CN201997524U - Hole cleaner - Google Patents

Hole cleaner Download PDF

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Publication number
CN201997524U
CN201997524U CN 201020694395 CN201020694395U CN201997524U CN 201997524 U CN201997524 U CN 201997524U CN 201020694395 CN201020694395 CN 201020694395 CN 201020694395 U CN201020694395 U CN 201020694395U CN 201997524 U CN201997524 U CN 201997524U
Authority
CN
China
Prior art keywords
brush
slide plate
air bag
band tooth
tooth slide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201020694395
Other languages
Chinese (zh)
Inventor
叶蕤
汪少军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Manufacturing International Shanghai Corp
Wuhan Xinxin Semiconductor Manufacturing Co Ltd
Original Assignee
Semiconductor Manufacturing International Shanghai Corp
Wuhan Xinxin Semiconductor Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Manufacturing International Shanghai Corp, Wuhan Xinxin Semiconductor Manufacturing Co Ltd filed Critical Semiconductor Manufacturing International Shanghai Corp
Priority to CN 201020694395 priority Critical patent/CN201997524U/en
Application granted granted Critical
Publication of CN201997524U publication Critical patent/CN201997524U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a hole cleaner, which comprises an air bag, a sealing cover, a brush and a brush rotation driving device, wherein the sealing cover is connected with the air bag in a sealed way, the sealing cover is provided with an air inlet passage, one end of the brush passes through the sealing cover and is arranged in the air bag, the brush is a hollow brush, external air enters the air bag through the air inlet passage and is then exhausted by the brush, a brush rotating driver is arranged in the air bag, the brush rotating driver is connected with the brush, and the brush is driven to rotate. The hole cleaner has the advantages that the cleaning effect is good, and the time and the labor are saved.

Description

The hole clean device
Technical field
The utility model relates to field of semiconductor manufacture, relates in particular to a kind of hole clean device.
Background technology
In semiconductor manufacturing industry, instrument and equipment needs periodic maintenance, usually will clean some holes in maintenance process, owing to be not specifically designed to the cleaner of cleaning hole, these hole clean are got up and wasted time and energy very much, particularly tiny hole.
The utility model content
The purpose of this utility model is to provide a kind of hole clean device, and cleaning effect is good, and is time saving and energy saving again.
To achieve the above object, the utility model provides a kind of hole clean device, comprises air bag, seal cover, brush and brush device of rotation driving; Described seal cover is connected with described air sac sealing; Described seal cover is provided with inlet channel; One end of described brush passes described seal cover and is arranged in the described air bag, and this brush is a hollow brush, and extraneous gas enters described air bag by described inlet channel, is discharged by described brush again; Described brush device of rotation driving is arranged in the described air bag, and this brush device of rotation driving is connected with described brush, drives described brush and rotates.
Above-mentioned hole clean device, wherein, described brush comprises hollow brush pipe and bristle, described bristle is arranged on the outer surface of described hollow brush Guan Yiduan; One end of the described bristle of described hollow brush Guan Weishe passes described seal cover and is arranged in the described air bag.
Above-mentioned hole clean device, wherein, described brush device of rotation driving comprises fixed head, band tooth slide plate, gear, baffle plate and spring; Described fixed head, band tooth slide plate, gear, baffle plate and spring are arranged in the described air bag; Described fixed head is fixed on the described seal cover; Described baffle plate is fixedlyed connected with described fixed head; Described band tooth slide plate and described fixed head are slidingly connected; One end of described spring is connected with described baffle plate, and its other end is connected with described band tooth slide plate, limits the displacement of sliding of described band tooth slide plate; Described gear fixed cover and is connected with a joggle with described band tooth slide plate on described brush.
Above-mentioned hole clean device, wherein, a sidewall of described band tooth slide plate is provided with indentation, and this indentation and described gear are complementary, and the side surface that described gear and described band tooth slide plate are provided with indentation is connected with a joggle.
Above-mentioned hole clean device, wherein, another sidewall of described band tooth slide plate is provided with chute, and described fixed head is provided with the projection that is complementary with described chute, and described projection is stuck in the described chute, and described chute slides along described projection.
Hole clean device of the present utility model is when hole is cleaned in the rotation that utilizes brush with water, and discharge gas blows away the particulate in the hole, and cleaning effect is good, the efficient height, and also very easy to use, laborsaving.
Description of drawings
Hole clean device of the present utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of the utility model hole clean device.
Fig. 2 is the schematic diagram that band tooth slide plate is connected with fixed head in the utility model.
The specific embodiment
Below with reference to Fig. 1~Fig. 2 hole clean device of the present utility model is described in further detail.
Hole clean device of the present utility model comprises air bag, seal cover, brush and brush device of rotation driving;
Described seal cover is connected with described air sac sealing;
Described seal cover is provided with inlet channel;
One end of described brush passes described seal cover and is arranged in the described air bag, and this brush is a hollow brush, and extraneous gas enters described air bag by described inlet channel, is discharged by described brush again;
Described brush device of rotation driving is arranged in the described air bag, and this brush device of rotation driving is connected with described brush, drives described brush and rotates.
The brush of the utility model hole clean device is when hole is cleaned in rotation with water, and discharge gas blows away the particulate in the hole, and cleaning effect is good, and time saving and energy saving.
Now describe hole clean device of the present utility model in detail with a specific embodiment:
Referring to Fig. 1, the hole clean device of present embodiment comprises air bag 101, seal cover 102, fixed head 103, band tooth slide plate 104, gear 105, brush 106, baffle plate 107 and spring 108;
Described seal cover 102 is arranged on the bottom of described air bag 101, is tightly connected with described air bag 101;
Described fixed head 103 is arranged in the described air bag 101, is fixed on the described seal cover 102;
Described baffle plate 107 is arranged in the described air bag 101, and its bottom is fixed on the described seal cover 102, and this baffle plate 107 is fixedlyed connected with described fixed head 103;
Described band tooth slide plate 104 is arranged in the described air bag 101, is slidingly connected with described fixed head 103, and this band tooth slide plate 104 can slide on described fixed head 103;
Described spring 108 is arranged in the described air bag 101, and the one end is connected with described baffle plate 107, and its other end is connected with described band tooth slide plate 104;
Described spring 108 is used to limit the displacement of sliding of described band tooth slide plate 104, and described band tooth slide plate 104 is slided within the specific limits;
Described brush 106 comprises hollow brush pipe 1061 and bristle 1062, and described bristle 1062 is arranged on the outer surface of described hollow brush pipe 1,061 one ends;
The end that described hollow brush pipe 1061 is not established described bristle 1062 passes described seal cover 102 and is arranged in the described air bag 101;
Described gear 105 is arranged in the described air bag 101, and this gear 105 is enclosed within on the described hollow brush pipe 1061, fixedlys connected with described hollow brush pipe 1061;
One side surface of described band tooth slide plate 104 is provided with indentation 1041, this indentation 1041 and described gear 105 couplings, described gear 105 is connected with a joggle with the side surface that described band tooth slide plate 104 is provided with indentation 1041, the slip of described band tooth slide plate 104 drives described gear 105 and rotates, and then drives described brush 106 rotations;
The big I of described brush 106 designs as required, and therefore, the hole clean device of present embodiment is applicable to the hole of different sizes;
Be provided with inlet channel 1021 in the described seal cover 102, can be by this inlet channel 1021 to described air bag 101 gas transmissions.
Referring to Fig. 2, the opposite side surface of described band tooth slide plate 104 is provided with chute 1042, the side surface of described fixed head 103 is provided with the projection 1031 that is complementary with described chute 1042, described projection 1031 is stuck in the described chute 1042, described chute 1042 can slide along described projection 1031, described band tooth slide plate 104 is fixed on the described fixed head 103 by described chute 1042, and slides along described fixed head 103 by described chute 1042.
The operation principle of present embodiment hole clean device is: described inlet channel 1021 is connected with external air source, by external air source to described air bag 101 air feed, the gas that external air source provides enters described air bag 101 by described inlet channel 1021, the gas in the described air bag 101 again by described hollow brush pipe 1061 outside described air bag 101 is discharged in the bottom of described hollow brush pipe 1061; Described band tooth slide plate 104 is applied horizontal force F (shown in the arrow among Fig. 1), promote described band tooth slide plate 104 and slide, the slip of described band tooth slide plate 104 drives described gear 105 and rotates, and then drives described brush 106 rotations; During use, an end that described brush 106 is provided with bristle 1062 inserts hole 200, described inlet channel 1021 is connected with external air source, described band tooth slide plate 104 is applied horizontal force, described brush 106 is cleaned the particulate in hole 200 inwalls with water in 200 li rotations of hole, and the gas of discharging from described brush 106 bottoms blows afloat these particulates, these particulates are blown out outside the hole 200, reach the purpose of cleaning hole.
The hole clean device of present embodiment is when hole is cleaned in the rotation that utilizes brush with water, and discharge gas blows away the particulate in the hole, and cleaning effect is good, the efficient height, and also very easy to use, laborsaving.

Claims (5)

1. a hole clean device is characterized in that, comprises air bag, seal cover, brush and brush device of rotation driving;
Described seal cover is connected with described air sac sealing;
Described seal cover is provided with inlet channel;
One end of described brush passes described seal cover and is arranged in the described air bag, and this brush is a hollow brush, and extraneous gas enters described air bag by described inlet channel, is discharged by described brush again;
Described brush device of rotation driving is arranged in the described air bag, and this brush device of rotation driving is connected with described brush, drives described brush and rotates.
2. hole clean device as claimed in claim 1 is characterized in that described brush comprises hollow brush pipe and bristle, and described bristle is arranged on the outer surface of described hollow brush Guan Yiduan; One end of the described bristle of described hollow brush Guan Weishe passes described seal cover and is arranged in the described air bag.
3. hole clean device as claimed in claim 1 or 2 is characterized in that, described brush device of rotation driving comprises
Fixed head, band tooth slide plate, gear, baffle plate and spring;
Described fixed head, band tooth slide plate, gear, baffle plate and spring are arranged in the described air bag;
Described fixed head is fixed on the described seal cover;
Described baffle plate is fixedlyed connected with described fixed head;
Described band tooth slide plate and described fixed head are slidingly connected;
One end of described spring is connected with described baffle plate, and its other end is connected with described band tooth slide plate, limits the displacement of sliding of described band tooth slide plate;
Described gear fixed cover and is connected with a joggle with described band tooth slide plate on described brush.
4. hole clean device as claimed in claim 3 is characterized in that, a sidewall of described band tooth slide plate is provided with indentation, and this indentation and described gear are complementary, and the side surface that described gear and described band tooth slide plate are provided with indentation is connected with a joggle.
5. hole clean device as claimed in claim 4, it is characterized in that another sidewall of described band tooth slide plate is provided with chute, described fixed head is provided with the projection that is complementary with described chute, described projection is stuck in the described chute, and described chute slides along described projection.
CN 201020694395 2010-12-30 2010-12-30 Hole cleaner Expired - Fee Related CN201997524U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201020694395 CN201997524U (en) 2010-12-30 2010-12-30 Hole cleaner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201020694395 CN201997524U (en) 2010-12-30 2010-12-30 Hole cleaner

Publications (1)

Publication Number Publication Date
CN201997524U true CN201997524U (en) 2011-10-05

Family

ID=44700299

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201020694395 Expired - Fee Related CN201997524U (en) 2010-12-30 2010-12-30 Hole cleaner

Country Status (1)

Country Link
CN (1) CN201997524U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106733795A (en) * 2016-12-26 2017-05-31 重庆荣易达铝业有限公司 The method for removing cylinder cap duct metal fillings
CN107051930A (en) * 2016-12-26 2017-08-18 重庆荣易达铝业有限公司 The curved hole cleaning device of cylinder cap

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106733795A (en) * 2016-12-26 2017-05-31 重庆荣易达铝业有限公司 The method for removing cylinder cap duct metal fillings
CN107051930A (en) * 2016-12-26 2017-08-18 重庆荣易达铝业有限公司 The curved hole cleaning device of cylinder cap

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20111005

Termination date: 20161230