CN202189758U - Silicon slice loading automatic lifting device - Google Patents
Silicon slice loading automatic lifting device Download PDFInfo
- Publication number
- CN202189758U CN202189758U CN 201120261435 CN201120261435U CN202189758U CN 202189758 U CN202189758 U CN 202189758U CN 201120261435 CN201120261435 CN 201120261435 CN 201120261435 U CN201120261435 U CN 201120261435U CN 202189758 U CN202189758 U CN 202189758U
- Authority
- CN
- China
- Prior art keywords
- pallet
- slice
- basket device
- servo motor
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a silicon slice loading automatic lifting device, comprising a pedestal and a pallet. A servo motor is fixed on the pedestal, and the output of the servo motor is connected with a lead screw, an the lead screw is connected with a nut in a pallet fixing frame; the pallet is fixed with the pallet fixing frame, an insertion slice signal induction sensor is arranged at the insertion slice position of a basket device on the pallet, and an induction signal of the insertion slice signal induction sensor is connected with an input signal of the servo motor via a control circuit. When the silicon slice loading automatic lifting device is used, the basket device is placed in a basket device pallet, the insertion slice signal induction sensor can induce an insertion slice action whenever a silicon slice is inserted automatically, and then the insertion slice action is transmitted to the servo motor via the control circuit. In the utility model, the servo motor moves to a determined position to drive the lead screw to rotate a determined rotary angle, so that the basket device pallet is lifted along with the lifting of the pallet fixing frame, and finally the basket device in which the silicon slices are inserted is lifted according to a set height, and accordingly, the purposes of lifting the basket device automatically and inserting the silicon slices in the basket device one by one are achieved.
Description
Technical field
The utility model relates to the silicon chip process equipment, is specifically related to a kind of silicon chip and loads automatic lifting device.
Background technology
Present silicon chip load all will be packed in the basket tool through manual work, both easily silicon wafer is caused artificial pollution like this, increases working strength of workers again, can't enhance productivity.In order to make the load ability automation of silicon chip, need the device that the basket prodigiosin is promoted and one by one silicon chip inserted automatically for this reason.
The utility model content
The purpose of the utility model is to overcome the defective that exists in the prior art, provide a kind of production efficiency high, do not need manual operation, can promote automatically and one by one silicon wafer is inserted the silicon chip load automatic lifting device in the basket tool.
For realizing above-mentioned purpose; The technical scheme of the utility model is that a kind of silicon chip of design loads automatic lifting device, and it comprises base and pallet, it is characterized in that; On said base, be fixed with servomotor; The output of said servomotor is connected with leading screw, and said leading screw is connected with the interior nut of pallet fixed mount, and said pallet and pallet fixed mount are fixed; The set inserted sheet place that is equipped with the basket tool is provided with inserted sheet induction of signal transducer on said pallet, and the induced signal of said inserted sheet induction of signal transducer is connected through control circuit with said servomotor input signal.
The advantage and the beneficial effect of the utility model are: this silicon chip loads automatic lifting device, during use, the basket tool is placed in the basket tool pallet; Every a slice silicon chip that inserts automatically; Inserted sheet induction of signal transducer all will be sensed an inserted sheet action, pass to servomotor through control circuit then, and the band of position movable wire thick stick that servomotor is walked about definite rotates the anglec of rotation of confirming; Thereby driving basket tool pallet rises with the rising of pallet fixed mount; Final basket tool by the elevated height silicon chip insertion of setting will insert the basket tool lattice that use with next and aim at the silicon chip that next step inserts automatically, and completion promotes automatically and one by one silicon chip inserted the purpose in the basket tool.
Description of drawings
Fig. 1 is the utility model embodiment 1 structural representation.
Among the figure: 1, base; 2, servomotor; 3, pallet fixed mount; 4, leading screw; 5, pallet; 6, basket tool; 7, basket tool lattice; 8, nut; 9, inserted sheet induction of signal transducer.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the embodiment of the utility model is further described.Following examples only are used for more clearly explaining the technical scheme of the utility model, and can not limit the protection range of the utility model with this.
Embodiment:
As shown in Figure 1, a kind of silicon chip that present embodiment is described loads automatic lifting device, and it comprises base 1 and pallet 5; On base 1, be fixed with servomotor 2; The output of servomotor 2 is connected with leading screw 4, and leading screw 4 is connected with pallet fixed mount 3 interior nuts 8, and pallet 5 is fixing with pallet fixed mount 3.The inserted sheet place of the basket tool 6 that is provided with is provided with inserted sheet induction of signal transducer 9 on pallet 5, and the induced signal of inserted sheet induction of signal transducer 9 is connected with the signal input part of servomotor 2 through control circuit.
During use; Basket tool 6 is placed in the pallet 5, every a slice silicon chip that inserts automatically, inserted sheet induction of signal transducer 9 all will be sensed an inserted sheet action; Pass to servomotor 2 then; The band of position movable wire thick stick 4 that servomotor 2 is walked about definite rotates the anglec of rotation of confirming, rises the final basket tool 6 that inserts by the elevated height silicon chip of setting with the rising of pallet fixed mount 3 thereby drive pallet 5; Next will be inserted the basket tool lattice 7 that use aim at the silicon chip that next step inserts automatically, completion promotes automatically and one by one silicon chip is inserted the purpose in the basket tool 6.
The above only is the preferred implementation of the utility model; Should be understood that; For those skilled in the art; Under the prerequisite that does not break away from the utility model know-why, can also make some improvement and retouching, these improvement and retouching also should be regarded as the protection range of the utility model.
Claims (1)
1. a silicon chip loads automatic lifting device, and it comprises base and pallet, it is characterized in that; On said base, be fixed with servomotor; The output of said servomotor is connected with leading screw, and said leading screw is connected with the interior nut of pallet fixed mount, and said pallet and pallet fixed mount are fixed; The set inserted sheet place that is equipped with the basket tool is provided with inserted sheet induction of signal transducer on said pallet, and the induced signal of said inserted sheet induction of signal transducer is connected through control circuit with said servomotor input signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120261435 CN202189758U (en) | 2011-07-22 | 2011-07-22 | Silicon slice loading automatic lifting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120261435 CN202189758U (en) | 2011-07-22 | 2011-07-22 | Silicon slice loading automatic lifting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202189758U true CN202189758U (en) | 2012-04-11 |
Family
ID=45921193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120261435 Expired - Fee Related CN202189758U (en) | 2011-07-22 | 2011-07-22 | Silicon slice loading automatic lifting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202189758U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102760676A (en) * | 2012-05-18 | 2012-10-31 | 南京华伯仪器科技有限公司 | Loading and unloading basket device for silicon wafers |
| CN103552955A (en) * | 2013-10-25 | 2014-02-05 | 宇环数控机床股份有限公司 | Servo control and drive lift-and-turn compound motion mechanism |
| CN112435955A (en) * | 2019-08-26 | 2021-03-02 | 合肥晶合集成电路股份有限公司 | Supporting device for wafer splinters and fixing method thereof |
-
2011
- 2011-07-22 CN CN 201120261435 patent/CN202189758U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102760676A (en) * | 2012-05-18 | 2012-10-31 | 南京华伯仪器科技有限公司 | Loading and unloading basket device for silicon wafers |
| CN102760676B (en) * | 2012-05-18 | 2015-01-21 | 南京华伯仪器科技有限公司 | Loading and unloading basket device for silicon wafers |
| CN103552955A (en) * | 2013-10-25 | 2014-02-05 | 宇环数控机床股份有限公司 | Servo control and drive lift-and-turn compound motion mechanism |
| CN112435955A (en) * | 2019-08-26 | 2021-03-02 | 合肥晶合集成电路股份有限公司 | Supporting device for wafer splinters and fixing method thereof |
| CN112435955B (en) * | 2019-08-26 | 2024-04-16 | 合肥晶合集成电路股份有限公司 | Wafer crack supporting device and fixing method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203699397U (en) | Automatic disk stacking device | |
| CN104493457B (en) | Device for press-fitting plastic part and copper sleeve of magnetic sensor | |
| CN202189758U (en) | Silicon slice loading automatic lifting device | |
| CN103286199B (en) | Automobile filter casing automatic production line | |
| CN104759796B (en) | Three station mechanical hands of condenser elastic step nut fitting machine | |
| CN204277390U (en) | Magnetic sensor plastic, copper sheathing pressure-mounting device | |
| CN205290964U (en) | Manipulator | |
| CN206998413U (en) | Manipulator for numerical control machine | |
| CN203778634U (en) | Automatic stamping feeding and discharging device based on mechanical arms | |
| CN206750921U (en) | Automatic sealing cover gripping machine | |
| CN205254334U (en) | Laser work platform electric lift adjusting device | |
| CN201770801U (en) | Silicon wafer loading and automatic lifting device | |
| CN105150451B (en) | The automatic implant system of shear blade being molded for scissors | |
| CN209773865U (en) | Automatic feeding device for automobile hub bearing dust cap | |
| CN202169709U (en) | Self-checking fixed platform type press | |
| CN204938421U (en) | A kind of mealy medicine automatic lifting device | |
| CN205240698U (en) | A unloader in automation for online production | |
| CN202367806U (en) | Automatic height-regulating device used on water-jet machine | |
| CN202763059U (en) | Lathe manipulator device | |
| CN207402014U (en) | A kind of feeding device for metal plate punching ancillary equipment | |
| CN201419516Y (en) | Integral self-checking fixed bench press | |
| CN206767099U (en) | A kind of automatic feeder of full-automatic silk flower forming machine | |
| CN111195922A (en) | Automatic change material suction means for production line | |
| CN204912381U (en) | Bending device | |
| CN202492541U (en) | High frequency annealing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120411 Termination date: 20120722 |