CN202283468U - Planar miniature radio-frequency coil and micro-flow passage integrating structure - Google Patents
Planar miniature radio-frequency coil and micro-flow passage integrating structure Download PDFInfo
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- CN202283468U CN202283468U CN2011203877110U CN201120387711U CN202283468U CN 202283468 U CN202283468 U CN 202283468U CN 2011203877110 U CN2011203877110 U CN 2011203877110U CN 201120387711 U CN201120387711 U CN 201120387711U CN 202283468 U CN202283468 U CN 202283468U
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- frequency coil
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- miniature radio
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Abstract
The utility model discloses a planar miniature radio-frequency coil and micro-flow passage integrating structure. A polyimide (PI) layer, a first polydimethylsiloxane (PDMS) layer and a second PDMS layer are sequentially arranged above a substrate, the PI layer covers a planar miniature radio-frequency coil and an approach bridge, the first PDMS layer and an electrode arranged above a lead wire wrap and cover the lead wire, the first PDMS layer and the second PDMS layer are aligned and bonded to form a micro-flow passage, and an inlet and outlet pipe through hole directly leading to the micro-flow passage is arranged on the second PDMS layer. The planar miniature radio-frequency coil and micro-flow passage integrating structure has the advantage that the short target distance is realized between the planar miniature radio-frequency coil and the micro-flow passage.
Description
Technical field
The utility model relates to the magnetic resonance detection field, the particularly a kind of planar miniature radio-frequency coil of microfluid magnetic resonance detection and integrated morphology of microchannel of being used for.
Background technology
The NMR spectrum detection technique has non-destructive to sample, thereby is widely used in fields such as chemistry, biomedicine, life science and material science.But compare with other analytical methods such as infrared spectrum analysis, mass spectral analysis etc.; Because at nuclear magnetic resonance (nuclear magnetic resonance; NMR) under the technology, the atomic nucleus system reaches thermal equilibrium state, and the check figure order under each energy state is almost equal; Thereby cause NMR spectrum detection technique sensitivity (or signal to noise ratio) very low, generally its sample detection limit is approximately 10
-9Mol.Signal to noise ratio formula (Hoult according to classics; D.I.and R.E.Richards, SIGNAL-TO-NOISE RATIO OF NUCLEAR MAGNETIC-RESONANCE EXPERIMENT.Journal of Magnetic Resonance, 1976.24 (1): p.71-85.); Signal to noise ratio is directly proportional with the sensitivity of coil; The diameter that reduces coil can improve coil sensitivity, especially when sample trace or rare when valuable, uses the miniature coils that just in time holds sample that the raising signal to noise ratio is had great role.The solenoid coil of main flow research is on glass capillary, to adopt the winding lead to make, and microminiaturized making of coil is difficult for realizing, so the part scholar has invested the research of planar miniature radio-frequency coil.The planar miniature radio-frequency coil can use little manufacturing photoetching technique to form groove on photoresist and adopt the copper electroplating technology, carries out automation and mass manufacturing; Along with the proposition of the little bulk analysis of the nineties in last century system, the planar miniature radio-frequency coil is prone to combine with micro-fluidic chip is integrated in addition.(Trumbull; J.D.; Et al.; Integrating microfabricated fluidic systems and NMR spectroscopy.Ieee Transactions on Biomedical Engineering, 2000.47 (1): p.3-7.) document proposes planar miniature radio-frequency coil and the integrated NMR spectrum that is used for of microchannel are detected the earliest, but causes signal to noise ratio low because fill factor is little with high impedance single-turn circular coil.(Massin; C.; Et al.; Planar microcoil-based microfluidic NMR probes.Journal of Magnetic Resonance, 2003.164 (2): p.242-255.) in the document in the A of 525 micron thick heat resistant glass lower surface and the B heat resistant glass upper surface HF acid etch degree of depth be 75 microns runner respectively, lower surface etching (or boring) the inlet pipe hole of B heat resistant glass with go out pore; A heat resistant glass lower surface and B heat resistant glass upper surface are aimed at bonding down for 600 ℃ in temperature, form the microchannel of sealing; In order to make the vertical range between the sample in coil and the microchannel is 140 microns, and (upper surface of A heat resistant glass) utilization machine glazed finish drops to 65 microns with A heat resistant glass thickness from 525 microns on bonding surface on glass; Produce pad (and lead), via and plane micro rf coil successively in bonding surface on glass utilization photoetching and electroplating technology again.(Wensink; H.; D.C.Hermes, and A.van den Berg, High signal to noise ratio in low field NMR on chip; Simulations and experimental results.Mems 2004:17th Ieee International Conference on Micro Electro Mechanical Systems; Technical Digest, 2004:p.407-410.) in the document with some difference of Massin, adopt blast (powderblaste) to be circle V-type runner at two Borofloat formation cross sections on glass; Under 600 ℃ with two glass bondings together; For the distance that makes coil and microchannel is 80 microns, adopt HF acid etch bonding glass; Coil is made in last re-plating.To this shows that they reach the short distance target in order making between coil and the microchannel, to adopt technology such as the deep erosion of machine glazed finish or HF acid bonding glass, thereby make the follow-up spectral analysis of the nuclear magnetic resonance that carries out show good effect.But in the actual process; The deep erosion of machine glazed finish glass and HF acid glass (account for glass original thickness 80%～90%) technical difficulty is big; Glass breadks easily in the operation is difficult for realizing the short distance target between coil and the microchannel, thereby can reduces the sensitivity of microfluid magnetic resonance detection.Domestic researcher Wang Ming number is in 200610164809.3 in one Chinese patent application, simultaneously makes the planar miniature radio-frequency coil at polyimide base film, and the another side etching forms the microchannel structure, but is difficult in the practical operation realizing.During the target range between coil and the microchannel very little (as 100 microns), will make polyimides very thin, be difficult for one side like this and make coil and make microchannel at another side; In addition, polyimides loses deeply and makes the difficult realization of microchannel.
The utility model content
The utility model purpose: to the problem and shortage of above-mentioned existing existence, the purpose of the utility model provides the integrated morphology of a kind of planar miniature radio-frequency coil and microchannel, makes to reach short target range between planar miniature radio-frequency coil and the microchannel.
Technical scheme: for realizing above-mentioned utility model purpose; The technical scheme that the utility model adopts is the integrated morphology of a kind of planar miniature radio-frequency coil and microchannel; Above substrate, be provided with PI (polyimides) layer, a PDMS (dimethyl silicone polymer) layer and the 2nd PDMS layer successively; Said PI layer parcel overlay planes micro rf coil and access bridge; A said PDMS layer covers lead-in wire with the electrode parcel that is located at the lead-in wire top, and a said PDMS layer is aimed at bonding and formed microchannel with the 2nd PDMS layer, and said the 2nd PDMS layer is provided with the turnover pipe through-hole of straight-through microchannel.
Said substrate preferred glass substrate; When the RF excited frequency is lower, can not bring big additional impedance, and in experiment to transparency less demanding in, can select the silicon substrate of surface coverage oxide layer for use.
Said planar miniature radio-frequency coil, access bridge, lead-in wire and electrode can be connected successively, and the material of said planar miniature radio-frequency coil, access bridge and lead-in wire all can be copper, and the material of electrode can be gold or aluminium.
Said planar miniature radio-frequency coil is used to launch RF excited and receives free induction decay signal, and its number of turn, width and spacing are drawn by the concrete Theoretical Calculation of reality, and thickness is relevant with skin depth; Being connected between access bridge is used for the planar miniature radio-frequency coil and goes between; The PI material is a polyimides; Be a kind of polymeric material of good insulating, planar miniature radio-frequency coil and access bridge are wrapped up in it, play antioxidant effect; Help follow-up sputtering seed layer in addition, also play the place mat effect simultaneously for follow-up making lead-in wire and spin coating PDMS layer.
Said electrode making lead-in wire avoid oxidized directly over lead-in wire and PDMS layer combination parcel lead-in wire; The upper surface of electrode is exposed, is used to weld outside pcb board circuit, makes RF pulse signal pass through electrode, lead-in wire, access bridge to the planar miniature radio-frequency coil.
The PDMS material is a dimethyl silicone polymer, is a kind of elastomeric material, and it has advantages such as light transmission, electrical insulating property and bio-compatibility.
In order to form the microchannel of sealing; The 2nd PDMS layer is aimed at bonding with a PDMS layer; Can be provided with the sample cavity that upright projection is positioned at the planar miniature radio-frequency coil in the said microchannel, also can be provided with the turnover sample cell concentric in the said microchannel with said turnover pipe through-hole.In order to inject sample to microchannel, the 2nd PDMS layer punched forms the turnover pipe through-hole.
Beneficial effect: the utility model provides thisly is used for the planar miniature radio-frequency coil of microfluid magnetic resonance detection and the integrated morphology of microchannel can realize reaching short target range between planar radio frequency coils and the microchannel, thereby has improved the sensitivity of microfluid magnetic resonance detection.This planar miniature radio-frequency coil of microfluid magnetic resonance detection and the integrated morphology of microchannel of being used for that the utility model provides; Adopt PI material parcel planar miniature radio-frequency coil and access bridge; Adopt PDMS material and electrode parcel lead-in wire, play planar miniature radio-frequency coil, lead-in wire and access bridge are carried out anti-oxidation processing.This planar miniature radio-frequency coil of microfluid magnetic resonance detection and the integrated morphology of microchannel of being used for that the utility model provides can be used for micro-liquid sample is carried out spectral analysis of the nuclear magnetic resonance.
Description of drawings
Fig. 1 is the structural representation of the utility model;
Fig. 2 is the vertical view of the utility model;
Fig. 3 is the enlarged diagram of Fig. 2 A portion.
The specific embodiment
Below in conjunction with accompanying drawing and specific embodiment; Further illustrate the utility model; Should understand these embodiment only be used to the utility model is described and be not used in the restriction the utility model scope; After having read the utility model, those skilled in the art all fall within the application's accompanying claims institute restricted portion to the modification of the various equivalent form of values of the utility model.
As shown in Figure 1, this integrated morphology of integrated morphology of the utility model provides this planar miniature radio-frequency coil that is used for the microfluid magnetic resonance detection and microchannel is bottom-up to be substrate 1, PI layer 4, a PDMS layer 7 and the 2nd PDMS layer 8 successively.Wherein, PI layer 4 inside are planar miniature radio-frequency coil 2 and access bridge 3 successively; The one PDMS layer 7 inside are lead-in wire 5 and electrode 6 successively; The 2nd PDMS layer 8 inside are microchannel 9 and turnover pipe through-hole 10 successively.
Planar miniature radio-frequency coil 2, access bridge 3, lead-in wire 5 are connected one with electrode 6, and electrode 6 is directly over lead-in wire 5, and electrode 6 goes between 5 with a PDMS layer 7 combination parcel, and making goes between 5 avoids oxidized; PI layer 4 internal package planar miniature radio-frequency coil 2 and access bridge 3 play antioxidation; The upper surface of electrode 6 is exposed, is used to weld outside pcb board circuit (not shown), makes driving source pass through electrode 6, lead-in wire 5, access bridge 3 to planar miniature radio-frequency coil 2.
As shown in Figures 2 and 3, a PDMS layer 7 is aimed at bonding and is formed microchannel 9 with the 2nd PDMS layer 8; The upright projection of the sample cavity 12 in the microchannel 9 is positioned at planar miniature radio-frequency coil 2; Turnover sample cell 11 in the microchannel 9 is concentric with turnover pipe through-hole 10.
Please consult Fig. 1 again, the thickness of substrate 1 is not limit, and commonly used is 0.5 millimeter or 1 millimeter; The thickness of planar miniature radio-frequency coil 2 is relevant with skin depth; The thickness of the one PDMS layer 7 directly has influence on the target range between planar miniature radio-frequency coil 2 and the microchannel 9, and this target range is following three's sum: half of planar miniature radio-frequency coil 2 thickness, the thickness of a PDMS layer 7, highly half of microchannel 9; The thickness of PI layer 4 is the thickness sum of planar miniature radio-frequency coil 2 and access bridge 3; The thickness of the one PDMS layer 7 is bigger than the thickness sum of lead-in wire 5 and electrode 6, and is littler than the target range between planar miniature radio-frequency coil 2 and the microchannel 9, specifically looks the actual conditions requirement; The thickness of the 2nd PDMS layer 8 is the hole depth sum of height with the turnover pipe through-hole 10 of microchannel 9, is generally 1～2 millimeter.
The course of work of the utility model is following: at first the integrated morphology with whole planar miniature radio-frequency coil and microchannel is put in permanent magnet or the superconducting magnet.Micro-liquid sample is injected turnover pipe through-hole 10 through syringe pump; After getting into microchannel 9 arrival and being full of sample cavity 12; The trace liquid sample issue magnetisationization in the effect of main field, magnetization vector appears on the macroscopic view, on the microcosmic in the sample intrinsic atomic nucleus system thermal equilibrium state appears.With pcb board circuit that electrode 6 upper surfaces link to each other on apply and specify the excitation radio-frequency pulse; RF pulse signal arrives electrode 6, lead-in wire 5, access bridge 3, planar miniature radio-frequency coil 2 successively through the pcb board circuit; Planar miniature radio-frequency coil 2 produces radiofrequency field under the excitation of RF pulse signal, radiofrequency field makes the magnetization vector of macroscopic view upset occur until being turned to 90 °; At this moment close radio-frequency pulse; Under the effect of relaxation; The magnetization vector of atomic nucleus system will be got back to original thermal equilibrium state, promptly gets back to original 0 ° again from 90 °, in this relaxation process; Planar miniature radio-frequency coil 2 cutting magnetic lines generation free induction decay signal (Free Induction Decay, FID).The FID signal just can obtain corresponding nmr spectroscopic signal through low noise amplification, detection, Fourier transformation, just can carry out structural analysis and structure evaluation by the liquid towards sample through nmr spectroscopic signal.
Claims (6)
1. the integrated morphology of planar miniature radio-frequency coil and microchannel; It is characterized in that: be provided with PI layer (4), a PDMS layer (7) and the 2nd PDMS layer (8) successively in the top of substrate (1); Said PI layer (4) parcel overlay planes micro rf coil (2) and access bridge (3); A said PDMS layer (7) and electrode (6) parcel that is located at lead-in wire (5) top cover lead-in wire (5); A said PDMS layer (7) is aimed at bonding and is formed microchannel (9) with the 2nd PDMS layer (8), said the 2nd PDMS layer (7) is provided with the turnover pipe through-hole (10) of straight-through microchannel (9).
2. according to the integrated morphology of said planar miniature radio-frequency coil of claim 1 and microchannel, it is characterized in that: said substrate (1) is the silicon substrate of glass substrate or surface coverage oxide layer.
3. according to the integrated morphology of said planar miniature radio-frequency coil of claim 1 and microchannel; It is characterized in that: said planar miniature radio-frequency coil (2), access bridge (3), lead-in wire (5) are connected with electrode (6) successively; The material of said planar miniature radio-frequency coil (2), access bridge (3) and lead-in wire (5) is copper, and the material of electrode (6) is gold or aluminium.
4. according to the integrated morphology of said planar miniature radio-frequency coil of claim 1 and microchannel, it is characterized in that: be provided with the sample cavity (12) that upright projection is positioned at planar miniature radio-frequency coil (2) in the said microchannel (9).
5. according to the integrated morphology of said planar miniature radio-frequency coil of claim 1 and microchannel, it is characterized in that: be provided with the turnover sample cell (11) concentric in the said microchannel (9) with said turnover pipe through-hole (10).
6. according to the integrated morphology of said planar miniature radio-frequency coil of claim 1 and microchannel, it is characterized in that: the upper surface of said electrode (6) is exposed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203877110U CN202283468U (en) | 2011-10-12 | 2011-10-12 | Planar miniature radio-frequency coil and micro-flow passage integrating structure |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011203877110U CN202283468U (en) | 2011-10-12 | 2011-10-12 | Planar miniature radio-frequency coil and micro-flow passage integrating structure |
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| CN202283468U true CN202283468U (en) | 2012-06-27 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102500437A (en) * | 2011-10-12 | 2012-06-20 | 东南大学 | Integrated structure of planar micro radio-frequency coil and microfluidic channel |
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2011
- 2011-10-12 CN CN2011203877110U patent/CN202283468U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102500437A (en) * | 2011-10-12 | 2012-06-20 | 东南大学 | Integrated structure of planar micro radio-frequency coil and microfluidic channel |
| CN102500437B (en) * | 2011-10-12 | 2013-10-09 | 东南大学 | Integrated structure of planar micro radio-frequency coil and microfluidic channel |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120627 Effective date of abandoning: 20131009 |
|
| RGAV | Abandon patent right to avoid regrant |