CN202061840U - Ultrasonic cleaning device for coated graphite frame - Google Patents
Ultrasonic cleaning device for coated graphite frame Download PDFInfo
- Publication number
- CN202061840U CN202061840U CN2011200855872U CN201120085587U CN202061840U CN 202061840 U CN202061840 U CN 202061840U CN 2011200855872 U CN2011200855872 U CN 2011200855872U CN 201120085587 U CN201120085587 U CN 201120085587U CN 202061840 U CN202061840 U CN 202061840U
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- frame
- ultrasonic
- hydrofluoric acid
- acid solution
- bearing frame
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Abstract
An ultrasonic cleaning device for a coated graphite frame comprises a cleaning tank, an ultrasonic oscillator installation frame, a swing load bearing frame, a supporting shaft, an umbrella-shaped gear, a driving gear, a servo motor and an electronic control component. An ultrasonic generator is installed in the ultrasonic oscillator installation frame and at the bottom of the cleaning tank, the swing load bearing frame is arranged in the cleaning tank in sway mode, the servo motor drives the swing load bearing frame to reciprocate in a transmission method that the driving gear is meshed with the umbrella-shaped gear. The ultrasonic generator accelerates reaction between hydrofluoric acid solution and silicon nitride, and horizontal swing of the swing load bearing frame increases contact between the graphite frame and the hydrofluoric acid solution, homogenizes the density of the hydrofluoric acid solution in the cleaning tank, and benefits reaction between the hydrofluoric acid solution and the silicon nitride. Compared with the prior art, the ultrasonic cleaning device for a coated graphite frame is fast in speed and good in cleaning effect, can clean the silicon nitride or sewage attached to corners of the graphite frame, and only requires a half of turnover graphite frames of the prior art.
Description
Technical field:
The utility model relates to a kind of cleaning device of silicon chip of solar cell, relates in particular to silicon chip film-coated cleaning device with the graphite frame.
Background technology:
Make antireflective coating at silicon chip surface and can reduce optical loss and recombination losses, improve the power output of solar cell, at present, the solar cell of large-scale production all adopts the flat-plate type plasma chemical deposition, and promptly PECVD makes antireflective coating.The main process of its chemical deposition is: at first a copper pipe is placed airtight quartz ampoule, quartz ampoule is put into sedimentary origin, sedimentary origin is vacuumized, feed silane and ammonia then, copper pipe is launched microwave, under specific temperature conditions, silane and ammonia gas react generate silicon nitride, silicon nitride is the material of antireflective coating, because the battery sheet is placed on the graphite frame and is positioned among the sedimentary origin, silicon nitride upwards slowly is deposited on the battery sheet in film-forming process, also can be deposited on the surface of graphite frame simultaneously, in whole film-forming process, must be in quartz ampoule bubbling air to reduce the temperature of copper pipe, avoid silicon nitride to be deposited on the copper pipe, finish the making of antireflective coating.
After whole making antireflective coating process, the silicon nitride that adheres on the graphite frame must thoroughly wash, at present, cleaning method commonly used is that the graphite frame is soaked in concentration range in 5%～15% hydrofluoric acid solution, make hydrofluoric acid and silicon nitride reaction, water flushing again, oven dry at last.The removing effect of this soaking and washing method is bad, is difficult to wash silicon nitride or other foreign material attached to graphite frame edge, and the time of required immersion simultaneously is longer, cleaning efficiency is not high, it is many to produce required turnover graphite frame quantity, not only once throw the cost height, and floor space is big.
The utility model content:
In order to remove the foreign material such as silicon nitride that deposited on the graphite frame behind the plated film faster and betterly, the utility model provides a kind of ultrasonic cleaning equipment of plated film graphite frame.
The technical scheme that the utility model adopted is:
A kind of ultrasonic cleaning equipment of plated film graphite frame, comprise rinse bath, the ultrasonic oscillator installing frame, supersonic generator, the swing bearing frame, bolster, umbrella gear, driving gear, servomotor and electric-controlled parts, supersonic generator is arranged in the ultrasonic oscillator installing frame, the ultrasonic oscillator installing frame is arranged on the bottom of rinse bath, the swing bearing frame is installed in the rinse bath by bolster, bolster one end stretches out outside the rinse bath, external part at bolster is equipped with umbrella gear, driving gear is installed on the output shaft of servomotor, driving gear is meshed with umbrella gear, supersonic generator and servomotor all are electrically connected with electric-controlled parts, supersonic generator and servomotor are controlled by electric-controlled parts, electric-controlled parts control servomotor carries out positive and negative alternate and rotates, and drives swing bearing frame reciprocally swinging by driving gear and umbrella gear.
Owing to set up supersonic generator in the bottom of rinse bath, it sends ultrasonic wave and has quickened loosening attached to silicon nitride sedimentary deposit on the graphite frame, impels silicon nitride and hydrofluoric acid solution to react.In rinse bath, set up the swing bearing frame that can swing and both increased contacting of graphite frame and hydrofluoric acid solution, the concentration of hydrofluoric acid solution in again can the homogenizing rinse bath, be more conducive to hydrofluoric acid solution and silicon nitride reaction, practice shows, graphite frame after adopting this device to plated film cleans, scavenging period has only 1/3～1/2 of prior art, not only cleaning speed is fast, and cleaning performance is good, also can be removed fast even attach at the silicon nitride or the dirt of graphite frame edge, to graphite frame table face not damaged, whole cleaning process operator is not as long as the control electric-controlled parts can touch cleaning fluid simultaneously, the operator there is not injury, the cleaning fluid consumption is few simultaneously, comprehensively cleans cost and descends significantly, and required in process of production turnover graphite frame has only 1/2 of prior art.
Description of drawings:
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the connection transmission schematic diagram between servomotor, driving gear and the umbrella gear;
Among the figure: the 1-rinse bath; 2-ultrasonic oscillator installing frame; The 3-supersonic generator; 4-swings bearing frame; The 5-bolster; The 6-umbrella gear; The 7-driving gear; The 8-servomotor; The 9-electric-controlled parts; 10-graphite frame.
The specific embodiment:
Describe the specific embodiment of the present utility model with reference to the accompanying drawings in detail:
Shown in Fig. 1～2, a kind of ultrasonic cleaning equipment of plated film graphite frame, comprise rinse bath 1, ultrasonic oscillator installing frame 2, supersonic generator 3, swing bearing frame 4, bolster 5, umbrella gear 6, driving gear 7, servomotor 8 and electric-controlled parts 9, supersonic generator 3 is arranged in the ultrasonic oscillator installing frame 2, ultrasonic oscillator installing frame 2 is arranged on the bottom of rinse bath 1, swing bearing frame 4 is installed in the rinse bath 1 by bolster 5, bolster 5 one ends stretch out outside the rinse bath 1, external part at bolster 5 is equipped with umbrella gear 6, driving gear 7 is installed on the output shaft of servomotor 8, driving gear 7 is meshed with umbrella gear 6, supersonic generator 3 and servomotor 8 all are electrically connected with electric-controlled parts 9, supersonic generator 3 and servomotor 8 are by electric-controlled parts 9 controls, electric-controlled parts 9 control servomotors 8 carry out positive and negative alternate and rotate, and drive swing bearing frame 4 by driving gear 7 and umbrella gear 6 and make the constant speed reciprocally swinging.
The course of work of the present utility model is as follows:
Adding concentration is 5%～15% hydrofluoric acid solution in rinse bath 1, graphite frame 10 to be cleaned is placed on the swing bearing frame 4, make supersonic generator 3 energising work by electric-controlled parts 9, soak and start servomotor 8 after 5～8 minutes, make servomotor 8 carry out deciding the positive and negative alternate rotation of angle, drive umbrella gear 6 by driving gear 7 and do the positive and negative alternate rotation, because umbrella gear 6 is fixedly mounted on the bolster 5, swing bearing frame 4 also is fixed on the bolster 5, the positive and negative angle alternate rotation of umbrella gear 6 then drives swing bearing frame 4 and swings in rinse bath 1, the ultrasonic wave energy that supersonic generator 3 sends is accelerated attached to the silicon nitride deposit on the graphite frame 10 loosening, and impel silicon nitride and hydrofluoric acid solution to react, swing bearing frame 4 swinging in rinse bath 1 increased contacting of graphite frame 10 and hydrofluoric acid solution, the concentration of hydrofluoric acid solution in the while energy homogenizing rinse bath 1, be more conducive to hydrofluoric acid solution and silicon nitride reaction, practice shows, adopt this device that plated film graphite frame is cleaned, scavenging period has only 1/3～1/2 of prior art, not only speed is fast, and cleaning performance is good, even the silicon nitride or the dirt that attach at graphite frame 10 edges also can be eliminated, simultaneously to graphite frame 10 surperficial not damageds, as long as whole cleaning process operator is control electric-controlled parts 9, do not contact cleaning fluid, the operator there is not injury, the cleaning fluid consumption is few simultaneously, the comprehensive cost that cleans descends significantly, and required in process of production turnover graphite frame has only 1/2 of prior art.
Claims (1)
1. the ultrasonic cleaning equipment of a plated film graphite frame, it is characterized in that: comprise rinse bath (1), ultrasonic oscillator installing frame (2), supersonic generator (3), swing bearing frame (4), bolster (5), umbrella gear (6), driving gear (7), servomotor (8) and electric-controlled parts (9), supersonic generator (3) is arranged in the ultrasonic oscillator installing frame (2), ultrasonic oscillator installing frame (2) is arranged on the bottom of rinse bath (1), swing bearing frame (4) is installed in the rinse bath (1) by bolster (5), bolster (5) one ends stretch out outside the rinse bath (1), external part at bolster (5) is equipped with umbrella gear (6), driving gear (7) is installed on the output shaft of servomotor (8), driving gear (7) is meshed with umbrella gear (6), supersonic generator (3) and servomotor (8) all are electrically connected with electric-controlled parts (9), supersonic generator (3) and servomotor (8) are controlled by electric-controlled parts (9), electric-controlled parts (9) control servomotor (8) carries out positive and negative alternate and rotates, and drives swing bearing frame (4) reciprocally swinging by driving gear (7) and umbrella gear (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200855872U CN202061840U (en) | 2011-03-29 | 2011-03-29 | Ultrasonic cleaning device for coated graphite frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200855872U CN202061840U (en) | 2011-03-29 | 2011-03-29 | Ultrasonic cleaning device for coated graphite frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202061840U true CN202061840U (en) | 2011-12-07 |
Family
ID=45055720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200855872U Expired - Fee Related CN202061840U (en) | 2011-03-29 | 2011-03-29 | Ultrasonic cleaning device for coated graphite frame |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202061840U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102211097A (en) * | 2011-03-29 | 2011-10-12 | 常州亿晶光电科技有限公司 | Ultrasonic cleaning device for film coated graphite frame |
| CN105241266A (en) * | 2015-10-23 | 2016-01-13 | 苏州市金翔钛设备有限公司 | Automatic descaling condenser |
-
2011
- 2011-03-29 CN CN2011200855872U patent/CN202061840U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102211097A (en) * | 2011-03-29 | 2011-10-12 | 常州亿晶光电科技有限公司 | Ultrasonic cleaning device for film coated graphite frame |
| CN105241266A (en) * | 2015-10-23 | 2016-01-13 | 苏州市金翔钛设备有限公司 | Automatic descaling condenser |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111207 Termination date: 20140329 |