CN202107764U - Fast substrate temperature raising and reducing device in film photovoltaic cell scale manufacture - Google Patents
Fast substrate temperature raising and reducing device in film photovoltaic cell scale manufacture Download PDFInfo
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- CN202107764U CN202107764U CN2011200695587U CN201120069558U CN202107764U CN 202107764 U CN202107764 U CN 202107764U CN 2011200695587 U CN2011200695587 U CN 2011200695587U CN 201120069558 U CN201120069558 U CN 201120069558U CN 202107764 U CN202107764 U CN 202107764U
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Abstract
The utility model discloses a fast substrate temperature raising and reducing device in film photovoltaic cell scale manufacture, which relates to a fast substrate temperature raising and reducing device in the plasma enhanced chemical vapor deposition (PECVD) preparation process. Electrodes are arranged in vacuum equipment and are mutually and respectively connected with an external radio frequency power supply, base materials are also attached on the electrodes, electric heating pipes and water pipes are embedded inside or on the surfaces of the electrodes, electric heating wires are arranged inside the electric heating pipes, water is introduced into the water pipes, the water pipes are also connected with a cold water machine, and water approaching to the ice point is introduced into the water pipes. After the fast substrate temperature raising and reducing device is adopted, the raising and reduction velocity of the electrode temperature can be obviously accelerated, both the operation efficiency and the utilization rate of equipment are improved, and the production capability of the equipment is also fully exerted.
Description
Technical field
The utility model relates to fexible film photovoltaic cell scale manufacturing device, specially refers to PECVD and prepares base material rapid temperature rise and drop device in the process.
Background technology
Before the utility model proposed, the manufacturing of fexible film photovoltaic cell had formed the production of mass-producing.In the production process of this mass-producing, PECVD (plasma enhanced chemical vapor deposition) preparation operation is crucial technological process.When system added voltage between electrode, the electronics that is come out by emission of cathode was accelerated at electric field and obtains energy, through with reaction chamber in gas or molecular impact, make its separation, excite or ionization, formed a lot of electronics, ion and reactive group.Particle with positive equate with negative total charge, be a kind of plasma body.These particles of forming plasma body through series of physical-chemical reaction process, form film with regard to being deposited on the base material.The PECVD operation is carried out in vacuum apparatus, and the electrode of mutual correspondence is arranged in this equipment, is covered with base material on the electrode, and electrode also links together with the outer radio-frequency power supply of equipment.Utilize the radio-frequency power supply counter electrode to heat, when reaching specified temperature, the electronics that obtains energy just begins the PECVD operation, and when the film on base material reached certain requirement, the PECVD operation just stopped to carry out.This operation need just can be carried out under certain temperature (～200 ℃); Radio-frequency power supply on the dependence equipment carries out heat temperature raising; Because the power of radio-frequency power supply is not high, so temperature rise rate is less, need boosting and needs just can reach working temperature to the time than length.Among the PECVD operation process, the battery substrate needs different temperature, could unload with atmosphere after the temperature of having plated the hull cell work in-process (being base material) of film also need reduce to contact.Common way is in equipment, to feed nitrogen, utilizes flowing nitrogen that the heat in the equipment is brought out, and reaches the purpose of cooling.Yet the heat that nitrogen can be taken away is limited, is difficult at short notice the temperature of equipment is lowered.Thereby influence plant factor.
The utility model content
The technical problem that the utility model will solve is to overcome deficiency of the prior art, propose a kind of in the film photovoltaic cell scale manufacturing base material rapid temperature rise and drop device.In the PECVD operation process, shorten and heat up and temperature fall time, improve operating efficiency and usage ratio of equipment.
The utility model is to realize through following technical measures.Base material rapid temperature rise and drop device in the film photovoltaic cell scale manufacturing comprises that inside is equipped with the vacuum apparatus of electrode, and described electrode interconnects with outside radio-frequency power supply, on the described electrode also with base material; On described electrode, inlaying inner the be equipped with electrothermal tube of nichrome wire and the water pipe of inner water flowing.
Described electrothermal tube and water pipe are embedded in electrode surface or inside.
Described electrode interconnects with outside radio-frequency power supply, converts electrical energy into heat energy, and directly counter electrode heats, because electric heating tube is to be embedded in the heat conduction good metal electrode, realizes being rapidly heated of electrode through the control to electric power.
Described water pipe links to each other with handpiece Water Chilling Units, and the heat of electrode will be through giving water coolant thermal energy transfer with the heat exchange of water coolant.Because water-cooled tube is to be embedded in the heat conduction good metal electrode,, realize the control of electric power is realized the fast cooling of electrode through delivering goods with the heat of chilled(cooling) water return (CWR).
After the utility model adopts abovementioned technology, when the PECVD operation begins to carry out, utilize the electrothermal tube that nichrome wire is housed to continue heating, till reaching processing temperature.After the PECVD end of job, utilize the water coolant counter electrode in the water pipe to cool off, also can use water to cool off through cooling-water machine near freezing point.So no matter to be the heating phase, or colling stages, the elevation rate of electrode temperature can be accelerated significantly, also will save many times, and operating efficiency and usage ratio of equipment all increase, and the throughput of equipment also is able to give full play to.
Description of drawings
Accompanying drawing 1 is the equipment synoptic diagram among the embodiment of the utility model.
Accompanying drawing 2 is that electrode among the embodiment 2 of the utility model, electrothermal tube, water pipe are arranged synoptic diagram.
Among the figure: 1 is vacuum apparatus, and 2 is one of electrode, and 3 is one of electrode, and 4 is radio-frequency power supply, and 5 do
Base material, 6 is nichrome wire, and 7 is electrothermal tube, and 8 is water pipe, and 9 is cooling-water machine, 10 is heating power supply.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is described further.
When the PECVD operation begins operation, connect nichrome wire 6 by heating power supply 10, further heat through electrothermal tube 7 counter electrode 2 and 3, base material, till reaching job requirement.
After accomplishing the PECVD operation, when needing cooling, start cooling-water machine 9, to the water of water pipe 8 conveyings, till the temperature of electrode 2 and 3, base material reaches normal temperature near freezing point.
Embodiment 2.Referring to Fig. 1 and Fig. 2, in the film photovoltaic cell scale manufacturing, carry out the equipment of PECVD operation, be with the difference of embodiment 1: the electrothermal tube 7 that nichrome wire 6 is housed is embedded on the surface of electrode 2 and 3; 8 inboards that are embedded in electrode 2 and 3 of water pipe of inner water flowing are more near the place of base material.When needs were lowered the temperature, the cooling performance of the water coolant in the water pipe 8 was more effective like this, and rate of cooling improves more.
Above-described only is the preferred implementation of the utility model.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the utility model principle, can also make some modification and improvement, these also should be regarded as belonging to the protection domain of the utility model.
Claims (3)
1. base material rapid temperature rise and drop device in the film photovoltaic cell scale manufacturing comprises that inside is equipped with the vacuum apparatus (1) of electrode (2 and 3), and described electrode (2 and 3) interconnects with outside radio-frequency power supply (4), also has base material (5) on the described electrode (2 and 3); It is characterized in that: on described electrode (2 and 3), inlaying the electrothermal tube (7) that inside is housed by nichrome wire (6) and the water pipe (8) of inner water flowing.
2. according to claim 1 in the film photovoltaic cell scale manufacturing base material rapid temperature rise and drop device, it is characterized in that: described electrothermal tube (7) and water pipe (8) are embedded in electrode (2 and 3) surface or inner.
3. according to claim 1 in the film photovoltaic cell scale manufacturing base material rapid temperature rise and drop device, it is characterized in that: described water pipe (8) with provide cooling-water machine (9) to interconnect near the water of freezing point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200695587U CN202107764U (en) | 2011-03-17 | 2011-03-17 | Fast substrate temperature raising and reducing device in film photovoltaic cell scale manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200695587U CN202107764U (en) | 2011-03-17 | 2011-03-17 | Fast substrate temperature raising and reducing device in film photovoltaic cell scale manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202107764U true CN202107764U (en) | 2012-01-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200695587U Expired - Fee Related CN202107764U (en) | 2011-03-17 | 2011-03-17 | Fast substrate temperature raising and reducing device in film photovoltaic cell scale manufacture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202107764U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102174691A (en) * | 2011-03-17 | 2011-09-07 | 苏州思博露光伏能源科技有限公司 | Quick base material temperature raising and reducing technology in large-scale production of thin film photovoltaic battery |
-
2011
- 2011-03-17 CN CN2011200695587U patent/CN202107764U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102174691A (en) * | 2011-03-17 | 2011-09-07 | 苏州思博露光伏能源科技有限公司 | Quick base material temperature raising and reducing technology in large-scale production of thin film photovoltaic battery |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120111 Termination date: 20180317 |