CN102221425B - Micro-pressure sensor based on short cavity fiber laser - Google Patents
Micro-pressure sensor based on short cavity fiber laser Download PDFInfo
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- CN102221425B CN102221425B CN2011100770065A CN201110077006A CN102221425B CN 102221425 B CN102221425 B CN 102221425B CN 2011100770065 A CN2011100770065 A CN 2011100770065A CN 201110077006 A CN201110077006 A CN 201110077006A CN 102221425 B CN102221425 B CN 102221425B
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Abstract
The invention relates to a micro-pressure sensor based on a short cavity fiber laser. The environmental interference on the conventional micro-pressure sensor is high. The micro-pressure sensor based on the short cavity fiber laser comprises a sensor shell, a spring, an elastic film, an aluminum plate, a cantilever beam, a first short cavity fiber laser and a second short cavity fiber laser, wherein the elastic film is fixedly arranged on the top of the sensor shell; the aluminum plate arranged in the sensor shell is tightly attached to the bottom surface of the elastic film; one end of the spring is fixed together with the inner bottom of the sensor shell, and the other end of the spring is fixed together with the bottom surface of the aluminum plate; the elastic film, the aluminum plate and the spring are arranged coaxially; one end of the cantilever beam is fixed together with the edge of the aluminum plate, and the other end of the cantilever beam is fixed together with the inner wall of the sensor shell; the first short cavity fiber laser is tightly attached to the top surface of the cantilever beam; and the second short cavity fiber laser is tightly attached to the bottom surface of the cantilever beam. Due to the adoption of a fiber sensing technology, the micro-pressure sensor has a compact structure and a simple process and is free from electromagnetic interference.
Description
Technical field
The invention belongs to technical field of optical fiber sensing, relate to a kind of sensor that beat signal that on the semi-girder one or two short cavity fiber lasers form changes with the variation of extraneous minute-pressure power that is fixed on.
Background technology
Pressure and pressure are one of modal important parameters in the practical applications field, are that industries such as oil, chemical industry, building are the sensing amounts that must monitor.Along with deepening continuously of various application, pressure transducer there is further demand, as in application such as low-pressure gas, vacuum tightness, wind pressure monitoring, needing the pressure transducer of high sensitivity, lower range.At present mostly this kind pressure transducer is the micro-pressure sensor based on MEMS on the home market, and pressure resistance type is arranged, condenser type, and three kinds of working methods such as resonant mode, its range majority rarely is lower than 1 KPa more than 1 KPa.The micro-pressure sensor of electronic type is under mal-conditions such as complex electromagnetic environment, and as easy as rolling off a log being interfered limited the application of some special occasions.Application publication number is the silicon piezoresistive pressure sensor that the patent " modified wind load pressure transducer " of CN 101738281 A is based on MEMS; And integrated temperature sensor, well heater, temperature-control circuit and signal conditioning circuit plate can be realized lower range (5 KPa) pressure measurement.But this sensor comprises a plurality of circuit, under measurement environment such as highfield high-intensity magnetic field and inapplicable, is disturbed easily even malfunctioning.
Optical fiber sensing technology be utilize optical fiber or optical-fiber type device various optical signallings to external world the responsive characteristic of some physical quantity carry out a kind of technology of sensing testing.Wherein, Fiber Bragg Grating FBG (FBG) and the strain and the temperature variation that cause to external world based on its characteristic wavelength of short cavity fiber laser of FBG are responsive, so they are a kind of wavelength-modulated type optical sensors.The Bragg wavelength of bragg grating
is determined by following formula:
In the formula;
is the effective refractive index of fibre core, and
is the cycle of grating.The cycle that is operated in the FBG of optical fiber communication wave band generally is the hundreds of nanometer, and it can reflect being transmitted in fibre core basic mode light wave on wavelength selectivity ground.Can design the pressure transducer that can adapt to HTHP, disturb rugged surroundings such as electromagnetic interference (EMI) based on FBG and cantilever beam structure, described by the patent " fiber bragg grating pressure sensor " of CN 101750183 A like application publication number.But the sensitivity of this structure is about 0.008nm/N, only is suitable for the pressure sensing under the high pressure, is not suitable for as lower range (1 KPa) micro-pressure sensor.
About 10～the 20mm of length of the short cavity fiber laser of on Er-doped fiber or erbium-ytterbium co-doped fiber, making FBG and constituting.It has not only continued into the advantage of fiber grating as sensor, also possesses more high resolving power, bigger signal to noise ratio (S/N ratio).Particularly adopt the laser output of the very close short cavity fiber laser of two wavelength or adopt two frequencies of Orthogonal Double frequency laser can on photo-detector, produce beat signal through suitable processing, frequency is the difference frequency of two laser signals.
Summary of the invention
The object of the present invention is to provide a kind of micropressure sensor based on the short cavity fiber laser.This sensor utilizes laser output the carrying out beat frequency of short cavity fiber laser to realize sensing, is used to solve the high-sensitivity measurement and the anti-interference problems of measurement of small pressure.
One of technical scheme that technical solution problem of the present invention is taked is:
Based on the micropressure sensor of short cavity fiber laser, comprise sensor housing, spring, elastic film, aluminium sheet, semi-girder, the first short cavity fiber laser and the second short cavity fiber laser.
The sensor housing top fixedly installs elastic film; Being arranged on the interior aluminium sheet of sensor housing and the bottom surface of elastic film is close to; The end, fixed in one end of spring and the sensor housing, the bottom surface of the other end and aluminium sheet fixes the coaxial setting of described elastic film, aluminium sheet and spring.
One end of semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; The first short cavity fiber laser is close to the end face of semi-girder, and the second short cavity fiber laser is close to the bottom surface of semi-girder.
Described semi-girder is the sheet metal of isosceles triangle, and the described first short cavity fiber laser and the second short cavity fiber laser all are provided with along the axis of sheet metal.
Two of the technical scheme that technical solution problem of the present invention is taked is:
Based on the micropressure sensor of short cavity fiber laser, comprise sensor housing, spring, elastic film, aluminium sheet, first semi-girder, second semi-girder and short cavity fiber laser.
The sensor housing top fixedly installs elastic film; Being arranged on the interior aluminium sheet of sensor housing and the bottom surface of elastic film is close to; The end, fixed in one end of spring and the sensor housing, the bottom surface of the other end and aluminium sheet fixes the coaxial setting of described elastic film, aluminium sheet and spring.
One end of first semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; One end of second semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; First semi-girder be positioned at second semi-girder directly over, first semi-girder is identical with the second semi-girder shape.
Described first semi-girder and second semi-girder are the sheet metal of isosceles triangle; Described short cavity fiber laser is between first semi-girder and second cantilever; And be close to setting with first semi-girder and second cantilever, the short cavity fiber laser is provided with along the axis of sheet metal.
Beneficial effect of the present invention: the phenomenon that (1) the present invention utilizes the beat signal frequency of short cavity fiber laser to produce drift realizes the lower range micro-pressure sensing, compares the present invention with traditional fiber grating pressure sensing and possesses higher sensitivity; (2) to propose second kind of the remolding sensitivity of first kind of scheme in two kinds of technical schemes high in the present invention, but the preparation of second kind of sensor is convenient; (3) the present invention adopts optical fiber sensing technology, compact conformation, and technology is simple, does not receive electromagnetic interference (EMI), compares with traditional electronic type lower range micro-pressure sensing method, more is applicable in the complex electromagnetic environment and uses to have vast potential for future development.
Description of drawings
Fig. 1 is the structural representation of first embodiment of the invention.
Fig. 2 is the structural representation of second embodiment of the invention.
Fig. 3 is cantilever beam structure synoptic diagram among the present invention.
Fig. 4 obtains beat signal device synoptic diagram for utilizing first embodiment.
Fig. 5 obtains beat signal device synoptic diagram for utilizing second embodiment.
Embodiment
Embodiment 1
Sensor construction figure for one of technical scheme of the present invention as shown in Figure 1 comprises the first short cavity fiber laser 1-1, the second short cavity fiber laser 1-2; Square-section isosceles triangle semi-girder 2, the circular aluminium sheet 3 of pressurized, elastic film 4; Wire spring 5, sensor housing 6.
The sensor housing top fixedly installs elastic film; Being arranged on the interior aluminium sheet of sensor housing and the bottom surface of elastic film is close to; The end, fixed in one end of spring and the sensor housing, the bottom surface of the other end and aluminium sheet fixes the coaxial setting of described elastic film, aluminium sheet and spring.
One end of semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; The first short cavity fiber laser is close to the end face of semi-girder, and the second short cavity fiber laser is close to the bottom surface of semi-girder.
Described semi-girder is the sheet metal of isosceles triangle, and the described first short cavity fiber laser and the second short cavity fiber laser all are provided with along the axis of sheet metal.
In the present embodiment, the method for making of short cavity fiber laser micropressure sensor may further comprise the steps:
Step 1: adopt the phase mask plate method on erbium-ytterbium co-doped fiber, to make the first short cavity fiber laser 1-1 and the second short cavity fiber laser 1-2 respectively;
Step 2: adopt the beryllium-bronze plate to produce a square-section isosceles triangle semi-girder 2, and the first short cavity fiber laser 1-1 and the second short cavity fiber laser 1-2 are fastened with glue on the midline position of semi-girder 2 upper and lower surfaces;
Step 3: with the outer edge and semi-girder 2 terminal fixed connections of the circular aluminium sheet 3 of pressurized;
Step 4: wire spring 5 one ends are fixedly connected on the circular aluminium sheet of pressurized 3 centers, and the other end is fixedly connected on the bottom in the sensor housing 6, simultaneously the semi-girder stiff end is installed on semi-girder 2 mounting holes in the sensor housing 6;
Step 5: elastic film 4 is close to and is positioned on the circular aluminium sheet 3 of pressurized, compresses elastic film and is fixed on the sensor housing with screw with the same big annular aluminium flake with sensor housing 6 external diameters of external diameter.
The first short cavity fiber laser 1-1 and the second short cavity fiber laser 1-2 all adopt the phase mask plate method on erbium-ytterbium co-doped fiber, to make; High reflective grid reflectivity is generally 99.9%; Low reflective grid reflectivity is about 95%, the about 15mm of whole laser instrument length, and threshold pump power is the milliwatt magnitude.Laser center wavelength is 1550nm, and signal to noise ratio (S/N ratio) is greater than 60 dB.
Beryllium-bronze square-section isosceles triangle semi-girder 2 adopts the beryllium-bronze plate to make; Its synoptic diagram is as shown in Figure 3; The base width is
; Length is
, and thickness is
.The described first short cavity fiber laser 1-1 and the second short cavity fiber laser 1-2 stick on semi-girder 2 center lines with glue rigidly.
According to the mechanics of materials; Can derive this square-section isosceles triangle semi-girder 2 and be equi intensity cantilever; Promptly under any effect that puts on the terminal power of semi-girder 2, the strain that sticks on the FBG any position on the semi-girder 2 all equates, and linear with acting force.Therefore FBG can not produce chirp.The centre wavelength drift value of FBG; The i.e. wavelength shift of the first short cavity fiber laser 1-1 and the second short cavity fiber laser 1-2, terminal pressure
relation is as follows with being applied to semi-girder 2:
In the formula:
is semi-girder length;
is width;
is thickness; Elasto-optical coefficient
=0.22; The Young modulus of beryllium-bronze
=130 GPa;
is the centre wavelength of short cavity fiber laser,
for putting on the terminal pressure size of semi-girder.Under the effect of power
; The semi-girder end departs from the distance of equilibrium position, and promptly amount of deflection
is:
The cylindroid helical-coil compression spring that wire spring 5 adopts steel wire to make, its rigidity, even spring produces the load of unit deformation, for
In the formula:
is the spring axle pressure, and
is the spring axial compression amount.
The rigidity of this compression spring can also be expressed as:
In the formula:
is the shear modulus of spring;
is the spring wire diameter;
is the number of active coils of spring;
is for curling up than (or claiming spring index);
is footpath in the turn, and
is the turn external diameter.
The circular aluminium sheet 3 of pressurized adopts aluminum alloy plate materials to process; Diameter is
; Hardness is bigger, and weight is lighter.
Laser output the carrying out beat frequency of short cavity fiber laser is meant that the laser output with two sublasers is input to realization light wave beat frequency on the photodetector simultaneously; As shown in Figure 4; 980nm pump light source 4-6 is divided into two bundles through the beam splitter 4-5 of 50:50 with pump light, and a branch of 980/1550 wavelength division multiplexer 4-3 that passes through gets into the first short cavity fiber laser 1-1; Another bundle pump light gets into the second short cavity fiber laser 1-2 through another 980/1550 wavelength division multiplexer 4-4.The laser of the first short cavity fiber laser 1-1 is input to photodetector 4-7 through wavelength division multiplexer 4-3; The laser of the second short cavity fiber laser 1-2 is input to photodetector 4-7 through wavelength division multiplexer 4-4; Two bundle laser carry out beat frequency on detector 4-7, its signal frequency obtains through frequency spectrograph 4-8.
Beat signal exists and frequency item and difference frequency term; In frequency
;
is much higher than the response frequency of photodetector in
magnitude; Difference frequency term
is when two bundle short cavity fiber laser output laser frequencies
are close with
;
can reach in the cutoff frequency of photodetector; Detector can respond, its output voltage
Because the second short cavity fiber laser 1-2 of the first short cavity fiber laser 1-1 is installed in the upper surface and the lower surface of semi-girder respectively; The upper surface strain is tensile strain; The wavelength shift of short cavity fiber laser is
, and direction is to the long wave direction; The strain of lower surface is compressive strain; The wavelength shift of short cavity fiber laser also is
, and direction is to the shortwave direction.Therefore the wavelength difference of two short cavity fiber lasers on the semi-girder is
under external force.
Can get by
:
Can know that by (1) formula and (6) formula the output signal frequency
of photodetector is proportional to the acting force
that is applied to the semi-girder end, that is:
In the present embodiment; If outside pressure is
=1000 Pa; The circular aluminium sheet diameter
of pressurized=30mm; Semi-girder length
=30mm; Width
=10mm, thickness
=0.8mm; Spring wire diameter=0.5mm; External diameter
=20mm; Number of active coils
=10, the shear modulus of spring steel wire
=80000
.
By (4) formula can be regarded as this spring rate be 0.1458
.The acting force of the circular aluminium sheet of outside pressure pressurized
, and establish and pass to semi-girder rigidly, by (2) formula can be regarded as the terminal amount of deflection 0.1720mm of semi-girder.This moment, spring was 0.025 to the acting force of the circular aluminium sheet of pressurized
,Can ignore.By (7) formula can be regarded as under the effect of extraneous 1000Pa pressure; Sensor beat signal frequency of the present invention is 46.17 GHz, sensitivity be 46.17
.
As shown in Figure 2 be the sensor construction figure of second kind of technical scheme of the present invention, comprise the first square-section isosceles triangle semi-girder 2-1, the second square-section isosceles triangle semi-girder 2-2; Short cavity fiber laser 2-3; With the ordinary optic fibre 2-4 of short cavity fiber laser equal length, the circular aluminium sheet 3 of pressurized, elastic film 4; Wire spring 5, sensor housing 6.
The sensor housing top fixedly installs elastic film; Being arranged on the interior aluminium sheet of sensor housing and the bottom surface of elastic film is close to; The end, fixed in one end of spring and the sensor housing, the bottom surface of the other end and aluminium sheet fixes the coaxial setting of described elastic film, aluminium sheet and spring.
One end of first semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; One end of second semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; First semi-girder be positioned at second semi-girder directly over, first semi-girder is identical with the second semi-girder shape.
First semi-girder and second semi-girder are the sheet metal of isosceles triangle; The short cavity fiber laser is between first semi-girder and second cantilever; And be close to setting with first semi-girder and second cantilever; The short cavity fiber laser is provided with along the axis of sheet metal, at the other ordinary optic fibre that also is provided with of short cavity fiber laser.
In the present embodiment, the method for making of short cavity fiber laser micropressure sensor may further comprise the steps:
Step 1: adopt the phase mask plate method on erbium-ytterbium co-doped fiber, to make a short cavity fiber laser 2-3;
Step 2: adopt the beryllium-bronze plate to make the first square-section isosceles triangle semi-girder 2-1; The second square-section isosceles triangle semi-girder 2-2; And the ordinary optic fibre 2-4 of short cavity fiber laser 2-3 and one section equal length is positioned on the center line of semi-girder 2; Put the second square-section isosceles triangle semi-girder 2-2 then, two semi-girders are fixed into one, and clamp short cavity fiber laser 2-3 and ordinary optic fibre 2-4 in wherein with screw.
Step 3: with the outer edge and the first square-section isosceles triangle semi-girder 2-1 of the circular aluminium sheet 3 of pressurized, the end of the second square-section isosceles triangle semi-girder 2-2 is fixedly connected;
Step 4: wire spring 5 one ends are fixedly connected on the circular aluminium sheet of pressurized 3 centers, and the other end is fixedly connected on the bottom in the sensor housing 6, simultaneously the semi-girder stiff end is installed on the semi-girder mounting hole in the sensor housing;
Step 5: elastic film 4 is close to and is positioned on the circular aluminium sheet 3 of pressurized, compresses elastic film and is fixed on the sensor housing with screw with the same big annular aluminium flake with the sensor shell body diameter of external diameter.
Short cavity fiber laser 2-3 adopts the phase mask plate method on erbium-ytterbium co-doped fiber, to make, and high reflective grid reflectivity is generally 99.9%, and low reflective grid reflectivity is about 95%, the about 15mm of whole laser instrument length, and threshold pump power is the milliwatt magnitude.Laser center wavelength is 1550nm, and signal to noise ratio (S/N ratio) is greater than 60 dB.
Two beryllium-bronze square-section isosceles triangle semi-girders adopt the beryllium-bronze plate to make, length and width, thick all equal.Two semi-girders adopt screws to be adjacent to and are fixed into one, and clamp the isometric ordinary optic fibre of short cavity fiber laser and a section and short cavity fiber laser in the isoceles triangle midline position.Can know that by the mechanics of materials median surface of two uniform thickness semi-girders is its neutral surface; Promptly when external force acts on the semi-girder end; The semi-girder upper surface produces tensile strain; Lower surface produces compressive strain, does not have strain to produce on the neutral surface, but places the short cavity fiber laser in the middle of two semi-girders will receive the transverse pressure of semi-girder up and down.This transverse pressure strengthens the birefringence effect of optical fiber.Because birefringence effect, this short cavity fiber laser will produce two bundle polarization directions vertically and be the laser of single longitudinal mode.This two bundles laser is carried out beat frequency, and its beat signal frequency is:
In the formula:
is the birefringence that is produced by pressure in the optical fiber;
is light beam; The effective refractive index of
optical fiber,
is the mean wavelength of short cavity fiber laser output.It is big more to put on the terminal acting force of semi-girder; The suffered transverse pressure of short cavity fiber laser is big more; Birefringence
value is big more, and beat signal frequency
also will increase then.
The acquisition mode of beat signal frequency is as shown in Figure 5; The light of 980nm pump light source 5-2 gets into short cavity fiber laser 2-3 through 980/1550 wavelength division multiplexer 5-1; The laser of short cavity fiber laser gets into optoisolator 5-3 through 980/1550 wavelength division multiplexer 2-3; The back gets into Polarization Controller 5-4, gets into photodetector 5-6 through analyzer 5-5 again.Beat signal frequency is obtained by frequency spectrograph 5-7.
The cylindroid helical-coil compression spring that wire spring 5 adopts steel wire to make, its rigidity is described suc as formula (4), (5).
The circular aluminium sheet 3 of pressurized adopts aluminum alloy plate materials to process; Diameter is
; Hardness is bigger, and weight is lighter.
Said elastic film 4 adopts rubber film, and elasticity coefficient is little, plays and transmits pressure and water-proof function.
Foregoing description of the present invention is merely exemplary attribute, and the various distortion that therefore do not depart from main idea of the present invention ought to be within scope of the present invention.These distortion should not be regarded as and depart from the spirit and scope of the present invention.
Claims (2)
1. based on the micropressure sensor of short cavity fiber laser, comprise sensor housing, spring, elastic film, aluminium sheet, semi-girder, the first short cavity fiber laser and the second short cavity fiber laser, it is characterized in that:
The sensor housing top fixedly installs elastic film; Being arranged on the interior aluminium sheet of sensor housing and the bottom surface of elastic film is close to; The end, fixed in one end of spring and the sensor housing, the bottom surface of the other end and aluminium sheet fixes the coaxial setting of described elastic film, aluminium sheet and spring;
One end of semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; The first short cavity fiber laser is close to the end face of semi-girder, and the second short cavity fiber laser is close to the bottom surface of semi-girder;
Described semi-girder is the sheet metal of isosceles triangle, and the described first short cavity fiber laser and the second short cavity fiber laser all are provided with along the axis of sheet metal.
2. based on the micropressure sensor of short cavity fiber laser, comprise sensor housing, spring, elastic film, aluminium sheet, first semi-girder, second semi-girder and short cavity fiber laser, it is characterized in that:
The sensor housing top fixedly installs elastic film; Being arranged on the interior aluminium sheet of sensor housing and the bottom surface of elastic film is close to; The end, fixed in one end of spring and the sensor housing, the bottom surface of the other end and aluminium sheet fixes the coaxial setting of described elastic film, aluminium sheet and spring;
One end of first semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; One end of second semi-girder and the edge of aluminium sheet is fixed, the other end and sensor housing inwall are fixed; First semi-girder be positioned at second semi-girder directly over, first semi-girder is identical with the second semi-girder shape;
Described first semi-girder and second semi-girder are the sheet metal of isosceles triangle; Described short cavity fiber laser is between first semi-girder and second cantilever; And be close to setting with first semi-girder and second cantilever, the short cavity fiber laser is provided with along the axis of sheet metal.
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|---|---|---|---|
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| CN102564654B (en) * | 2012-01-10 | 2013-10-23 | 西安科技大学 | Laser force-measuring system used in scanning electron microscope |
| CN107202922A (en) * | 2017-05-24 | 2017-09-26 | 电子科技大学 | Strong-electromagnetic field environmentally conscious materialses microwave dielectric property studies test system and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101650209A (en) * | 2009-09-09 | 2010-02-17 | 昆明理工大学 | Convoluted diaphragm-type optical fiber Bragg raster liquid level sensor |
| CN101750183A (en) * | 2008-12-02 | 2010-06-23 | 中国石油大学(北京) | Fiber grating pressure sensor |
| CN202083512U (en) * | 2011-03-29 | 2011-12-21 | 浙江大学 | Micro-pressure sensor |
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| JP4417655B2 (en) * | 2003-06-13 | 2010-02-17 | 坂田電機株式会社 | Cantilever-like displacement conversion mechanism using fiber Bragg grating |
| JP5371527B2 (en) * | 2009-04-16 | 2013-12-18 | 株式会社安藤・間 | Civil engineering pressure transducer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101750183A (en) * | 2008-12-02 | 2010-06-23 | 中国石油大学(北京) | Fiber grating pressure sensor |
| CN101650209A (en) * | 2009-09-09 | 2010-02-17 | 昆明理工大学 | Convoluted diaphragm-type optical fiber Bragg raster liquid level sensor |
| CN202083512U (en) * | 2011-03-29 | 2011-12-21 | 浙江大学 | Micro-pressure sensor |
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