CN202301166U - Cross-flow fan impeller - Google Patents

Cross-flow fan impeller Download PDF

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Publication number
CN202301166U
CN202301166U CN 201120403036 CN201120403036U CN202301166U CN 202301166 U CN202301166 U CN 202301166U CN 201120403036 CN201120403036 CN 201120403036 CN 201120403036 U CN201120403036 U CN 201120403036U CN 202301166 U CN202301166 U CN 202301166U
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CN
China
Prior art keywords
impeller
fan
flow fan
cross flow
joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 201120403036
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Chinese (zh)
Inventor
丁金滨
刘斌
陈进新
王宇
周翊
赵江山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of Microelectronics of CAS
Original Assignee
Academy of Opto Electronics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to CN 201120403036 priority Critical patent/CN202301166U/en
Application granted granted Critical
Publication of CN202301166U publication Critical patent/CN202301166U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model relates to a cross-flow fan impeller, composed of a plurality of impeller sections, wherein the two ends of each impeller are respectively connected with one end flange, a central disc is arranged between two impeller sections, a plurality of fan blades which are circumferentially arranged are fixed between every two central discs, and two adjacent fan blades in each impeller section are arranged in certain angle. By adopting the cross-flow fan impeller provided by the utility model, layout of the fan blades in the impeller is improved, axial uniformity of a discharge area can be improved, and noise of a fan system can be effectively reduced.

Description

A kind of cross flow fan impeller
Technical field
The utility model relates to a kind of gas-powered of suitable excimer laser, refers in particular to the cross flow fan impeller that is applicable to gas laser.
Background technique
Gas discharge laser especially excimer laser is that laser source is used in best photoetching, and generally typical excimer laser mainly contains laser cavity, high-voltage pulsed source two-part are formed.See also shown in Figure 1ly, mainly contain sparking electrode 2, gas-circulating system 1, radiation system 4 in the cavity 3 of laser cavity and form.And the impeller in the gas-circulating system 1 is the power of discharge cavity gas circulation.
Laser all can produce waste gas (ionized gas) and discharge dust after each discharge, can waste gas and dust be taken away through gas-circulating system, otherwise can have influence on discharge effect next time, can cause the laser quencher under the serious situation.Most important parts are through-flow impellers in gas-circulating system, and it can all be new gas to guarantee each discharge for region of discharge provides enough wind speed.
There is the Excimer Laser of report to use impeller at present; For example: U.S. Pat 006061376A (1998), US006765946B2 (2001), US20080310960A1 (2008) have mentioned several kinds of excimer lasers and have used impeller; Wherein the fan blade form of US006061376A (1998) and US20080310960A1 (2008) employing is the straight fan blade of circular arc type; And US006765946B2 (2001) adopts is circular arc type skew wind leaf, and fan blade is arranged as every joint in the same way, and adjacent two joints are incorgruous; Staggered successively step reduces noise thus.
According to the basic principle of cross flow fan, during the impeller rotation, air-flow opens wide from impeller and gets into leaf grating, passes impeller inside, enters spiral case from the another side leaf grating, forms working air current.Because the mobility status of working air current in impeller is very complicated, air-flow field is astable, and therefore inhomogeneous at the axial wind speed of cross flow fan exhaust outlet is the intrinsic defect of cross flow fan system.For improving the uniformity of the axial wind speed of cross flow fan exhaust outlet, adopt the way that increases impeller joint number (compartment mode) to realize usually.
The increase of impeller joint number inevitably can cause the increase of wheel rotation inertia, and this just needs powerful drive motor, and the energy that causes blower fan system to inject discharge cavity simultaneously thus increases, and cooling system is caused burden.
The model utility content
The purpose of the utility model is to provide a kind of excimer laser to use the cross flow fan impeller, with the axial wind speed uniformity that improves cross flow fan and reduce the blower fan system noise.
For realizing above-mentioned purpose, the technological scheme that the utility model provides is that the arrangement of adjustment fan blade when adopting increase impeller joint number improves the axial uniformity of region of discharge and reduces the blower fan system noise.
Specifically; The excimer laser that the utility model provides is used the cross flow fan impeller; Be made up of some joint impellers, the two ends of impeller respectively connect an end flange, between every joint impeller a mid-game are arranged all; Be fixed with some fan blades of circumferential arrangement between per two mid-games, be an angle between adjacent two fan blades in every joint impeller.
Described excimer laser is used the cross flow fan impeller, and wherein, the fan blade that is angle forms the formula structure that postpones.
Described excimer laser is used the cross flow fan impeller, and wherein, the fan blade that is angle forms symmetrical structure.
Described excimer laser is used the cross flow fan impeller, and wherein, impeller is that aluminum alloy or engineering plastics are processed.
Described excimer laser is used the cross flow fan impeller, wherein, is ultrasonic welding between the mid-game in the impeller, fan blade and the end flange.
Described excimer laser is used the cross flow fan impeller, and wherein, impeller can adopt Al-alloy pipe integral body to process.
The utility model has improved the layout type of fan blade in the impeller, can improve the axial uniformity of blower fan, and reduces the noise of blower fan system.
Description of drawings
Fig. 1 is the structural representation of known technology cavity of excimer laser.
Fig. 2 is that the excimer laser of the utility model is with cross flow fan blade wheel structure schematic representation.
Fig. 3 is the fan blade setting type figure after impeller shown in Figure 2 launches, and wherein the fan blade shown in Fig. 3 a is arranged for the formula that postpones, and the fan blade shown in Fig. 3 b is that symmetric type is arranged.
1 gas-circulating system; 2 sparking electrodes; 3 cavitys; 4 radiation systems;
10 fan blades; 20 mid-games; 30 end flange.
Embodiment
Seeing also shown in Figure 2ly, is that the utility model excimer laser is with the blade wheel structure schematic representation in the cross flow fan.
The impeller of the utility model is that some joint numbers are formed, and the two ends of impeller respectively connect an end flange 30, is installed in (known technology) in the cross flow fan by the flange 30 at these two ends.Be fixed with the fan blade 10 of circumferential arrangement between every joint impeller by mid-game 20, be an angle between adjacent two fan blades 10 in every joint impeller.
Seeing also Fig. 3 a and Fig. 3 b, is the fan blade setting type figure after the impeller of the utility model launches, and as can be seen from the figure, fan blade in every joint 10 is an angle between adjacent two, and (Fig. 3 a) or symmetrical structure (Fig. 3 b) to form the formula structure that postpones.
The impeller of the utility model can adopt known aluminum alloy or engineering plastics to process, and connection each other can be adopted like ultrasonic welding and fix, and also can adopt Al-alloy pipe integral body to process simultaneously.
When the impeller of the formula structure that postpones of the utility model is worked; The wind field that every joint impeller produces is that the exhaust outlet according to impeller gets into region of discharge according to this; Wind direction and region of discharge axial direction are a non-perpendicular angle (blade installation angle) simultaneously; Can realize like this putting the different region of discharge of arrival at one time, improve the flow field uniformity of region of discharge thus by the air-flow that same blade produces.
When the impeller of symmetrical structure is worked, be similar to the formula structure that postpones, but the air-flow that produces between the different blades of this structure, can be interact with each other, further improve the flow field uniformity of region of discharge thus.

Claims (4)

1. a cross flow fan impeller is characterized in that, is made up of some joint impellers; The two ends of impeller respectively connect an end flange; Between every joint impeller a mid-game is arranged all, be fixed with some fan blades of circumferential arrangement between per two mid-games, be an angle between adjacent two fan blades in every joint impeller.
2. cross flow fan impeller according to claim 1 is characterized in that, the fan blade that wherein is angle forms the formula structure that postpones.
3. cross flow fan impeller according to claim 1 is characterized in that, the fan blade that wherein is angle forms symmetrical structure.
4. cross flow fan impeller according to claim 1 is characterized in that, wherein the impeller material is aluminum alloy or engineering plastics.
CN 201120403036 2011-10-20 2011-10-20 Cross-flow fan impeller Expired - Lifetime CN202301166U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201120403036 CN202301166U (en) 2011-10-20 2011-10-20 Cross-flow fan impeller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201120403036 CN202301166U (en) 2011-10-20 2011-10-20 Cross-flow fan impeller

Publications (1)

Publication Number Publication Date
CN202301166U true CN202301166U (en) 2012-07-04

Family

ID=46370075

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201120403036 Expired - Lifetime CN202301166U (en) 2011-10-20 2011-10-20 Cross-flow fan impeller

Country Status (1)

Country Link
CN (1) CN202301166U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104747493A (en) * 2013-12-26 2015-07-01 珠海格力电器股份有限公司 Air conditioner and cross flow blade thereof
CN108128772A (en) * 2017-12-28 2018-06-08 韦爱龄 High-effective spherical graphite comminutor
CN108176450A (en) * 2017-12-28 2018-06-19 韦爱龄 Graphite pulverizer
CN108176449A (en) * 2017-12-28 2018-06-19 韦爱龄 Spheroidization graphite powder comminutor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104747493A (en) * 2013-12-26 2015-07-01 珠海格力电器股份有限公司 Air conditioner and cross flow blade thereof
CN108128772A (en) * 2017-12-28 2018-06-08 韦爱龄 High-effective spherical graphite comminutor
CN108176450A (en) * 2017-12-28 2018-06-19 韦爱龄 Graphite pulverizer
CN108176449A (en) * 2017-12-28 2018-06-19 韦爱龄 Spheroidization graphite powder comminutor
CN108176450B (en) * 2017-12-28 2019-11-05 吴超 Graphite pulverizer
CN108176449B (en) * 2017-12-28 2019-11-05 吴超 Spheroidization graphite powder pelletizer

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20200907

Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District

Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences

Address before: 100094, No. 9 Deng Nan Road, Beijing, Haidian District

Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences

Effective date of registration: 20200907

Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3

Patentee after: Institute of Microelectronics, Chinese Academy of Sciences

Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District

Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences

TR01 Transfer of patent right
CX01 Expiry of patent term

Granted publication date: 20120704

CX01 Expiry of patent term