CN202041433U - Platform for detecting air suction performance of getter at normal temperature - Google Patents
Platform for detecting air suction performance of getter at normal temperature Download PDFInfo
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- CN202041433U CN202041433U CN2011201071754U CN201120107175U CN202041433U CN 202041433 U CN202041433 U CN 202041433U CN 2011201071754 U CN2011201071754 U CN 2011201071754U CN 201120107175 U CN201120107175 U CN 201120107175U CN 202041433 U CN202041433 U CN 202041433U
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- getter
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Abstract
A platform for detecting air suction performance of a getter at a normal temperature relates to getter performance detection equipment. The utility model provides a platform for detecting air suction performance of the getter, and the platform has the advantages as follows: the detected vacuity range is wider, the getter is prevented from being exposed to atmosphere from pack-opening to the start of detection, and the whole loading process is under the protection of inert gas. The platform is provided with a vacuum chamber sphere, a composite vacuometer, a first fine-tuning valve, a second fine-tuning valve, a vacuum spherical valve, a sample room, a gate valve, a turbine molecular pump, and a mechanical pump, wherein the vacuum chamber sphere is connected with the composite vacuometer, the first fine-tuning valve, the second fine-tuning valve, the vacuum spherical valve, and the gate valve respectively; the first fine-tuning valve is externally connected with experiment gas; the second fine-tuning valve is externally connected with argon gas; the vacuum spherical valve is connected with the sample room; the gate valve is connected with the turbine molecular pump; and the turbine molecular pump is connected with the mechanical pump.
Description
Technical field
The utility model relates to a kind of getter performance detection apparatus, especially relates to a kind of normal temperature getter pumping property detection platform.
Background technology
Getter is meant under certain vacuum condition, absorbs the residual gas in the vacuum device, improves and keeps vacuum tightness in the device, to improve device reliability, increases the service life.Getter can be divided into two big class, evaporable air-absorbing agent and nonevaporable getters.No matter be evaporable air-absorbing agent, or nonevaporable getter, their common feature is all to show stable chemical property at normal temperatures, evapotranspire more than 400 ℃ or activate after just can reach air-breathing purpose.
The method that detects the pumping property parameter mainly contains two kinds of static method and dynamic methods, and main performance parameter comprises gettering rate and inspiratory capacity.Mostly traditional detection system is glass system, they are by opening the getter packing, getter is packed in the sample chamber of detection system,, by high frequency or heating in medium frequency getter is evapotranspired then or activate the pumping property of testing getter in sealed sample chamber and vacuum system.
Do not need the getter that activates for normal temperature, unpacking just can be air-breathing.This getter can not be tested with traditional checkout equipment, because getter can be exposed in the atmosphere in the process of detection system sample chamber momently unpacking to pack into, getter will adsorb a large amount of gas like this, except that part has taken place the irreversible chemical reaction, because its surface area is bigger, a large amount of gas has also been adsorbed on the surface, these gases are difficult to thoroughly remove in the process that vacuumizes, very big error will be in test, produced like this, even correct detection data can not be obtained.
Summary of the invention
The purpose of this utility model is to provide a kind of vacuum ranges that can test bigger; getter detects beginning from unpacking to can not be exposed in the atmosphere normal temperature getter pumping property detection platform that whole charging process is all finished under inert gas shielding.
The utility model is provided with vacuum chamber spheroid, compound vacuum gauge, the 1st micrometering valve, the 2nd micrometering valve, Vacuum ball valve, sample chamber, push-pull valve, turbomolecular pump and mechanical pump; The vacuum chamber spheroid is connected with push-pull valve with compound vacuum gauge, the 1st micrometering valve, the 2nd micrometering valve, Vacuum ball valve respectively, the external experimental gas of the 1st micrometering valve, the external argon gas of the 2nd micrometering valve, Vacuum ball valve connects the sample chamber, push-pull valve connects turbomolecular pump, and turbomolecular pump connects mechanical pump.
Described Vacuum ball valve can be connected with vacuum chamber with the sample chamber by flange respectively; Described flange can adopt band type vacuum quick-release flange, and described flange is provided with O shape rubber seal.
Described push-pull valve can adopt pneumatic vacuum push-pull valve.
The utility model adopts static method (constant volume method) test, presses down by force over time relation and studies gettering rate and inspiratory capacity by testing a constant volume.Because the normal temperature getter mainly is to be used for the low vacuum environment, have in the vacuum device of big inspiratory capacity, and the getter that the initial gettering rate of getter excites unlike traditional needs has very big initial gettering rate, it is more rational therefore selecting static method for use.
The utility model is applicable to and detects gettering rate and the inspiratory capacity that normal temperature does not need the getter that activates.Be that with the difference of traditional getters detection system the getter that is detected detects beginning from unpacking to can not expose atmosphere, whole charging process is all finished under inert gas shielding.
How normal temperature is not needed the getter that activates to pack in the process of detection system sample chamber and discontiguous air unpacking to, the utility model can address this problem.In addition, the utility model is compared with traditional detection system, and the vacuum ranges that can test is bigger.
Description of drawings
Fig. 1 is that the structure of the utility model embodiment is formed synoptic diagram.
Embodiment
In order more to be expressly understood technical scheme described in the utility model, further set forth the utility model by the following examples.
Referring to Fig. 1, the utility model embodiment is provided with vacuum chamber spheroid 1, compound vacuum gauge the 2, the 1st micrometering valve the 3, the 2nd micrometering valve 4, Vacuum ball valve 5, sample chamber 6, push-pull valve 7, turbomolecular pump 8 and mechanical pump 9; Vacuum chamber spheroid 1 is connected with push-pull valve 7 with compound vacuum gauge the 2, the 1st micrometering valve the 3, the 2nd micrometering valve 4, Vacuum ball valve 5 respectively, the 1st micrometering valve 3 external experimental gas 10, the 2nd micrometering valve 4 external argon gas 11, Vacuum ball valve 5 connects sample chamber 6, push-pull valve 7 connects turbomolecular pump 8, and turbomolecular pump 8 connects mechanical pump 9.
Described Vacuum ball valve 5 can be connected with vacuum chamber with the sample chamber by flange respectively; Described flange can adopt band type vacuum quick-release flange, and described flange is provided with O shape rubber seal.
Described push-pull valve 7 can adopt pneumatic vacuum push-pull valve.
The utility model is used for normal temperature not to be needed the composite getter pumping property detection platform that activates, getter to detect beginning from unpacking to can not to expose atmosphere, and whole charging process is all finished under inert gas shielding.
Concrete experimental implementation step: at first the sample chamber is pulled down in the glove box of packing into together with Vacuum ball valve, open in the sample chamber of packing into, Vacuum ball valve and close Vacuum ball valve in the connection at following getter sample of argon shield.The sample chamber taken out with rapid-acting coupling from glove box together with Vacuum ball valve be connected to vacuum chamber.Suction to pressure less than 1 * 10
-4The time, give in the system and charge into argon gas to atmospheric pressure, open Vacuum ball valve, be sample chamber and vacuum chamber.Be evacuated to pressure once more less than 1 * 10
-4The time, close Vacuum ball valve, give to feed experimental gas in the system to required pressure.Open Vacuum ball valve then, begin experiment.Printable output experimental result after experiment is finished.
Vacuum system adopts the air suction mode of direct connection high speed rotary-vane vaccum pump and molecular pump combination in the utility model.
Induction part of the present utility model adopts the vacuum micrometering valve to come the pilot-gas flow.
The mode that vacuum system of the present utility model can adopt the heating tape to wrap up is carried out the heated baking below 105 ℃.
Electric control system of the present utility model is by pushbutton switch (being arranged on the man-machine touch screen interface), relay and solenoid control, the native system program design has the storage and the analysis of experimental data, data and curves shows in real time and printing function, is convenient to the researchist and analyzes experimental data.
Claims (5)
1. a normal temperature getter pumping property detection platform is characterized in that being provided with vacuum chamber spheroid, compound vacuum gauge, the 1st micrometering valve, the 2nd micrometering valve, Vacuum ball valve, sample chamber, push-pull valve, turbomolecular pump and mechanical pump; The vacuum chamber spheroid is connected with push-pull valve with compound vacuum gauge, the 1st micrometering valve, the 2nd micrometering valve, Vacuum ball valve respectively, the external experimental gas of the 1st micrometering valve, the external argon gas of the 2nd micrometering valve, Vacuum ball valve connects the sample chamber, push-pull valve connects turbomolecular pump, and turbomolecular pump connects mechanical pump.
2. a kind of normal temperature getter pumping property detection platform as claimed in claim 1 is characterized in that described Vacuum ball valve is connected with vacuum chamber with the sample chamber by flange respectively.
3. a kind of normal temperature getter pumping property detection platform as claimed in claim 2 is characterized in that described flange is a band type vacuum quick-release flange.
4. as claim 2 or 3 described a kind of normal temperature getter pumping property detection platform, it is characterized in that described flange is provided with O shape rubber seal.
5. a kind of normal temperature getter pumping property detection platform as claimed in claim 1 is characterized in that described push-pull valve is pneumatic vacuum push-pull valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201071754U CN202041433U (en) | 2011-04-13 | 2011-04-13 | Platform for detecting air suction performance of getter at normal temperature |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201071754U CN202041433U (en) | 2011-04-13 | 2011-04-13 | Platform for detecting air suction performance of getter at normal temperature |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202041433U true CN202041433U (en) | 2011-11-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201071754U Expired - Fee Related CN202041433U (en) | 2011-04-13 | 2011-04-13 | Platform for detecting air suction performance of getter at normal temperature |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202041433U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108318376A (en) * | 2017-12-19 | 2018-07-24 | 兰州空间技术物理研究所 | A method of judging sealing cesium beam tube material out-gassing rate |
-
2011
- 2011-04-13 CN CN2011201071754U patent/CN202041433U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108318376A (en) * | 2017-12-19 | 2018-07-24 | 兰州空间技术物理研究所 | A method of judging sealing cesium beam tube material out-gassing rate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111116 Termination date: 20180413 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |