CN202230032U - Re-inspecting machine for vision inspection - Google Patents

Re-inspecting machine for vision inspection Download PDF

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Publication number
CN202230032U
CN202230032U CN2011204002277U CN201120400227U CN202230032U CN 202230032 U CN202230032 U CN 202230032U CN 2011204002277 U CN2011204002277 U CN 2011204002277U CN 201120400227 U CN201120400227 U CN 201120400227U CN 202230032 U CN202230032 U CN 202230032U
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China
Prior art keywords
reflecting surface
optical
mirror
switching
optical path
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Expired - Fee Related
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CN2011204002277U
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Chinese (zh)
Inventor
张进益
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PANTRATEQ Corp
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PANTRATEQ Corp
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Abstract

A re-inspecting machine for vision inspection comprises a working base table for bearing a workpiece being tested, an optical sensing device arranged above the working base table and a change-over mirror group arranged between the working base table and the optical sensing device. The optical sensing device senses the workpiece being tested through the change-over mirror group. The change-over mirror group is provided with a first optical path and a second optical path. The first optical path provides a front visual angle image perpendicular to the workpiece being tested for the optical sensing device to sense. The second optical path provides an inclined face visual angle image inclined to the workpiece being tested for the optical sensing device to sense. The re-inspecting machine for the vision inspection provides change over of optical paths through configuration of a reflector group, a single optical sensing device is enabled to film front images and inclined face images, and a problem of filming dead angle is solved.

Description

Visual inspection is rechecked machine
Technical field
The utility model relates to a kind of optical inspection means, relates in particular to a kind of reinspection machine with changeable optical path.
Background technology
In the middle of electronic installation now, have many electronic components usually and be assembled on the printed circuit board (PCB).At printed circuit board (PCB) (Printed Circuit Board; PCB) assembling is produced online; Because the electronic component on the printed circuit board (PCB) is towards the trend development of microminiaturized and densification; So the fine and closely woven electronic component that on printed circuit board (PCB), is distributed can not rely on operating personnel's Manual Visual Inspection to go the identification defective again.Therefore, the assembling manufacturer of printed circuit board (PCB) can produce online installing automated optical detection equipment in it usually, uses accurately and detects.
Automated optical detection equipment (Automatic Optical Inspection; AOI) the mainly driving through computer program; And a thing to be detected is scanned automatically through pick-up lens (like CCD, camera, video camera or other optical sensing apparatus); And collect the image after overscanning, again the canonical parameter in image and the database is compared and analyzing and processing, and on image, find out the defective of thing to be detected.Automated optical detects the defective that can detect, and comprises whether detected electrons element pin leaks weldering, short circuit, tin sticky or tin amount are uneven really, and situations such as whether electronic component squints, color-changeable shape-changeable even gaps and omissions.Then; The defect result of again COMPUTER DETECTION being come out is through automated optical detection equipment (AOI) self display or be sent to the reinspection machine or the recovery station in downstream, to indicate defective locations; Maintenance personal for follow-up declares again, rebuilds, and storage, analysis and managing defect result.
Automated optical detects compared to the traditional detection mode, has precision height and the restriction that does not receive the element microminiaturization.In addition, the detection speed that automated optical detects is very fast, can either effectively save human cost, also has the function of the data of collection defect type for the management of maintenance personal's subsequent analysis.Therefore; Automated optical detection equipment widespread usage in the detection operation of various industries; Especially be applied to integrated circuit (IntegratedCircuit, IC), two-d display panel (Flat Display Panel, FDP), printed circuit board (PCB) (PrintedCircuit Board; PCB), (Printed Circuit Board Assembly is PCBA) etc. in the association area for printed circuit board (PCB) assembling.
In the testing process of general printed circuit board (PCB), the running through conveying belt transmits printed circuit board (PCB) usually, carries out a series of procedure of processing and handles.Afterwards, pass through testing process again one, printed circuit board (PCB) is delivered to automated optical detection equipment carry out defects detection, zero defect is arranged with the electronic component of judging welding.If when the result that inspection is come out was defectiveness, the printed circuit board (PCB) that then will have defective was sent into the reinspection machine to carry out follow-up reinspection flow process.
In rechecking flow process; It is online to accept the information data of the defective of biography under the optical detection apparatus to recheck function and automated optical detection equipment; According to the detection data of automated optical detection equipment, the reinspection machine can be moved to defective locations, carries out all angles and does the observation of big multiplying power to its defect part.By this, can observe the real phenomenon that causes defect part.So except helping the maintenance personal correctly to judge and being convenient to confirm that bad point is rebuild, can also be in detail and correctly add up the factor that causes defect part in the technology, be beneficial to and analyze and then revise technology to reduce the incidence of defective.
Please, illustrate the stereographic map of existing reinspection machine 1 with reference to Fig. 1.Generally speaking, reinspection machine 1 comprises optical element 10, work base station 20 and connecting gear 30.Reinspection machine 1 utilize connecting gear 30 with the printed circuit board (PCB) that will detect be sent on the work base station 20, and be sent to optical element 10 belows, carry out sensing in order to optical element 10.
Please, illustrate the stereographic map of the optical element 10 of existing reinspection machine 1 with reference to Fig. 2.Have first pick-up lens 111, second pick-up lens 112 and rotating element 120 in the optical element 10.First optical path 130 vertically marches to first pick-up lens 111 from printed circuit board (PCB), and makes first pick-up lens 111 can take the front image of printed circuit board (PCB).Second optical path 140 along inclined direction marches to second pick-up lens 112 from printed circuit board (PCB), and makes second pick-up lens 112 can take the oblique face picture of printed circuit board (PCB).The angle of vergence direction and horizontal direction is about 60 degree.The shooting visual field of first pick-up lens 111 is bigger, and enlargement ratio is lower, usually in order to assist the location of printed circuit board (PCB).The enlargement ratio of second pick-up lens 112 is higher, and it is less to take the visual field, detects the image of use in printed circuit board usually in order to acquisition.Rotating element 120 can rotate second pick-up lens 112 along axle center A1, and second pick-up lens 112 can be horizontally rotated with respect to printed circuit board (PCB), therefore can take the oblique face picture of printed circuit board (PCB) from all angles.
Yet; Because the configuration of first pick-up lens 111 and second pick-up lens, 112 its power leads and transmission line; And the rotating range of rotating element 120 is restricted, thereby produce the dead angle of shooting angle, and then possibly cause the testing result of reinspection machine 1 not accurate enough.
Please, illustrate the stereographic map of the optical element 20 of another existing reinspection machine with reference to Fig. 3.Comprise first pick-up lens 211, second pick-up lens 212, rotating element 220 and reflector group 250 in the optical element 20.First pick-up lens 211 is arranged to deviate from the axle center A2 of rotating element 220.Second pick-up lens 212 is arranged on the axle center A2 of rotating element 220.First and second pick-up lens 211,212 is all taken down.Reflector group 250 comprises first catoptron 251, second catoptron 252, the 3rd catoptron 253, the 4th catoptron 254 and web member 255.First catoptron 251 is positioned at first pick-up lens, 211 belows, and second catoptron 252 is positioned at the horizontal side of first catoptron 251, greatly on second pick-up lens, 212 belows.Web member 255 connects first catoptron 251 and second catoptron, 252, the three catoptrons 253 and 254 inside that are installed on rotating element 220 of the 4th catoptron.First optical path 230 vertically marches to second catoptron 252 from printed circuit board (PCB), again via first catoptron 251, reflexes to first pick-up lens 211, and makes first pick-up lens 211 can take the front image of printed circuit board (PCB).The 3rd catoptron 253 is positioned at second pick-up lens, 212 belows, and 254 of the 4th catoptrons depart from the shooting direction of second pick-up lens 212.Second optical path 240 along inclined direction marches to the 4th catoptron 254 from printed circuit board (PCB), again via the 3rd catoptron 253, reflexes to second pick-up lens 212, and makes second pick-up lens 212 can take the oblique face picture of printed circuit board (PCB).The angle of vergence direction and horizontal direction is about 62 degree.The shooting visual field of first pick-up lens 211 is bigger, and enlargement ratio is lower, usually in order to assist the location of printed circuit board (PCB).The enlargement ratio of second pick-up lens 212 is higher, and it is less to take the visual field, detects the image of use in printed circuit board usually in order to acquisition.Rotating element 220 can rotate the 3rd catoptron 253 and the 4th catoptron 254, and the 3rd catoptron 253 and the 4th catoptron 254 can be horizontally rotated with respect to printed circuit board (PCB) along axle center A2, therefore can take the oblique face picture of printed circuit board (PCB) from all angles.
Thus,, just the oblique face picture of printed circuit board (PCB) can be taken, and extremely about 0~330 degree of scope of shooting angle can be increased from all angles owing to only must rotate the 3rd catoptron 253 and the 4th catoptron 254.Yet, because blocking of web member 255 causes the dead angle of shooting angle 330~360 degree, thereby still might cause the testing result of reinspection machine not accurate enough.
The utility model content
Because the problems referred to above, the purpose of the utility model is to provide a kind of visual inspection to recheck machine, through the configuration of reflector group the switching of optical path is provided, and makes single optical sensing apparatus can take image positive and oblique, the problem of solution shooting blind angle amount.
To achieve these goals, the utility model provides a kind of visual inspection to recheck machine, comprising:
One work base station is examined workpiece in order to carry one;
One optical sensing apparatus is arranged at this work base station top; And
One switches the mirror group; Be arranged between this work base station and this optical sensing apparatus; This is examined workpiece to this optical sensing apparatus via this switching mirror group sensing; This switching mirror group provides one first optical path and one second optical path, and this first optical path provides this optical sensing apparatus sensing to be examined a positive visual angle image of workpiece perpendicular to this, and this second optical path provides this optical sensing apparatus sense tilt to be examined one oblique visual angle image of workpiece in this.
Above-mentioned visual inspection is rechecked machine, and wherein, this optical sensing apparatus has a sensing direction towards this work base station, and this visual inspection is rechecked machine and also comprised a rotating element, is arranged at this switching mirror group, uses so that this switching mirror group is rotated as the axle center along this sensing direction.
Above-mentioned visual inspection is rechecked machine, wherein, also comprises a check system, according to this visual angle, front image and this oblique visual angle image, compares this and is examined workpiece and this and examined the difference situation between the non-defective unit state of workpiece.
Above-mentioned visual inspection is rechecked machine, and wherein, this optical sensing apparatus has a sensing direction towards this work base station, and this switching mirror group comprises:
One switches the water chestnut mirror, switches on a primary importance and a second place; And
One oblique catoptron is movably set in this work base station top, is arranged to depart from this sensing direction;
Wherein, when this switching water chestnut mirror switched on this primary importance, this switching mirror group provided this first optical path;
Wherein, When this switching water chestnut mirror switched on this second place, this switching water chestnut mirror was positioned on this sensing direction, and this switching mirror group provides this second optical path; This second optical path is examined workpiece from this; Favour this sensing direction, this oblique mirror reflects of passing through reflexes to this optical sensing apparatus again to this switching water chestnut mirror.
Above-mentioned visual inspection is rechecked machine; Wherein, this switching water chestnut mirror has one first reflecting surface, when this switching water chestnut mirror is positioned at this primary importance; This first reflecting surface deviates from this sensing direction; When this switching water chestnut mirror was positioned at this second place, this first reflecting surface was positioned on this sensing direction, will reflex to this optical sensing apparatus from the light of this oblique catoptron.
Above-mentioned visual inspection is rechecked machine, and wherein, when switching water chestnut mirror was positioned at this second place, the minute surface normal direction of this oblique catoptron was switched between water chestnut mirror and this work base station towards this.
Above-mentioned visual inspection is rechecked machine, and wherein, when switching water chestnut mirror was positioned at this second place, the normal direction of this first reflecting surface was between this oblique catoptron and this optical sensing apparatus.
Above-mentioned visual inspection is rechecked machine; Wherein, this switching water chestnut mirror also has one second reflecting surface and one the 3rd reflecting surface, and this switching mirror group also comprises a front mirror; This front mirror is arranged at this work base station top; And be arranged to depart from this sensing direction, when switching water chestnut mirror was positioned at this primary importance, this second reflecting surface was positioned on this sensing direction; The normal direction of this second reflecting surface is between this optical sensing unit and this front mirror, and the normal direction of the 3rd reflecting surface is between this front mirror and this work base station.
Above-mentioned visual inspection is rechecked machine; Wherein, This front mirror has one first light path reflecting surface and one second light path reflecting surface; The normal direction of this first light path reflecting surface is between this second reflecting surface and this second light path reflecting surface, and the normal direction of this second light path reflecting surface is between this first light path reflecting surface and the 3rd reflecting surface.
Above-mentioned visual inspection is rechecked machine, and wherein, this second reflecting surface and the 3rd reflecting surface are perpendicular to one another, and this first light path reflecting surface and this second light path reflecting surface are perpendicular to one another.
Above-mentioned visual inspection is rechecked machine, and wherein, this second reflecting surface and this first light path reflecting surface are parallel, and the 3rd reflecting surface and this second light path reflecting surface are parallel.
Above-mentioned visual inspection is rechecked machine, wherein, and from the distance of central authorities to the 3rd reflecting surface of this work base station; Add the distance of the 3rd reflecting surface to this second light path reflecting surface; Add the distance of this second light path reflecting surface to this first light path reflecting surface, add the distance of this first light path reflecting surface to this second reflecting surface, add the distance of this second reflecting surface to this optical sensing apparatus; Be total up to one first optical path length of this first optical path; From the distance of the central authorities of this work base station to this oblique catoptron, add the distance of this oblique catoptron to this first reflecting surface, add the distance of this first reflecting surface to this optical sensing apparatus; Be total up to one second optical path length of this second optical path, this first optical path length equals this second optical path length.
Visual inspection according to the utility model is rechecked machine; Through switch the mirror group provide perpendicular to favour the optical path of being examined workpiece; Make single optical sensing apparatus be able to the positive visual angle image of sensing and oblique visual angle image, make the cost cost that visual inspection is rechecked machine and can reduce.The visual inspection of the utility model is rechecked machine can also switch the mirror group through the rotating element rotation, and can under the situation at no dead angle, be examined oblique the visual angle image of workpiece on all directions, reaches to promote the accuracy of being examined the workpiece, defect state.
Below in conjunction with accompanying drawing and specific embodiment the utility model is described in detail, but not as the qualification to the utility model.
Description of drawings
Fig. 1 illustrates the stereographic map of existing reinspection machine;
Fig. 2 illustrates the stereographic map of the optical element of existing reinspection machine;
Fig. 3 illustrates the stereographic map of the optical element of another existing reinspection machine;
Fig. 4 illustrates the stereographic map of the machine of rechecking according to the visual inspection of the embodiment of the utility model;
Fig. 5 illustrates the stereographic map of rechecking the switching mirror group of machine according to the visual inspection of the embodiment of the utility model;
Fig. 6 illustrates among the embodiment according to the utility model, and the switching mirror group of visual inspection reinspection machine provides the schematic isometric of first optical path;
Fig. 7 illustrates among the embodiment according to the utility model, and the switching mirror group of visual inspection reinspection machine provides the schematic isometric of second optical path.
Wherein, Reference numeral
1 reinspection machine
10,20 optical elements
111,211 first pick-up lenss
112,212 second pick-up lenss
120,220 rotating elements
130,230 first optical paths
140,240 second optical paths
250 reflector group
251 first catoptrons
252 second catoptrons
253 the 3rd catoptrons
254 the 4th catoptrons
255 web members
20 work base stations
30 connecting gears
A1, A2 axle center
3 visual inspections are rechecked machine
310 work base stations
320 optical sensing apparatus
33 optical systems
330 switch the mirror group
331 switch the water chestnut mirror
331a first reflecting surface
331b second reflecting surface
331c the 3rd reflecting surface
332 oblique catoptrons
333 front mirror
The 333a first light path reflecting surface
The 333b second light path reflecting surface
340 rotating elements
350 picture mosaic cameras
360 slide blocks
370 CDs
380 light sources
40 are examined workpiece
A3 sensing direction
P1 first optical path
P2 second optical path
N11, N12, N13, N2, N31, N32 normal direction
The X direction
The θ angle excursion
Embodiment
Below in embodiment, be described in detail the detailed features and the advantage of the utility model; Its content is enough to make any those skilled in the art to understand the technology contents of the utility model and implements according to this; And according to content, the claim scope and graphic that this instructions disclosed, any those skilled in the art can understand the utility model relevant purpose and advantage easily.Following embodiment is the viewpoint of further explain the utility model, but non-to limit the category of the utility model anyways.
Please with reference to Fig. 4, illustrate the stereographic map of rechecking machine 3 according to the visual inspection of the embodiment of the utility model.In the Work inspection device flow process, examined workpiece after the automated optical detection equipment inspection, can the defective workpiece of being examined be sent into visual inspection reinspection machine 3, be judged to be the underproof workpiece of being examined to reaffirm through the automated optical detection.Examined workpiece and for example be the electronic component through assembling such as integrated circuit, two-d display panel and printed circuit board (PCB).Visual inspection is rechecked machine 3 and is comprised work base station 310, optical sensing apparatus 320 and optical system 33.Work base station 310 is examined workpiece in order to carrying.Optical sensing apparatus 320 is arranged at work base station 310 tops.Optical sensing apparatus 320 have towards work base station 310 sensing direction A3 towards work base station 310, sensing direction A3 perpendicular to work base station 310 the surface.
Optical system 33 comprises switches mirror group 330 and light source.Switching mirror group 330 is arranged between work base station 310 and the optical sensing apparatus 320.Optical sensing apparatus 320 is via switching the workpiece of being examined that mirror group 330 sensings are carried on work base station 310.Switch mirror group 330 first optical path and second optical path are provided.First optical path provides optical sensing apparatus 320 sensings perpendicular to the positive visual angle image of being examined workpiece.Second optical path provides optical sensing apparatus 320 sense tilt in oblique visual angle image being examined workpiece.Optical sensing apparatus 320 can also external check system, and check system can be according to positive visual angle image and oblique visual angle image of being examined workpiece, and comparison is examined workpiece and examined the difference situation between the non-defective unit state of workpiece, is examined the state of workpiece with inspection.
In addition, visual inspection reinspection machine 3 can also comprise rotating element 340.The axle center of rotating element 340 overlaps with the sensing direction.Rotating element 340 is arranged at and switches mirror group 330, is the axle center rotation so that switch mirror group 330 along sensing direction A3.Can horizontally rotate with respect to being examined workpiece through switching mirror group 330, and make optical sensing apparatus 320 take positive and oblique the visual angle image of being examined workpiece and not have the dead angle from all angles.Visual inspection is rechecked machine 3 can also comprise picture mosaic camera 350, is examined workpiece to scan on a large scale, and risks the whole image of being examined workpiece, and then assist to be examined the location of workpiece.
Please with reference to Fig. 5, illustrate the stereographic map of rechecking the switching mirror group 330 of machine 3 according to the visual inspection of the embodiment of the utility model.Switch mirror group 330 and comprise switching water chestnut mirror 331, oblique catoptron 332 and front mirror 333.Oblique catoptron 332, front mirror 333 and light source 380 are arranged within the CD 370.Switching 331 in water chestnut mirror is to be arranged within the CD 370 via slide block 360.Switching water chestnut mirror 331 can move along directions X with respect to CD 370 through slide block 360 guidings, and makes switching water chestnut mirror 331 switch on the primary importance and the second place along directions X.Oblique catoptron is arranged to depart from sensing direction A3.Front mirror 333 is arranged at work base station top, and also is arranged to depart from sensing direction A3.In present embodiment, oblique catoptron 332 departs from sensing direction A3 with front mirror 333 with opposite location and is provided with.And when switching water chestnut mirror 331 when directions X switches on primary importance, switching mirror group 330 provides first optical path.When switching water chestnut mirror 331 switched on the second place, switching mirror group 330 provided second optical path.In addition, CD 370 can be connected with the rotating element 340 of Fig. 4, and rotating element 340 that can be through Fig. 4 is along sensing direction A3 rotation, can be the axle center rotation along sensing direction A3 and make whole switching mirror group 330 related.
Please with reference to Fig. 6, illustrate among the embodiment according to the utility model, the switching mirror group 330 of visual inspection reinspection machine 3 provides the schematic isometric of the first optical path P1.In Fig. 6, switch water chestnut mirror 331 and switch to primary importance along directions X.Switch water chestnut mirror 331 and have the first reflecting surface 331a, the second reflecting surface 331b and the 3rd reflecting surface 331c.The second reflecting surface 331b and the 3rd reflecting surface 331c are vertical in fact each other.When switching water chestnut mirror 331 was positioned at primary importance, the first reflecting surface 331a deviated from the sensing direction A3, and the second reflecting surface 331b is positioned on the sensing direction A3.The normal direction N12 of the second reflecting surface 331b is between optical sensing unit 320 and front mirror 333, and the normal direction N13 of the 3rd reflecting surface 331c is between front mirror 333 and work base station 310.
Wherein, front mirror 333 has the first light path reflecting surface 333a adjacent one another are and the second light path reflecting surface 333b, and the first light path reflecting surface 333a and the second light path reflecting surface 333b are vertical in fact each other.The normal direction N31 of the first light path reflecting surface 333a is between the second reflecting surface 331b and the second light path reflecting surface 333b.The normal direction N32 of the second light path reflecting surface 333b is between the first light path reflecting surface 333a and the 3rd reflecting surface 331c.
Wherein, the second reflecting surface 331b and the first light path reflecting surface 333a are parallel in fact each other, and the 3rd reflecting surface 331c and the second light path reflecting surface 333b are parallel in fact each other.The angle of the second reflecting surface 331b and the first light path reflecting surface 333a and sensing direction A3 is essentially 45 degree.The angle of the 3rd reflecting surface 331c and the second light path reflecting surface 333b and sensing direction A3 is essentially 45 degree.
When switching water chestnut mirror 331 is positioned at primary importance shown in Figure 6; Switch the first optical path P1 that mirror group 330 is provided; Examined workpiece 40 along sensing direction A3 from what work base station 310 carried; Pass through the 3rd reflecting surface 331c, the second light path reflecting surface 333b, the first light path reflecting surface 333a and the second reflecting surface 331b reflex to optical sensing apparatus 320 again.Distance from the work base station three reflecting surface 331c of 310 central authorities to the; Add the distance of the 3rd reflecting surface 331c to the second light path reflecting surface 333b; Add the distance of second light path reflecting surface 333b to the first light path reflecting surface 333a; Add the distance of first light path reflecting surface 333a to the second reflecting surface 331b, add the distance of the second reflecting surface 331b, be total up to first optical path length of the first optical path P1 to optical sensing apparatus 320.Because from examining the light that workpiece 40 sent is to send along the sensing direction A3 perpendicular to work base station 310, and by 320 sensings of optical sensing apparatus, so optical sensing apparatus 320 can photograph the positive visual angle image of being examined workpiece 40 this moment.So positive visual angle image energy assists check system to be examined the location of workpiece 40, also can supply check system to be examined workpiece 40 and detect.
Please with reference to Fig. 7, illustrate among the embodiment according to the utility model, the switching mirror group 330 of visual inspection reinspection machine 3 provides the schematic isometric of the second optical path P2.In Fig. 7, switch water chestnut mirror 331 and switch to the second place along directions X.This moment, switch water chestnut mirror 331 and be positioned on the sensing direction A3.In detail, when switching water chestnut mirror 331 switched on the second place, the first reflecting surface 331a that switches water chestnut mirror 331 was positioned on the sensing direction A3, will reflex to optical sensing apparatus 320 from the light of oblique catoptron 332.The minute surface normal direction N2 of oblique catoptron 332 can reflex to the first reflecting surface 331a that switches water chestnut mirror 331 with the light of being examined workpiece 40 that is carried on work base station 310 by this towards switching between water chestnut mirror 331 and the work base station 310.The normal direction N11 of the first reflecting surface 331a can reflex to the light of oblique catoptron 332 optical sensing apparatus 320 by this between oblique catoptron 332 and optical sensing apparatus 320.
Therefore; When switching water chestnut mirror 331 is positioned at the second place shown in Figure 7; Switch the second optical path P2 that mirror group 330 is provided; Be to favour sensing direction A3 from the workpiece 40 of being examined that work base station 310 is carried, the oblique catoptron 332 of passing through reflexes to the first reflecting surface 331a that switches water chestnut mirror 331, reflexes to optical sensing apparatus 320 again.From the distance of work base station 310 central authorities to oblique catoptrons 332, add the distance of oblique catoptron 332 to first reflecting surface 331a, add the distance of the first reflecting surface 331a to optical sensing apparatus 320, be total up to second optical path length of the second optical path P2.Wherein, first optical path length equates with second optical path length.Because from examining the light that workpiece 40 sent is to send along favouring sensing direction A3, and by 320 sensings of optical sensing apparatus, so optical sensing apparatus 320 can photograph oblique visual angle image being examined workpiece 40 this moment.So oblique visual angle image energy supplies check system to be examined the detection of workpiece 40.In addition; Switch switching water chestnut mirror 331, oblique catoptron 332 and the front mirror 333 that mirror group 330 is comprised owing to anyway rotate; All do not have element and cover the first optical path P1 and the second optical path P2; Therefore can make optical sensing apparatus 320 take positive and oblique visual angle image of being examined workpiece 40 from all angles not having under the situation at dead angle.
Wherein, because second optical path length of first optical path length of the first optical path P1 and the second optical path P2 is identical, and when switching the first optical path P1 and the second optical path P2, can not change the focal length of optical sensing apparatus 320.In addition, along the center line of the second optical path P2, be about 60 degree to 70 degree with respect to the angle excursion θ of horizontal direction from examining direction that workpiece 40 is issued to oblique catoptron 222.In present embodiment, angle excursion θ is set at 62 degree
In sum; The visual inspection of the utility model is rechecked machine owing to switch first optical path and second optical path through switching the mirror group; Even only use single optical sensing apparatus; Also can be examined positive visual angle image and oblique visual angle image of workpiece all angles by sensing, thereby can be promoted the accuracy of being examined workpiece, can also be saved the cost of manufacture that visual inspection is rechecked machine.
Certainly; The utility model also can have other various embodiments; Under the situation that does not deviate from the utility model spirit and essence thereof; Those of ordinary skill in the art work as can make various corresponding changes and distortion according to the utility model, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the utility model.

Claims (12)

1. a visual inspection is rechecked machine, it is characterized in that, comprising:
One work base station is examined workpiece in order to carry one;
One optical sensing apparatus is arranged at this work base station top; And
One switches the mirror group; Be arranged between this work base station and this optical sensing apparatus; This is examined workpiece to this optical sensing apparatus via this switching mirror group sensing; This switching mirror group provides one first optical path and one second optical path, and this first optical path provides this optical sensing apparatus sensing to be examined a positive visual angle image of workpiece perpendicular to this, and this second optical path provides this optical sensing apparatus sense tilt to be examined one oblique visual angle image of workpiece in this.
2. visual inspection according to claim 1 is rechecked machine; It is characterized in that; This optical sensing apparatus has a sensing direction towards this work base station; This visual inspection is rechecked machine and is also comprised a rotating element, is arranged at this switching mirror group, uses so that this switching mirror group is rotated as the axle center along this sensing direction.
3. visual inspection according to claim 1 is rechecked machine, it is characterized in that, also comprises a check system, according to this visual angle, front image and this oblique visual angle image, compares this and is examined workpiece and this and examined the difference situation between the non-defective unit state of workpiece.
4. visual inspection according to claim 1 is rechecked machine, it is characterized in that this optical sensing apparatus has a sensing direction towards this work base station, and this switching mirror group comprises:
One switches the water chestnut mirror, switches on a primary importance and a second place; And
One oblique catoptron is movably set in this work base station top, is arranged to depart from this sensing direction;
Wherein, when this switching water chestnut mirror switched on this primary importance, this switching mirror group provided this first optical path;
Wherein, When this switching water chestnut mirror switched on this second place, this switching water chestnut mirror was positioned on this sensing direction, and this switching mirror group provides this second optical path; This second optical path is examined workpiece from this; Favour this sensing direction, this oblique mirror reflects of passing through reflexes to this optical sensing apparatus again to this switching water chestnut mirror.
5. visual inspection according to claim 4 is rechecked machine; It is characterized in that this switching water chestnut mirror has one first reflecting surface, when this switching water chestnut mirror is positioned at this primary importance; This first reflecting surface deviates from this sensing direction; When this switching water chestnut mirror was positioned at this second place, this first reflecting surface was positioned on this sensing direction, will reflex to this optical sensing apparatus from the light of this oblique catoptron.
6. visual inspection according to claim 5 is rechecked machine, it is characterized in that, when switching water chestnut mirror was positioned at this second place, the minute surface normal direction of this oblique catoptron was switched between water chestnut mirror and this work base station towards this.
7. visual inspection according to claim 5 is rechecked machine, it is characterized in that, when switching water chestnut mirror was positioned at this second place, the normal direction of this first reflecting surface was between this oblique catoptron and this optical sensing apparatus.
8. visual inspection according to claim 5 is rechecked machine; It is characterized in that this switching water chestnut mirror also has one second reflecting surface and one the 3rd reflecting surface, this switching mirror group also comprises a front mirror; This front mirror is arranged at this work base station top; And be arranged to depart from this sensing direction, when switching water chestnut mirror was positioned at this primary importance, this second reflecting surface was positioned on this sensing direction; The normal direction of this second reflecting surface is between this optical sensing unit and this front mirror, and the normal direction of the 3rd reflecting surface is between this front mirror and this work base station.
9. visual inspection according to claim 8 is rechecked machine; It is characterized in that; This front mirror has one first light path reflecting surface and one second light path reflecting surface; The normal direction of this first light path reflecting surface is between this second reflecting surface and this second light path reflecting surface, and the normal direction of this second light path reflecting surface is between this first light path reflecting surface and the 3rd reflecting surface.
10. visual inspection according to claim 8 is rechecked machine, it is characterized in that this second reflecting surface and the 3rd reflecting surface are perpendicular to one another, and this first light path reflecting surface and this second light path reflecting surface are perpendicular to one another.
11. visual inspection according to claim 10 is rechecked machine, it is characterized in that this second reflecting surface and this first light path reflecting surface are parallel, the 3rd reflecting surface and this second light path reflecting surface are parallel.
12. visual inspection according to claim 8 is rechecked machine, it is characterized in that, from the distance of central authorities to the 3rd reflecting surface of this work base station; Add the distance of the 3rd reflecting surface to this second light path reflecting surface; Add the distance of this second light path reflecting surface to this first light path reflecting surface, add the distance of this first light path reflecting surface to this second reflecting surface, add the distance of this second reflecting surface to this optical sensing apparatus; Be total up to one first optical path length of this first optical path; From the distance of the central authorities of this work base station to this oblique catoptron, add the distance of this oblique catoptron to this first reflecting surface, add the distance of this first reflecting surface to this optical sensing apparatus; Be total up to one second optical path length of this second optical path, this first optical path length equals this second optical path length.
CN2011204002277U 2011-10-18 2011-10-18 Re-inspecting machine for vision inspection Expired - Fee Related CN202230032U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104155307A (en) * 2014-08-27 2014-11-19 昆山元崧电子科技有限公司 3D vision recheck device used in detection of AOI
CN106568778A (en) * 2015-10-08 2017-04-19 台达电子工业股份有限公司 An electronic component appearance image detecting method
CN111855701A (en) * 2020-07-29 2020-10-30 深圳芯通互联科技有限公司 AOI system detection method
CN113495074A (en) * 2020-04-07 2021-10-12 大量科技股份有限公司 Visual inspection system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104155307A (en) * 2014-08-27 2014-11-19 昆山元崧电子科技有限公司 3D vision recheck device used in detection of AOI
CN106568778A (en) * 2015-10-08 2017-04-19 台达电子工业股份有限公司 An electronic component appearance image detecting method
CN113495074A (en) * 2020-04-07 2021-10-12 大量科技股份有限公司 Visual inspection system
CN111855701A (en) * 2020-07-29 2020-10-30 深圳芯通互联科技有限公司 AOI system detection method

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