CN202245325U - Substrate carrying manipulator equipment - Google Patents
Substrate carrying manipulator equipment Download PDFInfo
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- CN202245325U CN202245325U CN2011203765971U CN201120376597U CN202245325U CN 202245325 U CN202245325 U CN 202245325U CN 2011203765971 U CN2011203765971 U CN 2011203765971U CN 201120376597 U CN201120376597 U CN 201120376597U CN 202245325 U CN202245325 U CN 202245325U
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- arm
- equipment
- substrate
- detecting device
- signal
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Abstract
The utility model discloses substrate carrying manipulator equipment, which relates to the field of manufacture of liquid crystal panels and can conduct all-sided detection to substrates to avoid harms to follow-up processes. The substrate carrying equipment comprises an equipment body, a manipulator arm and an adsorption module at the upper part of the manipulator arm and further comprises a detection device, a driving device and a processing device, wherein the detection device is fixedly mounted on the manipulator arm; the driving device is fixedly mounted on one side of the manipulator arm; and the processing device is in wired or wireless connection with the detection device. The substrate carrying manipulator equipment is used for carrying the substrates.
Description
Technical field
The utility model relates to liquid crystal panel and makes the field, relates in particular to a kind of substrate transfer robot equipment.
Background technology
Substrate transfer robot equipment is through the absorption of the vacuum suction module on arm glass substrate, thus the conveyance of realization glass substrate.At present, substrate transfer robot equipment can only be to the substrate contribution of breakage during to the vacuum suction module region, just can send and report to the police and decommission.
If the glass substrate breakage zone is not within this vacuum suction module scope on the arm; Substrate transfer robot equipment just can not send warning so; And then cause damaged glass substrate to proceed transmission, send into subsequent technique, thereby cause subsequent technique bad; Or other equipment unit are caused damage, production is brought greater loss.
The utility model content
The utility model discloses a kind of substrate transfer robot equipment, can carry out complete detection to substrate, avoids subsequent technique bad.
For achieving the above object, the utility model adopts following technical scheme:
On the one hand, a kind of substrate transfer robot equipment is provided, comprises apparatus body, arm and be positioned at the adsorption module on the said arm, said equipment also comprises:
Detecting device is connected with actuating device, and the substrate on said arm is placed the plane;
Actuating device is connected with said detecting device;
Processing equipment is connected with said detecting device through wired or wireless mode.
The length of said detecting device is more than or equal to the substrate length on one side that is placed on the said arm.
Said equipment also comprises:
Guide rail is fixed on the said apparatus body, perpendicular to the length direction of said detecting device;
Slide block is arranged on the said guide rail, and an end is connected with said detecting device, and the other end is connected with said actuating device through driving device;
Driving device, an end is connected with said actuating device, and the other end is connected with said slide block.
Said equipment also comprises: warning device is connected with said processing equipment.
Said detecting device comprises:
Signal projector, the substrate on said arm is placed the plane;
Signal receiver is positioned at a side of said signal projector, and the substrate on said arm is placed the plane, receives the signal that said signal projector sends;
Signal converter, an end is connected with said signal receiver, and the other end is connected with said processing equipment.
Said signal projector comprises: pinger, one or both in the light wave projector.
Said signal receiver comprises: acoustic receiver, one or both in the light wave receptor.
Said processing equipment comprises: micro controller system, programmable logic controller (PLC) or Personal Computer.
Said slide block also comprises:
Chute is arranged on the said slide block along said arm length direction;
Slide plate is fixed in the said chute through check screw, and an end is connected with said check implement;
Check screw is tightened said slide plate and is fixed in the said chute.
When said detecting device was positioned at said arm below, said arm below was provided with reflector; The said adsorption module that is positioned at said arm top is the vacuum suction module that the said arm length direction in edge with measuring ability is strip.
The substrate transfer robot equipment that the utility model provides comprises apparatus body, arm and is positioned at the adsorption module on the arm, also comprises: detecting device, be connected with actuating device, and the substrate on arm is placed the plane; Actuating device is connected with detecting device; Processing equipment is connected with detecting device through wired or wireless mode.Detecting device on the substrate transfer robot equipment can comprehensively detect the substrate that is carried on the substrate transfer robot arm, and draw testing result via processing equipment under the driving of actuating device.Thereby can find the breakage of any position on the glass substrate, guarantee that damaged substrate occurring can not be sent to subsequent technique, avoid the bad of subsequent technique, prevent the infringement that damaged substrate causes other equipment unit simultaneously.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiment of the utility model, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
The structural representation of the substrate transfer robot equipment that Fig. 1 provides for the utility model embodiment;
The structural representation of the substrate transfer robot equipment that Fig. 2 provides for another embodiment of the utility model;
The substrate transfer robot equipment testing device testing process scheme drawing that Fig. 3 provides for the utility model embodiment;
The structural representation of the slide block of the substrate transfer robot equipment that Fig. 4 provides for the utility model embodiment;
The structural representation of the another substrate transfer robot equipment that Fig. 5 provides for the utility model embodiment.
The specific embodiment
To combine the accompanying drawing among the utility model embodiment below, the technical scheme among the utility model embodiment is carried out clear, intactly description, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
The carrying manipulator equipment 10 that the utility model embodiment is provided, as shown in Figure 1, comprising: apparatus body (not shown), arm 1 and be positioned at the adsorption module 2 on this arm 1.In addition, this carrying manipulator equipment 10 also comprises: detecting device 3, be connected with actuating device 4, and the substrate on this arm 1 is placed the plane; Actuating device 4 is connected with detecting device 3; Processing equipment 5 is connected with detecting device 3 through wired or wireless mode, is used for the detection data that processing and detecting device 3 sends, and breakage whether occurs to judge glass substrate.Concrete, processing equipment 5 can be micro controller system, programmable logic controller (PLC) or Personal Computer.
For example, as shown in Figure 1 in practical application, detecting device 3 moves along X, Y direction under the drive of actuating device 4 anyhow, accomplishes the detection to whole glass substrate.
Detecting device on the substrate transfer robot equipment can comprehensively detect the substrate that is carried on the substrate transfer robot arm, and draw testing result via processing equipment under the driving of actuating device.Thereby can find the breakage of any position on the glass substrate, guarantee that damaged substrate occurring can not be sent to subsequent technique, avoid the bad of subsequent technique, prevent the infringement that damaged substrate causes other equipment unit simultaneously.
The carrying manipulator equipment 20 that another embodiment of the utility model provides, as shown in Figure 2, comprising: apparatus body (not shown), arm 1 and be positioned at the adsorption module 2 on this arm 1.In addition, this carrying manipulator equipment 20 also comprises: detecting device 3, be connected with actuating device 4, and the substrate on this arm 1 is placed the plane; Actuating device 4 is connected with detecting device 3; Processing equipment 5 is connected with detecting device 3 through wired or wireless mode, is used for the detection data that processing and detecting device 3 sends, and breakage whether occurs to judge glass substrate.
In the present embodiment, detecting device 3 is strip, and it is in the length of side of the length on the Y direction more than or equal to the Y direction that is placed on the glass substrate on the arm 1.Like this, when detecting, this detecting device 3 can once move along directions X and accomplish the detection to glass substrate under the driving of actuating device 4.
In addition, also comprise the guide rail 6 that is arranged on the apparatus body in the present embodiment, exemplary, this guide rail 6 can be arranged on the arm 1, like this can conserve space.Further, on this guide rail 6, also be provided with slide block 7, these slide block 7 one ends are connected with detecting device 3, and the other end is connected with actuating device 4 through driving device 11.Driving device 11 1 ends are connected with actuating device 4, and the other end is connected with slide block 7.In the present embodiment, actuating device 4 can be a motor, and correspondingly, this driving device 11 can be a belt etc.
When detecting, driving device 11 with the transmission of power of actuating device 4 outputs to slide block 7, slide block 7 along guide rail 6 drive detecting devices 3 on directions X from a lateral movement of substrate to opposite side.Because detecting device 3 towards substrate 8, therefore can detect the damaged situation of substrate 8.
In the present embodiment, as shown in Figure 3, detecting device 3 can comprise signal projector 31, signal receiver 32 and signal converter (not shown).Wherein, signal projector 31, the substrate on arm is placed the plane; Signal receiver 32 is positioned at a side of signal projector 31, and the substrate on arm is placed the plane, receives the signal that signal projector 31 sends; Signal converter, the one of which end is connected with signal receiver 32, and the other end is connected with processing equipment 5.At this, signal projector 31 can be pinger, one or both in the light wave projector.Accordingly, signal receiver 32 can be acoustic receiver, one or both in the light wave receptor.
After detecting device started, as shown in Figure 3, signal projector 31 was to the surface emitting acoustic signals and/or the lightwave signal of substrate 8, and this acoustic signals and/or lightwave signal are received by signal receiver 32 after substrate 8 surface reflections.Signal receiver 32 sends to signal converter with acoustic signals that receives and/or lightwave signal, and signal converter is transferred to processing equipment 5 after this acoustical signal and/or optical signal are converted into electric signal.
The whole nothing of glass substrate is damaged; Like the position among Fig. 3 81; Consistent with other position height of substrate surface; It is certain that signal receiver 32 receives time difference through the signal of surface, substrate 81 places reflection of signal projector 31 emission, can be with this time difference or this time difference changing value within the specific limits as the standard time difference and preserve.
If the glass baseplate surface at 82 places, position has damaged situation; The substrate surface height that then is positioned at substrate 82 places is lower than normal height; Then signal receiver 32 receive the time difference of signal of the substrate surface reflection of signal projector 31 emission will the overgauge time difference, treatment facility 5 can confirm that in view of the above substrate has breakage.
Further; In the present embodiment; Processing module 5 can also be connected with warning device, and this warning device can be in acoustic alarm device, light crossing-signal, the combined aural and visual alarm one or more, after the glass substrate generation breakage that treatment facility 5 is confirmed on the arms; Send instruction to warning device, warning device sends sound, light is reported to the police to remind the staff.
As shown in Figure 4, the slide block 7 in the utility model may further include: be arranged on the chute 71 on the slide block 7 along the arm length direction; Slide plate 9 is fixed in the chute 71 through check screw 12, and an end is connected with check implement 3; Check screw 12 is tightened slide plate 9 and is fixed in the chute 71.Check implement 3 can stretch on slide block 7, and then adapts to the glass substrate of different size dimensions.
The substrate transfer robot equipment that the utility model embodiment provides comprises apparatus body, arm and is positioned at the adsorption module on the arm, also comprises: detecting device, be connected with actuating device, and the substrate on arm is placed the plane; Actuating device is connected with detecting device; Processing equipment is connected with detecting device through wired or wireless mode.Detecting device on the substrate transfer robot equipment can comprehensively detect the substrate that is carried on the substrate transfer robot arm, and draw testing result via processing equipment under the driving of actuating device.Thereby can find the breakage of any position on the glass substrate, guarantee that damaged substrate occurring can not be sent to subsequent technique, avoid the bad of subsequent technique, prevent the infringement that damaged substrate causes other equipment unit simultaneously.
Need to prove that among above-mentioned each embodiment, check implement 3 is arranged on substrate 8 planes top on the arm 1, in order to save the space and the arm 1 conveyance substrate 8 that might as well be in the way, detecting device 3 also can be arranged on arm 1 below, and is as shown in Figure 5.At this moment, arm 1 will shelter from the part of substrate 8, survey in order to make detecting device 3 that mistake not take place, and the arm below can be provided with the reflector (not shown), during with assurance detecting device 3 process arms 1 below, can receive normal signal.Meanwhile; Be positioned at the adsorption module 2 of the absorption substrate of arm 1 top; Can be have a measuring ability be the vacuum suction module of strip along the arm length direction; At this moment, since arm 1 block can't be to be detected the substrate portion that detects of device 3 then can detect by vacuum suction module 2.
The testing process of the detecting device in the present embodiment is same as the previously described embodiments, repeats no more at this.
The above; Be merely the specific embodiment of the utility model; But the protection domain of the utility model is not limited thereto; Any technical personnel of being familiar with the present technique field can be expected changing or replacement in the technical scope that the utility model discloses easily, all should be encompassed within the protection domain of the utility model.Therefore, the protection domain of the utility model should be as the criterion with the protection domain of said claim.
Claims (10)
1. a substrate transfer robot equipment comprises apparatus body, arm and is positioned at the adsorption module on the said arm, it is characterized in that said equipment also comprises:
Detecting device is connected with actuating device, and the substrate on said arm is placed the plane;
Actuating device is connected with said detecting device;
Processing equipment is connected with said detecting device through wired or wireless mode.
2. equipment according to claim 1 is characterized in that, the length of said detecting device is more than or equal to the substrate length on one side that is placed on the said arm.
3. equipment according to claim 2 is characterized in that, said equipment also comprises:
Guide rail is fixed on the said apparatus body, perpendicular to the length direction of said detecting device;
Slide block is arranged on the said guide rail, and an end is connected with said detecting device, and the other end is connected with said actuating device through driving device;
Driving device, an end is connected with said actuating device, and the other end is connected with said slide block.
4. equipment according to claim 1 is characterized in that, said equipment also comprises: warning device is connected with said processing equipment.
5. equipment according to claim 1 is characterized in that, said detecting device comprises:
Signal projector, the substrate on said arm is placed the plane;
Signal receiver is positioned at a side of said signal projector, and the substrate on said arm is placed the plane, receives the signal that said signal projector sends;
Signal converter, an end is connected with said signal receiver, and the other end is connected with said processing equipment.
6. equipment according to claim 5 is characterized in that, said signal projector comprises: pinger, one or both in the light wave projector.
7. equipment according to claim 6 is characterized in that, said signal receiver comprises: acoustic receiver, one or both in the light wave receptor.
8. equipment according to claim 1 is characterized in that, said processing equipment comprises: micro controller system, programmable logic controller (PLC) or Personal Computer.
9. equipment according to claim 3 is characterized in that, said slide block also comprises:
Chute is arranged on the said slide block along said arm length direction;
Slide plate is fixed in the said chute through check screw, and an end is connected with said check implement;
Check screw is tightened said slide plate and is fixed in the said chute.
10. according to the arbitrary described equipment of claim 1 to 9, it is characterized in that when said detecting device was positioned at said arm below, said arm below was provided with reflector; The said adsorption module that is positioned at said arm top is the vacuum suction module that the said arm length direction in edge with measuring ability is strip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203765971U CN202245325U (en) | 2011-09-28 | 2011-09-28 | Substrate carrying manipulator equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203765971U CN202245325U (en) | 2011-09-28 | 2011-09-28 | Substrate carrying manipulator equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202245325U true CN202245325U (en) | 2012-05-30 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203765971U Expired - Lifetime CN202245325U (en) | 2011-09-28 | 2011-09-28 | Substrate carrying manipulator equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN202245325U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103523555A (en) * | 2013-10-31 | 2014-01-22 | 京东方科技集团股份有限公司 | Reversing device for substrates |
| CN103839852A (en) * | 2012-11-20 | 2014-06-04 | 上海华虹宏力半导体制造有限公司 | Wafer detection device and method used for ashing machine |
| CN106625589A (en) * | 2016-12-06 | 2017-05-10 | 东莞市科纯电子有限公司 | Manipulator for transmitting PCBA board and manufacturing method of manipulator |
| CN108147056A (en) * | 2017-12-25 | 2018-06-12 | 北京中电科电子装备有限公司 | A kind of panel blocked-material detecting device and with its panel transport device |
| WO2018161569A1 (en) * | 2017-03-08 | 2018-09-13 | 京东方科技集团股份有限公司 | System and method for monitoring temperature of substrate heating furnace |
| US11131504B2 (en) | 2017-03-08 | 2021-09-28 | Boe Technology Group Co., Ltd. | Temperature monitoring system and method for a substrate heating furnace |
-
2011
- 2011-09-28 CN CN2011203765971U patent/CN202245325U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103839852A (en) * | 2012-11-20 | 2014-06-04 | 上海华虹宏力半导体制造有限公司 | Wafer detection device and method used for ashing machine |
| CN103523555A (en) * | 2013-10-31 | 2014-01-22 | 京东方科技集团股份有限公司 | Reversing device for substrates |
| CN106625589A (en) * | 2016-12-06 | 2017-05-10 | 东莞市科纯电子有限公司 | Manipulator for transmitting PCBA board and manufacturing method of manipulator |
| CN106625589B (en) * | 2016-12-06 | 2023-08-15 | 东莞市科纯电子有限公司 | Manipulator for conveying PCBA (printed Circuit Board Assembly) and manufacturing method thereof |
| WO2018161569A1 (en) * | 2017-03-08 | 2018-09-13 | 京东方科技集团股份有限公司 | System and method for monitoring temperature of substrate heating furnace |
| US11131504B2 (en) | 2017-03-08 | 2021-09-28 | Boe Technology Group Co., Ltd. | Temperature monitoring system and method for a substrate heating furnace |
| CN108147056A (en) * | 2017-12-25 | 2018-06-12 | 北京中电科电子装备有限公司 | A kind of panel blocked-material detecting device and with its panel transport device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150710 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150710 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150710 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE Technology Group Co., Ltd. Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd. Address before: 100176, No. 8, Middle West Road, Beijing economic and Technological Development Zone, Beijing Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120530 |