN202307806U CN 201120325243 CN201120325243U CN202307806U CN 202307806 U CN202307806 U CN 202307806U CN 201120325243 CN201120325243 CN 201120325243 CN 201120325243 U CN201120325243 U CN 201120325243U CN 202307806 U CN202307806 U CN 202307806U
- Authority
- CN
- China
- Prior art keywords
- probe
- knob
- crystal grain
- marking
- shell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The utility model discloses a device for marking crystalline grains on a manual probe station, which comprises a base arranged on the probe station, and a marking probe arranged on the base, wherein the marking probe is an ink core covered by a shell; the ink core is fixed in the hollow shell; the front end of the ink core extends outside the shell and is bended vertically down so as to form a probe tip; the base is provided with an X knob, a Y knob and a Z knob which are used for adjusting the position of the marking probe; the ink core has the diameter of 3-10mm; and the probe tip has the diameter of 0.5-2mm. The device which is specially used for marking and is arranged on the manual probe station is simple in structure, convenient to operate and reusable, and can be used for rapidly and accurately marking the needed crystalline grains without causing pollution to a bonding pad and the surrounding crystalline grains, thus greatly improving the working efficiency.
Description
Technical field
The utility model relates to semiconductor integrated circuit and makes the field, belongs to a kind of labelling apparatus, relates in particular to a kind of device that is used for manual probe station mark crystal grain.
Background technology
Manually probe station is an instrument commonly used during semiconductor test is analyzed, and is mainly used in the DC parameter testing of semiconductor product.Use manual probe station to wafer in the process of each crystal grain test, need do follow-up analysis and just need carry out mark if run into suitable crystal grain it.Because crystal grain is too little, mark crystal grain is the thing of a trouble and easy error as far as the engineer.
When using manual probe station to test; The method that crystal grain is made marks mainly contains two; A kind of method is with the naked eye to be certain about the crystal grain that need make marks, and moves wafer then to correct position, makes marks around crystal grain with marking pen; Another kind method is to note the coordinate of crystal grain through naked eyes, crystal grain is made marks after testing again.All there are a lot of deficiencies in these two kinds of methods, count crystal grain like naked eyes and not only bother but also be easy to and make mistakes; If crystal grain is very little, to polluting pad in the process of crystal grain mark, the marking pen mark must pollute the crystal grain of periphery simultaneously with marking pen; And, if marking pen has covered a plurality of crystal grain at the mark of crystal grain periphery, easily mistaken crystal grain in the analysis in later stage.
The utility model content
The technical problem that the utility model will solve provides a kind of device that is used for manual probe station mark crystal grain, can make marks to crystal grain rapidly and accurately.
For solving the problems of the technologies described above; The device that is used for manual probe station mark crystal grain of the utility model; Comprise the pedestal that is installed on the probe station and be installed in the label probe on the pedestal; Said label probe is that the front end of Mo Xin stretches out shell and is formed with a probe pinpoint by the black core of shell parcel, and said pedestal is provided with the knob of adjustment label probe position.
Further, said knob comprises X knob, Y knob and the Z knob of adjusting three direction positions of label probe respectively.
Wherein preferred, said black core is fixed in the shell of hollow, and its front end is bent to form probe pinpoint vertically downward.
Further, the diameter of said black core is 3mm～10mm, and the diameter of probe pinpoint is 0.5mm～2mm.
Wherein, said shell is metal shell or plastic casing.
The utility model is through manually installing the device that is specifically designed to mark on the probe station, and it is simple in structure, and is easy to operate; Can recycle; And can quick and precisely carry out mark, can not pollute, improve operating efficiency greatly pad and peripheral crystal grain to required crystal grain.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is done further detailed explanation:
Accompanying drawing is the structural representation of the utility model.
Wherein description of reference numerals is following:
1 is pedestal; 2 is label probe; 21 is shell; 22 is black core; 23 is probe pinpoint; 3 is the X knob; 4 is the Y knob; 5 is the Z knob.
Embodiment
The device that is used for manual probe station mark crystal grain of the utility model, shown in accompanying drawing, this device comprises the pedestal 1 that is installed on the probe station and is installed in the label probe 2 on the pedestal 1.Said label probe 2 is that the front end of Mo Xin 22 stretches out shell 21 and is formed with a probe pinpoint 23 by the black core 22 of shell 21 parcels, and said pedestal 1 is provided with the knob of adjustment label probe 2 positions.Knob comprises X knob 3, Y knob 4 and the Z knob 5 of adjusting 2 three direction positions of label probe respectively, through regulate pedestal 1 three knobs can adjust the position of probe pinpoint 23 in the space.
Said black core 22 is fixed in the shell 21 of hollow, and its front end is bent to form probe pinpoint 23 vertically downward.The diameter of said black core 22 is 3mm～10mm, and the diameter of probe pinpoint 23 is 0.5mm～2mm, contains prepared Chinese ink among the Mo Xin 22, can point out ink marks when probe pinpoint 23 contacts with crystal grain.Said shell 21 can be metal shell, also can be plastic casing.
This device in use is installed in pedestal 1 on the manual probe station earlier, regulates X knob 3 and Y knob 4, make probe be in measured crystal grain directly over; When needs carried out mark to crystal grain, adjusting Z knob 5 moved down with grain surface probe pinpoint 23 and contacts, point out ink marks and can accomplish mark; Move wafer when next crystal grain is tested, probe can be in all the time the crystal grain of surveying directly over, and do not need to regulate again X knob 3 and Y knob 4.
The utility model is through manually installing the device that is specifically designed to mark on the probe station, and it is simple in structure, and is easy to operate; Can recycle; And can quick and precisely carry out mark, can not pollute, improve operating efficiency greatly pad and peripheral crystal grain to required crystal grain.
More than through specific embodiment the utility model has been carried out detailed explanation, but these are not the restriction of formation to the utility model.Under the situation that does not break away from the utility model principle, those skilled in the art also can make many distortion and equivalent replacement to the structure of the structure of pedestal, label probe, shape and size etc., and these also should be regarded as the protection range of the utility model.
Claims (5)
1. device that is used for manual probe station mark crystal grain; It is characterized in that: this device comprises the pedestal (1) that is installed on the probe station and is installed in the label probe (2) on the pedestal (1); Said label probe (2) is the black core (22) by shell (21) parcel; The front end of Mo Xin (22) stretches out shell (21) and is formed with a probe pinpoint (23), and said pedestal (1) is provided with the knob of adjustment label probe (2) position.
2. the device that is used for manual probe station mark crystal grain according to claim 1 is characterized in that: said knob comprises X knob (3), Y knob (4) and the Z knob (5) of adjusting (2) three direction positions of label probe respectively.
3. the device that is used for manual probe station mark crystal grain according to claim 1 is characterized in that: said black core (22) is fixed in the shell (21) of hollow, and its front end is bent to form probe pinpoint (23) vertically downward.
4. the device that is used for manual probe station mark crystal grain according to claim 1 is characterized in that: the diameter of said black core (22) is 3mm～10mm, and the diameter of probe pinpoint (23) is 0.5mm～2mm.
5. according to claim 1 or the 3 described devices that are used for manual probe station mark crystal grain, it is characterized in that: said shell (21) is metal shell or plastic casing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120325243 CN202307806U (en) | 2011-09-01 | 2011-09-01 | Device for marking crystalline grains on manual probe station |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120325243 CN202307806U (en) | 2011-09-01 | 2011-09-01 | Device for marking crystalline grains on manual probe station |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202307806U true CN202307806U (en) | 2012-07-04 |
Family
ID=46376648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120325243 Expired - Fee Related CN202307806U (en) | 2011-09-01 | 2011-09-01 | Device for marking crystalline grains on manual probe station |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202307806U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109530345A (en) * | 2018-10-18 | 2019-03-29 | 武汉华星光电半导体显示技术有限公司 | Probe cleaning device and probe clean method |
-
2011
- 2011-09-01 CN CN 201120325243 patent/CN202307806U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109530345A (en) * | 2018-10-18 | 2019-03-29 | 武汉华星光电半导体显示技术有限公司 | Probe cleaning device and probe clean method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20131220 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20131220 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120704 Termination date: 20150901 |
|
| EXPY | Termination of patent right or utility model |