CN202107758U - Vacuum sputtering equipment - Google Patents
Vacuum sputtering equipment Download PDFInfo
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- CN202107758U CN202107758U CN2011202032579U CN201120203257U CN202107758U CN 202107758 U CN202107758 U CN 202107758U CN 2011202032579 U CN2011202032579 U CN 2011202032579U CN 201120203257 U CN201120203257 U CN 201120203257U CN 202107758 U CN202107758 U CN 202107758U
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- transport unit
- target
- track
- slide rail
- travelling belt
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Abstract
The utility model relates to the field of vacuum coating, in particular to vacuum sputtering equipment comprising a vacuum cavity, a base plate, target material and displacement measuring equipment. The target material is consumed gradually in the working process of coating the base plate and becomes thinner and thinner gradually, and the displacement measuring equipment is arranged in the vacuum sputtering equipment and is used for measuring the consumption of the target material when the vacuum sputtering equipment stops the coating work so as to obtain the accurate consumption of the target material and replace the target material timely when the target material is consumed excessively. By adopting the measurement way to replace a traditional way of roughly measuring the consumption of the target material by using time, the replace frequency of the target material is reduced, the waste on the left target material is reduced, and the cost is saved.
Description
Technical field
The utility model relates to the vacuum plating field, especially a kind of vacuum sputtering equipment.
Background technology
Present vacuum sputtering equipment to substrate film coating, owing to the consumption of target, can not carry out displacement measurement accurately to target consumption degree in the cavity through target in operational process.For example in the interior plated film consumption process of vacuum sputtering equipment, target material surface causes thickness consumption to reduce with etching takes place duration of service, and target life reduces.But in this process, can't monitor its etching deformation quantity in real time, so can't accurately understand its remaining life, cause target just not change in advance to work-ing life, utilization ratio is low, cost of idleness.Therefore need to the target proofing unit that improves this kind problem, also there is similar problem in other consumer.
The utility model content
For improving the problem that exists in the prior art, the utility model proposes a kind of vacuum sputtering equipment, in order to confirm the thickness of vacuum sputtering device interior target.
The vacuum sputtering equipment that the utility model proposes comprises: vacuum cavity; Be oppositely arranged on intravital substrate of vacuum chamber and target, also comprise: being arranged at being used between said substrate and the target measures the displacement measuring device of target consumption.
Said displacement measuring device comprises:
Be fixed on first track on the vacuum cavity inwall, be positioned at target outside the sputter area of substrate, and parallel with target material surface;
Transport unit, an end are slidingly connected with first track and are vertical with first track;
Drive transmission unit connects first track and transport unit respectively along the gear unit that slides on first track;
Displacement sensor connects said transport unit, and is moving between substrate and the target and in the plane parallel with target with said transport unit.
Target can consume in the working process of substrate being carried out plated film gradually; The attenuation gradually of the thickness of target plate; Through displacement sensor being set at the vacuum sputtering device interior, when vacuum sputtering equipment stops plated film work, the consumption degree of target is measured, can draw accurately the target consumption and when target overruns, in time change; This kind metering system replaces the form with the consumption of rough measurement duration of service target in the past; Reduced the replacing number of times of target, and, practiced thrift cost the waste of the target that do not use.
Said gear unit comprises:
Second drive-motor connects the transport unit and first track respectively, and drives transport unit one end along the walking of first track length; Perhaps
Along first track length direction, first travelling belt around the home; Be fixed on first track, one end and drag first driving motor of first travelling belt, be fixed on the first track the other end and be fixedly connected first travelling belt with said transport unit one end of the driven pulley of first travelling belt.
The purpose that gear unit is set is to drive transport unit to realize moving back and forth along the length direction of first track.
Said transport unit comprises: slide rail, and drive first drive-motor of said displacement sensor along the slide rail walking.
Said transport unit comprises: slide rail; Along slide rail length direction second travelling belt around the home; And be fixed on slide rail one end and drag second driving motor of second travelling belt, be fixed on the slide rail the other end and be fixed on second travelling belt with the driven pulley displacement sensor of second travelling belt.
Further, the other end of transport unit also is connected with parallel first track and is fixed on second track on the vacuum cavity inwall.
Said transport unit comprises: expansion link, said displacement sensor is connected the expansion link the other end.
This kind design is to substitute the purpose that realizes the moving displacement transmitter along the slide rail move mode with stretch mode.
The displacement measuring device of the another kind of structure of the vacuum sputtering device interior that the utility model proposes comprises:
Rotary electric machine, rotary electric machine are arranged on target outside the sputter area of substrate;
Transport unit, an end of transport unit is connected with rotary electric machine, and parallel with target material surface;
Displacement sensor is connected on the transport unit, and is moving between substrate and the target and in the plane parallel with target with transport unit.
At vacuum cavity set inside rotary electric machine; And be connected with transport unit; Purpose is the rotation through rotary electric machine, drives the relative in-plane moving of transport unit at target and substrate, simultaneously because transport unit is connected with displacement sensor; Therefore can the consumption degree of the various piece of target material surface be realized measuring, can accurately measure the target consumption equally and in time change according to the consumption situation of target.
Said transport unit comprises: slide rail, and drive three drive-motor of said displacement sensor along the slide rail walking.
Said transport unit comprises: slide rail; Along slide rail length direction the 3rd travelling belt around the home; And be fixed on slide rail one end and drag the 3rd driving motor of the 3rd travelling belt, be fixed on the slide rail the other end and be fixed on the 3rd travelling belt with the driven pulley displacement sensor of the 3rd travelling belt.
Said transport unit comprises: expansion link, said displacement sensor is connected the expansion link the other end.
This kind design also is to utilize stretch mode to substitute the purpose that realizes the moving displacement transmitter along the slide rail move mode.
The vacuum sputtering equipment that the utility model proposes; Through between target in vacuum cavity and the substrate displacement sensor being set; Realization is to the measurement of the etching deformation quantity of substrate surface; Therefore can measure the consumption of target accurately and also in time change, improve the utilization ratio of target, practice thrift cost.
Description of drawings
Be clear the utility model and the beneficial effect thereof described, in conjunction with following accompanying drawing to being described in detail of embodiment, wherein:
Fig. 1 is the inner structural perspective of vacuum sputtering equipment vacuum cavity that the utility model embodiment 1 provides;
Fig. 2 is first kind of vacuum sputtering equipment inner structure figure that the utility model embodiment 1 provides;
Fig. 3 is second kind of vacuum sputtering equipment inner structure figure that the utility model embodiment 1 provides;
Fig. 4 is the third vacuum sputtering equipment inner structure figure that the utility model embodiment 1 provides;
Fig. 5 is the 4th kind of vacuum sputtering equipment inner structure figure that the utility model embodiment 1 provides;
Fig. 6 is first kind of vacuum sputtering equipment inner structure figure that the utility model embodiment 2 provides;
Fig. 7 is second kind of vacuum sputtering equipment inner structure figure that the utility model embodiment 2 provides;
Fig. 8 is the third vacuum sputtering equipment inner structure figure that the utility model embodiment 2 provides.
Embodiment
Describe the embodiment of the utility model below in detail, the example of said embodiment is shown in the drawings, and wherein identical from start to finish or similar label is represented identical or similar elements or the element with identical or similar functions.Be exemplary through the embodiment that is described with reference to the drawings below, only be used to explain the utility model, and can not be interpreted as restriction the utility model.
In the description of the utility model; The orientation of indication such as term " top ", " bottom " " top ", " below " or position relation are for concerning based on orientation shown in the drawings or position; Only be for the ease of describing the utility model rather than requiring the utility model therefore can not be interpreted as restriction with specific azimuth configuration and operation to the utility model.
Embodiment 1:
The vacuum sputtering equipment of the utility model embodiment is described with reference to figure 1～Fig. 5 below.
As shown in Figure 1, vacuum sputtering equipment comprises: vacuum cavity 1; Be oppositely arranged on substrate 11 and target 12 in the vacuum cavity 1, also comprise: being arranged at being used between said substrate and the target measures the displacement measuring device of target consumption.
Displacement measuring device comprises:
Be fixed on first track 2 on vacuum cavity 1 inwall, be positioned at outside target 12 and the substrate 11 opposite face scopes, and parallel with target 12 surfaces;
First track is arranged at target 12 outside the sputter area of substrate 11, and purpose is the plated film work that does not influence 12 pairs of substrates 11 of target.Carry out in the working process of plated film at 12 pairs of substrates of target 11, transport unit 2 and displacement sensor 4 parked in target 12 to the sputter area of substrate 11 outside.After plated film work stops; In the time of need measuring target 12; Under the effect of gear unit, transport unit 3 moves along the length direction of first track 2, when arriving specified horizontal position; The displacement sensor 4 that is positioned on the transport unit 3 just can move up and down along the longitudinal direction of transport unit 3, thereby realizes the measurement to target 12 surfaces.
As shown in Figure 2, gear unit can adopt the directly mode of driving of drive-motor, for example is fixedly mounted on second drive-motor 21 of transport unit 3 one ends.Second drive-motor 21 connects first track 2; Its mode of connection can be: on second drive-motor 21, gear is installed, on first track 2, tooth bar is set, the mutual interlock of wheel and rack; Under the positive and negative rotation of second drive-motor 21, driven gear moves back and forth on tooth bar.In order to guarantee that transport unit 3 remains vertical with first track 2 in moving process; Two or more synchronous second drive-motor 21 arranged side by side can also be set; And be separately installed with first track 2 on the gear that cooperates of tooth bar; Under the acting in conjunction of synchronous machine, make that moving back and forth of transport unit 3 is more steady.Further, can drive several gears simultaneously, drive the gear unit that is no less than two and cooperate, on first track 2, move back and forth to drag transport unit 3 with tooth bar through one second drive-motor 21.
As shown in Figure 3, gear unit can also be the travelling belt driving style, and then gear unit comprises: be fixed on first driving motor 22 of first track, 2 one ends, on first driving motor 22 around the home first travelling belt 23.First travelling belt 23 is the length direction settings along first track 2, and the opposite end of first driving motor 22 on first track 2 also is provided with the pulley 24 that supports first travelling belt 23.First travelling belt 23 is driven by first driving motor 22, and under the mating reaction of pulley 24, realizes running.Transport unit 3 one ends are fixedly connected on first travelling belt 23, and along with the running of first travelling belt 23 length direction along first track 2 moves reciprocatingly.
As shown in Figure 2; Transport unit 3 can comprise the slide rail 31 and first drive-motor 211; First drive-motor 211 is set in place on the displacement sensor 4, and contacts with slide rail 31, when first drive-motor 211 rotates; Interact with slide rail 31, reciprocatingly move along the length direction of slide rail 31 thereby can drive displacement sensor 4.First drive-motor 211 can adopt the fit system of wheel and rack to be connected with the mode of connection of slide rail 31 equally; Gear through being arranged on first drive-motor 211 matches with tooth bar on being arranged on slide rail 31; Driving displacement sensor 4 moves on the direction of vertical first track 2; And through with the cooperating of driver element, displacement sensor 4 can be measured target 12 whole surfaces.
As shown in Figure 3, in the another kind of concrete implementation of transport unit 3, comprising: slide rail 31, be fixed with second driving motor 32 at slide rail 31 1 ends, be provided with pulley 24, the second travelling belts 33 around second driving motor 32 and pulley 24 at the other end of slide rail 31.When second driving motor 32 rotates, under the cooperation of pulley 24, drive second travelling belt 33 and realize running.Displacement sensor 4 is fixed on second travelling belt 33, thereby can on the direction of vertical first track 2, move back and forth along with the running of second travelling belt 33.And through with the cooperating of driver element, target 12 surfaces are detected.
As shown in Figure 4; Further improvement to present embodiment is: at the other end of transport unit 3 second track 5 of first track 2 that is slidingly connected with transport unit 3 and is parallel to is set, the effect of this kind setting is in order better to stablize transport unit 3 in the intravital operation of vacuum chamber.
For example shown in Figure 5, expansion link 34 is transport unit 3 another concrete implementation, and expansion link 34 1 ends are slidingly connected through the gear unit and first track 2; The other end is fixedly connected displacement sensor 4; Expansion link 34 cooperates with gear unit when work, and when gear unit moved to the appointment horizontal position with expansion link, expansion link 34 was protruding from the basic point position; Drive displacement sensor 4 and arrive specified lengthwise position, thereby realize making displacement sensor 4 in the target 12 surperficial purposes that move.When adopting expansion link 34, gear unit can be any concrete structure that provides in the present embodiment 1.
Embodiment 2:
The vacuum sputtering equipment of the utility model embodiment is described with reference to figure 6, Fig. 7, Fig. 8 below.
As shown in Figure 6, the displacement measuring device of the another kind of structure that the utility model provides comprises:
Rotary electric machine 7, rotary electric machine 7 are arranged on outside the sputter area of substrate 11 and target;
Transport unit, an end of transport unit is connected with rotary electric machine 7, and parallel with target material surface;
The rotary electric machine 7 that is arranged in the vacuum cavity 1 is connected with vacuum cavity 1 outer opertaing device; Through setting to opertaing device; Can control rotary electric machine 7 angle rotation according to the rules, and it is mobile in the sputter area of substrate 11 and target 12 to drive transport unit.Displacement sensor 4 can move along the transport unit length direction, therefore through with the cooperating of rotary electric machine 7, displacement sensor 4 can move to the optional position of target material surface according to demand, and is implemented in the accurate location and the measurement on target 12 surfaces.
Transport unit and displacement sensor 4 are positioned at when the plated film working order of vacuum sputtering equipment outside the sputter area of target 12 and substrate 11; After 12 pairs of substrates of target 11 carry out plated film work and stop; In the time of need measuring target 12; Transport unit can move to the rotation of rotary electric machine 7 in the relative scope of target 12 and substrate 11, and drives displacement sensor and move to specified location, thereby realizes target 12 is measured.
Transport unit can be: the 3rd drive-motor 212 that is provided with on slide rail 6 and the displacement sensor 4, displacement sensor 4 can move back and forth along the length direction of slide rail 6 under the effect of the 3rd drive-motor 212.The 3rd drive-motor 212 can adopt the fit system of wheel and rack to be connected with the mode of connection of slide rail 6; On the 3rd drive-motor 212, gear is set; On slide rail 6, tooth bar is set; The driven gear running cooperates with tooth bar through the running of the 3rd drive-motor, realizes that drive displacement sensor 4 moves back and forth along the length direction of transport unit.
As shown in Figure 7; In the another kind of concrete implementation of transport unit: transport unit is set to slide rail 6, is fixed with the 3rd driving motor 61 at slide rail 6 one ends, is provided with pulley at the other end of slide rail 6; The 3rd travelling belt 62 is around the 3rd driving motor 61 and pulley; When 61 runnings of the 3rd driving motor, under the cooperation of pulley, drive the 3rd travelling belt 62 and realize running.Displacement sensor 4 is fixed on the 3rd travelling belt 62, and the length direction along transport unit moves back and forth along with the running of the 3rd travelling belt 62.
As shown in Figure 8, expansion link 8 is another concrete implementation of transport unit, and expansion link 8 one ends are fixedly connected with rotary electric machine 7; Through the rotation of rotary electric machine, can drive expansion link 8 and move at substrate surface, the other end is fixedly connected displacement sensor 4; When rotary electric machine 7 turns to prescribed position; Expansion link 8 is protruding from the basic point position, and displacement sensor 4 is moved to specified location, realizes the purpose to target 12 surface measurements.
Although illustrated and described the embodiment of the utility model; Those having ordinary skill in the art will appreciate that: under the situation of principle that does not break away from the utility model and aim; Can carry out multiple variation, modification, replacement and modification to these embodiment, the scope of the utility model is limited claim and equivalent thereof.
Claims (10)
1. a vacuum sputtering equipment comprises: vacuum cavity; Be oppositely arranged on intravital substrate of vacuum chamber and target, it is characterized in that, also comprise: being arranged at being used between said substrate and the target measures the displacement measuring device of target consumption.
2. vacuum sputtering equipment according to claim 1 is characterized in that said displacement measuring device comprises:
Be fixed on first track on the vacuum cavity inwall, be positioned at target outside the sputter area of substrate, and parallel with target material surface;
Transport unit, an end are slidingly connected with first track and are vertical with first track;
Drive transmission unit connects first track and transport unit respectively along the gear unit that slides on first track;
Displacement sensor connects said transport unit, and is moving between substrate and the target and in the plane parallel with target with said transport unit.
3. like the said vacuum sputtering equipment of claim 2, it is characterized in that said gear unit comprises:
Second drive-motor connects the transport unit and first track respectively, and drives transport unit one end along the walking of first track length; Perhaps
Along first track length direction, first travelling belt around the home; Be fixed on first track, one end and drag first driving motor of first travelling belt; Be fixed on the first track the other end and with the driven pulley of first travelling belt, said transport unit one end is fixedly connected first travelling belt.
4. like the said vacuum sputtering equipment of claim 3, it is characterized in that said transport unit comprises: slide rail, and drive first drive-motor of said displacement sensor along the slide rail walking.
5. like the said vacuum sputtering equipment of claim 3; It is characterized in that; Said transport unit comprises: slide rail along slide rail length direction second travelling belt around the home, and is fixed on slide rail one end and drags second driving motor of second travelling belt; Be fixed on the slide rail the other end and with the driven pulley of second travelling belt, displacement sensor is fixed on second travelling belt.
6. like claim 4 or 5 said vacuum sputtering equipment, it is characterized in that, also comprise:
Second track, parallel first track is fixed on the vacuum cavity inwall.
7. like the said vacuum sputtering equipment of claim 3, it is characterized in that said transport unit comprises: expansion link, said displacement sensor is connected the expansion link the other end.
8. vacuum sputtering equipment according to claim 1 is characterized in that said displacement measuring device comprises:
Rotary electric machine, rotary electric machine are arranged on target outside the sputter area of substrate;
Transport unit, an end of transport unit is connected with rotary electric machine, and parallel with target material surface;
Displacement sensor is connected on the transport unit, and is moving between substrate and the target and in the plane parallel with target with transport unit.
9. like the said vacuum sputtering equipment of claim 8, it is characterized in that said transport unit comprises: slide rail, and drive three drive-motor of said displacement sensor along the slide rail walking.
10. like the said vacuum sputtering equipment of claim 8; It is characterized in that; Said transport unit comprises: slide rail along slide rail length direction the 3rd travelling belt around the home, and is fixed on slide rail one end and drags the 3rd driving motor of the 3rd travelling belt; Be fixed on the slide rail the other end and with the driven pulley of the 3rd travelling belt, displacement sensor is fixed on the 3rd travelling belt; Or
Said transport unit comprises: expansion link, said displacement sensor is connected the expansion link the other end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202032579U CN202107758U (en) | 2011-06-16 | 2011-06-16 | Vacuum sputtering equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202032579U CN202107758U (en) | 2011-06-16 | 2011-06-16 | Vacuum sputtering equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202107758U true CN202107758U (en) | 2012-01-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202032579U Expired - Lifetime CN202107758U (en) | 2011-06-16 | 2011-06-16 | Vacuum sputtering equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202107758U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105220124A (en) * | 2015-10-10 | 2016-01-06 | 京东方科技集团股份有限公司 | Fixing base station and evaporated device |
-
2011
- 2011-06-16 CN CN2011202032579U patent/CN202107758U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105220124A (en) * | 2015-10-10 | 2016-01-06 | 京东方科技集团股份有限公司 | Fixing base station and evaporated device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150707 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150707 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150707 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE Technology Group Co., Ltd. Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd. Address before: 100176 Beijing city in Western Daxing District economic and Technological Development Zone, Road No. 8 Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120111 |