CN202256602U - Array substrate detection framework and apparatus - Google Patents

Abstract

The utility model provides an array substrate detection framework and apparatus. The array substrate detection framework includes a bearing framework, a detection signal access interface and a probe device arranged at the inner side of the bearing framework. The probe device includes a control component positioned at top, a spring with one end connected with the control component, a detection probe sleeve with one end connected with the other end of the spring and a probe head connected with the other end of the detection probe sleeve. In the utility model, the telescoping of the probe head of the probe device is controlled, under the condition that array substrates of different models are required to be electrically detected by the array substrate detection apparatus, the replacement frequency of the detection framework is effectively minimized, work intensity of the apparatus maintenance personnel is reduced, and production continuity is enhanced.

Description

A kind of array base palte detects framework and equipment

Technical field

The utility model relates to the array base palte detection range, relates in particular to a kind of array base palte and detects framework and equipment.

Background technology

TFT LCD MODULE (Thin Film Transistor-Liquid Crystal Display; TFT-LCD) manufacture process probably can be divided into three phases: the phase one; Array technology; On a bigger glass substrate, form some independently TFT pixel array circuit, the corresponding LCDs of each pixel array region; Subordinate phase, cell technology, coating of liquid crystalline on the TFT substrate covers colored filter, pieces together the LCD panel and cuts into independently LCDs; Phase III, for LCDs backlight, polaroid and peripheral circuit are installed, form complete TFT-LCD.

In Array technology, after deposition forms the TFT pixel array circuit on the glass substrate, need through array base palte checkout equipment (Array Test) testing usually the TFT electrical parameter.Wherein, the detection framework that is used for signal loading on the array base palte checkout equipment can be with reference to Fig. 1 a, Fig. 1 b, Fig. 1 c and Fig. 1 d, and Fig. 1 a, Fig. 1 b, Fig. 1 c and Fig. 1 d show the structure that the different model array base palte detects framework; Wherein, detect framework and comprise that test signal adds incoming interface 11 and test probe 12, in the prior art; Shown in Fig. 2 a and Fig. 2 b; The position distribution of the PDI Pad 21 of different model array base palte (on the glass substrate for adding the metallic film that test signal forms) can be different, can be shown in Fig. 2 a and Fig. 2 b, laterally can difference on vertically; Even the PDI Pad that direction is identical, its particular location also can there are differences; Therefore when the different model array base palte was carried out the test of TFT device electrical parameter, the array base palte checkout equipment needed frequent change different detection framework, and production continuity and plant maintenance are brought a lot of inconvenience.

The utility model content

In view of this, the fundamental purpose of the utility model is to provide a kind of array base palte to detect framework and equipment, can reduce the array base palte checkout equipment and change the number of times that detects framework.

For achieving the above object, the technical scheme of the utility model is achieved in that

A kind of array base palte detects framework, comprises that bearing frame and test signal add incoming interface, and said detection framework also comprises: be positioned at the inboard probe unit of said bearing frame,

Said probe unit comprises: be positioned at the control assembly at top, the spring that an end links to each other with said control assembly, the test probe cover that links to each other with the said spring other end, overlap the probe that the other end links to each other with said test probe.

Further, said detection framework also comprises the linear motor that is positioned at each limit of bearing frame, is used to regulate the position of the probe unit probe head that is positioned at inboard each limit of said bearing frame, guarantees probe and PDI Pad location matches.

Further, said control assembly is electromagnet or step motor.

Here, said test signal adds the two ends that incoming interface is positioned at bearing frame, also is used for the control signal of input control unit;

The test signal that said test signal adds the incoming interface access is input to probe unit through the test signal access wiring that is positioned at the test probe cover.

Here, the location swap of the control assembly of said probe unit and spring.

A kind of array base palte checkout equipment includes aforesaid detection framework.

The utility model is flexible through control probe unit probe; Need carry out the array base palte of different model under the situation of electrical detection at the array base palte checkout equipment; Can effectively reduce detecting the replacing number of times of framework; Increase the operability of checkout equipment, reduced plant maintenance personnel's working strength, improved the production continuity.

Description of drawings

Fig. 1 a is the structural representation that existing 19 cun array base paltes detect framework;

Fig. 1 b is the structural representation that existing 14 cun array base paltes detect framework;

Fig. 1 c is the structural representation that existing 17 cun array base paltes detect framework;

Fig. 1 d is the structural representation that existing 15.6 cun array base paltes detect framework;

Fig. 2 a is the PDI Pad distribution schematic diagram of 19 cun array base paltes;

Fig. 2 b is the PDI Pad distribution schematic diagram of 17 cun array base paltes;

Fig. 3 detects the structural representation of framework for the utility model array base palte;

Fig. 4 is the structural representation of the probe unit in the detection framework shown in Figure 3;

Probe situation synoptic diagram when Fig. 5 detects for using the utility model array base palte to detect framework.

Embodiment

The basic thought of the utility model is: a kind of array base palte detects framework, comprises that bearing frame and test signal add incoming interface, also comprise: be positioned at the inboard probe unit of said bearing frame; Wherein, said probe unit comprises: be positioned at the control assembly at top, the spring that an end links to each other with said control assembly, the test probe cover that links to each other with the said spring other end, overlap the probe that the other end links to each other with said test probe.

For the purpose, technical scheme and the advantage that make the utility model is clearer, below lift embodiment and with reference to accompanying drawing, to the utility model further explain.

Fig. 3 shows the structure that the utility model array base palte detects framework, and as shown in Figure 3, said detection framework comprises: bearing frame 33, the test signal that lays respectively at the bearing frame two ends add incoming interface 31 and are positioned at the inboard probe unit 32 of bearing frame; Wherein, consider probe unit 32 can with PDI Pad location matches, can not cause test to disturb between each probe unit 32, the number of the probe unit 32 that is provided with on bearing frame 33 each limit usually is no more than 200 groups.Wherein, bearing frame 33 can be metal framework, the framework that also can process for carbon fibre or other suitable materials.

Simultaneously, because the position of the PDI Pad of the array base palte of different model is different, can think horizontal or vertical; When even direction is identical, the PDI Pad position of different model is difference to some extent still, 17 cun array base paltes and 15.6 cun array base paltes of illustrating respectively like Fig. 1 c and Fig. 1 d; Therefore, said detection framework 33 can also comprise linear motor 34, is positioned at each limit of said bearing frame; Preferably, can one linear motor 34 be set, be used for the position that trace is regulated probe unit 32 probe head that are positioned at said bearing frame 33 inboard each limit like the midpoint of Fig. 3 on bearing frame 33 each limit; Guarantee probe and PDI Pad location matches, promptly guarantee probe can with PDI Pad full contact, therefore; Need when probe unit is set, about it, leave certain surplus and supply its activity, be to be understood that; When practical adjustments,, can whole the probe unit 32 that is positioned at same limit be regulated for the ease of control; So can regard the probe unit that is positioned at four limits 32 as an integral body; Guarantee to reserve between this integral body and the bearing frame 33 certain small surplus; Supply linear motor 34 when finely tuning, each limit of probe unit as a whole can left-right and front-back ground be moved and is got final product.

Here; The structure of said probe unit 32 can be with reference to Fig. 4; Comprise: be positioned at the control assembly 321 at top, spring 322 that an end links to each other with said control assembly 321, the test probe cover 323 that links to each other with said spring 322 other ends, overlap the probe 324 that 323 other ends link to each other with said test probe; Wherein, said test signal adds test signal that incoming interface 31 inserts and adds wiring 325 through the test signal that is arranged at test probe cover 323 and be input to probe unit 32; Wherein, said control assembly 321 can be electromagnet or step motor.

In the utility model; When control assembly 321 was electromagnet, after the adding electromagnet start signal, the electromagnet energising of probe unit 32 produced magnetic force; The test probe that attracts to be connected with self through spring 322 overlaps 323; Probe 324 is followed said spring 322 and is upwards shunk, and away from tested array base palte surface, prevents to scratch substrate surface; Can know that so the probe unit 32 that adds the electromagnet start signal belongs to subsequent use probe unit, promptly in this test, the probe unit that need not use, and the probe unit 32 that inserts test signal is for needing the probe unit of use in this test.Therefore, can use as the electromagnet start signal, accomplish the electrical detection of array base palte after the test signal reverse process.

In addition, in the above-mentioned probe unit, the position of control assembly 321 and spring 322 can also exchange realizes, when control assembly 321 is electromagnet; When spring 322 is positioned at the top, after the electromagnet energising, produce magnetic force; Attract each other with bearing frame 33, extrusion spring 322, in like manner; Probe 324 is followed said spring 322 and is upwards shunk, and away from tested array base palte surface, prevents to scratch substrate surface; Wherein, when control assembly 321 is realized for step motor, the control through step motor realizes expanding-contracting action, control spring 322 flexible, and controllability is stronger.

Describe adopting above-mentioned detection framework to carry out the array base palte detection below in conjunction with a concrete embodiment.

When adopting above-mentioned detection framework that 19 cun array base paltes shown in Fig. 2 a are carried out electrical detection; Suppose be numbered 1,3,5,7,9,11 the probe unit of the probe unit corresponding with the PDI Pad of said 19 cun array base paltes for a limit detecting framework, this limit is provided with 1～12 group of probe unit of numbering again, therefore; The probe unit of the probe unit of this limit odd-numbered for using; The probe unit of even-numbered is subsequent use probe unit, thus need to give this limit to be numbered 2,4,6,8,10,12 probe unit input electromagnet start signal, after the electromagnet energising; Produce magnetic force; Attract the test probe cover, probe upwards shrinks thereupon, away from the array base palte surface; Add wiring 325 through test signal then and be numbered 1,3,5,7,9,11 probe unit input test signal for this limit, test, concrete probe unit operating position can be with reference to Fig. 5.

The utility model also provides a kind of array base palte checkout equipment, and said checkout equipment includes aforesaid detection framework.

The above is merely the preferred embodiment of the utility model, is not the protection domain that is used to limit the utility model.

Claims (6)

1. an array base palte detects framework, comprises that bearing frame and test signal add incoming interface, it is characterized in that said detection framework also comprises: be positioned at the inboard probe unit of said bearing frame,

Said probe unit comprises: be positioned at the control assembly at top, the spring that an end links to each other with said control assembly, the test probe cover that links to each other with the said spring other end, overlap the probe that the other end links to each other with said test probe.

2. detection framework according to claim 1; It is characterized in that; Said detection framework also comprises the linear motor that is positioned at each limit of bearing frame; Be used to regulate the position of the probe unit probe head that is positioned at inboard each limit of said bearing frame, guarantee probe and metallic film PDI Pad location matches.

3. detection framework according to claim 1 and 2 is characterized in that, said control assembly is electromagnet or step motor.

4. detection framework according to claim 3 is characterized in that said test signal adds the two ends that incoming interface is positioned at bearing frame, also is used for the control signal of input control unit;

The test signal that said test signal adds the incoming interface access is input to probe unit through the test signal access wiring that is positioned at the test probe cover.

5. detection framework according to claim 1 is characterized in that, the control assembly of said probe unit and the location swap of spring.

6. an array base palte checkout equipment is characterized in that, includes like each described detection framework of claim 1 to 6.

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