CN202199204U - Processing plant for recovering regenerated oil from waste oil mud of silicon wafer cutting - Google Patents
Processing plant for recovering regenerated oil from waste oil mud of silicon wafer cutting Download PDFInfo
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- CN202199204U CN202199204U CN2011202834391U CN201120283439U CN202199204U CN 202199204 U CN202199204 U CN 202199204U CN 2011202834391 U CN2011202834391 U CN 2011202834391U CN 201120283439 U CN201120283439 U CN 201120283439U CN 202199204 U CN202199204 U CN 202199204U
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Abstract
The utility model discloses a processing plant for recovering regenerated oil from waste oil mud of silicon wafer cutting; the processing plant comprises a waste oil storage tank, a coarse filtering unit, a coarse filtering storage tank and a fine filtering unit; the processing plant for recovering regenerated oil from waste oil mud of silicon wafer cutting; with the adoption of the processing plant for recovering regenerated oil from waste oil mud of silicon wafer cutting, the waste oil mud in the waste oil storage tank is pumped and sent to the coarse filtering storage tank; the solid-liquid separation of the waste oil mud is carried out massively and continuously with the using of a centrifugal machine of the coarse filtering unit, so that the majority of particles and impurities in the waste oil mud can be rapidly removed, the blocking of a thin film is reduced during the post treatment, the extension of the operation period of the thin film and the reduction of cost can be achieved; moreover, the regenerated oil satisfying the recovering standard can be acquired, and the requirement on environmental protection is satisfied.
Description
Technical field
The utility model relates to a kind of treating apparatus of discarded object, refers in particular to a kind of waste oil mud of can be in a large number handling continuously, reducing the recovered oil cost, and the treating apparatus of reclaiming oil in Silicon Wafer cutting waste oil mud of compliance with environmental protection requirements.
Background technology
In the industry of making semiconductor chip and solar panels, the Silicon Wafer (sheet) that silicon crystal bar is cut into the thickness homogeneous has belonged to a ring of normal process, and it uses special metal scroll saw (Wire Saw) to be cutting tool usually; And the carborundum (SiC) of employing high rigidity is abrasive; Be aided with again and be mixed with polyethylene glycol (PEG), diethylene glycol (DEG), propane diols mineral such as (PG) grease and be cutting, cooling fluid, whereby, when metal scroll saw at a high speed back and forth during operation; Just can cooperate carborundum is the cutting power that medium improves scroll saw; Silicon being formed good dissection, and cutting simultaneously, will be that the cutting fluid of main composition is facing to the cutting part ejection with polyethylene glycol; On the one hand except conduct cooling and lubrication applications; Still can take silica flour and impurity that cutting the time is produced out of the cutting groove road on the other hand, wafer cutting processing procedure can be carried out smoothly and stably, in order to carrying out successive process.
In the process that is cut, grinds at Silicon Wafer; Cutting area is sprayed and uses cutting fluid later; The silica flour chip that can carry under one's arms when cutting to be produced, impurity and the carborundum that is worn and torn constantly are discharged from outside the cutting area, and then become particle concentration and the high pulpous state waste oil mud of turbidity.In the past, the Silicon Wafer of domestic majority cutting manufacturer can only handle with the discarded object mode for these waste oil mud; Or bury after incinerating with heavy oil; But, still need pay high expense and please the discarded object dealer handle, and if waste oil mud handle with the incineration mode; Also can produce a large amount of carbon dioxide, quite not environmental protection.In addition, also will the furnace wall of incinerator be done great damage after the burning, therefore, for the discarded object (greasy filth) that is produced behind the Silicon Wafer cutting and grinding, to incinerate or to bury all nonideal processing method.
At present, external dealer has adopted filter plant to reclaim the cutting oil plant in the waste oil mud, and it utilizes thin film technique to carry out Separation of Solid and Liquid usually; Though this mode can obtain partly liquid reclaimed oil (cutting fluid), recovery re-uses when supplying Silicon Wafer to manufacture, and this method can produce a large amount of mud also; Also can only handle with the mode of burying, and carry out the recovery of reclaimed oil with solid-liquid separation method, its economic benefit is unsatisfactory; When main cause is that waste oil mud carries out membrane filtration, do not obtain good pre-treatment, make fenestra very easily dirty stifled (fouling); Cause the operation cycle of film to reduce, on the other hand, if further the quality of recovered oil is analyzed; The recovery quality that can learn reclaimed oil is to be inversely proportional to the fenestra aperture, that is to say, though the aperture of film is bigger; Though the reclaimed oil circulation that is obtained is high, silicon grain and waste material concentration contained in the oil are also higher, and the oil quality of relative reclaimed oil is just low; This obviously is unfavorable for the operation lifetime property of reclaimed oil, can't reach the standard of reclaiming oil.
Therefore; How between cost recovery and environmental protection, reaching balance, the processing mode of the efficient and match operation cost of neither one still makes Silicon Wafer cutting dealer improve on the cost load more and more high in environmental protection so far; How actively to improve the quality of production and pollution prevention technique is taken into account economy and environmental protection; Reduce production costs, improve industrial competitiveness, become the target of the urgent effort of present related industry institute.
In view of this, the design people is not to attaining perfect many disappearances and the inconvenience that causes on the above-mentioned treating apparatus, and deeply design, and the active research improvement has a fling at and development and Design goes out this case.
The utility model content
The purpose of the utility model is to be to provide a kind of can handle waste oil mud in a large number continuously, with reduction recovered oil cost, and the oily treating apparatus of reclaiming in Silicon Wafer cutting waste oil mud of compliance with environmental protection requirements.
In order to reach above-mentioned purpose, the solution of the utility model is:
A kind of in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, comprise a waste oil storage tank, just storage storage tank and at least one smart filter unit of filter unit, just, this waste oil storage tank stores waste oil mud; Just the filter unit is communicated with this waste oil storage tank, utilizes the centrifugal sedimentation mode that waste oil mud is carried out Separation of Solid and Liquid, with the solid content in the filtering waste oil mud, and obtains first filter filtrating wherein; Just the filter storage tank is temporary through the first filter filtrating that the unit disengaged of filter just; This essence filter unit comprises one and is installed in the driving mechanism that smart filter membrane group in this essence filter pocket, a link with this essence filter membrane group with the smart filter pocket, of filter storage tank conducting just, and one filters the regeneration oil groove of the reclaimed oil after resume module in order to this essence of splendid attire process.
Above-mentioned filter just unit comprises the waste liquid feed pump and a centrifuge and the filtrate discharge pump that are communicated with this waste oil storage tank; The hollow cylinder, one that this centrifuge has a support, a rotation is placed in this hollow cylinder inner centrifuge tube, a passage; And at least one waste outlet; Defining this passage of an accommodation space between this hollow cylinder and this centrifuge tube is to be opened on the tube wall of this centrifuge tube, and then is connected with this accommodation space.
The centrifuge of above-mentioned filter just unit also has one first motor and one second motor, and this first motor drives this hollow cylinder, and this second motor drives this centrifuge tube.
The rotating speed of above-mentioned first motor is higher than the rotating speed of this second motor.
Above-mentioned centrifuge also has a plurality of helical blades that are arranged at this centrifuge tube outside.
Above-mentioned smart filter unit is provided with many groups, and smart filter unit is series system and connects.
Above-mentioned in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil also include a waste liquid storage tank, this waste liquid storage tank collects the concentrating spent liquor of in the smart filter pocket of this essence filter unit, being discharged, and takes out to draw and be back to this and just refilter in filter unit.
Above-mentioned in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil also comprise an oily monitoring means, this oil monitoring means is linked between the smart filter pocket and this regeneration oil groove of this essence filter unit.
Above-mentioned in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil also comprise an ECU, the required power supply of this ECU this treating apparatus of control.
Above-mentioned filter just unit is the wherein a kind of of vertical helical sedimentation centrifuge, horizontal type screw settling centrifuge.
Adopt said structure; The treating apparatus of the utility model reclaiming oil in Silicon Wafer cutting waste oil mud is operation waste liquid feed pump earlier; Waste oil dredge pump in this waste oil storage tank is sent in the middle of the interior room of this centrifuge tube; Pass through the passage on this centrifuge tube again, flow into the batch charging in the accommodation space of this hollow cylinder.Because the rotating speed of this first motor is higher than the rotating speed of this second motor; So, a plurality of helical blades in rotating speed this centrifuge tube utilization faster outside push effect, so that the solid content of waste oil mud is extruded towards waste outlet gradually fast; And be deposited in the filtrating of this accommodation space; Then cooperate under the extraction of this filtrate discharge pump, be pumped to this filter storage tank just via this filtrate (liquid, to accomplish preliminary filtration.Then, filter filtrating remittance is just delivered to this, and just filter storage tank is temporary, then; Just filter filtrating gets in the smart filter pocket of each smart filter unit again and carries out further smart filter (Separation of Solid and Liquid), so, and the first less solid content of particle diameter in the filter filtrating; Just can be held back, and then disengage the reclaimed oil that meets the recovery standard, and each smart filter unit can be adopted with series system and connects by filter membrane; So that the quality of reclaimed that filters out is more clean, and processing procedure is more quick.Therefore, the utility model carried out the pre-filtering of waste oil mud with first filter unit earlier before essence filter unit; Stifled except the dirt that can effectively reduce the smart filter of back segment film, increase film operation cycle property, on the other hand; Just the centrifuge of filter unit by using screw settling formula not only can handle waste oil mud in a large number continuously, and outward appearance does not neatly have stink; Compliance with environmental protection requirements and can not endanger working environment and health makes the utility model be able under situation about reducing cost, can not only increase the circulation of reclaimed oil; And the quality of oil product still meets the standard that re-uses that reclaims; Not only economic worth is high, more effectively lowers the pollution of a large amount of Silicon Wafer cuttings in the high-tech industry, and also can contribute to some extent environmental protection.
Description of drawings
Fig. 1 is the block flow diagram of the utility model treating apparatus of reclaiming oil in Silicon Wafer cutting waste oil mud;
Fig. 2 is for showing that waste oil mud is through just filtering to the flow chart of smart filter;
Fig. 3 is the equipment plane of the utility model treating apparatus of reclaiming oil in Silicon Wafer cutting waste oil mud;
Fig. 4 is the cutaway view of a kind of horizontal type screw settling centrifuge of explanation;
Fig. 5 just filters the unit in carrying out the flow chart of filter just for explanation the utility model;
Fig. 6 is presented at the smart flow chart of monitoring through oil in the journey that filters;
Fig. 7 is for showing the flow chart of the essence filter unit that is connected in series.
The specific embodiment
In order further to explain the technical scheme of the utility model, come the utility model is set forth in detail through specific embodiment below.
With reference to Fig. 1 and Fig. 2, an embodiment of the utility model treating apparatus of reclaiming oil in Silicon Wafer cutting waste oil mud includes a waste oil storage tank 100, and just filters unit 200, one first filter storage tank 300 and at least one smart filter unit 400.
This waste oil storage tank 100 is in order to store waste oil mud.
Just filter unit 200 is to adopt horizontal type screw settling centrifuge 220 (abbreviation centrifuge) in the present embodiment.Just filter unit 200 utilizes the centrifugal sedimentation mode that waste oil mud is carried out Separation of Solid and Liquid, with the solid content in the filtering waste oil mud, and obtains first filter filtrating wherein.
Further, with reference to Fig. 5, this is filter unit 200 just, and it includes the waste liquid feed pump 210, a centrifuge 220 and the filtrate discharge pump 230 that are communicated with this waste oil storage tank 100.
With reference to Fig. 3, Fig. 4, this centrifuge 220 has centrifuge tube 223, a passage 224 and a plurality of waste outlet 225 that a support 221, one rotatable hollow cylinder 222, is placed in these hollow cylinder 222 inside.Define an accommodation space 226 between this hollow cylinder 222 and this centrifuge tube 223; And this passage 224 is opened on the tube wall of this centrifuge tube 223; And then be connected with this accommodation space 226; The waste oil dredge pump is delivered to the inside of an interior room 2231 of this centrifuge tube 223 by this waste liquid feed pump 210; Utilize this hollow cylinder 222 to rotate also the push effect of power mutually of the friendship of rotation simultaneously along equidirectional, so that the solid content in this waste oil mud is pushed towards these waste outlet 225 directions with this centrifuge tube 223.And this hollow cylinder 222 is provided with at least one filtrate (liquid 227 in contrast to an end of waste outlet 225, and filtrating is then outwards pumped by this filtrate discharge pump 230 along this filtrate (liquid 227.
Just the centrifuge 220 of filter unit 200 also has one first motor 228 and one second motor 229.This first motor 228 is in order to drive this hollow cylinder 222.This second motor 229 is in order to drive this centrifuge tube 223.
Just filter storage tank 300 is filtrated in order to keep in the first filter that goes out through 230 pumpings of filtrate discharge pump of filter unit 200 just.
With reference to Fig. 6; This essence filter unit 400; Comprise one and be installed in the driving mechanism 430 that smart filter membrane group 420 in this essence filter pocket 410, a link with this essence filter membrane group 420, and one filters the regeneration oil groove 440 of the reclaimed oil after module 420 processing in order to splendid attire through this essence with the smart filter pocket 410, of filter storage tank 300 conductings just.
Continuous with reference to Fig. 2, Fig. 3, in the present embodiment, this essence filter unit 400 is provided with four groups altogether, and output that respectively should essence filter unit 400 is connected to this regeneration oil groove 440 respectively, again with filtrating feed pump 210 comply with respectively should essence filter pocket 410 the liquid level demand carry out fluid infusion.
These essence filter membrane group 420 milipore filters capable of using, how wherein a kind of filter membrane of rice filter membrane is done smart filter and is handled, and is the milipore filter that adopts the rice coating film treatment through how in the present embodiment, and it can bear the turbidity height, and has the advantages that the surface is difficult for incrustation.
This driving mechanism 430 has the oil well pump 431 that is connected with this essence filter module 420; When these oil well pump 431 actions; Can impel the first filter filtrating in this essence filter pocket 410, the filtration of a plurality of smart filter films of can dialysing gradually, and then produce the reclaimed oil that meets the recovery standard; The reclaimed oil that is disengaged is recycled to this regeneration oil groove 440 inside, is beneficial to subsequent packages and handles.
In addition, the driving mechanism 430 of this essence filter unit 400 has more a turn motor 432, and this turn motor 432 produces turn in order to drive these essence filter module 420 inner essence filter films in this essence filter pocket 410.
Further, consult like Fig. 7, aforementioned smart filter unit 400 can be adopted series system and connect in regular turn; Serial connection in regular turn by many groups of smart filter unit 400; So that just filter filtrating is passed through each smart filter unit 400 one by one, and form the smart filter effect of multiple tracks, to obtain the good reclaimed oil of clean quality.
In addition, as shown in Figure 2, the utility model also includes a waste liquid storage tank 500, and this waste liquid storage tank 500 can collect the concentrating spent liquor of in the smart filter pocket 410 of this essence filter unit 400, being discharged according to circumstances, and takes out to draw and be back to this and just filter in unit 200 and refilter.
With reference to Fig. 6; The utility model also comprises an oily monitoring means 600; This oil monitoring means 600 is linked between the smart filter pocket 410 and this regeneration oil groove 440 of this essence filter unit 400, makes reclaimed oil do the accurate differentiation of turbidity via this oil monitoring means 600, then disengages in this regeneration oil groove 440 through standard compliant reclaimed oil and reclaims; Below standard accurate reclaimed oil then connect draw back should essence filter pocket 410 in, to carry out diafiltration once more.
With reference to Fig. 1, Fig. 3; The utility model also comprises an ECU 700; This ECU 700 is in order to control the required power supply in each unit; And required charging in filter process, the control action of discharging, and the control action of charging, discharging also can utilize each interim filter effect of hand monitor according to circumstances except that adopting the automation.
According to the above, details are as follows for the operating process of again that the utility model reclaiming in Silicon Wafer cutting waste oil mud is oily treating apparatus:
At first; Be to operate waste liquid feed pump 210 earlier; Waste oil dredge pumps in this waste oil storage tank 100 are sent in the middle of the interior room 2231 of this centrifuge tube 223, passed through the passage 224 on this centrifuge tube 223 again, flow into the batch charging in the accommodation space 226 of this hollow cylinder 222.Because the rotating speed of this first motor 228 is higher than the rotating speed of this second motor 229; So, rotating speed faster this centrifuge tube 223 utilize the outside a plurality of helical blades 2232 push effect, so that the solid content 110 of waste oil mud is extruded towards waste outlet 225 gradually fast; And be deposited in the filtrating of this accommodation space 226; Then cooperate under the extraction of this filtrate discharge pump 230, be pumped to this filter storage tank 300 just via this filtrate (liquid 227, to accomplish preliminary filtration.
Then, filter filtrating remittance is just delivered to this, and just filter storage tank 300 is temporary, then; Just filter filtrating gets in the smart filter pocket 410 of each smart filter unit 400 again and carries out further smart filter (Separation of Solid and Liquid), so, and the first less solid content of particle diameter in the filter filtrating; Just can be held back, and then disengage the reclaimed oil that meets the recovery standard, and each smart filter unit 400 can be adopted with series system and connects by filter membrane; So that the quality of reclaimed that filters out is more clean, and processing procedure is more quick.
In addition; The utility model can see through the turbidity that this oil monitoring means 600 detects reclaimed oil at any time in the process of operation, can be recycled and packaged if turbidity meets standard; If turbidity does not still meet the use standard; Then be back to this essence filter unit 400 again through filtering once more, repeatable operation like this is till quality of reclaimed meets standard.
Therefore, the utility model carried out the pre-filtering of waste oil mud with first filter unit 200 earlier before essence filter unit 400; Stifled except the dirt that can effectively reduce the smart filter of back segment film, increase film operation cycle property, on the other hand; Just filter unit 200 utilizes the centrifuge 220 of screw settling formula, not only can handle continuously in a large number, and outward appearance does not neatly have stink; Compliance with environmental protection requirements and can not endanger working environment and health makes the utility model be able under situation about reducing cost, can not only increase the circulation of reclaimed oil; And the quality of oil product still meets the standard that re-uses that reclaims; Not only economic worth is high, more effectively lowers the pollution of a large amount of Silicon Wafer cuttings in the high-tech industry, and also can contribute to some extent environmental protection.In addition, the installation of centrifuge is easy, and it is less to take up an area of the space, and starting, stops very fast, can improve the treatment effeciency of waste oil mud.
Other is worth mentioning; With reference to Fig. 6, aforementioned smart filter unit 400 will inevitably produce the higher fluid of concentration after fine filtering after a while; This moment, pump flow to a dense waste oil liquid bath 800 again; Again the filtrate pump in the dense waste oil liquid bath 800 is evacuated to this and just filters in the unit 200, and carry out the processing of aforementioned filter just, smart filter in regular turn, to reach the energy-conservation useless purpose that subtracts.
In the utility model, be embodiment only though just filter unit 200 with the horizontal type screw settling centrifuge among Fig. 3, Fig. 4, just filter unit 200 also can use the vertical helical sedimentation centrifuge certainly, and it uses effect identical, no longer adds explanation.
The product form and the style of the foregoing description and accompanying drawing and non-limiting the utility model, the those of ordinary skill of any affiliated technical field all should be regarded as not breaking away from the patent category of the utility model to its suitable variation or modification of doing.
Claims (10)
1. the treating apparatus of a reclaiming oil in Silicon Wafer cutting waste oil mud comprises a waste oil storage tank, just filter unit, a first storage storage tank and at least one smart filter unit, it is characterized in that:
This waste oil storage tank stores waste oil mud;
Just the filter unit is communicated with this waste oil storage tank, utilizes the centrifugal sedimentation mode that waste oil mud is carried out Separation of Solid and Liquid, the solid content in the filtering waste oil mud, and obtain first filter filtrating wherein;
Just the filter storage tank is temporary through the first filter filtrating that the unit disengaged of filter just;
This essence filter unit comprises one and is installed in the driving mechanism that smart filter membrane group in this essence filter pocket, a link with this essence filter membrane group with the smart filter pocket, of filter storage tank conducting just, and one filters the regeneration oil groove of the reclaimed oil after resume module in order to this essence of splendid attire process.
2. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil; It is characterized in that: this just comprises the waste liquid feed pump and a centrifuge and the filtrate discharge pump that are communicated with this waste oil storage tank in filter unit; The hollow cylinder, one that this centrifuge has a support, a rotation is placed in this hollow cylinder inner centrifuge tube, a passage; And at least one waste outlet; Defining this passage of an accommodation space between this hollow cylinder and this centrifuge tube is to be opened on the tube wall of this centrifuge tube, and then is connected with this accommodation space.
3. as claimed in claim 2 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil; It is characterized in that: this centrifuge of just filtering the unit also has one first motor and one second motor; This first motor drives this hollow cylinder, and this second motor drives this centrifuge tube.
4. as claimed in claim 3 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: the rotating speed of this first motor is higher than the rotating speed of this second motor.
5. as claimed in claim 3 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: this centrifuge also has a plurality of helical blades that are arranged at this centrifuge tube outside.
6. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: smart filter unit is provided with many groups, smart filter unit is series system and connects.
7. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil; It is characterized in that: also include a waste liquid storage tank; This waste liquid storage tank collects the concentrating spent liquor of in the smart filter pocket of this essence filter unit, being discharged, and takes out to draw and be back to this and just refilter in filter unit.
8. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: also comprise an oily monitoring means, this oil monitoring means is linked between the smart filter pocket and this regeneration oil groove of this essence filter unit.
9. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: also comprise an ECU, the required power supply of this ECU this treating apparatus of control.
10. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: this just filter unit be the wherein a kind of of vertical helical sedimentation centrifuge, horizontal type screw settling centrifuge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202834391U CN202199204U (en) | 2011-08-05 | 2011-08-05 | Processing plant for recovering regenerated oil from waste oil mud of silicon wafer cutting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202834391U CN202199204U (en) | 2011-08-05 | 2011-08-05 | Processing plant for recovering regenerated oil from waste oil mud of silicon wafer cutting |
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| Publication Number | Publication Date |
|---|---|
| CN202199204U true CN202199204U (en) | 2012-04-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202834391U Expired - Fee Related CN202199204U (en) | 2011-08-05 | 2011-08-05 | Processing plant for recovering regenerated oil from waste oil mud of silicon wafer cutting |
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| CN (1) | CN202199204U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104226016A (en) * | 2013-06-17 | 2014-12-24 | 苏州新华软智能装备有限公司 | Real-time online conduction oil multi-stage fine filtration system |
| CN104225994A (en) * | 2013-06-17 | 2014-12-24 | 苏州新华软智能装备有限公司 | Real-time refined filtration device for high-temperature heat-conducting oil |
-
2011
- 2011-08-05 CN CN2011202834391U patent/CN202199204U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104226016A (en) * | 2013-06-17 | 2014-12-24 | 苏州新华软智能装备有限公司 | Real-time online conduction oil multi-stage fine filtration system |
| CN104225994A (en) * | 2013-06-17 | 2014-12-24 | 苏州新华软智能装备有限公司 | Real-time refined filtration device for high-temperature heat-conducting oil |
| CN104226016B (en) * | 2013-06-17 | 2020-10-27 | 苏州新华软智能装备有限公司 | Real-time online multistage fine filtration system for heat conduction oil |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120425 Termination date: 20200805 |