CN202083512U - Micro-pressure sensor - Google Patents
Micro-pressure sensor Download PDFInfo
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- CN202083512U CN202083512U CN2011200873921U CN201120087392U CN202083512U CN 202083512 U CN202083512 U CN 202083512U CN 2011200873921 U CN2011200873921 U CN 2011200873921U CN 201120087392 U CN201120087392 U CN 201120087392U CN 202083512 U CN202083512 U CN 202083512U
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- girder
- fiber laser
- short cavity
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Abstract
The utility model relates to a micro-pressure sensor. The conventional micro-pressure sensor is easily interfered by the environment. The micro-pressure sensor comprises a sensor housing, a spring, an elastic film, an aluminum plate, a cantilever beam, a first short cavity optical fiber laser and a second short cavity optical fiber laser, wherein the elastic film is fixedly arranged at the top of the sensor housing, the aluminum plate arranged in the sensor housing is appressed to the bottom surface of the elastic film, one end of the spring is fixed with the inner bottom of the sensor housing, the other end of the spring is fixed with the bottom surface of the aluminum plate, and the elastic film, the aluminum plate and the spring are coaxially arranged. One end of the cantilever beam is fixed with the edge of the aluminum plate, and the other end of the cantilever beam is fixed with the inner wall of the sensor housing; and the first short cavity optical fiber laser is appressed to the top surface of the cantilever beam, and the second short cavity optical fiber laser is appressed to the bottom surface of the cantilever beam. By adopting an optical fiber sensing technology, the micro-pressure sensor is compact in structure, simple in technology, and free from the electromagnetic interference.
Description
Technical field
The utility model belongs to technical field of optical fiber sensing, relates to a kind of micropressure sensor.
Background technology
Pressure and pressure are one of modal important parameters in the engineering application, are that industries such as oil, chemical industry, building are the sensing amounts that must monitor.Along with deepening continuously of various application, pressure transducer there is further demand, as in application such as low-pressure gas, vacuum tightness, wind pressure monitoring, needing the pressure transducer of high sensitivity, lower range.At present this kind pressure transducer mostly is micro-pressure sensor based on MEMS on the home market, and pressure resistance type is arranged, condenser type, and three kinds of working methods such as resonant mode, its range majority rarely is lower than 1 KPa more than 1 KPa.The micro-pressure sensor of electronic type is under mal-conditions such as complex electromagnetic environment, and as easy as rolling off a log being interfered limited the application of some special occasions.Application publication number is the silicon piezoresistive pressure sensor that the patent " modified wind load pressure transducer " of CN 101738281 A is based on MEMS, and integrated temperature sensor, well heater, temperature-control circuit and signal conditioning circuit plate can be realized lower range (5 KPa) pressure measurement.But this sensor comprises a plurality of circuit, under measurement environment such as highfield high-intensity magnetic field and inapplicable, is disturbed easily even malfunctioning.
Optical fiber sensing technology be utilize optical fiber or optical-fiber type device various optical signallings to external world the characteristic of some physical quantity sensitivity carry out a kind of technology of sensing testing.Wherein, Fiber Bragg Grating FBG (FBG) and the strain and the temperature variation sensitivity that cause to external world based on its characteristic wavelength of short cavity fiber laser of FBG, so they are a kind of wavelength-modulated type optical sensors.The Bragg wavelength of bragg grating
Determine by following formula:
In the formula,
Be the effective refractive index of fibre core,
Be the cycle of grating.The cycle that is operated in the FBG of optical fiber communication wave band generally is the hundreds of nanometer, and it can reflect being transmitted in fibre core basic mode light wave on wavelength selectivity ground.Can design the pressure transducer that can adapt to High Temperature High Pressure, disturb rugged surroundings such as electromagnetic interference (EMI) based on FBG and cantilever beam structure, be described by the patent " fiber bragg grating pressure sensor " of CN 101750183 A as application publication number.But the sensitivity of this structure is about 0.008nm/N, only is suitable for the pressure sensing under the high pressure, is not suitable as lower range (1 KPa) micro-pressure sensor.
About 10～the 20mm of length of the short cavity fiber laser of on Er-doped fiber or erbium-ytterbium co-doped fiber, making FBG and constituting.It has not only continued into the advantage of fiber grating as sensor, also possesses more high resolving power, bigger signal to noise ratio (S/N ratio).Particularly adopt the laser output of the very close short cavity fiber laser of two wavelength or adopt two frequencies of Orthogonal Double frequency laser can produce beat signal by suitable processing on photo-detector, frequency is the difference frequency of two laser signals.
Summary of the invention
The purpose of this utility model is to provide a kind of micropressure sensor based on the short cavity fiber laser.This sensor utilizes laser output the carrying out beat frequency of short cavity fiber laser to realize sensing, is used to solve the high-sensitivity measurement and the anti-interference problems of measurement of small pressure.
One of technical scheme that the utility model technical solution problem is taked is:
Based on the micropressure sensor of short cavity fiber laser, comprise sensor housing, spring, elastic film, aluminium sheet, semi-girder, the first short cavity fiber laser and the second short cavity fiber laser.
The sensor housing top fixedly installs elastic film, being arranged on the interior aluminium sheet of sensor housing and the bottom surface of elastic film is close to, the end, fixed in one end of spring and the sensor housing, the bottom surface of the other end and aluminium sheet fixes the coaxial setting of described elastic film, aluminium sheet and spring.
One end of semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; The first short cavity fiber laser is close to the end face of semi-girder, and the second short cavity fiber laser is close to the bottom surface of semi-girder.
Described semi-girder is the sheet metal of isosceles triangle, and the described first short cavity fiber laser and the second short cavity fiber laser all are provided with along the axis of sheet metal.
Two of the technical scheme that the utility model technical solution problem is taked is:
Based on the micropressure sensor of short cavity fiber laser, comprise sensor housing, spring, elastic film, aluminium sheet, first semi-girder, second semi-girder and short cavity fiber laser.
The sensor housing top fixedly installs elastic film, being arranged on the interior aluminium sheet of sensor housing and the bottom surface of elastic film is close to, the end, fixed in one end of spring and the sensor housing, the bottom surface of the other end and aluminium sheet fixes the coaxial setting of described elastic film, aluminium sheet and spring.
One end of first semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; One end of second semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; First semi-girder be positioned at second semi-girder directly over, first semi-girder is identical with the second semi-girder shape.
Described first semi-girder and second semi-girder are the sheet metal of isosceles triangle, described short cavity fiber laser is between first semi-girder and second cantilever, and be close to setting with first semi-girder and second cantilever, the short cavity fiber laser is provided with along the axis of sheet metal.
The beneficial effects of the utility model: the phenomenon that (1) the utility model utilizes the beat signal frequency of short cavity fiber laser to produce drift realizes the lower range micro-pressure sensing, compares the utility model with traditional fiber grating pressure sensing and possesses higher sensitivity; (2) it is high to the utility model proposes second kind of the remolding sensitivity of first kind of scheme in two kinds of technical schemes, but the preparation of second kind of sensor is convenient; (3) the utility model adopts optical fiber sensing technology, compact conformation, and technology is simple, is not subjected to electromagnetic interference (EMI), compares with traditional electronic type lower range micro-pressure sensing method, more is applicable in the complex electromagnetic environment and uses to have vast potential for future development.
Description of drawings
Fig. 1 is the structural representation of the utility model first embodiment.
Fig. 2 is the structural representation of the utility model second embodiment.
Fig. 3 is a cantilever beam structure synoptic diagram in the utility model.
Fig. 4 obtains beat signal device synoptic diagram for utilizing first embodiment.
Fig. 5 obtains beat signal device synoptic diagram for utilizing second embodiment.
Embodiment
Embodiment 1
As shown in Figure 1 be the sensor construction figure of one of technical solutions of the utility model, comprise the first short cavity fiber laser 1-1, the second short cavity fiber laser 1-2, square-section isosceles triangle semi-girder 2, the circular aluminium sheet 3 of pressurized, elastic film 4, wire spring 5, sensor housing 6.
The sensor housing top fixedly installs elastic film, being arranged on the interior aluminium sheet of sensor housing and the bottom surface of elastic film is close to, the end, fixed in one end of spring and the sensor housing, the bottom surface of the other end and aluminium sheet fixes the coaxial setting of described elastic film, aluminium sheet and spring.
One end of semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; The first short cavity fiber laser is close to the end face of semi-girder, and the second short cavity fiber laser is close to the bottom surface of semi-girder.
Semi-girder is the sheet metal of isosceles triangle, and the first short cavity fiber laser and the second short cavity fiber laser all are provided with along the axis of sheet metal.
The first short cavity fiber laser 1-1 and the second short cavity fiber laser 1-2 all adopt the phase mask plate method to make on erbium-ytterbium co-doped fiber, high reflective grid reflectivity is generally 99.9%, low reflective grid reflectivity is about 95%, the about 15mm of whole laser instrument length, and threshold pump power is the milliwatt magnitude.Laser center wavelength is 1550nm, and signal to noise ratio (S/N ratio) is greater than 60 dB.
Beryllium-bronze square-section isosceles triangle semi-girder 2 adopts the beryllium-bronze plates to make, its synoptic diagram as shown in Figure 3, the base width is
, length is
, thickness is
The first short cavity fiber laser 1-1 and the second short cavity fiber laser 1-2 stick on semi-girder 2 center lines rigidly with glue.
The cylindroid helical-coil compression spring that wire spring 5 adopts steel wire to make, the circular aluminium sheet 3 of pressurized adopts aluminum alloy plate materials to process, and diameter is
, hardness is bigger, and weight is lighter.Elastic film 4 adopts rubber film, and elasticity coefficient is little, plays and transmits pressure and water-proof function.
Laser output the carrying out beat frequency of short cavity fiber laser is meant that the laser output with two sublasers is input to realization light wave beat frequency on the photodetector simultaneously, as shown in Figure 4,980nm pump light source 4-6 is divided into two bundles by the beam splitter 4-5 of 50:50 with pump light, a branch ofly enters the first short cavity fiber laser 1-1 by 980/1550 wavelength division multiplexer 4-3; Another bundle pump light enters the second short cavity fiber laser 1-2 by another 980/1550 wavelength division multiplexer 4-4.The laser of the first short cavity fiber laser 1-1 is input to photodetector 4-7 by wavelength division multiplexer 4-3, the laser of the second short cavity fiber laser 1-2 is input to photodetector 4-7 by wavelength division multiplexer 4-4, two bundle laser carry out beat frequency on detector 4-7, its signal frequency obtains by frequency spectrograph 4-8.
Embodiment 2
As shown in Figure 2 be the sensor construction figure of second kind of technical scheme of the utility model, comprise the first square-section isosceles triangle semi-girder 2-1, the second square-section isosceles triangle semi-girder 2-2, short cavity fiber laser 2-3, with the ordinary optic fibre 2-4 of short cavity fiber laser equal length, the circular aluminium sheet 3 of pressurized, elastic film 4, wire spring 5, sensor housing 6.
The sensor housing top fixedly installs elastic film, being arranged on the interior aluminium sheet of sensor housing and the bottom surface of elastic film is close to, the end, fixed in one end of spring and the sensor housing, the bottom surface of the other end and aluminium sheet fixes the coaxial setting of described elastic film, aluminium sheet and spring.
One end of first semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; One end of second semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; First semi-girder be positioned at second semi-girder directly over, first semi-girder is identical with the second semi-girder shape.
First semi-girder and second semi-girder are the sheet metal of isosceles triangle, the short cavity fiber laser is between first semi-girder and second cantilever, and be close to setting with first semi-girder and second cantilever, the short cavity fiber laser is provided with along the axis of sheet metal, at the other ordinary optic fibre that also is provided with of short cavity fiber laser.
Short cavity fiber laser 2-3 adopts the phase mask plate method to make on erbium-ytterbium co-doped fiber, and high reflective grid reflectivity is generally 99.9%, and low reflective grid reflectivity is about 95%, the about 15mm of whole laser instrument length, and threshold pump power is the milliwatt magnitude.Laser center wavelength is 1550nm, and signal to noise ratio (S/N ratio) is greater than 60 dB.
Two beryllium-bronze square-section isosceles triangle semi-girders adopt the beryllium-bronze plate to make, length and width, thick all equal.Two semi-girders adopt screws to be adjacent to and are fixed into one, and clamp the isometric ordinary optic fibre of short cavity fiber laser and a section and short cavity fiber laser in the isoceles triangle midline position.By the mechanics of materials as can be known the median surface of two uniform thickness semi-girders be its neutral surface, promptly when external force acts on the semi-girder end, the semi-girder upper surface produces tensile strain, lower surface produces compressive strain, do not have strain to produce on the neutral surface, but place the short cavity fiber laser in the middle of two semi-girders will be subjected to the transverse pressure of semi-girder up and down.This transverse pressure strengthens the birefringence effect of optical fiber.Because birefringence effect, this short cavity fiber laser will produce two bundle polarization directions vertically and be the laser of single longitudinal mode.This two bundles laser is carried out beat frequency, and its beat signal frequency is:
In the formula:
Be the birefringence that produces by pressure in the optical fiber,
Be light beam,
The effective refractive index of optical fiber,
Mean wavelength for the output of short cavity fiber laser.The acting force that puts on the semi-girder end is big more, and the suffered transverse pressure of short cavity fiber laser is big more, birefringence
Be worth big more, beat signal frequency then
Also will increase.
The acquisition mode of beat signal frequency as shown in Figure 5, the light of 980nm pump light source 5-2 enters short cavity fiber laser 2-3 by 980/1550 wavelength division multiplexer 5-1, the laser of short cavity fiber laser enters optoisolator 5-3 by 980/1550 wavelength division multiplexer 2-3, after enter Polarization Controller 5-4, enter photodetector 5-6 through analyzer 5-5 again.Beat signal frequency is obtained by frequency spectrograph 5-7.
The cylindroid helical-coil compression spring that wire spring 5 adopts steel wire to make, the circular aluminium sheet 3 of pressurized adopts aluminum alloy plate materials to process, and hardness is bigger, and weight is lighter.Elastic film 4 adopts rubber film, and elasticity coefficient is little, plays and transmits pressure and water-proof function.
Foregoing description of the present utility model only is exemplary attribute, and the various distortion that therefore do not depart from the utility model main idea ought to be within scope of the present utility model.These distortion should not be regarded as departing from spirit and scope of the present utility model.
Claims (2)
1. a micropressure sensor comprises sensor housing, spring, elastic film, aluminium sheet, semi-girder, the first short cavity fiber laser and the second short cavity fiber laser, it is characterized in that:
The sensor housing top fixedly installs elastic film, being arranged on the interior aluminium sheet of sensor housing and the bottom surface of elastic film is close to, the end, fixed in one end of spring and the sensor housing, the bottom surface of the other end and aluminium sheet fixes the coaxial setting of described elastic film, aluminium sheet and spring;
One end of semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; The first short cavity fiber laser is close to the end face of semi-girder, and the second short cavity fiber laser is close to the bottom surface of semi-girder;
Described semi-girder is the sheet metal of isosceles triangle, and the described first short cavity fiber laser and the second short cavity fiber laser all are provided with along the axis of sheet metal.
2. a micropressure sensor comprises sensor housing, spring, elastic film, aluminium sheet, first semi-girder, second semi-girder and short cavity fiber laser, it is characterized in that:
The sensor housing top fixedly installs elastic film, being arranged on the interior aluminium sheet of sensor housing and the bottom surface of elastic film is close to, the end, fixed in one end of spring and the sensor housing, the bottom surface of the other end and aluminium sheet fixes the coaxial setting of described elastic film, aluminium sheet and spring;
One end of first semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; One end of second semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; First semi-girder be positioned at second semi-girder directly over, first semi-girder is identical with the second semi-girder shape;
Described first semi-girder and second semi-girder are the sheet metal of isosceles triangle, described short cavity fiber laser is between first semi-girder and second cantilever, and be close to setting with first semi-girder and second cantilever, the short cavity fiber laser is provided with along the axis of sheet metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200873921U CN202083512U (en) | 2011-03-29 | 2011-03-29 | Micro-pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200873921U CN202083512U (en) | 2011-03-29 | 2011-03-29 | Micro-pressure sensor |
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| CN202083512U true CN202083512U (en) | 2011-12-21 |
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|---|---|---|---|
| CN2011200873921U Expired - Lifetime CN202083512U (en) | 2011-03-29 | 2011-03-29 | Micro-pressure sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102221425A (en) * | 2011-03-29 | 2011-10-19 | 浙江大学 | Micro-pressure sensor based on short cavity fiber laser |
| CN107621328A (en) * | 2017-09-07 | 2018-01-23 | 南京溯极源电子科技有限公司 | A kind of atmospheric pressure measurement apparatus and method |
| CN108362412A (en) * | 2018-04-25 | 2018-08-03 | 深圳大学 | A kind of optical-fiber laser pressure sensor and its pressure measurement method |
-
2011
- 2011-03-29 CN CN2011200873921U patent/CN202083512U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102221425A (en) * | 2011-03-29 | 2011-10-19 | 浙江大学 | Micro-pressure sensor based on short cavity fiber laser |
| CN102221425B (en) * | 2011-03-29 | 2012-08-08 | 浙江大学 | Micro-pressure sensor based on short cavity fiber laser |
| CN107621328A (en) * | 2017-09-07 | 2018-01-23 | 南京溯极源电子科技有限公司 | A kind of atmospheric pressure measurement apparatus and method |
| CN108362412A (en) * | 2018-04-25 | 2018-08-03 | 深圳大学 | A kind of optical-fiber laser pressure sensor and its pressure measurement method |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20111221 Effective date of abandoning: 20120808 |