CN201912833U

CN201912833U - Treatment device for recycling reclaimed oil from silicon wafer cutting waste oil sludge

Info

Publication number: CN201912833U
Application number: CN2010206772065U
Authority: CN
Inventors: 陈皇志; 林晖智; 张岳维; 黄丈耘
Original assignee: ABON INTERNATIONAL Corp
Current assignee: ABON INTERNATIONAL Corp
Priority date: 2010-12-23
Filing date: 2010-12-23
Publication date: 2011-08-03
Anticipated expiration: 2020-12-23

Abstract

The utility model discloses a treatment device for recycling reclaimed oil from silicon wafer cutting waste oil sludge, which comprises a waste oil storage tank, at least one primary filter unit, a primary filter storage tank, at least one fine filter unit and a reclaimed oil tank. Waste oil sludge in the waste oil storage tank is pumped into the primary filter unit, solid objects with larger grain diameters in the waste oil sludge are stopped by a filter material of the primary filter units, solid objects with smaller grain diameters are filtered by the fine filter units, most of particles and impurities in the waste oil sludge are screened by the primary filter units, blocking of films during later-stage treatment is reduced so as to prolong operation cycle of the films and reduce cost, reclaimed oil which conforms to recycling standard can be obtained, and the treatment device for recycling reclaimed oil from silicon wafer cutting waste oil sludge meets the requirement of environmental protection.

Description

The treating apparatus of reclaiming oil in Silicon Wafer cutting waste oil mud

Technical field

The utility model relates to a kind for the treatment of apparatus of discarded object, especially a kind ofly can reduce cost recovery, and the treating apparatus of reclaiming oil in Silicon Wafer cutting waste oil mud of compliance with environmental protection requirements.

Background technology

In the industry of making semiconductor chip and solar panels, the Silicon Wafer (sheet) that silicon crystal bar is cut into the thickness homogeneous has belonged to a ring of normal process, it uses special metal scroll saw (Wire Saw) to be cutting tool usually, and the carborundum (SiC) of employing high rigidity is abrasive, be aided with again and be mixed with polyethylene glycol (PEG), diethylene glycol (DEG), propane diols mineral such as (PG) grease is cutting, cooling fluid, therefore, when the metal scroll saw back and forth moves at a high speed, just can cooperate carborundum is the cutting power that medium improves scroll saw, silicon is formed good dissection, and cutting simultaneously, be to be that the cutting fluid of main composition is facing to cutting part ejection with polyethylene glycol, on the one hand except conduct cooling and lubrication applications, still can take silica flour and impurity that cutting the time is produced out of the cutting groove road on the other hand, wafer cutting processing procedure can be carried out smoothly and stably, in order to carrying out successive process.

In the process that is cut, grinds at Silicon Wafer, cutting area is sprayed and uses later cutting fluid, can carry under one's arms when cutting silica flour chip, impurity that is produced and the carborundum that is worn away, constantly be discharged from outside the cutting area, and then become particle concentration and the high pulpous state waste oil mud of turbidity.In the past, the Silicon Wafer cutting manufacturer of domestic majority is for these waste oil mud, can only handle in the discarded object mode, or bury after incinerating with heavy oil, but, still need to pay high expense and please the discarded object dealer handle, and if waste oil mud handle in the incineration mode, also can produce a large amount of carbon dioxide, quite not environmental protection.In addition, also will the furnace wall of incinerator be done great damage after the burning, therefore, for the discarded object (greasy filth) that is produced behind the Silicon Wafer cutting and grinding, to incinerate or to bury all nonideal processing method.

At present, external dealer has adopted filter plant to reclaim cutting oil plant in the waste oil mud, it utilizes thin film technique to carry out Separation of Solid and Liquid usually, though this mode can obtain partly liquid reclaimed oil (cutting fluid), reclaim when manufacturing and re-use for Silicon Wafer, but this method can produce a large amount of mud also, also can only handle in the mode of burying, and carry out the recovery of reclaimed oil with solid-liquid separation method, its economic benefit is unsatisfactory, when main cause is that waste oil mud carries out membrane filtration, do not obtain good pre-treatment, make fenestra very easily dirty stifled (fouling), cause the operation cycle of film to reduce, on the other hand, if further the quality of recovered oil is analyzed, the recovery quality that can learn reclaimed oil is to be inversely proportional to the fenestra aperture, though the aperture of film is bigger, though the reclaimed oil circulation that is obtained is high, but silicon grain and waste material concentration contained in the oil are also higher, the oil quality amount of relative reclaimed oil is just low, and this obviously is unfavorable for the operation lifetime of reclaimed oil, can't reach the standard of reclaiming oil.

Therefore, how between cost recovery and environmental protection, to reach balance, so far the processing mode of the efficient and match operation cost of neither one still, make Silicon Wafer cutting dealer improve on the cost load more and more high in environmental protection, how actively to improve the quality of production and pollution prevention technique is taken into account economy and environmental protection, reduce production costs, improve industrial competitiveness, become the target of the urgent effort of present related industry institute.

The utility model content

The purpose of this utility model provides and a kind ofly can reduce the recovered oil cost, and the treating apparatus of reclaiming oil in Silicon Wafer cutting waste oil mud of compliance with environmental protection requirements.

In order to reach above-mentioned purpose, solution of the present utility model is:

A kind of in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, comprise a waste oil storage tank, at least one filter just unit, just filter storage tank, at least one smart filter unit and a reclaimed oil groove; It is characterized in that: this waste oil storage tank, in order to store waste oil mud.Should just filter the unit, comprise a waste liquid feed pump that is communicated with this waste oil storage tank and a plurality of plate compression film group, aforementioned plate compression film group respectively have a charging aperture, one and the filter chamber, of this charging aperture conducting be installed in first filter filter material in this filter chamber, an and floss hole that communicates with this filter chamber, by this waste liquid feed pump so that waste oil mud is pumped in this filter chamber via this charging aperture, and utilize this just filter filter material the solid content that particle diameter is bigger in the waste oil mud is trapped in this filter chamber.Should just filter storage tank, in order to keep in first filter filtrate from aforementioned floss hole disengaged.This essence filter unit, comprise one and be installed in smart filter membrane group in this essence filter pocket with the smart filter pocket, of filter storage tank conducting just, an and driving mechanism that is connected with this essence filter membrane group, this essence filter membrane group has a plurality of smart filter films and and covers aforementioned smart filter film and form the main collector tube that watertight is communicated with, this driving mechanism has an oil well pump that is communicated with this main collector tube, when this oil well pump start, utilize negative-pressure sucking to impel first filter filtrate in this essence filter pocket to dialyse and aforementionedly smartly filter film, and then disengage the reclaimed oil that meets the recovery standard in this main collector tube certainly.This oil groove of regenerating links with this oil well pump, in order to the reclaimed oil after this essence filter cell processing of splendid attire process, handles for subsequent packages.

Further, this just first filter filter material of filter unit can be wherein a kind of or any above material of porous matter filter clothes such as adhesive-bonded fabric, activated carbon, sponge and form.

Further, this just more comprises a conveying mechanism in the filter unit, and this conveying mechanism is the below that is positioned at aforementioned plate compression film group, and has a conveying belt body, the body refuse under being held back by first filter filter material in order to carrying.

Further, this first filter unit more comprises a first back washpump of filtering, and this just filters back washpump is to connect to this just to filter storage tank, is back in the filter chamber to take out the filtrate of drawing in this first filter storage tank, and then first filter material is carried out back washing clean.

Further, the driving mechanism of this essence filter unit has more a turn motor, and this turn motor is to link with this main collector tube, produces turn with the essence filter film that drives on this main collector tube in this essence filter pocket.

Further, to can be milipore filter, NF membrane wherein a kind of for the essence filter film of this essence filter unit.

Further, more include a waste liquid storage tank, this waste liquid storage tank can collect the concentrating spent liquor of being discharged according to circumstances in the smart filter pocket of this essence filter unit, and takes out to draw and be back to this and just refilter in filter unit.

Further, more comprise an oily monitoring means, this oil monitoring means is connected between the smart filter pocket and this regeneration oil groove of this essence filter unit, make reclaimed oil do the accurate differentiation of turbidity via this oil monitoring means, then disengage in this regeneration oil groove through standard compliant reclaimed oil and to reclaim, the reclaimed oil of below standard standard is then connect to be drawn back in this essence filter pocket.

Further, this essence filter unit more comprises scrapes actuation mechanism, and this is scraped actuation mechanism and is folded in respectively between the two smart filter films, and contacts with essence filter film retention wire, to strike off the mud that is attached on this essence filter film outside.

Further, more comprise an ECU, this ECU is in order to controlling the required power supply in each unit, and required charging in filter process, the control action of discharging.

After adopting said structure, the utility model utilized the solid content that just the filter unit is bigger with the particle diameter in the waste oil mud to reduce to low below 10% by 30% ~ 40% before this, adopt the charging of batch operating pressure pump again, make waste oil mud be pressed into filter chamber via feed pump, and the bigger solid content of particle diameter forms mud cake after the second-compressed via pressure-air again in the filter chamber, and is delivered to the body refuse storage tank via conveying mechanism and recycles.And should essence the filter unit first less solid content of particle diameter in the filtrate again, pass through meticulous sieving again, with the reclaimed oil of the high clean quality of output.

Description of drawings

Fig. 1 is the block flow diagram of the utility model treating apparatus of reclaiming oil in Silicon Wafer cutting waste oil mud;

Fig. 2 shows the flow chart of waste oil mud through the extremely smart filter of filter just;

Fig. 3 is the equipment appearance figure of the utility model treating apparatus of reclaiming oil in Silicon Wafer cutting waste oil mud;

Fig. 4 is the equipment plane of the utility model treating apparatus of reclaiming oil in Silicon Wafer cutting waste oil mud;

Fig. 5 is that filter just of the present utility model unit is carrying out the flow chart of filter just with back washing;

Fig. 6 is presented at the smart flow chart that filters journey through the oil monitoring;

Fig. 7 is the assembled sectional view that shows the internal structure of this plate compression film group;

Fig. 8 is the assembled sectional view that shows the internal structure of this essence filter membrane group;

Fig. 9 is the flow chart that shows the essence filter unit that is connected in series.

The specific embodiment

In order further to explain the technical solution of the utility model, the utility model is elaborated below by specific embodiment.

With reference to Fig. 1, Fig. 3 and Fig. 4, an embodiment of the utility model treating apparatus of reclaiming oil in Silicon Wafer cutting waste oil mud, it includes a waste oil storage tank 100, storage tank 300, at least one smart filter unit 400 and a reclaimed oil groove 500 are just filtered at least one filter just unit 200.

This waste oil storage tank 100 is in order to store the waste oil mud that Silicon Wafer is cut, produced when grinding.

With reference to Fig. 5 and Fig. 7, this is filter unit 200 just, is to adopt plate and frame type filter-press in the present embodiment, and it comprises a waste liquid feed pump 210 that is communicated with this waste oil storage tank 100 and a plurality of plate compression film group 220.Aforementioned plate compression film group 220 respectively have a charging aperture 221, one and the filter chamber 222(of these charging aperture 221 conductings see Fig. 7), a first filter filter material 223 that is installed in this filter chamber 222, an and floss hole 224 that communicates with this filter chamber 222.By this waste liquid feed pump 210 waste oil mud is pumped in this filter chamber 222 via this charging aperture 221, and utilizes this first filter filter material 223 that the solid content that particle diameter is bigger in the waste oil mud is trapped in this filter chamber 222.

And this just more comprises a conveying mechanism 230 in filter unit 200, and this conveying mechanism 230 is the belows that are positioned at aforementioned plate compression film group 220, and has a conveying belt body 231.Just filtering in the journey, be trapped within the bigger solid content of particle diameter in this filter chamber 222, pass through formed body refuse (cake) 240 after the compression of pressure-air again, can be when the outer framework of plate compression film group 220 be opened, be disposed to this conveying belt body 231, and be concentrated to a body refuse storage tank 232(and see Fig. 3) for subsequent recovery.

In the present embodiment, just first filter filter material 223 of filter unit 200 can be porous matter filter cloth such as adhesive-bonded fabric, activated carbon, sponge or fibrous nodules is wherein a kind of or any is above material is formed, because these materials have porosity height, characteristics that specific area is big, therefore just using on the filter unit 200, then having first filtrate flow velocity height, retaining power is strong, resistance is little advantage.

Also because just filter filter material 223 possesses mushy characteristics, come prolong operation cycle so quite be fit to carry out backsurging operation, therefore, filter just of the present utility model unit 200 more comprises one and just filters back washpump 250, just filter back washpump 250 is to connect to this just to filter storage tank 300, be back in the filter chamber 222 to take out the filtrates of drawing in this first filter storage tank 300, and then first filter material 223 is carried out the back washing cleaning.

Should just filter storage tank 300, in order to temporary first filter filtrate of being disengaged from aforementioned floss hole 224.

With reference to Fig. 8, this essence filter unit 400 comprises one and is installed in a smart filter membrane group 420 in this essence filter pocket 410 and a driving mechanism 430 that is connected with this essence filter membrane group 420 with the smart filter pocket 410, of filter storage tank 300 conductings just.

In the present embodiment, this essence filter unit 400 is provided with four groups altogether, and output of each smart filter unit 400 is connected to this regeneration oil groove 500 respectively, again with filtrate feed pump 210 comply with respectively should essence filter pocket 410 the liquid level demand carry out fluid infusion.

This essence filter membrane group 420 has a plurality of smart filter films 421 and and covers aforementioned smart filter film 421 and form the main collector tube 422 that watertight is communicated with, this essence filter film 421 can be milipore filter (Ultrafiltration, be called for short the UF film), NF membrane (Nanofiltration, be called for short the NF film) wherein a kind of, it in the present embodiment UF film that adopts rice coating film treatment through how, it can bear the turbidity height, and have the advantages that the surface is difficult for incrustation, this essence filter membrane group 420 can adopt similar TaiWan, China to announce the filter bag structure of I318133 patent of invention, to reach good watertight assembling effect.

This driving mechanism 430 has an oil well pump 431(who is communicated with this main collector tube 422 and sees Fig. 6), when these oil well pump 431 starts, can form a negative-pressure sucking, utilize aforesaid negative-pressure sucking to impel first filter filtrate in this essence filter pocket 410, the aforementioned essence of can dialysing is gradually filtered film 421, and conflux to this main collector tube 422, and then disengage the reclaimed oil that meets the recovery standard in this main collector tube 422 certainly.

In addition, the driving mechanism 430 of this essence filter unit 400 has more a turn motor 432, and this turn motor 432 is and these main collector tube 422 coaxial bindings to produce turn with the essence filter film 421 that drives on this main collector tube 422 in smart filter pocket 410.

Further, as Fig. 3 and shown in Figure 9, aforementioned smart filter unit 400 can be adopted series system and connect in regular turn, be connected in series in regular turn by a plurality of groups of smart filter unit 400, so that just filtrate is filtered unit 400 by each essence one by one, and form the smart filter effect of multiple tracks, to obtain the good reclaimed oil of clean quality.

Fig. 1, shown in Figure 3 for another example, this oil groove 500 of regenerating is and this oil well pump 431 links that the reclaimed oil after handling through this essence filter unit 400 in order to splendid attire is handled for subsequent packages.

In addition, refer again to Fig. 2 and shown in Figure 3, the utility model more includes a waste liquid storage tank 600, and this waste liquid storage tank 600 can collect the concentrating spent liquor of being discharged according to circumstances in the smart filter pocket 410 of this essence filter unit 400, and takes out to draw and be back to this and just filter in unit 200 and refilter.

With reference to Fig. 6, the utility model more comprises an oily monitoring means 700, this oil monitoring means 700 is connected between the smart filter pocket 410 and this regeneration oil groove 500 of this essence filter unit 400, make reclaimed oil do the accurate differentiation of turbidity via this oil monitoring means 700, then disengage recovery in this regeneration oil groove 500 through standard compliant reclaimed oil, the reclaimed oil of below standard standard is then connect to be drawn back in this essence filter pocket 410, to carry out diafiltration once more.

Further, with reference to Fig. 8, this essence filter unit 400 more comprises scrapes actuation mechanism 440, this scrapes actuation mechanism 440 is to be folded in respectively between the two smart filter films 421 with a plurality of assemblies 441 that scrape, and contact with essence filter film 421 retention wires, when essence filter film 421 rotations on turn motor 432 these main collector tubes 422 of drive, what contact with film scrapes assembly 441, just can automatically strike off the mud that is attached on these essence filter film 421 surfaces, preventing that film from being covered, stopping up by the waste oil mud drum, and then completely lose the membrane filtration effect.This assembly 441 that scrapes of scraping actuation mechanism 440 is to be example with the spring in the present embodiment.

With reference to Fig. 1 and Fig. 4, the utility model more comprises an ECU 800, this ECU 800 is in order to control the required power supply in each unit, and the control action of required charging, discharging in filter process, and the control action of charging, discharging also can utilize manual mode to monitor each interim filter effect except that adopting the automation according to circumstances.

According to the above, the treating apparatus of the utility model reclaiming oil in Silicon Wafer cutting waste oil mud, its operating process is as follows:

At first, be earlier operation waste liquid feed pump 210 with the waste oil mud in this waste oil storage tank 100 with the batch charging, make and be pumped into the filter chamber 222 of filter unit 200 just in the waste oil mud, and with the interception of first filter filter material 223 solid content that particle diameter is bigger in filter chamber 222, with so that the solid content that particle diameter is bigger in the waste oil mud is reduced to low below 10% by 30% ~ 40%, and the bigger solid content of particle diameter forms body refuse (cake) after the second-compressed via pressure-air again in the filter chamber 222, and be delivered to body refuse storage tank 232 via conveying mechanism 230, recycle in addition again.Then, just filter filtrate is to converge with delivering to this just filter storage tank 300 is temporary, then, just filter filtrate enters in the smart filter pocket 410 of each smart filter unit 400 again and carries out further smart filter (Separation of Solid and Liquid), its mode is to start oil well pump 431, utilize negative-pressure sucking to impel first filter filtrates in this essence filter pocket 410 aforementioned smart film 421 of filtering of dialysing, so, just filter the less solid content of particle diameter in the filtrate, just can be held back, and then disengage the reclaimed oil that meets the recovery standard in this main collector tube 422 certainly, and each smart filter unit 400 can be adopted with series system and connects by filter membrane, so that the quality of reclaimed that filters out is more clean, and processing procedure is more quick.

In addition, the utility model is in the process of operation, more can see through the turbidity that this oil monitoring means 700 detects reclaimed oil at any time, if meeting standard, turbidity can be recycled and packaged, if turbidity does not still meet the use standard, then be back to this essence filter unit 400 again through filtering once more, repeatable operation like this is till quality of reclaimed meets standard.

Therefore; the utility model carried out the pre-filtering of waste oil mud with first filter unit 200 earlier before essence filter unit 400; the dirt that can effectively reduce the smart filter of back segment film 421 on the one hand is stifled; increase film operation cycle property; on the other hand; just the first filter filter material 223 of filter unit 200 is materials such as filter cloth at lower cost; quite being suitable as consumptive material uses; the utility model is able under the situation that reduces cost; can not only increase the circulation of reclaimed oil, and the quality of oil product still meets the standard that recovery re-uses, not only economic worth height; the pollution of a large amount of Silicon Wafers cuttings in the more effective attenuating high-tech industry, and also can contribute to some extent the protection of environmental protection border.

Other is worth mentioning, with reference to Fig. 4 and Fig. 6, aforementioned smart filter unit 400 is after fine filtering after a while, will inevitably produce the higher fluid of concentration, this moment, pump flow to a dense waste oil liquid bath 900 again, again the filtrate pump in the dense waste oil liquid bath 900 is evacuated to this and just filters in the unit 200, and carry out the processing of aforementioned filter just, smart filter in regular turn, to reach the energy-conservation useless purpose that subtracts.

The foregoing description and accompanying drawing and non-limiting product form of the present utility model and style, any person of an ordinary skill in the technical field all should be considered as not breaking away from patent category of the present utility model to its suitable variation or modification of doing.

Claims

1. the treating apparatus of a reclaiming oil in Silicon Wafer cutting waste oil mud is characterized in that, comprises: a waste oil storage tank, at least one filter just unit, be filter storage tank, at least one smart filter unit and a reclaimed oil groove just;

Should just filter the unit, comprise a waste liquid feed pump that is communicated with this waste oil storage tank and a plurality of plate compression film group, aforementioned plate compression film group respectively have a charging aperture, one and the filter chamber, of this charging aperture conducting be installed in first filter filter material in this filter chamber, and a floss hole that communicates with this filter chamber, this floss hole is communicated with first filter storage tank;

This essence filter unit, comprise one and be installed in smart filter membrane group in this essence filter pocket with the smart filter pocket, of filter storage tank conducting just, an and driving mechanism that is connected with this essence filter membrane group, this essence filter membrane group has a plurality of smart filter films and and covers aforementioned smart filter film and form the main collector tube that watertight is communicated with, and this driving mechanism has an oil well pump that is communicated with this main collector tube; And the oil groove of should regenerating, link with this oil well pump.

2. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: this just first filter filter material of filter unit be a kind of in adhesive-bonded fabric, activated carbon, the sponge.

3. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: this just more comprises a conveying mechanism in the filter unit, this conveying mechanism is the below that is positioned at aforementioned plate compression film group, and this conveying mechanism has one and carries belt body.

4. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: this just more comprises a first filter back washpump in filter unit, this just filter back washpump be to connect to this first filter storage tank.

5. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: the driving mechanism of this essence filter unit has a turn motor, and this turn motor is and this main collector tube links.

6. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: the essence filter film of this essence filter unit is a kind of in milipore filter, the NF membrane.

7. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: described treating apparatus more includes a waste liquid storage tank, this waste liquid storage tank is connected this essence filter unit and just filters between the unit.

8. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: described treating apparatus more comprises an oily monitoring means, and this oil monitoring means is connected between the smart filter pocket and this regeneration oil groove of this essence filter unit.

9. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: this essence filter unit more comprises scrapes actuation mechanism, and this is scraped actuation mechanism and is folded in respectively between the two smart filter films, and contacts with essence filter film retention wire.

10. as claimed in claim 1 in Silicon Wafer cutting waste oil mud the treating apparatus of reclaiming oil, it is characterized in that: described treating apparatus also comprises control each a unit required power supply, and required charging in filter process, the ECU of discharging.