CN202255291U - Intellectual detection system for magnetostrictive effect - Google Patents

Abstract

The utility model provides an intellectual detection system for magnetostrictive effect, solving the problems that the magnetostrictive effect based on magneto-rheological grease is not brought to the forefront and the measurement accuracy for the existing optical lever method is low. The intellectual detection system for magnetostrictive effect comprises a magneto-rheological grease magnetostrictive micro-displacement driver and an optical lever micro-displacement measuring device which is based on the dependent variable of the magneto-rheological grease magnetostriction, wherein the magneto-rheological grease magnetostrictive micro-displacement driver acts on the optical lever in a line contact mode; when the magneto-rheological grease is magnetized, the dependent variable of the magneto-rheological grease magnetostriction is generated; a first level amplification is performed for the dependent variable through the optical lever, and the second level amplification is performed through a battery of lens so as to make the dependent variable be received by PSD; and the dependent variable is convert to an electrical signal by the PSD; and the electrical signal is input to a data processing system for data processing through a pre-amplify circuit and an A/D conversion, thus obtaining the magnitude of the dependent variable. The intellectual detection system for magnetostrictive effect has the advantages of being able to accurately measure the magnitude of the dependent variable of the magneto-rheological grease magnetostriction under the effect of various magnetic fields, having simple structure, convenient operation, accurate measurement, high accuracy and high anti-external-interference, and being able to realize real time measurement. Studying on the magneto-rheological grease magnetostrictive effect is a new try for studying the magneto-rheological fluids and has very important practical value for studying the magneto-rheological fluids.

Description

A kind of magnetostrictive effect intelligent checking system

Technical field

The utility model relates to the method and the device of a kind of magnetostrictive effect and Measuring Object tiny length.Specifically, the utility model relates to a kind of optical lever micrometric displacement nanometer accuracy measurement method and device based on the magneto-rheological grease magnetostrictive effect.

Background technology

Colloidal dispersion system (the Yao Jinguang of the structural framework that magneto-rheological grease is made up of micron order ferromagnetic particles, base oil, viscosifying agent, adjuvant and filler; Yan Hua, high-performance magnetorheological fluid progress of research [J], developing material and application; 2009,24 (2): 62-67).Its ferromagnetic particle size is the micron number magnitude, and the magnetic domain size also is the micron number magnitude, and therefore, magneto-rheological grease is a kind of magnetostriction materials.In recent years, magnetic rheological body has obtained using widely as a kind of intellectual material.But the magneto-rheological grease magnetostrictive effect does not cause the concern of domestic and international scientific circles, and also nobody proposes the dependent variable measurement device that the magneto-rheological grease magnetostrictive effect causes.

In engineering and scientific experiment, need to measure the tiny length variable quantity, measurement mechanism commonly used has milscale method and optical lever method.Milscale method micrometer device needs fixed measuring point, and promptly the measurement point change in location can cause measuring error.Optical lever method micrometer device; Constitute by devices such as fully-reflected plane mirror, Telescope, scales; Change tiny length (highly) variable quantity into minute angle and change, Telescope is a reading bigger on the rule with the angle change transitions, but measuring accuracy is not enough.Tan Xingwen, He Guotian propose a kind of new optical lever measurement mechanism (Tan Xingwen, He Guotian; The research [J] of nano-precision optical lever microdisplacement measurement method, Chinese laser, 2009; 36 (s2): 189-193), micro-displacement sensor (PSD) is applied in the optical lever measurement.This technology formerly has simple to operate, can realize advantages such as non-cpntact measurement, but in the optical lever measuring process, exist operate approximately, and measuring accuracy decreases, angular adjustment difficulty, not energy measurement nano-grade displacement amount.Along with the reach of science, the requirement of microdisplacement measurement precision is reached inferior nanometer scale, formerly technology has been not suitable for the high engineering practice of accuracy requirement and scientific research (like the dependent variable of measurement magneto-rheological grease magnetostrictive effect).

The utility model content

In order to overcome above-mentioned deficiency, the utility model proposes a kind of inferior nanometer accuracy measurement method of optical lever of magneto-rheological grease magnetostrictive effect, and designs a kind of optical lever measurement mechanism that can accurately measure the micrometric displacement variable quantity.Utilize formerly technological optical lever principle, design make new advances light path and angle regulator, micrometric displacement is carried out secondary amplify (optical lever amplifying method, optical imagery amplifying method), amplify 10 at least ⁶Doubly.Replace scale with micro-displacement sensor (PSD), make PSD output signal get into data handling system, realized high-acruracy survey magneto-rheological grease magnetostrictive effect adaptability to changes.

The technical scheme that the utility model adopted:

In order to address the above problem, the utility model designs a kind of optical lever measurement mechanism of magneto-rheological grease magnetostrictive effect, can obtain the dependent variable size that the magneto-rheological grease magnetostrictive effect causes in real time, and its precision can reach inferior nanometer scale.The measurement mechanism of the utility model design is made up of laser transmitting system, magneto-rheological grease magnetostriction microdisplacement driver, light displacement amplification device, optical imagery amplification system, signal processing system.

The light displacement amplification device of the utility model design is as shown in Figure 1, is made up of level crossing (catoptron) M1, M2; Wherein M1 one end is fixed, and the other end can move in vertical direction, and M2 fixes.Laser transmitting system is as shown in Figure 2, is made up of laser instrument, collimating mirror, diaphragm, catoptron, piezoelectric ceramics (PZT), angular transducer and scm managing system seven parts.The magneto-rheological grease magnetostriction microdisplacement driver is as shown in Figure 3, is made up of direct supply, sealed cylinder block, sealed screw, magneto-rheological grease, coil, piston, expansion link.The optical imagery amplification system is as shown in Figure 4, constitutes (each lens combination is made up of two lens, and enlargement factor is between 10-100) by a plurality of convex lens groups.Signal processing system is as shown in Figure 5, is made up of displacement photodetector, pre-arcing road, wave filter, A/D conversion, SCM system five parts.Dc power output end links to each other with magneto-rheological grease magnetostriction microdisplacement driver coil input end, and required magnetic field provides magnetic field during for the magneto-rheological grease magnetostriction.The end in contact of expansion link and level crossing M1 is made as the B point, and expansion link moves drive level crossing M1 and moves.

Laser transmitting system is made up of laser instrument, collimating mirror, diaphragm, catoptron, piezoelectric ceramics (PZT), angular transducer and scm managing system seven parts; Helium-neon laser (101) is gone up fixed angle sensor (106), the laser that laser instrument is launched through first collimating mirror (102), aperture diaphragm (104), second collimating mirror (103) after a catoptron (105) incide on the displacement optical amplification device M1.Piezoelectric ceramics PSt150/4/7VS9 (107a, 107b, 107c, 107d) is through the angle of 89C51 single-chip microcomputer (108) control catoptron 105.Become directional light behind laser process collimating mirror that laser instrument sends and the diaphragm, incide on the plane of level crossing M1, reflex on the M2 mirror in the optical amplification device through level crossing M1 from the B point.Light penetrates from M1 other end A after repeatedly coming and going reflection between level crossing M1, M2 at last, shines optical imagery amplification system input end, carries out second level displacement and amplifies; After the optical imagery amplification system is repeatedly amplified, be imaged on the displacement photodetector photosurface.Displacement photodetector output electric signal is input to SCM system through pre-arcing road, wave filter and A/D conversion, carries out micrometric displacement and handles, and calculates the micrometric displacement amount that the magneto-rheological grease magnetostrictive effect causes.

Through the angle of angular transducer measurement plane mirror deflection, and big or small through the incident angle of single-chip microcomputer, PZT control laser instrument, thus regulate the enlargement factor of optical amplification device to displacement.

When direct supply was not worked, magnetostrictive effect did not take place in magneto-rheological grease, and expansion link is not flexible, and M1 is in horizontality, light will be radiated at the displacement photodetector a bit on.When direct supply is worked, magneto-rheological grease generation magnetostrictive effect, expansion link is elongation upwards, drives M1 and moves up, and light will be radiated on another aspect of displacement photodetector.The distance of point-to-point transmission is exactly that magnetostriction is to be measured, after conversion, can get actual mangneto stroke.

Concrete measurement thought is following:

As shown in Figure 1, the magneto-rheological grease magnetostriction microdisplacement driver is touched at the B place with the line way of contact.The depth of parallelism is good, the light distribution integrated light beam through becoming behind lens and the aperture diaphragm for laser beam.This light beam very low-angle incides the free end of M1, between two level crossings repeatedly the reflection back by other end A place's outgoing of M1, through shining on the displacement photodetector after the optical imagery amplification system (lens combination).M1 and M2 are parallel to each other during initial position, and after giving coil electricity, external magnetic field acts on the magneto-rheological grease.The magneto-rheological grease magnetostriction produces micro-displacement Δ L, and level crossing M1 rotates around the A point, to the terminal B place, moves Δ L.M1 deflection minute angle Δ α, shown in dotted line among the figure:

$\tan \mathrm{\Δ\α}=\frac{\mathrm{\ΔL}}{b}---\left(1\right)$

B goes up the AB segment length for level crossing M1.

Because Δ α is very little, so:

$\mathrm{\Δ\α}=\tan \mathrm{\Δ\α}=\frac{\mathrm{\ΔL}}{b}---\left(2\right)$

Light beam is through repeatedly reflection, and emergence angle Δ β angle is changed to:

$\mathrm{\Δ\β}=2\mathrm{n\Δ\α}=2n\frac{\mathrm{\ΔL}}{b}---\left(3\right)$

N is the order of reflection of light between two catoptrons in the formula.

If it is Δ s that the first order is amplified (optical lever multiplying arrangement) displacement, AC=d, AD=l ₁, AE=l ₂, CD=l ₃, ED=Δ s in Δ AED, gets according to the cosine law:

$\cos \mathrm{\Δ\β}\frac{l_1^2+l_2^2-{\mathrm{\Δs}}^2}{2l_1{l}_2}---\left(4\right)$

Wherein:

$l_1=\sqrt{d^2+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2}---\left(5\right)$

$l_2=\frac{d}{\cos \mathrm{\&theta;}}---\left(6\right)$

θ is the laser instrument incident angle, and θ=∠ CAE.

In (5), (6) substitution (4):

$\cos \mathrm{\&Delta;\&beta;}=\frac{d^2{\cos }^2\mathrm{\&theta;}+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2{\cos }^2\mathrm{\&theta;}+d^2-{\mathrm{\&Delta;s}}^{2}c{\mathrm{os}}^2\mathrm{\&theta;}}{2d\cos \mathrm{\&theta;}\sqrt{d^2+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2}}---\left(7\right)$

Know by (3):

$\cos \mathrm{\&Delta;\&beta;}=\cos 2n\frac{\mathrm{\&Delta;L}}{b}---\left(8\right)$

Get by (7) formula and (8) formula:

$\mathrm{\&Delta;L}=b\frac{\arccos \left(\frac{d^{2}c{\mathrm{os}}^2\mathrm{\&theta;}+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2{\cos }^2\mathrm{\&theta;}+d^2-{\mathrm{\&Delta;s}}^2{\cos }^2\mathrm{\&theta;}}{2d\sqrt{d^2+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2}\cos \mathrm{\&theta;}}\right)}{2n}---\left(9\right)$

Wherein b, d, θ, l ₃, n, known.

By on can know that the displacement after the first order is amplified is Δ s.In order to improve measuring accuracy, need further displacement enlargement amount Δ s, as shown in Figure 4, to establish through after the second level displacement amplification (optical imagery amplification system, i.e. lens combination), the displacement photodetector records distance and is Δ h, and the lens combination enlargement factor is k, then

Δh＝kΔs (10)

So measurement mechanism is surveyed the expression formula of magnetostrictive strain amount size:

$\mathrm{\&Delta;L}=b\frac{\arccos \left(\frac{d^2{\cos }^2\mathrm{\&theta;}+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2{\cos }^2\mathrm{\&theta;}+d^2-{\left(\frac{\mathrm{\&Delta;h}}{k}\right)}^2{\cos }^2\mathrm{\&theta;}}{2d\sqrt{d^2+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2}\cos \mathrm{\&theta;}}\right)}{2n}---\left(11\right)$

By on can know that the displacement photodetector records distance between two points Δ h, carry out signal Processing through signal processing system, thereby obtain the value of displacement L to be measured.

The laser transmitting system 1 of the utility model design is as shown in Figure 2,

Described laser instrument 101 can be helium-neon laser, carbon dioxide laser, semiconductor laser etc.

Described collimating mirror is convex lens 102,103, makes light through becoming parallel later.

Described diaphragm is an aperture diaphragm 104.

Described catoptron is a level crossing 105, and it is shaped as rectangle, and square is circular or oval.

Described piezoelectric ceramics 107a-107d (PZT) is a kind of inorganic non-metallic and material with piezoelectric effect, and four identical PZT are placed on four angles of catoptron bottom.

Described angular transducer 106 is used for measuring the angle of mirror deflection.

Described SCM system 108 is controlled the size of laser instrument incident angle through PZT.

The magneto-rheological grease magnetostriction microdisplacement driver 3 of the utility model design is as shown in Figure 2,

Described encapsulation cylinder body 301, its material are non-ferromagnetic metals such as aluminium, copper.Inside is full of magneto-rheological grease.

Described coil 302, its material is a copper, evenly is wound in the encapsulation.

Described magneto-rheological grease 303, the colloidal dispersion system of the structural framework of forming by micron order ferromagnetic particles, base oil, viscosifying agent, adjuvant and filler.Also magnetic flow liquid, magnetic liquid or the like test sample article.

Described piston 304, its material is non-ferromagnetic metals such as aluminium, copper, is shaped as square, cylindrical.

Described expansion link 305, its material is non-ferromagnetic metals such as aluminium, copper, be shaped as square, circle, trapezoidal and all are irregularly shaped.

Described sealed screw 306, its material are non-ferromagnetic metals such as aluminium, copper.Good seal performance.

The said displacement first order of the utility model multiplying arrangement is that optical amplification device is made up of level crossing 4 (M1), level crossing 5 (M2), requires high reflectance; Wherein level crossing 4 one ends can move in vertical direction, and level crossing 5 is fixing.Displacement second level multiplying arrangement is an optical imagery amplification system 6, is made up of a plurality of convex lens groups.Emergent ray amplifies k doubly through the convex lens group with Δ s.

The signal processing system 7 of the utility model design is as shown in Figure 4.Form by displacement photodetector 701, pre-arcing road 702, wave filter 703, A/D conversion 704, SCM system 108.The rayed of planoconvex lens group 6 outgoing converts light signal to electric signal to displacement detector 701 photosurfaces.Displacement photodetector 701 output electric signal are input to through pre-arcing road, wave filter and A/D conversion and carry out data processing in the SCM system.

Described pre-arcing road 702 is made up of operational amplifier, and enlargement factor is 5～10 times.

Described wave filter 703 is a low-pass filter.

SCM system 108 in described SCM system 108 and the laser transmitting system 1 is same system; Displacement photodetector 701 output electric signal are input in the SCM system 108 through pre-arcing road 702, wave filter 703 and A/D conversion 704, by SCM system data 108 are handled.

In the technical scheme of the utility model, a kind of new and optical lever measuring method are proposed, have accurate, quick, the inferior nano-precision of measurement, characteristics such as real-time, have a good application prospect.

The method that the utility model adopted:

According to above-mentioned measurement mechanism, the utility model further proposes a kind of measuring method based on magneto-rheological grease magnetostrictive strain amount, and this method may further comprise the steps:

(1) testing sample (like magneto-rheological grease) is full of in the magneto-rheological grease magnetostriction microdisplacement driver

(2) with the magneto-rheological grease magnetostriction microdisplacement driver with the mode of line contact as the level crossing fulcrum.

(3) make the parallel placement of level crossing M1, amplify as the first order of displacement with M2.Convex lens group amplifying unit is placed on the emergent ray direction, receives the light from M1 one end A outgoing, amplifies as the second level of displacement.

(4) through single-chip microcomputer and piezoelectric ceramics control laser beam emitting device angle.After the adjustment angle, note laser instrument incident angle size through angular transducer.

(5) direct supply is that the coil of magneto-rheological grease magnetostriction microdisplacement driver provides electric current, makes its inner magnetic field that produces.Magneto-rheological grease issues magnetisation in the effect of externally-applied magnetic field and causes flex effect, produces the magnetostrictive strain amount, and contacts with level crossing M1 through expansion link, makes the M1 run-off the straight, causes the light ray propagation path between level crossing M1, the M2 to change.

Emergent ray when (6) reception of displacement photodetector does not add magnetic field behind emergent ray and the externally-applied magnetic field through pre-arcing road, A/D conversion, is input to data handling system.

(7) magneto-rheological grease magnetostrictive strain amount size does

$\mathrm{\&Delta;L}=b\frac{\arccos \left(\frac{d^2{\cos }^2\mathrm{\&theta;}+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2{\cos }^2\mathrm{\&theta;}+d^2-{\left(\frac{\mathrm{\&Delta;h}}{k}\right)}^2{\cos }^2\mathrm{\&theta;}}{2d\sqrt{d^2+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2}\cos \mathrm{\&theta;}}\right)}{2n}---\left(12\right)$

(8) change electric current, measure magneto-rheological grease magnetostrictive strain amount size under different externally-applied magnetic field effects.

(9) repeat (1)～(8) step and get the displacement variable that magnetostrictive effect causes.

The beneficial effect of the utility model:

The utility model proposes the measuring method that the micrometric displacement amount is answered in a kind of magneto-rheological grease magnetostriction; And design the magneto-rheological grease magnetostriction and answer the micrometric displacement measuring device, can be exactly, inferior nano-precision detects magneto-rheological grease magnetostriction to be measured and answers amount of displacement in real time.

Description of drawings

The optical lever micro-displacement measuring device that the magnetostriction of Fig. 1 magneto-rheological grease is answered

Fig. 2 magneto-rheological grease magnetostriction microdisplacement driver

Fig. 3 laser transmitting system

Fig. 4 optical imagery amplification system

Fig. 5 signal processing system

Embodiment

For above-mentioned purpose, technical scheme and the effect that further specifies the utility model, below combine above-mentioned each figure that utility model is described in detail through instance.See also shown in Figure 1; It is an optical lever measuring system block diagram; The utility model is to measure the optical lever method measurement mechanism that the magneto-rheological grease magnetostriction is answered; Comprise the level crossing 4 and 5 in laser transmitting system 1, direct supply 2, magneto-rheological grease magnetostriction microdisplacement driver 3, the micro-system, displacement optical imagery amplification system 6, signal processing system 7.

Said 1 is laser transmitting system; See also shown in Figure 2; Fixed angle sensor 106 on helium-neon laser 101, the laser that laser instrument is launched incides on the displacement optical amplification device M1 through a catoptron 105 through collimating mirror 102, aperture diaphragm 104, collimating mirror 103.Piezoelectric ceramics PSt150/4/7VS9107a, 107b, 107c, 107d control the angle of catoptrons 105 through 89C51 single-chip microcomputer 108.

Said 101 is helium-neon laser, and wavelength is 630.2nm.

Said 102,103 is collimating mirror.

Said 104 is aperture diaphragm, and model is SL02-xSL, stitches wide: 0～14mm stitches long: 80mm.

Said 105 is catoptron.

Said 106 is angular transducer, and its model is CPS24-PFJ-AME, and its technical indicator is following,

Output mode: simulation output mode

Angle range: 0～360 °

Output area: 0.5～+ 4.5V

Supply voltage: 5V+10%

Resolution: 12

Precision: 10

Temperature range :-40 ℃～+ 100 ℃.

Said 107a, 107b, 107c, 107d are piezoelectric ceramics PSt150/4/7VS9.

Said 108 89C51 single-chip microcomputers for ATMEL production.

Said 2 is direct supply, and its model is QJ5010XII, output voltage range: 0-50V.The drive current that produces magnetic field is provided for magneto-rheological grease magnetostriction microdisplacement driver 3.

Said 3 is the magneto-rheological grease magnetostriction microdisplacement driver.See also shown in Figure 3ly, it is a magneto-rheological grease magnetostriction microdisplacement driver 3.Constitute by encapsulation cylinder body 301, coil 302, magneto-rheological grease 303, piston 304, expansion link 305 and sealing screw 306.

Said 301 are the encapsulation cylinder body, and its material is an aluminium.Long is 100mm, and wide is 30mm.

Said 302 is coil, and its material is a copper, and its external diameter is 1.5mm, and internal diameter is 1.2mm.The coiling number of turn is 500 circles.

Said 303 is magneto-rheological grease, and its base fluid is a silicone oil, and magnetic-particle adopts carbonyl iron particles, and adds stabilizing agent.Magnetic-particle concentration is 35%.

Said 304 is piston, and its material is an aluminium.

Said 305 is expansion link, and its material is an aluminium, and it is shaped as rectangular parallelepiped.

Said 306 is sealing screw, and its material is an aluminium, and length is 20mm, flight pitch 1.5mm.

Said 4 is level crossing M1, and long is 600mm, and wide is 30mm.

Said 5 is level crossing M2, long is 500mm, and wide be 30mm, with level crossing M2 apart from being 100mm.

Said level crossing 4 and 5 constitutes the light path of optical lever amplification system.The laser beam that laser transmitting system 1 sends incides the B place of level crossing 4 (M1), and light is in two level crossings 4 and 5 round reflections.Level crossing 4 does not have an angle Δ β when run-off the straight and run-off the straight between the emergent ray at A place.

Said lens combination 6 is displacement optical imagery amplification system, and is as shown in Figure 4.It is made up of convex lens 601 (focal length is 100mm) and convex lens 602 (focal length is 10mm).Its enlargement factor is 100 (k=100).After A emergent ray scioptics group 6, the magnetostrictive displacement amount is further amplified.

Said 7 is signal processing system, sees also shown in Figure 5.It is made up of displacement photodetector 701, pre-arcing road 702, wave filter 703, A/D conversion 704, SCM system 108 5 parts.

Said 701 is displacement transducer PSD.Distance between the focus of itself and convex lens 602 is 1000mm.

Said 702 are the pre-arcing road, are made up of operational amplifier.Enlargement factor is 5 times.

Said 703 is low-pass filter.

Said 704 is A/D converter, and its model is AD7705,16.

Said 108 89C51 single-chip microcomputers for ATMEL production.

Rayed converts light signal to electric signal by displacement photodetector 701 to displacement photodetector PSD701.This signal is input in the low-pass filter 703 after amplifying through pre-arcing road 702, is input to 89C51 single-chip microcomputer 108 through A/D conversion 704 then, calculates magnetostrictive displacement amount Δ L.Its concrete course of work is following:

The depth of parallelism is good, the light distribution integrated light beam through becoming behind lens and the aperture diaphragm for laser beam.This light beam very low-angle incides the free end B place of M1, and between two level crossing M1 and M2 repeatedly after the reflection, the other end A place's outgoing by M1 shines on the PSD through lens combination 6.M1 and M2 are parallel to each other during initial position, and rayed is a bit located on the PSD photosurface.After giving coil electricity, external magnetic field acts on the magneto-rheological grease.The magneto-rheological grease magnetostriction produces micro-displacement Δ L, moves Δ L on the optical lever rear fulcrum B.Level crossing M1 bar is around axle (A) deflection minute angle Δ α, and shown in dotted line among the figure, irradiate light is on another aspect on the PSD photosurface.Distance between two points is Δ h.

Know by Fig. 1:

$\tan \mathrm{\&Delta;\&alpha;}=\frac{\mathrm{\&Delta;L}}{b}---\left(13\right)$

B is the vertical range of optical lever rear fulcrum B to axis A

Because Δ α is very little, so:

$\mathrm{\&Delta;\&alpha;}=\tan \mathrm{\&Delta;\&alpha;}=\frac{\mathrm{\&Delta;L}}{b}---\left(14\right)$

Light beam is through repeatedly reflection, and the emergence angle angle variable quantity is Δ β:

$\mathrm{\&Delta;\&beta;}=2\mathrm{n\&Delta;\&alpha;}=2n\frac{\mathrm{\&Delta;L}}{b}---\left(15\right)$

N is the order of reflection of light between two catoptrons in the formula.According to the cosine law:

$\cos \mathrm{\&Delta;\&beta;}\frac{l_1^2+l_2^2-{\mathrm{\&Delta;s}}^2}{2l_1{l}_2}---\left(16\right)$

Wherein:

$l_1=\sqrt{d^2+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2}---\left(17\right)$

$l_2=\frac{d}{\cos \mathrm{\&theta;}}---\left(18\right)$

θ is the laser instrument incident angle.

In (17), (18) substitution (16):

$\cos \mathrm{\&Delta;\&beta;}=\frac{d^2{\cos }^2\mathrm{\&theta;}+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2{\cos }^2\mathrm{\&theta;}+d^2-{\mathrm{\&Delta;s}}^{2}c{\mathrm{os}}^2\mathrm{\&theta;}}{2d\cos \mathrm{\&theta;}\sqrt{d^2+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2}}---\left(19\right)$

Know by (15):

$\cos \mathrm{\&Delta;\&beta;}=\cos 2n\frac{\mathrm{\&Delta;L}}{b}---\left(20\right)$

From the above, the displacement after the first order is amplified is Δ s.In order further to improve measuring accuracy, need displacement enlargement amount once more.If after second level displacement amplification (optical imagery amplification system, i.e. lens combination), the displacement photodetector records distance and is Δ h, and the lens combination enlargement factor is 100 (k=100), then

Δh＝kΔs＝100Δs (21)

Getting the magnetostrictive effect expression formula by (19) formula, (20) formula, (21) formula is:

$\mathrm{\&Delta;L}=b\frac{\arccos \left(\frac{d^2{\cos }^2\mathrm{\&theta;}+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2{\cos }^2\mathrm{\&theta;}+d^2-{\left(\frac{\mathrm{\&Delta;h}}{100}\right)}^2{\cos }^2\mathrm{\&theta;}}{2d\sqrt{d^2+{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="110509122330.png"\; state="\{\{state\}\}">l</figure-callout>}}_3^2}\cos \mathrm{\&theta;}}\right)}{2n}---\left(22\right)$

Wherein b, d, θ, l ₃, n is known.By on can know that the displacement photodetector records distance between two points Δ h,

Carry out Signal Processing through signal processing system, thereby obtain the value of magnetostrictive displacement amount Δ L.

Above-mentioned elaboration shows that the method for the utility model can detect magnetostrictive effect, and precision reaches inferior nanometer scale.

Claims (1)

1. a magnetostrictive effect intelligent checking system is made up of laser transmitting system, magneto-rheological grease magnetostriction microdisplacement driver, light displacement amplification device, optical imagery amplification system, signal processing system;

It is characterized by:

Described laser transmitting system is made up of laser instrument, collimating mirror, diaphragm, catoptron, piezoelectric ceramics (PZT), angular transducer and scm managing system seven parts; Helium-neon laser (101) is gone up fixed angle sensor (106), the laser that laser instrument is launched through first collimating mirror (102), aperture diaphragm (104), second collimating mirror (103) after a catoptron (105) incide on the displacement optical amplification device M1; Piezoelectric ceramics PSt150/4/7VS9 (107a, 107b, 107c, 107d) is through the angle of 89C51 single-chip microcomputer (108) control catoptron (105).

Images