CN202133821U - Laser beam uniform irradiation optical system - Google Patents
Laser beam uniform irradiation optical system Download PDFInfo
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- CN202133821U CN202133821U CN201120219989U CN201120219989U CN202133821U CN 202133821 U CN202133821 U CN 202133821U CN 201120219989 U CN201120219989 U CN 201120219989U CN 201120219989 U CN201120219989 U CN 201120219989U CN 202133821 U CN202133821 U CN 202133821U
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- lens array
- laser beam
- laser
- positive lens
- negative lens
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Abstract
The utility model is a laser beam uniform irradiation optical system, comprising a phase modulator for performing frequency broadening to narrowband laser beams, a dispersion raster for expanding broadband laser in space, a positive lens array and a negative lens array for dividing laser beams into a lot of beamlets, and a focusing lens for making the laser beams form uniform light spots on object targets which are sequentially arranged; the optical axises of the phase modulator, the dispersion raster, the positive lens array, the negative lens array and the focusing lens are at a same straight line. According to the utility mode, the laser beams broadened by the phase modulator and the dispersion raster include a lot of independent frequency components, and the spots formed by each frequency component are on the object target surfaces but not superposed, and therefore fine interference fringes in the spots can be erased; in such a way that object focal planes can obtain light spots with uniform irradiation, and the sizes of the light spots can be adjusted; requirements to the light spots under different conditions can be conveniently met by using a set of optical system.
Description
Technical field
The utility model is a kind ofly to be used for superpower laser, can to obtain uniform spot intensity at the target target surface and distribute; And can change the even illuminated optical of the laser beam system of the size of target hot spot neatly, belong to the renovation technique of the even illuminated optical of laser beam system.
Background technology
Superpower laser has a wide range of applications in scientific research and industrial circle; This type laser instrument proposes very high requirement to the irradiation uniformity of light beam; But the light beam light intensity of laser instrument generation is Gaussian distribution rather than evenly distributes generally speaking; And there is the distortion of intensity and phase place inevitably in light beam in transmission course, influences its irradiation quality at the target target surface.At present, lens array is to use more a kind of beam shaping and even sliding device, and it is made up of a plurality of lenslet unit, through cutting apart the influence that laser beam reduces the near-field beam distortion.But because laser has the coherence of height; Divided beamlet can produce fine and closely woven interference fringe when the target target surface is overlapping; Cause the inner light intensity of hot spot inhomogeneous, ask for something relatively the intensity modulated of the strict this small scale in application scenario be unallowed.In addition, different scientific researches or industrial applications have different requirement to spot size and form, generally can only satisfy different requirement through changing optical system components at present, and practical operation gets up to waste time and energy.
Summary of the invention
The purpose of the utility model is to consider the problems referred to above and a kind of size that can change the target hot spot neatly is provided, and the time through destroying laser beam and spatial coherence can be eliminated the even illuminated optical of the laser beam system of the fine and closely woven interference fringe in hot spot inside.The utility model is reasonable in design, and is convenient and practical.
The technical scheme of the utility model is: the even illuminated optical of the laser beam of the utility model system; Include the phase-modulator that is arranged in order to the laser of narrowband Shu Jinhang frequency bandspread of incident, make broad band laser the chromatic dispersion grating of space development, with laser beam be divided into a large amount of beamlets positive lens array and negative lens array, make laser beam form the condenser lens of uniform light spots at the target target surface, and the optical axis of phase-modulator, chromatic dispersion grating, positive lens array, negative lens array, condenser lens is on same straight line.
It is first that above-mentioned positive lens array includes several same positive lenslet, and the bore of lenslet unit does
d, focal length does
f 1
It is first that above-mentioned negative lens array includes several same negative lenslet, and the bore of lenslet unit does
d, focal length does
f 2, the bore of the lenslet unit of positive lens array
D withThe bore of the lenslet unit of negative lens array
D is identical.
Distance between above-mentioned positive lens array and the negative lens array does
s
The focal length of above-mentioned condenser lens does
f
Above-mentioned light beam forms size on the focal plane of condenser lens
aUniform light spots, the relation of spot size and systematic parameter does
Under the situation that system confirms,
f 1,
f 2,
fWith
dConstant, regulate
The s abilityMake spot size generation corresponding linear change.
Above-mentioned negative lens array is fixed, and the positive lens array can move along optical axis.
The utility model is owing to adopt the structure that includes phase-modulator, chromatic dispersion grating, positive lens array, negative lens array and condenser lens, and electro-optic phase modulator reduces its time coherence to the laser of narrowband Shu Jinhang frequency bandspread of incident; Thereby the chromatic dispersion grating makes broad band laser generation chromatic dispersion at space development, reduces its spatial coherence.Incident beam is divided into a large amount of beamlets through positive lens array and negative lens array; The influence of its near field intensity and phase distortion is lowered; Owing to the frequency component that is comprised a large amount of separations by the laser beam behind phase-modulator and the chromatic dispersion grating stretching, every kind of formed hot spot of frequency component is in target target surface non-coherent addition, so the inner fine and closely woven interference fringe of hot spot also can be by floating; Like this; Can obtain the uniform hot spot of irradiation on the target focal plane, and spot size can regulate neatly, use a cover optical system can satisfy under the different condition requirement easily hot spot.The utility model is that a kind of design is ingenious, function admirable, the even illuminated optical of convenient and practical laser beam system.
Description of drawings
Fig. 1 is the one-piece construction synoptic diagram of the even irradiation system of the utility model adjustable laser bundle
Among the figure: 1-phase-modulator, 2-chromatic dispersion grating, 3-positive lens array, 4-negative lens array, 5-condenser lens.
Embodiment
Embodiment:
The structural representation of the utility model is as shown in Figure 1; Include phase-modulator 1, chromatic dispersion grating 2, positive lens array 3, negative lens array 4 and condenser lens 5; The laser of narrowband Shu Jinhang frequency bandspread of 1 pair of incident of electro-optic phase modulator reduces its time coherence; Thereby chromatic dispersion grating 2 makes broad band laser generation chromatic dispersion at space development, reduces its spatial coherence.Positive lens array 3 is made up of several same positive lenslet unit, and the bore of lenslet unit does
d, focal length does
f 1Negative lens array 4 is made up of several same negative lenslet unit, and the bore of lenslet unit does
d, focal length does
f 2In the present embodiment, distance does between positive lens array 3 and the negative lens array 4
sThe focal length of condenser lens 5 does
fThe bore of the lenslet unit of positive lens array 3
D withThe bore of the lenslet unit of negative lens array 4
D is identical.
Incident beam scioptics array 3 is divided into a large amount of beamlets with lens array 4, and the influence of its near field intensity and phase distortion is lowered, and light beam forms size and does on the focal plane of condenser lens 5 then
aUniform light spots.Because focal plane is positioned at the accurate near field region of optical system, hot spot is formed by Fresnel diffraction, has the uniform strength envelope that is similar to flat-top.The relation of spot size and systematic parameter does
Under the situation that system confirms,
f 1,
f 2,
fWith
dConstant, regulate
sCan make spot size generation corresponding linear change.In practical implementation, can make negative lens array 4 fixed, move positive lens array 3 along optical axis.
The frequency component that is comprised a large amount of separations by the laser beam behind phase-modulator 1 and grating dispersion 2 broadenings; Every kind of formed hot spot of frequency component is in target target surface non-coherent addition; So the inner fine and closely woven interference fringe of hot spot can like this, can be obtained the uniform hot spot of irradiation by floating on the target focal plane; And spot size can regulate neatly, uses a cover optical system can satisfy under the different condition requirement to hot spot easily.
The principle of work of the utility model is following: the laser of narrowband Shu Jinhang frequency bandspread of 1 pair of incident of phase-modulator, reduce its time coherence; Chromatic dispersion grating 2 makes broad band laser at space development, reduces its spatial coherence; Positive lens array 3 is divided into a large amount of beamlets with negative lens array 4 with laser beam, reduces the influence of near-field beam intensity and phase distortion; Condenser lens 5 makes laser beam form uniform light spots at the target target surface.The distance of regulating between positive lens array 3 and the negative lens array 4 can change spot size.Utilize this system to obtain uniform laser irradiation at the target target surface, the flexible in size of target hot spot is adjustable, and the inner fine and closely woven intensity modulated of hot spot is by floating, and this even irradiation system has important use and is worth in superpower laser.
Claims (7)
1. the even illuminated optical of laser beam system; It is characterized in that including the phase-modulator (1) that is arranged in order to the laser of narrowband Shu Jinhang frequency bandspread of incident, make broad band laser the chromatic dispersion grating (2) of space development, with laser beam be divided into a large amount of beamlets positive lens array (3) and negative lens array (4), make laser beam form the condenser lens (5) of uniform light spots at the target target surface, and the optical axis of phase-modulator (1), chromatic dispersion grating (2), positive lens array (3), negative lens array (4), condenser lens (5) is on same straight line.
2. the even illuminated optical of laser beam according to claim 1 system, it is first to it is characterized in that above-mentioned positive lens array (3) includes several same positive lenslet, and the bore of lenslet unit does
d, focal length does
f 1
3. the even illuminated optical of laser beam according to claim 2 system, it is first to it is characterized in that above-mentioned negative lens array (4) includes several same negative lenslet, and the bore of lenslet unit does
d, focal length does
f 2, the bore of the lenslet unit of positive lens array (3)
D withThe bore of the lenslet unit of negative lens array (4)
D is identical.
4. the even illuminated optical of laser beam according to claim 3 system is characterized in that distance does between above-mentioned positive lens array (3) and the negative lens array (4)
s
5. the even illuminated optical of laser beam according to claim 4 system is characterized in that the focal length of above-mentioned condenser lens (5) does
f
6. the even illuminated optical of laser beam according to claim 5 system is characterized in that above-mentioned light beam forms size and does on the focal plane of condenser lens (5)
aUniform light spots, the relation of spot size and systematic parameter does
Under the situation that system confirms,
f 1,
f 2,
fWith
dConstant, regulate
The s abilityMake spot size generation corresponding linear change.
7. the even illuminated optical of laser beam according to claim 6 system is characterized in that above-mentioned negative lens array (4) is fixed, and positive lens array (3) can move along optical axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120219989U CN202133821U (en) | 2011-06-27 | 2011-06-27 | Laser beam uniform irradiation optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120219989U CN202133821U (en) | 2011-06-27 | 2011-06-27 | Laser beam uniform irradiation optical system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202133821U true CN202133821U (en) | 2012-02-01 |
Family
ID=45522584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120219989U Expired - Lifetime CN202133821U (en) | 2011-06-27 | 2011-06-27 | Laser beam uniform irradiation optical system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202133821U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102253493A (en) * | 2011-06-27 | 2011-11-23 | 广东工业大学 | Laser beam uniform radiation optical system |
| CN107065155A (en) * | 2017-01-20 | 2017-08-18 | 武汉创恒世纪激光科技有限公司 | A kind of laser cleaning varifocal optical unit and laser cleaner |
-
2011
- 2011-06-27 CN CN201120219989U patent/CN202133821U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102253493A (en) * | 2011-06-27 | 2011-11-23 | 广东工业大学 | Laser beam uniform radiation optical system |
| CN107065155A (en) * | 2017-01-20 | 2017-08-18 | 武汉创恒世纪激光科技有限公司 | A kind of laser cleaning varifocal optical unit and laser cleaner |
| CN107065155B (en) * | 2017-01-20 | 2023-04-07 | 武汉创恒世纪激光科技有限公司 | Variable-focus optical unit for laser cleaning and laser cleaning device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170612 Address after: 523570, A building,, Changping Science Park, New South Road, Changping Town, Dongguan, China Patentee after: DONGGUAN DEEP BLUE PHOTOELECTRIC TECHNOLOGY CO., LTD. Address before: 510006 Panyu District, Guangzhou, Guangzhou University,, West Ring Road, No. 100 Patentee before: Guangdong University of Technology |
|
| TR01 | Transfer of patent right | ||
| CP03 | Change of name, title or address |
Address after: 523000 Room 303, building 1, 107, Changping Xinnan Road, Changping Town, Dongguan City, Guangdong Province Patentee after: Guangdong Shenlan Photoelectric Technology Co.,Ltd. Address before: 523570, A building,, Changping Science Park, New South Road, Changping Town, Dongguan, China Patentee before: DONGGUAN DEEP BLUE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120201 |
|
| CX01 | Expiry of patent term |