CN202297837U - Plating solution coating device - Google Patents
Plating solution coating device Download PDFInfo
- Publication number
- CN202297837U CN202297837U CN2011203854994U CN201120385499U CN202297837U CN 202297837 U CN202297837 U CN 202297837U CN 2011203854994 U CN2011203854994 U CN 2011203854994U CN 201120385499 U CN201120385499 U CN 201120385499U CN 202297837 U CN202297837 U CN 202297837U
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- plating bath
- plating solution
- ray
- liquid
- transfer line
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Abstract
The utility model relates to a plating solution coating device, which is characterized in that at least part of a plating solution delivery pipe consists of an organic thin film, and the thickness of the organic thin film is between 0.5mm and 1mm; and an X-ray transmitting part and an X-ray detection part are arranged at the position of the organic thin film. The arrangement of the organic thin film aims at allowing X-rays transmitted by the X-ray transmitting part to pass smoothly and excite plating solution to generate X-ray fluorescent light, and the X-ray fluorescent light can smoothly pass and be received and detected by the X-ray detection part. Therefore, the concentration of compositions in the plating solution can be effectively analyzed, the real-time detection of the compositions of the plating solution is realized, the concentration of the compositions of the plating solution is ensured to be optimal, and the quality of the coating is ensured to be the best.
Description
Technical field
The utility model relates to a kind of film coating apparatus, especially a kind of plating bath film coating apparatus.
Background technology
In the middle of the technology of using plating bath plated films such as metallic solution; The metal concentration in the plating bath and the concentration of impurity; For by the distribution of current on plated substrate surface, separate out characteristic etc. material impact all arranged, and then have influence on all performances such as conduction, hardness of homogeneity, the film of bonding strength between plated film and the substrate, film thickness.In a word, film forming quality depends on solution composition-also be in the accurate control of metal concentration and impurity concentration to a great extent.
Often adopt in the existing techniques that an amount of plating bath of taking-up carries out off-line measurement from plating bath supply groove, yet according to the plating bath in result who measures and the experience periodic replacement plating bath supply groove or adjust the constituent concentration of plating bath in the plating bath supply groove.Yet on the one hand, so often be difficult in time react the actual concentrations of plating bath in the coating process, thereby cause the optimum concentration that can not plating bath be remained on each composition; Cause coating quality not good; On the other hand, rule of thumb regularly replace plating bath and also can cause unnecessary waste, for example plating bath is in still good CONCENTRATION STATE originally; Can the smooth implementation plated film, but since arrived the replacing time limit again not the electrolysis plating liquid situation still can change plating bath.
Therefore, develop a kind of film coating apparatus that can implement real-time detection to each composition in the plating bath, the quality with not only significantly improving plated film can also significantly reduce production costs.
Summary of the invention
The purpose of the utility model promptly is to provide a kind of plating bath film coating apparatus that can detect each constituent concentration in the plating bath in real time.
The technical scheme that the utility model adopted is following: a kind of plating bath film coating apparatus, and it has coating bath, plating bath supply groove, liquid-feeding pump, strainer; The liquid outlet of said plating bath supply groove is communicated with said liquid-feeding pump one end through the plating bath transfer line; The other end of said liquid-feeding pump is communicated with an end of said strainer through the plating bath transfer line; The other end of said strainer is communicated with the liquid inlet of said coating bath through the plating bath transfer line, and the liquid outlet of said coating bath is communicated with the liquid inlet of said plating bath supply groove through the plating bath transfer line; It is characterized in that: at least a portion of above-mentioned each plating bath transfer line is made up of organic film, and the thickness of said organic film is between 0.5-1mm; Be provided with X ray emission element and X ray detection part at said organic film place.
The utility model is interconnected coating bath, plating bath supply groove, liquid-feeding pump and strainer through the plating bath transfer line, and has realized the circulation of plating bath between coating bath and plating bath supply groove; And the setting of organic film can be passed through for the X ray of X ray emission element emission just smoothly; And excite plating bath to produce XRF; And XRF also can detect through being received by the X ray detection part smoothly, thereby the concentration of each composition in the plating bath is made effective analysis; It is the most suitable that the thickness of organic film is arranged between the 0.5-1mm, if less than 0.5mm, then the insufficient strength of organic film causes the leakage of plating bath easily, and if above 1mm, then the perviousness of X ray and XRF will be difficult to satisfy the detection requirement.
The beneficial effect of the utility model is can make detection to the constituent concentration of plating bath in real time, thereby guarantee that plating bath is in best constituent concentration at any time, is in the best with the quality that guarantees plated film.
Description of drawings
Fig. 1 is the structural representation of the plating bath film coating apparatus of the utility model.
Embodiment
Below in conjunction with accompanying drawing 1, describe the plating bath film coating apparatus of the utility model in detail, it has coating bath 1, plating bath supply groove 2, liquid-feeding pump 3, strainer 4; The liquid outlet of said plating bath supply groove 2 is communicated with said liquid-feeding pump 3 one ends through the plating bath transfer line; The other end of said liquid-feeding pump 3 is communicated with an end of said strainer 4 through the plating bath transfer line; The other end of said strainer 4 is communicated with the liquid inlet of said coating bath 1 through the plating bath transfer line, and the liquid outlet of said coating bath 1 is communicated with the liquid inlet of said plating bath supply groove 2 through the plating bath transfer line; It is characterized in that: at least a portion of above-mentioned each plating bath transfer line is made up of organic film 5, and the thickness of said organic film 5 is between 0.5-1mm; Be provided with X ray emission element 6 and X ray detection part 7 at said organic film 5 places.
Through the plating bath transfer line coating bath 1, plating bath supply groove 2, liquid-feeding pump 3 and strainer 4 are interconnected, and have realized the circulation of plating bath 82 of coating bath 1 and plating bath supply grooves; And the setting of organic film 5 can be passed through for the X ray of X ray emission element 6 emissions just smoothly; And excite plating bath 8 to produce XRF; And XRF also can detect through being received by X ray detection part 7 smoothly, thereby the concentration of each composition in the plating bath 8 is made effective analysis; It is the most suitable that the thickness of organic film 5 is arranged between the 0.5-1mm, if less than 0.5mm, then the insufficient strength of organic film 5 causes the leakage of plating bath 8 easily, and if above 1mm, then the perviousness of X ray and XRF will be difficult to satisfy the detection requirement.
Claims (1)
1. plating bath film coating apparatus, it has coating bath, plating bath supply groove, liquid-feeding pump, strainer; The liquid outlet of said plating bath supply groove is communicated with said liquid-feeding pump one end through the plating bath transfer line; The other end of said liquid-feeding pump is communicated with an end of said strainer through the plating bath transfer line; The other end of said strainer is communicated with the liquid inlet of said coating bath through the plating bath transfer line, and the liquid outlet of said coating bath is communicated with the liquid inlet of said plating bath supply groove through the plating bath transfer line; It is characterized in that: at least a portion of above-mentioned each plating bath transfer line is made up of organic film, and the thickness of said organic film is between 0.5-1mm; Be provided with X ray emission element and X ray detection part at said organic film place.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203854994U CN202297837U (en) | 2011-10-11 | 2011-10-11 | Plating solution coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203854994U CN202297837U (en) | 2011-10-11 | 2011-10-11 | Plating solution coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202297837U true CN202297837U (en) | 2012-07-04 |
Family
ID=46366771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203854994U Expired - Fee Related CN202297837U (en) | 2011-10-11 | 2011-10-11 | Plating solution coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202297837U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106835090A (en) * | 2017-03-14 | 2017-06-13 | 北京中纺精业机电设备有限公司 | A kind of deep hole coating apparatus |
-
2011
- 2011-10-11 CN CN2011203854994U patent/CN202297837U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106835090A (en) * | 2017-03-14 | 2017-06-13 | 北京中纺精业机电设备有限公司 | A kind of deep hole coating apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120704 Termination date: 20121011 |