CN202092460U - Vacuum furnace - Google Patents
Vacuum furnace Download PDFInfo
- Publication number
- CN202092460U CN202092460U CN2011201733618U CN201120173361U CN202092460U CN 202092460 U CN202092460 U CN 202092460U CN 2011201733618 U CN2011201733618 U CN 2011201733618U CN 201120173361 U CN201120173361 U CN 201120173361U CN 202092460 U CN202092460 U CN 202092460U
- Authority
- CN
- China
- Prior art keywords
- vacuum
- vacuum tank
- heating chamber
- temperature
- drying oven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The utility model discloses a vacuum furnace, which relates to thermal treatment and reduction sintering processes of semiconductor devices and material materials, can also be used for carbonization tests, and aims to solve the technical problem that conventional vacuum furnaces cannot meet requirements of high-temperature processing testes, cannot realize continuous evacuation and are uneven in temperature of fireboxes and the like. The vacuum furnace is characterized in that a mechanical frame is in a vertical structure, a combustion chamber is fixed on the upper portion of the mechanical frame, a vacuum system is disposed inside the mechanical frame, and rollers are mounted at the bottom of the mechanical frame. Further, the combustion chamber consists of a vacuum tank and a heating cavity, the vacuum tank is a sealed cylinder formed by welding double layers of steel plates, a front door can be opened and provided with a hand locking device, a pressure gauge, a safety valve and an exhaust valve are mounted on the top of the vacuum tank, a power wire connector is arranged on the lateral side of the vacuum tank, a fire resistant layer in the heating cavity can be made from mullite fiber products, U-shaped silicon molybdenum rods are selected for heating, and a circulating cooling water connector is mounted on one side of the mechanical frame. The vacuum furnace meets requirements of high-temperature processing tests and realizes continuous evacuation in high temperature and temperature of the combustion chamber can be ketp uniform.
Description
Technical field
The utility model belongs to the experiment kiln, specifically is heat treatment and the reductive sintered technology that is used for semiconductor devices, metal material, also can be used for the charing test.
Background technology
The vacuum drying oven serial equipment mainly is applicable to the heat treatment and the reductive sintered technology of semiconductor devices, metal material, also can be used for the charing test.At present, traditional vacuum drying oven adopts the resistance wire heating, because the resistance wire limiting temperature is lower, causes the temperature of burner hearth also lower, does not satisfy the high-temperature technology experimental requirements; On Vacuum System Design, legacy equipment can only vacuumize when low temperature, can not vacuumize when high temperature, more can not when high temperature, vacuumize continuously, because the burner hearth material can discharge gas in the heat temperature raising process, the vacuum of equipment is reduced, can not normally carry out thereby influence technological experiment; In addition, form because traditional vacuum drying oven burner hearth adopts heavy material to build by laying bricks or stones, heavy material density is big, thermal capacitance is bad, fall slag easily, causes fire box temperature inhomogeneous, is difficult to reach index and requirement high, the experiment of Seiko skill.
Summary of the invention
A kind of vacuum drying oven of the utility model technical problem to be solved is: overcome the defective of above-mentioned traditional vacuum stove, the vacuum drying oven device of characteristics such as providing a kind of and have that temperature is uniform and stable, programming rate is fast, energy-conservation and life-span is long.
Technical solution adopted in the utility model is: a kind of vacuum drying oven mainly contains mechanical framework, burner hearth, vacuum system composition, and mechanical framework is a vertical structure, and top is burner hearth fixedly, and vacuum system is equipped with in the inside, and roller is equipped with in the bottom.Burner hearth is the external seal formula, form by vacuum tank and heating chamber, it is barrel-shaped that vacuum tank is welded into O-ring by double-layer plate, the Qianmen openable, the band manual locking device, Pressure gauge, safety valve, vent valve are equipped with in the top, side arrangement has electric source line interface, the front and back end socket connects by flange, the sealing of silica gel circle, interlayer water flowing cooling.Heating chamber is a monoblock type, can pass in and out vacuum tank, adopt full fiber light material seaming assembled, flame retardant coating is selected the mullite fiber goods for use, the load bearing board of placing material is arranged at the bottom, and load bearing board is selected the corundum-mullite material for use, and U type Si-Mo rod is selected in heating for use, Si-Mo rod is arranged in the heating chamber both sides, is suspended on the heating chamber top with anchor clamps.The recirculated cooling water interface is equipped with in the mechanical framework side of vacuum system outside.
The beneficial effects of the utility model are: vacuum system can vacuumize when high temperature continuously, and good vacuum environment is provided; Utilize interlayer of steel plate to completely cut off heat, reduce stove table temperature, prevent to burn; Effectively overcome furnace roof caving in and cracking phenomena in use; The temperature of heating chamber is even, guarantees the sintering quality of material; Equipment appearance is elegant in appearance, and operation is succinct, and maintenance and repair is very convenient.
Description of drawings
Fig. 1 is a kind of vacuum drying oven front view of the utility model.
1 is mechanical framework, and 2 is burner hearth, and 3 is vacuum system, and 4 is roller, and 7 is manual locking device, and 8 is Pressure gauge, and 9 is safety valve, and 10 is vent valve.
Fig. 2 is a kind of vacuum drying oven left view of the utility model.
5 is vacuum tank, and 6 is heating chamber, and 11 is the recirculated cooling water interface, and 12 is electric source line interface, and 13 is flame retardant coating, and 14 is load bearing board, and 15 is Si-Mo rod.
The specific embodiment
As Fig. 1 and Fig. 2, a kind of vacuum drying oven mainly contains mechanical framework 1, burner hearth 2, vacuum system 3 compositions, and mechanical framework 1 is a vertical structure, and top is burner hearth 2 fixedly, and vacuum system 3 is equipped with in the inside, and roller 4 is equipped with in the bottom, can move.Mechanical framework 1 main body all adopts GB A 3 sheet materials and section bar to be welded, and elegant in appearance for equipment appearance, the free-standing electrostatically plastic-blasting is all adopted on the surface, and maintenance, repair are very convenient.
Burner hearth 2 is the external seal formula, is made up of vacuum tank 5 and heating chamber 6, and it is barrel-shaped that vacuum tank 5 is welded into O-ring by double-layer plate, in order to good vacuum environment to be provided, to utilize interlayer of steel plate to completely cut off heat simultaneously, reduces stove table temperature, prevents to burn.Vacuum tank 5 Qianmen openables, band manual locking device 7, Pressure gauge 8, safety valve 9, vent valve 10 are equipped with in vacuum tank 5 tops, and side arrangement has electric source line interface 12, and vacuum tank 5 front and back end sockets connect by flange, the sealing of silica gel circle, interlayer water flowing cooling.
Recirculated cooling water interface 11 is equipped with in mechanical framework 1 side of vacuum system 3 outsides.
Claims (4)
1. a vacuum drying oven mainly contains mechanical framework (1), burner hearth (2), vacuum system (3) composition, and it is characterized in that: described mechanical framework (1) is a vertical structure, and top is burner hearth (2) fixedly, and vacuum system (3) is equipped with in the inside, and roller (4) is equipped with in the bottom.
2. a kind of vacuum drying oven according to claim 1, it is characterized in that: described burner hearth (2) is the external seal formula, form by vacuum tank (5) and heating chamber (6), it is barrel-shaped that vacuum tank (5) is welded into O-ring by double-layer plate, vacuum tank (5) Qianmen openable, band manual locking device (7), Pressure gauge (8), safety valve (9), vent valve (10) are equipped with in vacuum tank (5) top, side arrangement has electric source line interface (12), end socket connects by flange before and after the vacuum tank (5), the sealing of silica gel circle, interlayer water flowing cooling.
3. a kind of vacuum drying oven according to claim 2, it is characterized in that: described heating chamber (6) is monoblock type, can pass in and out vacuum tank (5), heating chamber (6) adopts full fiber light material seaming assembled, flame retardant coating (13) is selected the mullite fiber goods for use, the load bearing board (14) of placing material is arranged at heating chamber (6) bottom, load bearing board (14) is selected the corundum-mullite material for use, select U type Si-Mo rod (15) heating for use, Si-Mo rod (15) is arranged in heating chamber (6) both sides, is suspended on heating chamber (6) top with anchor clamps.
4. a kind of vacuum drying oven according to claim 1 is characterized in that: recirculated cooling water interface (11) is equipped with in mechanical framework (1) side of described vacuum system (3) outside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201733618U CN202092460U (en) | 2011-05-27 | 2011-05-27 | Vacuum furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201733618U CN202092460U (en) | 2011-05-27 | 2011-05-27 | Vacuum furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202092460U true CN202092460U (en) | 2011-12-28 |
Family
ID=45367525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201733618U Expired - Fee Related CN202092460U (en) | 2011-05-27 | 2011-05-27 | Vacuum furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202092460U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104110965A (en) * | 2014-07-14 | 2014-10-22 | 洛阳市西格马炉业有限公司 | High-temperature air pressure sintering furnace |
| CN104154749A (en) * | 2013-05-15 | 2014-11-19 | 苏州先端稀有金属有限公司 | Vertical type vacuum-atmosphere high-temperature furnace |
| CN104591132A (en) * | 2015-02-10 | 2015-05-06 | 镇江博昊科技有限公司 | High-temperature heating vacuum furnace for carbonized catalyzation and graphitized purification |
-
2011
- 2011-05-27 CN CN2011201733618U patent/CN202092460U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104154749A (en) * | 2013-05-15 | 2014-11-19 | 苏州先端稀有金属有限公司 | Vertical type vacuum-atmosphere high-temperature furnace |
| CN104110965A (en) * | 2014-07-14 | 2014-10-22 | 洛阳市西格马炉业有限公司 | High-temperature air pressure sintering furnace |
| CN104110965B (en) * | 2014-07-14 | 2016-08-24 | 洛阳西格马炉业股份有限公司 | A kind of high temperature air pressure sintering furnace |
| CN104591132A (en) * | 2015-02-10 | 2015-05-06 | 镇江博昊科技有限公司 | High-temperature heating vacuum furnace for carbonized catalyzation and graphitized purification |
| CN104591132B (en) * | 2015-02-10 | 2016-06-29 | 镇江博昊科技有限公司 | A kind of high-temperature heating vacuum drying oven purified for carbonization catalysis and graphitization |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102896391B (en) | A kind of chain type vacuum furnace | |
| CN102284762B (en) | Horizontal no-muffle pushing rod type continuous brazing furnace | |
| CN202199884U (en) | Horizontal unmuffled pusher-type continuous brazing furnace | |
| CN202092460U (en) | Vacuum furnace | |
| CN105466209A (en) | Heat-insulated efficient energy-saving bottom discharge vertical vacuum calcination annealing furnace for zirconia fiber boards | |
| CN107723425A (en) | A kind of high-efficiency vacuum annealing furnace | |
| CN202254758U (en) | Efficient heating lifting furnace for rhodium reaction | |
| CN111879116A (en) | Billet steel smelting gas walking beam furnace sectional heating mechanism | |
| CN103836922B (en) | Bench vehicle type electrical resistance furnace | |
| CN105202917A (en) | Full-fiber box type resistance furnace | |
| CN203216247U (en) | Novel all-fiber muffle furnace | |
| CN203758291U (en) | Rectangular smoke hood suitable for multi-loop direct current submerged arc furnace | |
| CN202973857U (en) | Bogie-hearth resistance furnace | |
| CN206974174U (en) | A kind of energy-saving industrial electric furnace | |
| CN110004282B (en) | Trolley furnace for heat treatment of large parts | |
| CN107906948B (en) | A kind of horizontal-type high temperature hydrogen resistance furnace | |
| CN210506450U (en) | Sealed strenghthened type platform truck stove | |
| CN201740364U (en) | Brasses shaping for ore-smelting furnace and electrical furnace used for raising temperature in welding | |
| CN202177301U (en) | Full-automatic atmosphere protective resistance furnace | |
| CN203203392U (en) | Novel energy-saving sintering intermediate-frequency furnace | |
| CN202281493U (en) | Gas chamber type heating furnace | |
| CN202166313U (en) | Safe energy-gas-conservation high-temperature electric resistance furnace | |
| CN207395461U (en) | A kind of movable beam type high temperature sintering furnace | |
| CN206974175U (en) | A kind of energy saving temperature controlling industrial furnace | |
| CN202254811U (en) | Non-tank type protective atmosphere high-temperature experimental furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: HENGYANG ZHONGKE PHOTOELECTRONIC CO., LTD. Free format text: FORMER OWNER: HEFEI GAOGE HEAT TREATMENT APPLIED TECHNOLOGY CO., LTD. Effective date: 20140320 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 231131 HEFEI, ANHUI PROVINCE TO: 421100 HENGYANG, HUNAN PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20140320 Address after: 421100, No. 239, gathered Avenue, Hengnan County, Hengyang, Hunan Patentee after: HENGYANG ZHONGKE PHOTOELECTRON CO., LTD. Address before: Jinzang road Shuangfeng Industrial District of Hefei City, Anhui province 231131 No. 006 Patentee before: Hefei Gaoge Heat Treatment Applied Technology Co., Ltd. |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20151204 Address after: 421100, No. 239, gathered Avenue, Hengnan County, Hengyang, Hunan Patentee after: HENGYANG ZHONGKE PHOTOELECTRON CO., LTD. Patentee after: JIANGSU ZHONGKE PHOTOELECTRIC CO., LTD. Address before: 421100, No. 239, gathered Avenue, Hengnan County, Hengyang, Hunan Patentee before: HENGYANG ZHONGKE PHOTOELECTRON CO., LTD. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111228 Termination date: 20190527 |