CN202205721U

CN202205721U - Automatic brushing device of silicon wafer

Info

Publication number: CN202205721U
Application number: CN201120341314XU
Authority: CN
Inventors: 丁乙人; 徐国军; 陆绍良; 刘勇
Original assignee: CONCORD ELECTRONIC (WUXI) Co Ltd
Current assignee: Lite semiconductor (Wuxi) Co. Ltd.
Priority date: 2011-09-13
Filing date: 2011-09-13
Publication date: 2012-04-25
Anticipated expiration: 2021-09-13

Abstract

The utility model discloses an automatic brushing device of a silicon wafer, which comprises a turntable, a portal frame, a descending cylinder, a horizontal automatic reversing cylinder, a brush fixing clip and a brush, wherein the turntable is used for placing the silicon wafer, the portal frame covers the turntable, the descending cylinder is opposite to the turntable and is arranged at the top of the portal frame, the horizontal automatic reversing cylinder is arranged on a push shaft of the descending cylinder, the brush fixing clip and the brush are connected and integrated with the horizontal automatic reversing cylinder, and the brush is parallel with and opposite to the silicon wafer placed on the turntable. With the application and implementation of the automatic brushing device, the automatic brushing device has remarkable advantages that manual silicon wafer brushing is replaced by the electromechanically controlled automatic device, the labor cost is reduced, reworked and discarded silicon wafer caused by personal factors can be completely avoided, the safety of operators is further guaranteed, and the brushing qualified rate of the silicon wafer is practically improved.

Description

The automatic brushing device of silicon chip

Technical field

The utility model relates to a kind of wafer processing cleaning equipment, relates in particular to a kind of intelligent cleaning device that crystal column surface is removed foreign matter that is used for scrubbing automatically.

Background technology

In the production process of silicon chip, the flow process that has one special-purpose brush of usefulness to clean down the foreign matter in the silicon chip surface groove requires very high to the pressure that is added on the brush.If be applied to the pressure of silicon chip surface little can cause the unclean result of brush, pressure is big then can destroy the oxide layer of silicon chip surface and cause product rejection.Generally adopt manual work to scrub in the existing technology, this moment, regular meeting took place because workman's undue force causes the perhaps bad phenomenon of product rejection of doing over again.What is more, because of silicon chip breaks from the rotating disk fragment incised wound workman arm that flies out, has certain potential safety hazard sometimes.

Summary of the invention

Defective in view of above-mentioned prior art existence; The purpose of the utility model is the automatic brushing device that proposes a kind of silicon chip; Solve when silicon chip is removed foreign matter in the wafer fabrication processes and cause the problem of doing over again or scrapping, for low-cost, non-defective unit production provide effective solution because of workman's undue force.

The purpose of the utility model will be achieved through following technical scheme:

The automatic brushing device of silicon chip; It is characterized in that: comprise the rotating disk that is used to put silicon chip; Shroud the portal frame of said rotating disk; Be located at the decline cylinder at portal frame top over against rotating disk, brush geometrical clamp and the brush being located at the horizontal automatic reverse cylinder on the said decline cylinder push shaft and linking to each other with said horizontal automatic reverse cylinder one, said brush is parallel with the silicon chip on being placed on rotating disk relatively.

Further, be placed with the adjustable counterweight of weight on the said brush fixed mount.

Further, said rotating disk is located on the adjustable jacking cylinder of uplifting pressure.

The application of the automatic brushing device of the utility model, its outstanding effect is:

Automatics through Electromechanical Control replaces scrubbing manually silicon chip, and except that reducing cost of labor, that can avoid fully that human factor causes does over again and scrap, and has also ensured operating personnel's safety, has promoted silicon chip conscientiously and has scrubbed yield.

Following constipation closes the embodiment accompanying drawing, the embodiment of the utility model is done further to detail, so that the utility model technical scheme is easier to understand, grasp.

Description of drawings

Fig. 1 is the structural representation of facing of the automatic brushing device of the utility model.

Embodiment

The utility model is in order to solve the inhomogeneous cleaning effect instability that causes of pressure used in the artificial brush silicon chip process and the problem of product rejection; Designed a kind of automatic brushing device and replaced brushing manually, the control of wherein pressure by be added to brush fixedly the counterweight weight on the clip regulate or the alternate manner realization.

For reaching above-mentioned effect; The structure of the utility model technical scheme is formed and is mainly comprised: the rotating disk 1 that is used to put silicon chip; Shroud the portal frame 8 of rotating disk 1; Be located at the decline cylinder 7 at portal frame 8 tops over against rotating disk 1, the brush geometrical clamp 4 and brush 3 being located at the horizontal automatic reverse cylinder 6 on decline cylinder 7 push shafts and linking to each other with horizontal automatic reverse cylinder one.This brush 3 is parallel with the silicon chip 2 (silicon chip to be brushed) on being placed on rotating disk 1 relatively.

Wherein, the brush of this device fixedly accompanies the space that the easy on and off of certain limit moves, and the geometrical clamp upper surface can be placed counterweight; When sending down abnormally ascending cylinder landing instantly puts in place; Brush contacts silicon chip surface fully, and rotating disk can be brush and the certain distance of geometrical clamp picking-up thereof, and at this moment the weight of geometrical clamp and counterweight is exactly the pressure that is added on the brush; Therefore in case the weight of counterweight has been decided, be added in pressure on the brush also with regard to respective fixation.And when being directed against the scrubbing operation and need pressure to regulate of different product, a counterweight that only needs to increase or reduce respective amount gets final product simple realization.

Be the basis with the automatic brushing device of facing structural representation as shown in Figure 1, on rotating disk 1, put silicon chip 2 well earlier, press start button; Rotating disk 1 holds and drives silicon chip 2 beginnings and rotates with fixed rotating speed; The cylinder 7 that descends simultaneously begins to descend, left and right sides automatic reverse cylinder 6 beginning move left and right, and brush 3 has contacted with silicon chip fully when dropping to the end; Counterweight 5 is being pressed brush with brush geometrical clamp 4, and cylinder 6 drives the brush move left and right and begins to brush silicon chip 2.After arriving setting-up time, move left and right cylinder 6 quits work, and brush geometrical clamp 4 rises with brush 3 together under decline cylinder 7 drives simultaneously; Rotating disk 1 also stops the rotation; Take off the good silicon chip 2 of brush, change next silicon chip to be brushed, press switch and repeat above step and begin new round work.

Except that the embodiment of above-mentioned interpolation counterweight, the utility model is regulated for the pressure of hairbrush can also be through being located at rotating disk 1 on the jacking cylinder, and top lifting height or the jacking pressure of regulating the jacking cylinder are realized.Effect about the jacking cylinder is a kind of technology of generally understanding, and will not give unnecessary details now.Being merely explanation here regulates about the pressure of the automatic brushing device of the utility model and has multiple feasible mode, approach.

The outstanding effect of the visible the utility model of the summary through the following apparatus structure and the course of work: the automatics through Electromechanical Control replaces scrubbing manually silicon chip; Except that reducing cost of labor; That can avoid fully that human factor causes does over again and scraps; Also ensured operating personnel's safety, promoted silicon chip conscientiously and scrubbed yield.

Claims

1. the automatic brushing device of silicon chip; It is characterized in that: comprise the rotating disk that is used to put silicon chip; Shroud the portal frame of said rotating disk; Be located at the decline cylinder at portal frame top over against rotating disk, brush geometrical clamp and the brush being located at the horizontal automatic reverse cylinder on the said decline cylinder push shaft and linking to each other with said horizontal automatic reverse cylinder one, said brush is parallel with the silicon chip on being placed on rotating disk relatively.

2. the automatic brushing device of silicon chip according to claim 1 is characterized in that: be placed with the adjustable counterweight of weight on the said brush fixed mount.

3. the automatic brushing device of silicon chip according to claim 1, it is characterized in that: said rotating disk is located on the adjustable jacking cylinder of uplifting pressure.