CN202872166U - Discharge cavity of gas laser light source - Google Patents
Discharge cavity of gas laser light source Download PDFInfo
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- CN202872166U CN202872166U CN 201220465438 CN201220465438U CN202872166U CN 202872166 U CN202872166 U CN 202872166U CN 201220465438 CN201220465438 CN 201220465438 CN 201220465438 U CN201220465438 U CN 201220465438U CN 202872166 U CN202872166 U CN 202872166U
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- discharge cavity
- light source
- laser light
- discharge
- gas
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Abstract
The utility model discloses a discharge cavity of a gas laser light source. The discharge cavity of the gas laser light source comprises fans, flow deflectors, heat exchangers, electrodes, diversion dust-absorbing plates and uniform wire meshes. According to the gas discharge cavity, the axial-flow fans, the diversion dust-absorbing plates and the uniform wire meshes are used such that the generation of noises and shock waves is reduced, the influence of a sound field on the discharge cavity is reduced, and the discharge area obtains a high flow rate and uniform flow field; and the diversion dust-absorbing plates arranged inside the discharge cavity not only has a function of diversion, but also can carry out the cleaning and dedusting of all the work gas, providing a pre-ionization effect with no heat accumulation and no flow rate loss.
Description
Technical field
The utility model belongs to the gas laser technical field, is specifically related to a kind of discharge cavity of gas laser light source.
Background technology
The core key part of gas discharge laser light source is exactly discharge cavity.Discharge cavity has certain chamber type, keeps regular picture and the system stability bright dipping of its internal work gas.Discharge cavity generally is comprised of cavity body structure, blower fan system, discharge system and cooling system.Discharge cavity all can produce discharge dust after each discharge, impact discharge effect next time.Blower fan system can be taken away discharge dust, and passes through the periodic duty gas of inside, dust cleaning apparatus cleaner discharge chamber.Discharge system generally is comprised of main discharge system and preionization system.
Present normal operation tangential impeller in blower fan system.The axial wind speed of air outlet is inhomogeneous to be the very large shortcoming of tangential impeller.In addition, requiring when discharge cavity is operated in more high repetition frequency has higher gas flow rate between anodic-cathodic, also namely requires tangential impeller to be operated in higher rotating speed or tangential impeller has larger diameter; Unbalanced problem when this can bring tangential impeller to rotate under high speed, and the stall problem at the circumferential blade place of rotating speed or diameter increase posterior lobe wheel, thus shock wave and noise produced, affect discharge and the bright dipping of discharge cavity.
General outer the hanging on the discharge cavity of the dust cleaning apparatus that uses at present by aperture lead-in portion working gas, adopts the mode of Electrostatic Absorption to purify this part working gas of cleaning.This can only clean the sub-fraction working gas, and overwhelming majority discharge dust also is present in the discharge cavity along with working gas circulates in the chamber.Can affect like this useful life of discharge cavity.
The preionization system that uses at present generally is close to main electrode.Working gas between main electrode and the pre-ionization electrode under high pressure at first ionizes, and the electron motion of generation is assisted the discharge of negative and positive main electrode between two main electrodes.Unimpeded for guarantee that electronics move between two main electrodes, facing the wind or lee face need leave the gap in main electrode, can produce so a part of pressure loss reduction region of discharge flow velocity.In addition, the preionization zone can produce greatly heat, affects the discharge cavity discharge and goes out light effect.
The utility model content
The technical problem that (one) will solve
Gas discharge chamber of the present utility model mainly solves following technical problem: reduce the generation of noise and shock wave, reduce sound field to the impact of discharge cavity; Make that the region of discharge flow velocity is larger, the flow field is more even, satisfy the more instructions for use of high repetition frequency of discharge cavity; Improve the useful life of discharge cavity; Reduce to produce the loss of heat accumulation and flow velocity.
(2) technical scheme
The utility model provides a kind of gas discharge chamber, comprise blower fan, flow deflector, heat exchanger, electrode, water conservancy diversion dust-catching board and even silk screen, described blower fan is double rotor fan, and described double rotor fan relies on a motor-driven to realize two-spool both forward and reverse directions rotation.
According to a kind of embodiment of the present utility model, arrange a plurality of blower fans at optical axis direction, by regulating the rotating speed of different blower fans, reach the uniformity requirement of working gas optical axis direction flow velocity between anodic-cathodic.
According to a kind of embodiment of the present utility model, described water conservancy diversion dust-catching board is comprised of many groups thin plate, makes the region of discharge flow field more even.
According to a kind of embodiment of the present utility model, described water conservancy diversion dust-catching board interleaved links to each other with the upper and lower base plate of this gas discharge chamber respectively, can on upper and lower base plate, load respectively different voltages, discharge impurity in the working gas that flows through between thin plate on thin plate, is reached the purpose that purifies whole working gass by Electrostatic Absorption.
According to a kind of embodiment of the present utility model, form the capacity plate antenna battle array behind the described water conservancy diversion dust-catching board on-load voltage, can the partial ionization working gas.
According to a kind of embodiment of the present utility model, on described two-spool each rotor flabellum is arranged, being installed on an epitrochanterian flabellum is one group of flabellum, be installed on another epitrochanterian flabellum and be another group flabellum, by different flabellum face type and mounting meanss, two groups of flabellums driving gas on same direction of both forward and reverse directions rotation is flowed.
According to a kind of embodiment of the present utility model, described motor is ceramic motor.
According to a kind of embodiment of the present utility model, by the external remote control operating electrical machines.
According to a kind of embodiment of the present utility model, the rectification head is installed on the rotor away from motor side, and this rectification head links to each other with motor output shaft by connecting axle; Be fixed with external gear on the connecting axle, the rotor that reaches away from motor side with connecting axle rotates; External gear drives 4 groups of fixing planetary gear runnings of the center of circle; The running of planet gear drives internal gear; Internal gear is fixed together with the rotor of close motor side.
According to a kind of embodiment of the present utility model, described gas discharge cavity wall is arranged sound-absorbing material.
According to a kind of embodiment of the present utility model, described gas discharge chamber is square cross section of fluid channel, and every limit all same implant is equipped with blower fan, heat exchanger, electrode, water conservancy diversion dust-catching board and even silk screen, and flow deflector is arranged on square four jiaos.
According to a kind of embodiment of the present utility model, adjust discharge and the bright dipping time of region of discharge between four anodic-cathodics by the sequence of power switching of adjusting four groups of anodic-cathodics.
According to a kind of embodiment of the present utility model, described blower fan is multistage blower fan.
According to a kind of embodiment of the present utility model, the rotating speed of a plurality of blower fans of described every grade of blower fan is for to increase progressively to two ends from optical axis central authorities.
According to a kind of embodiment of the present utility model, described flow deflector is arranged in the larger place of degree of crook, discharge cavity cross section, reduces flow resistance, reduces the gas flow rate loss.
According to a kind of embodiment of the present utility model, described heat exchanger thermal recovery finned-tube bundle form.
According to a kind of embodiment of the present utility model, the endoporus of described heat exchanger is connected with cooling water flow, and endoporus is circular, oval, square; Outside fin adopts streamlined to reduce the flow resistance of heat exchanger; The material thermal conductivity of heat exchanger can be good, and with discharge cavity in working gas do not react to each other; The heat exchanger set that the same area is placed is staggered by many heat exchangers and forms.
(3) beneficial effect
New gas discharge cavity that the utility model provides adopts axial flow blower, water conservancy diversion dust-catching board and even silk screen etc., has reduced the generation of noise and shock wave, has reduced the impact of sound field on discharge cavity, and makes that the region of discharge flow velocity is larger, the flow field is more even.Except guide functions, the water conservancy diversion dust-catching board that is arranged in discharging chamber inside can to the dedusting of whole working gas cleaning, can reach the preionization effect and can not produce the loss of heat accumulation and flow velocity simultaneously.
Description of drawings
Fig. 1 is the sectional view of the utility model gas discharge chamber;
Fig. 2 a is the double rotor fan figure of the utility model gas discharge chamber;
Fig. 2 b is the sectional view of facing fan directional of the double rotor fan of the utility model gas discharge chamber;
Fig. 3 is the blower fan optical axis direction schematic diagram of the utility model gas discharge chamber;
Fig. 4 is the water conservancy diversion dust-catching board optical axis direction schematic diagram of the utility model gas discharge chamber;
Fig. 5 a is the shaft section figure of the heat exchanger of the utility model gas discharge chamber;
Fig. 5 b is the cross-sectional view of the heat exchanger of the utility model gas discharge chamber;
Fig. 6 is the utility model gas discharge chamber cross section expander graphs.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is described in further detail.
The cross section of new gas discharge cavity as shown in Figure 1.This new gas discharge cavity comprises blower fan, flow deflector, heat exchanger, electrode, water conservancy diversion dust-catching board and even silk screen.
Described blower fan is axial flow blower, and described blower fan is many rotors blower fan, and is preferred, is double rotor fan.As but do not limit as for example, a kind of double rotor fan is equipped with the rectification head on the rotor away from motor side shown in Fig. 2 a, and this rectification head links to each other with motor output shaft by connecting axle; Be fixed with external gear on the connecting axle, the rotor that reaches away from motor side with connecting axle rotates; External gear drives 4 groups of fixing planetary gear runnings of the center of circle; The running of planet gear drives internal gear; Internal gear is fixed together with the rotor of close motor side.Be to realize the technical solution of the utility model, described internal gear, external gear and planetary gear can have multiple position relationship and direction of rotation, and the utility model Fig. 2 b shows a kind of in described multiple position relationship and the direction of rotation.Fig. 2 b shows position relationship and the direction of rotation between internal gear, external gear and 4 groups of planetary gears.Shown in Fig. 2 b, what outmost turns turned is internal gear, and what innermost circle turned is external gear, and 4 middle runners are exactly 4 groups of planetary gears (Fig. 2 b only simply illustrates internal gear, external gear and 4 groups of planetary gears not to draw tooth by circle).The motor-driven that relies on described like this double rotor fan realizes two-spool both forward and reverse directions rotation.On described two-spool each rotor flabellum is arranged, each epitrochanterian flabellum can be single flabellum or many flabellums, being installed on an epitrochanterian flabellum is one group of flabellum, be installed on another epitrochanterian flabellum and be another group flabellum, by designing different flabellum face type and mounting means, two groups of flabellums driving gas on same direction of reverse rotation is flowed.By designing different flabellum face types and mounting means two groups of flabellums driving gas on same direction of reverse rotation is flowed, this belongs in the aerodynamics research field to aerofoil profile, this research is very ripe in fluid mechanics, belong to the state of the art, do not do at this and give unnecessary details.Such reverse rotation not only can increase the flowing velocity of gas, and can reduce the generation of noise and shock wave, reduces sound field to the impact of discharge cavity.As but do not limit as for example, selected motor is ceramic motor, at discharge cavity external remote control operating electrical machines.
In general, the length of wind field will be much larger than the diameter of electric fan on optical axis direction, and this just requires to arrange a plurality of blower fans at optical axis direction.The blower fan optical axis direction is arranged as shown in Figure 3.Can by regulating the rotating speed of different blower fans shown in Figure 3, reach the uniformity requirement of working gas optical axis direction flow velocity between anodic-cathodic; Reduce flow velocity because there is wall effect at the optical axis direction two ends, the rotating speed of a plurality of blower fans of every grade of blower fan generally all is to increase progressively to keep the flow velocity uniformity to two ends from optical axis central authorities.In addition, multistage blower fan can be set satisfy region of discharge flow field size requirements, be illustrated in figure 1 as the two-stage blower fan.
The water conservancy diversion dust-catching board along the layout of optical axis direction as shown in Figure 4 among Fig. 1.The water conservancy diversion dust-catching board is comprised of many groups thin plate, can make the region of discharge flow field more even.In addition, water conservancy diversion dust-catching board interleaved links to each other with the upper and lower base plate of this gas discharge chamber respectively.Described water conservancy diversion dust-catching board interleaved links to each other with the upper and lower base plate of this gas discharge chamber respectively specifically can be as shown in Figure 4: from a side (leftmost side or the rightmost side of many groups thin plate as shown in Figure 4) of described many group thin plates, the 1st thin plate, the 3rd thin plate, the 5th thin plate ... link to each other with the upper substrate of this gas discharge chamber, the 2nd thin plate, the 4th thin plate, the 6th thin plate ... link to each other with the infrabasal plate of this gas discharge chamber.The mode that water conservancy diversion dust-catching board shown in Figure 4 links to each other with the upper and lower base plate of gas discharge chamber respectively is one and gives an example, actual continuous mode can be arranged flexibly by those skilled in the art, for example continuous two thin plates link to each other with described upper substrate, then continuous two thin plates link to each other with described infrabasal plate, continuous two thin plates link to each other with described upper substrate again, etc. various ways.On upper and lower base plate, load respectively different voltages, the discharge impurity in the working gas that between thin plate, flows through like this can Electrostatic Absorption on thin plate, reach the purpose that purifies whole working gass.And, form the capacity plate antenna battle array behind the water conservancy diversion dust-catching board on-load voltage, can the partial ionization working gas, the effect of playing preionization helps the anodic-cathodic discharge.Such preionization can not produce thermal accumlation away from main electrode zone, thereby need to not facing the wind or lee face leaves the gap and produces a part of pressure loss and reduce the region of discharge flow velocity in main electrode yet.
Even silk screen is comprised of a row or multi-row filament parallel with optical axis direction among Fig. 1, and it and water conservancy diversion dust-catching board form the cross section grid of working gas flow direction, make the region of discharge flow field more even.
As shown in Figure 1, arrange flow deflector in the place that discharge cavity cross section degree of crook is larger, reduce the gas flow rate loss thereby reduce flow resistance; Anodic-cathodic arranges the horn mouth runner at the working gas flow direction, suitably increases the working gas flow velocity; Heat exchanger is used for taking away the heat in the discharge cavity; The discharge cavity cavity inner wall can be furnished with sound-absorbing material (not shown in FIG.).
In order to increase area of dissipation, to guarantee system radiating efficient, heat exchanger adopts the finned-tube bundle form.Endoporus is connected with cooling water flow, and endoporus is the shape such as circular, oval, square; Outside fin adopts streamlined to reduce the flow resistance of heat exchanger; The material of heat exchanger needs heat conductivility good, and with discharge cavity in working gas do not react to each other; The heat exchanger set that the same area is placed is staggered by many heat exchangers and forms.The shaft section of single heat exchanger is shown in Fig. 5 a, and the cross section of single heat exchanger is shown in Fig. 5 b.
Novel discharge cavity sectional view shown in Figure 1 can further expand, as but do not limit as for example, can be extended to representative gases discharge cavity sectional view shown in Figure 6.Representative gases discharge cavity shown in Figure 6 is square cross section of fluid channel, and every limit all same implant is equipped with blower fan, heat exchanger, electrode, water conservancy diversion dust-catching board and even silk screen, and flow deflector is arranged on square four jiaos.When powering up simultaneously, can realize four groups of anodic-cathodics that region of discharge discharges and bright dipping simultaneously between four anodic-cathodics.Also can adjust by the sequence of power switching of adjusting four groups of anodic-cathodics discharge and the bright dipping time of region of discharge between four anodic-cathodics.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the above only is specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any modification of making, be equal to replacement, improvement etc., all should be included within the protection range of the present utility model.
Claims (17)
1. the discharge cavity of a gas laser light source, comprise blower fan, flow deflector, heat exchanger, electrode, water conservancy diversion dust-catching board and even silk screen, it is characterized in that described blower fan is double rotor fan, described double rotor fan relies on a motor-driven to realize two-spool both forward and reverse directions rotation.
2. the discharge cavity of gas laser light source as claimed in claim 1 is further characterized in that, arranges a plurality of blower fans at optical axis direction, by regulating the rotating speed of different blower fans, reaches the uniformity requirement of working gas optical axis direction flow velocity between anodic-cathodic.
3. the discharge cavity of gas laser light source as claimed in claim 1 is further characterized in that, described water conservancy diversion dust-catching board is comprised of many groups thin plate, makes the region of discharge flow field more even.
4. the discharge cavity of gas laser light source as claimed in claim 3, be further characterized in that, described water conservancy diversion dust-catching board interleaved links to each other with the upper and lower base plate of this gas discharge chamber respectively, can on upper and lower base plate, load respectively different voltages, discharge impurity in the working gas that flows through between thin plate on thin plate, is reached the purpose that purifies whole working gass by Electrostatic Absorption.
5. the discharge cavity of gas laser light source as claimed in claim 4 is further characterized in that, forms the capacity plate antenna battle array behind the described water conservancy diversion dust-catching board on-load voltage, can the partial ionization working gas.
6. the discharge cavity of gas laser light source as claimed in claim 1, be further characterized in that, on described two-spool each rotor flabellum is arranged, being installed on an epitrochanterian flabellum is one group of flabellum, be installed on another epitrochanterian flabellum and be another group flabellum, by different flabellum face type and mounting meanss, two groups of flabellums driving gas on same direction of both forward and reverse directions rotation is flowed.
7. the discharge cavity of gas laser light source as claimed in claim 1 is further characterized in that, described motor is ceramic motor.
8. the discharge cavity of gas laser light source as claimed in claim 1 is further characterized in that, by the external remote control operating electrical machines.
9. the discharge cavity of gas laser light source as claimed in claim 1 is further characterized in that, the rectification head is installed on the rotor away from motor side, and this rectification head links to each other with motor output shaft by connecting axle; Be fixed with external gear on the connecting axle, the rotor that reaches away from motor side with connecting axle rotates; External gear drives 4 groups of fixing planetary gear runnings of the center of circle; The running of planet gear drives internal gear; Internal gear is fixed together with the rotor of close motor side.
10. the discharge cavity of gas laser light source as claimed in claim 1 is further characterized in that, described gas discharge cavity wall is arranged sound-absorbing material.
11. the discharge cavity of gas laser light source as claimed in claim 1, be further characterized in that, described gas discharge chamber is square cross section of fluid channel, and every limit all same implant is equipped with blower fan, heat exchanger, electrode, water conservancy diversion dust-catching board and even silk screen, and flow deflector is arranged on square four jiaos.
12. the discharge cavity of gas laser light source as claimed in claim 11 is further characterized in that, adjusts discharge and the bright dipping time of region of discharge between four anodic-cathodics by the sequence of power switching of adjusting four groups of anodic-cathodics.
13. the discharge cavity of gas laser light source as claimed in claim 2 is further characterized in that, described blower fan is multistage blower fan.
14. the discharge cavity of gas laser light source as claimed in claim 2 is further characterized in that, the rotating speed of a plurality of blower fans of described every grade of blower fan is for to increase progressively to two ends from optical axis central authorities.
15. the discharge cavity of gas laser light source as claimed in claim 1 is further characterized in that, described flow deflector is arranged in the larger place of degree of crook, discharge cavity cross section, reduces flow resistance, reduces the gas flow rate loss.
16. the discharge cavity of gas laser light source as claimed in claim 1 is further characterized in that, described heat exchanger thermal recovery finned-tube bundle form.
17. the discharge cavity of gas laser light source as claimed in claim 16 is further characterized in that, the endoporus of described heat exchanger is connected with cooling water flow, and endoporus is circular, oval, square; Outside fin adopts streamlined to reduce the flow resistance of heat exchanger; The material thermal conductivity of heat exchanger can be good, and with discharge cavity in working gas do not react to each other; The heat exchanger set that the same area is placed is staggered by many heat exchangers and forms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220465438 CN202872166U (en) | 2012-09-13 | 2012-09-13 | Discharge cavity of gas laser light source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220465438 CN202872166U (en) | 2012-09-13 | 2012-09-13 | Discharge cavity of gas laser light source |
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| Publication Number | Publication Date |
|---|---|
| CN202872166U true CN202872166U (en) | 2013-04-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220465438 Expired - Lifetime CN202872166U (en) | 2012-09-13 | 2012-09-13 | Discharge cavity of gas laser light source |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113359903A (en) * | 2021-06-25 | 2021-09-07 | 中国科学技术大学 | Heating method for detonation pipeline |
-
2012
- 2012-09-13 CN CN 201220465438 patent/CN202872166U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113359903A (en) * | 2021-06-25 | 2021-09-07 | 中国科学技术大学 | Heating method for detonation pipeline |
| CN113359903B (en) * | 2021-06-25 | 2022-07-15 | 中国科学技术大学 | Heating method for detonation pipeline |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200831 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094 Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences Effective date of registration: 20200831 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences |
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| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130410 |