CN202120912U - Non-refrigeration infrared focal plane array detector - Google Patents
Non-refrigeration infrared focal plane array detector Download PDFInfo
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- CN202120912U CN202120912U CN2011201479975U CN201120147997U CN202120912U CN 202120912 U CN202120912 U CN 202120912U CN 2011201479975 U CN2011201479975 U CN 2011201479975U CN 201120147997 U CN201120147997 U CN 201120147997U CN 202120912 U CN202120912 U CN 202120912U
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Abstract
The utility model relates to a non-refrigeration infrared focal plane array detector. The structure is that the end portion at one side of a bridge leg is connected with the bridge surface, and the end portion at the other side is connected with the substrate through an anchor column; the substrate is a read-out integrated circuit substrate with the surface provided with a reflective film layer; the bridge surface is hanged right over the reflective film layer, and a vacuum gap layer is formed between the bridge surface and the substrate; and the bridge legs are arranged at the opposite two sides of the bridge surface, and the lower surfaces of the bridge legs and the lower surface of the bridge surface are distributed in the same plane. The bridge surface is provided with a supporting layer, an absorbing layer, an insulating layer, a thermo-responsive layer and a protective layer from the lower portion to the upper portion in consequence, the bridge leg is provided with a thermal resistance layer, a conducting layer and a passivation layer from the lower portion to the upper portion in consequence. The anchor column comprises a tungsten column and a silicon oxide column, and the materials of the anchor column are tungsten and silicon oxide from the inner to the outer in consequence. The anchor column provided in the utility model is a novel anchor column, compared to the anchor column prepared by the traditional filling technology, the occupation surface of the anchor column is reduced, and the technology difficulty is reduced.
Description
Technical field
The utility model relates to a kind of non-refrigeration type infrared focal plane array seeker that is used for the infrared imaging system technical field, to the infrared radiation wave-length coverage be 8～14 μ m.
Background technology
According to the Planck blackbody radiation law, any object above zero all can be launched the infra-red electromagnetic thermal radiation to the external world at exhausted degree, and the light wave scope of this radiation is 0.8～1000 μ m approximately, can not directly see for human eye.(300K) at normal temperatures, the emission spectra centre wavelength of black body radiation is just in time near 10 mu m wavebands; And the infrared emanation that other object that temperature is close in human body and the environment is launched, 38% concentration of energy are in wavelength 8～14 mu m ranges, and therefore, this wave band is more suitable for the detection needs under sunburst, pitch-dark night or the bad weather.
The infrared radiation detector of infrared waves be can survey, photon type and thermosensitive type detector are divided into by detection principle.Photon type need be operated in the environment of liquid helium (about 77K) refrigeration; And the thermosensitive type detector is usually operated under the normal temperature; It is kind of " non-refrigeration type " detector; A plurality of this kind detector cells are arranged on the chip base with the form of two-dimensional array, and when chip being placed on the focal plane of infrared radiation imaging system condenser lens, have then constituted non-refrigeration type infrared focal plane array seeker (IRFPA).
This non-refrigeration type Infrared Detectors (IRFPA) generally includes:
-be used to absorb infrared radiation and be translated into hot device;
-with this detector for substrate thermal insulation and so that detector can be realized the device of temperature rise under the effect of infrared emanation;
-thermo-responsive device is under the heat effect of infrared radiation, the temperature variant resistance component of resistance or resistivity;
-and the circuit arrangement that reads thermo-responsive resistance variations.
For infrared focal plane array seeker, circuit arrangement is integrated in the substrate usually, is the semiconductor technology manufacturing that utilizes standard.This circuit is a kind ofly can apply signal of telecommunication excitation and be converted into the resistance variations of each unit of detector the signal of telecommunication (electric current or voltage) and two-way detector array realization sequential addressing CMOS is read integrated circuit; This reading circuit can also carry out preliminary treatment to the signal of telecommunication of detector cells (Pixel), the amplification that for example gains, nonuniformity correction processing such as (NUC).
In the utility model, the perspective view of non-refrigeration type Infrared Detectors is shown in 1, and what be mainly used in the absorption infrared energy is the metal absorbed layer 12 that is positioned on the bridge floor 10, and material is titanium nitride or nichrome etc.Theoretical according to electromagnetic transmission; When the film rectangular resistance (Sheet Resistance) of this metal absorbed layer 12 equals free space impedance (Free Space Impedance) and reaches 377 Ω/sq; The infrared energy of incident 50% is absorbed, and other 50% by transmission.Through taking a plurality of INFRARED ABSORPTION approach, can absorptivity be brought up to more than 50%, for example on substrate 50 surfaces of detector, add last layer infrared external reflection film 51, so-called vacuum gap layer 40 has just become the optical vacuum resonant cavity.In addition, the optical vacuum resonant cavity also has the ability that λ/4 selects to infrared wavelength to light wave, the thick resonant cavity of 2.5 μ m for example, the far red light wavelength of corresponding λ=10 μ m.
In detector cells, playing is exactly bridge leg 20 device for the effect of substrate thermal insulation.Absorbing under the infrared energy condition that equates; If the thermal resistance R of bridge leg 20 is big more, just mean that the temperature rise on the bridge floor 10 is high more, the variation of detector resistance under this temperature rise is just obvious more like this; The voltage response rate relatively will be big more, alleviated the pressure of reading of integrated circuit in the substrate 50.The thermal resistance R of bridge leg 20 not only with its on the pyroconductivity of layers of material relevant, also relevant with the length and width and the gauge of bridge leg 20; If bridge leg 20 quantity are greater than 1, the whole thermal resistance R of detector cells is just also relevant with the quantity of bridge leg 20.25 μ m * 25 μ m, 17 μ m * 17 μ m detectors are had relatively high expectations to thermal resistance R's, in present business-like Infrared Detectors, can be reached more than the 50MK/W.In order to obtain bigger thermal resistance R, the scheme that can take usually be select the pyroconductivity materials with smaller and with length lengthening, the width of bridge leg 20 reduce, reduced thickness.In addition, the detector thermal insulation is caused the extraneous air that also has of unfavorable interference, because bridge floor of detector 10 and bridge leg 20 structures are carried out heat exchange to air, cause the loss of heat, so Infrared Detectors need adopt the mode of Vacuum Package.
The core material of detector is a thermally sensitive layer 14 in the bridge floor 10, and its characteristics are exactly: its temperature changes after the infrared emanation heating that absorbed layer 12 absorbs, and himself measurable some character also changes thereupon.The most frequently used thermally sensitive layer 14 is that its resistance value (perhaps resistivity) changes with variation of temperature, is the resistance temperature variation characteristic, and describing index is temperature coefficient of resistance (TCR).At present, that the application of this type thermally sensitive layer material is maximum is vanadium oxide VOx, and be characterized in: the TCR value is bigger, and range of application is usually between 2%-3%; Resistivity is lower, and range of application between 0.5 Ω cm-2 Ω cm, causes the resistance value of detector less usually like this, and the Johnson noise relevant with resistance value (Johnson Noise) is just more little; The 1/f noise factor K of vanadium oxide VOx material is lower usually, and representative value is about K=10
-13So the preferable detector of performance adopts vanadium oxide VOx as thermally sensitive layer 14 mostly.Amorphous silicon hydride a-Si:H material also has higher TCR, and its preparation technology is comparatively simple, can with the semiconductor standard processes of current main-stream compatibility mutually, so be that the detector of thermally sensitive layer 14 has also obtained greatly developing with amorphous silicon a-Si:H.
An important indicator of non-refrigeration type Infrared Detectors is noise equivalent temperature difference NETD; Its connotation is: when the variations in temperature of tested infrared emanation target; When causing the voltage of focus planardetector output to equal noise voltage; This temperature variation is called NETD, and promptly the minimum temperature of the detection of a target that can differentiate of detector changes.NETD is more little good more, is generally between the 20-100mK at the NETD of present furnished uncooled ir thermal imaging system.Relation between NETD and thermal resistance R and the TCR is descended:
NETD ∝ R/ (ATCR) (A represents the effective area of detector cells)
The influencing factor of NETD is complicated, and following formula is only explained the relation between the effective area A of itself and thermal resistance R, TCR and detector cells.For 25 μ m * 25 μ m detector cells; Suppose that bridge leg 20 is exactly unbending straight beam; Its width 0.8 μ m, spacing between bridge leg 20 and the bridge floor 10 and the spacing between the unit are 1 μ m, effective area is 489.6 μ m approximately under the condition of not considering the anchor post area occupied so
2But; It is a kind of " top-down " fill process (Top-down) that the tradition anchor post forms technology; The anchor post that forms is a kind of inverted cone-shaped structure, its show as in shape lower opening less, above opening bigger, as shown in Figure 5; This just causes the anchor post that designs to be of a size of 2.5 μ m * 2.5 μ m, but the actual anchor post that forms has but taken the above area of 5 μ m * 5 μ m; With the rectangle anchor post is example, the size of report usually at 5 μ m * 5 μ m between 7 μ m * 7 μ m, that is to say that traditional anchor post forms technology and is difficult to control, cause the shared area of anchor post to become big, effective area reduces.
Summary of the invention
The utility model provides a kind of non-refrigeration type infrared focal plane array seeker, and has proposed a kind of novel anchor post, and the anchor post than traditional handicraft forms has dwindled the shared area of anchor post, and reduced technology difficulty.
In order to achieve the above object, the technical scheme of the utility model is achieved in that
A kind of non-refrigeration type infrared focal plane array seeker comprises substrate, bridge floor and bridge leg, it is characterized in that: the end, one side and the bridge floor of bridge leg link together, and the another side end is connected in the substrate through anchor post; Described substrate is for reading the integrated circuit substrate, and the surface is provided with reflective coating, and described bridge floor is unsettled directly over reflective coating, and and substrate between form the vacuum gap layer.
Described bridge leg is arranged on corresponding two sides of bridge floor, and bridge leg and bridge floor lower surface separately are distributed on the same plane.
Described bridge floor is followed successively by supporting layer, absorbed layer, insulating barrier, thermally sensitive layer and protective layer from top to bottom.
Described bridge leg is followed successively by thermoresistance layer, conductive layer and passivation layer from top to bottom.
Described anchor post is made up of tungsten post and silicon oxide column, and this anchor post is tungsten and silica material from inside to outside successively.
The thickness of described vacuum gap layer is 1.8～2.5 μ m.
Described anchor post is circle, rectangle or octagon at the cross section that parallels on the substrate direction.
The material of reflective coating is aluminium, titanium, gold or metal alloy on the described substrate surface, is 80%～100% in the reflectivity range of 8～14 μ m infrared bands.
The reflective coating of described bridge floor, bridge leg, anchor post and substrate surface is the form with two-dimensional array as a detector cells, is arranged on the substrate.
The end, one side of described bridge leg links to each other with the thermally sensitive layer electricity of bridge floor, and the another side end realizes that through anchor post the electricity between the reading circuit with substrate links to each other.
The material of described thermally sensitive layer is amorphous silicon, amorphous germanium silicon or vanadium oxide (VOx).
The thermoresistance layer of the supporting layer of described bridge floor and bridge leg adopts same material, and is silica, silicon nitride or silicon oxynitride; The conductive layer of the absorbed layer of bridge floor and bridge leg adopts same material, and is titanium nitride or nichrome; The passivation layer of the insulating barrier of bridge floor and bridge leg adopts same material, and is silica, silicon nitride or silicon oxynitride; The protective layer material of bridge floor is silica, silicon nitride or silicon oxynitride.
Described absorbed layer is discontinuous on bridge floor, is divided into several portions, every part as the absorption of infrared emanation with the direct contact of thermally sensitive layer so that realize that electricity is connected.
In the utility model; A kind of novel anchor post has also been proposed; This anchor post can utilize the tungsten growth technique in the semiconductor standard processes to form, and it is tungsten post and silica material on the material level from inside to outside successively; The effect of silica is the protection tungsten post that it wrapped up, and makes it be unlikely to come off.This novel anchor post, the anchor post than traditional fill process forms can dwindle the shared area of anchor post, and reduce technology difficulty.
Description of drawings
Fig. 1 is the perspective view of the non-refrigeration type infrared focal plane array seeker of the utility model;
Fig. 2 b, 3b and 4b are the vertical view of the non-refrigeration type infrared focal plane array seeker of the utility model;
Fig. 2 a is the A-A cutaway view among Fig. 2 b, the cross-section structure of expression bridge floor;
Fig. 3 a is the B-B cutaway view among Fig. 3 b, the cross-section structure of expression bridge floor;
Fig. 4 a is the C-C cutaway view among Fig. 4 b, the cross-section structure of expression bridge leg;
Fig. 5 is the profile of the anchor post of traditional fill process formation;
Fig. 6 is the profile of the novel anchor post of the utility model;
Fig. 7 is the generation type figure of the novel anchor post of the utility model.
Reference numeral among the figure: 10: bridge floor; 20: the bridge leg; 30: anchor post; 40: the vacuum gap layer; 50: substrate; 60: traditional anchor post; 70: sacrifice layer; 80: silica; 11: supporting layer; 12: absorbed layer; 13: insulating barrier; 14: thermally sensitive layer; 15: protective layer; 21: thermoresistance layer; 22: conductive layer; 23: passivation layer; 31: silicon oxide layer; 32: the tungsten post; 51: reflective coating; 71: the passage of anchor post; 72: the passage of tungsten post
Embodiment
In conjunction with accompanying drawing the utility model is done further to describe.
Below in conjunction with instantiation, purpose, the technical scheme of the utility model elaborated.
As shown in Figure 1, be the perspective view of the non-refrigeration type infrared focal plane array seeker of the utility model.This detector comprises substrate 50, bridge floor 10 and two bridge legs 20; The end, one side and the bridge floor 10 of bridge leg 20 link together; The another side end is connected in the substrate 50 through two anchor posts 30 respectively, and described substrate 50 is for reading the integrated circuit substrate, and the surface is provided with reflective coating 51; Bridge floor 10 be unsettled reflective coating 51 in substrate 50 directly over and and substrate 50 between form vacuum gap layer 40; For bridge floor 10 is carried out balanced support, bridge leg 20 is arranged on corresponding two sides of bridge floor 10, and bridge leg 20 is distributed on the same plane with bridge floor 10 lower surface separately.
Shown in Fig. 2 a, Fig. 4 a, be respectively the bridge floor 10 of the non-refrigeration type infrared focal plane array seeker of the utility model, the profile of bridge leg 20.Bridge floor 10 comprises supporting layer 11, absorbed layer 12, insulating barrier 13, thermally sensitive layer 14 and protective layer 15 from top to bottom successively; Bridge leg 20 comprises thermoresistance layer 21, conductive layer 22 and passivation layer 23 from top to bottom successively; Conductive layer 22 on absorbed layer 12 and the bridge leg 20 is a same material; Absorbed layer 12 is discontinuous on bridge floor 10; It is partitioned into three parts, and the area of intermediate portion is maximum, as absorbing infrared emanation; Other two parts are as directly contacting so that realize that electricity is connected, shown in Fig. 3 a with the lower surface of thermally sensitive layer 14.Because absorbed layer 12 some part need contact with thermally sensitive layer 14, the insulating barrier 13 on the bridge floor 10 is the absorbed layers 12 that selectively cover below it.
From the above, an end of bridge leg 20 is to realize being connected with the electricity of thermally sensitive layer 14 through divided absorbed layer 12, and an other end, its conductive layer 22 realizes that with the tungsten post 32 of anchor post 30 electricity is connected; Passivation layer 23 on the bridge leg 20 is used to protect conductive layer 22; The another one effect of bridge leg 20 is to make thermal insulation between bridge floor 10 and the substrate 50; To consider to increase the thermal resistance of bridge leg 20 during design; So that the temperature rise of bridge floor 10 is bigger, make the resistance variations of detector thermally sensitive layer 14 enough big by this, also simultaneously can access less NETD value.
Can obtain bigger thermal resistance through the measure of two aspects: select the lower material of pyroconductivity to make thermoresistance layer 21, the passivation layer 23 of bridge leg 20; On the physical dimension of bridge leg 20, shaped design, the thermal insulation of guaranteeing bridge leg 20 satisfies that detector resistance changes and the requirement of NETD.For example, thermoresistance layer 21 can be selected silicon nitride or silica material; For the detector cells of 25 μ m * 25 μ m, the width of bridge leg 20 is set to 0.8 μ m, and certainly, according to the ability and the detector performance requirement of manufacturing process, its width is not limited to 0.8 μ m, all is feasible in 0.5～1.2 mu m range; And for the detector cells of 17 μ m * 17 μ m, the width of bridge leg 20 can be arranged in 0.35～0.6 mu m range.
The material and the thickness of the bridge floor 10 of this case study on implementation, each layer of bridge leg 20:
The material of thermally sensitive layer 14 is amorphous silicon a-Si:H, and thickness all is feasible for
its thickness is not limited to
in
scope; Its TCR generally-2%～-3%/℃ between, representative value is-2.5%/℃.This amorphous silicon a-Si:H is usually by plasma reinforced chemical vapour deposition (PECVD) prepared;
The insulating layer 13 and the silicon nitride passivation layer 23, while technology is implemented; thickness of the material?
its thickness is not limited?
According to the performance requirements of the detector thickness is variable.Certainly; Also passivation layer 23 can be set in the utility model, promptly its thickness is that
this silicon nitride is usually by plasma reinforced chemical vapour deposition (PECVD) prepared.
In this case study on implementation, the protective layer 15 above the thermally sensitive layer 14 amorphous silicon a-Si:H is
In the utility model, also relate to a kind of novel anchor post 30.As shown in Figure 5, the profile of the anchor post 60 that forms for traditional fill process; As shown in Figure 6, be the profile of the novel anchor post 30 of the utility model.Traditional technology is after 20 preparations of bridge leg finish; Utilize the fill process of top-down (Top-down); Form whole anchor post 60, but owing to the reason of technology causes a kind of anchor post 60 of inverted cone-shaped structure, show as that lower opening is less, the top opening is bigger; Cause the real area of anchor post 60 to be difficult to control, exceed the size that is designed.And mentioned anchor post 30 generation types of the utility model are before not preparing bridge leg 20, utilize the tungsten growth technique to make anchor post 30 in advance.
As shown in Figure 7, for the realization technology of novel anchor post 30 comprises:
1, be provided with on the surface that 50 preparations, one layer thickness is the sacrifice layer 70 of 2.5 μ m in the substrate of reflective coating 51 (not drawing in the diagram), sacrifice layer 70 materials are polyimides (PI);
2, utilize the mode of etching, selectively remove partial sacrifice layer 70 material, form the occupied passage 71 of anchor post 30;
3, the PECVD silicon oxide layer deposited 80, fill 2) in formed passage 71; Etched portions silica 80 materials form the occupied passage 72 of tungsten post 32;
4, CVD tungsten fills 3) in formed passage 72; Selectively remove this tungsten material, only stay the tungsten post 32 in the passage 72.This step has been accomplished the manufacture craft of anchor post 30, is exactly after this to utilize traditional technology to make bridge floor 10, bridge leg 20 structures of detector, and be exactly releasing sacrificial layer 70 after these making finish, obtain unsettled structure.
In the 3rd process, the effect of silica 80 is that protection tungsten post 30 unlikely giving from substrate 50 surfaces come off; In the 4th process, usually can some very thin adhesion layers of sputter before plated metal tungsten, Ti/TiN for example increases the adhesiveness of tungsten post 30 and substrate 50; Tungsten material outside the anchor post 30 normally utilizes chemico-mechanical polishing (CMP) to remove, and can make that so also sacrifice layer 70 surfaces are more smooth.
Above-described practical implementation case; Be that the purpose and the technical scheme of the utility model have been carried out further explain, what be necessary to state is that the above is merely a practical implementation case of the utility model; Be not limited to the utility model; All within the spirit and scope of the utility model, any modification of being made, be equal to replacement, improvement etc., all should be included within the protection range of the utility model.
In the utility model; Detector reflects that the detection mechanism of extraneous target temperature information is: target is sent the infrared waves thermal radiation that contains self temperature information, is absorbed by the metal absorbed layer 12 of detector, because the thermal insulation effect of bridge leg 20; Thereby heat is accumulation heating thermally sensitive layer 14 wherein on bridge floor 10 just; And cause its temperature to rise, and then cause that thermally sensitive layer 14 resistance values such as materials such as amorphous silicon or vanadium oxides (perhaps resistivity) change the information of the corresponding amount of infrared radiation of this variation; After being converted into the signal of telecommunication, just utilize the integrated circuit in the substrate 50 to read successively.But the said process simplified summary is " absorbing infrared radiation-thermally sensitive layer variations in temperature-resistance change-circuit reads ".
Claims (13)
1. a non-refrigeration type infrared focal plane array seeker comprises substrate, bridge floor and bridge leg, it is characterized in that: the end, one side and the bridge floor of described bridge leg link together, and the another side end is connected in the substrate through anchor post; Described substrate is for reading the integrated circuit substrate, and the surface is provided with reflective coating; Described bridge floor is unsettled directly over reflective coating, and and substrate between form the vacuum gap layer.
2. non-refrigeration type infrared focal plane array seeker according to claim 1 is characterized in that: described bridge leg is arranged on corresponding two sides of bridge floor, and bridge leg and bridge floor lower surface separately are distributed on the same plane.
3. non-refrigeration type infrared focal plane array seeker according to claim 1 is characterized in that: described bridge floor is followed successively by supporting layer, absorbed layer, insulating barrier, thermally sensitive layer and protective layer from top to bottom.
4. non-refrigeration type infrared focal plane array seeker according to claim 1 is characterized in that: described bridge leg is followed successively by thermoresistance layer, conductive layer and passivation layer from top to bottom.
5. non-refrigeration type infrared focal plane array seeker according to claim 1 is characterized in that: described anchor post is made up of tungsten post and silicon oxide column, and this anchor post is tungsten and silica material from inside to outside successively.
6. non-refrigeration type infrared focal plane array seeker according to claim 1 is characterized in that: the thickness of described vacuum gap layer is 1.8～2.5 μ m.
7. non-refrigeration type infrared focal plane array seeker according to claim 1 is characterized in that: described anchor post is circle, rectangle or octagon at the cross section that parallels on the substrate direction.
8. non-refrigeration type infrared focal plane array seeker according to claim 1; It is characterized in that: the material of reflective coating is aluminium, titanium, gold or metal alloy on the described substrate surface, is 80%～100% in the reflectivity range of 8～14 μ m infrared bands.
9. non-refrigeration type infrared focal plane array seeker according to claim 1 is characterized in that: the reflective coating of described bridge floor, bridge leg, anchor post and substrate surface is the form with two-dimensional array as a detector cells, is arranged on the substrate.
10. according to the described non-refrigeration type infrared focal plane array seeker of one of claim 1-9; It is characterized in that: the end, one side of described bridge leg links to each other with the thermally sensitive layer electricity of bridge floor, and the another side end realizes that through anchor post the electricity between the reading circuit with substrate links to each other.
11. non-refrigeration type infrared focal plane array seeker according to claim 3 is characterized in that: the material of described thermally sensitive layer is amorphous silicon, amorphous germanium silicon or vanadium oxide.
12. according to claim 3 or 4 described non-refrigeration type infrared focal plane array seekers, it is characterized in that: the thermoresistance layer of the supporting layer of described bridge floor and bridge leg adopts same material, and is silica, silicon nitride or silicon oxynitride; The conductive layer of the absorbed layer of bridge floor and bridge leg adopts same material, and is titanium nitride or nichrome; The passivation layer of the insulating barrier of bridge floor and bridge leg adopts same material, and is silica, silicon nitride or silicon oxynitride; The protective layer material of bridge floor is silica, silicon nitride or silicon oxynitride.
13. non-refrigeration type infrared focal plane array seeker according to claim 3 is characterized in that: described absorbed layer is discontinuous on bridge floor, is divided into several portions.
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| CN2011201479975U CN202120912U (en) | 2011-05-11 | 2011-05-11 | Non-refrigeration infrared focal plane array detector |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102280455A (en) * | 2011-05-11 | 2011-12-14 | 武汉高德红外股份有限公司 | Non-refrigeration infrared focal plane array seeker |
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2011
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102280455A (en) * | 2011-05-11 | 2011-12-14 | 武汉高德红外股份有限公司 | Non-refrigeration infrared focal plane array seeker |
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Granted publication date: 20120118 |