CN201994558U - Thermal-distortion self-compensation high-energy laser reflecting mirror - Google Patents
Thermal-distortion self-compensation high-energy laser reflecting mirror Download PDFInfo
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- CN201994558U CN201994558U CN2011200397516U CN201120039751U CN201994558U CN 201994558 U CN201994558 U CN 201994558U CN 2011200397516 U CN2011200397516 U CN 2011200397516U CN 201120039751 U CN201120039751 U CN 201120039751U CN 201994558 U CN201994558 U CN 201994558U
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Abstract
The utility model discloses a thermal-distortion self-compensation high-energy laser reflecting mirror, comprising a substrate, wherein the front side face of the substrate is a reflecting face, a central area of the reflecting face forms a light spot area, a plurality of small holes around the light spot area of the substrate are arranged on the rear side face of the substrate, axes of the small holes are vertical to the rear side face of the substrate, the depth of each small hole is smaller than the thickness of the substrate, and a copper base is fixed in the middle part of the rear side face of the substrate and is connected with a cooling fin through a thermal-conducting pipe. In the utility model, the small holes around the light spot area are arranged on the back face of the thermal-distortion self-compensation high-energy laser reflecting mirror and used for decreasing a difference between maximal thermal distortion and minimal thermal distortion of the light spot area of a reflecting mirror face, so that the purpose of no thermal distortion on the laser wave front of the light spot area is achieved conveniently at the same time when the instantaneous thermal distortion of a laser cavity mirror is alleviated; and in addition, a certain distance is reserved between every two adjacent small holes, so that the influence of the small holes to the matrix geometric structure rigidity of an illumination area can be decreased.
Description
Technical field
The utility model relates to a kind of speculum that is used for laser systems such as superlaser resonant cavity and far field Beam Control, and particularly behavior has the strict laser mirror that limits to LASER HEAT, specifically is a kind of heat distortion self compensation superlaser speculum.
Background technology
In high-energy laser, in the laser mirror matrix and surperficial, because of absorbing the non-homogeneous temperature rise that laser energy causes speculum center and edge, the formation temperature gradient, minute surface produces thermal deformation (heat distorts), has had a strong impact on beam quality.
Superlaser (HEL) is different from the short pulse high power laser light, and it generally is the high-average power laser of continuous wave or quasi c. w. operation, and the duration reached more than the several seconds.For the high-energy laser of hundreds of kW, 1MW, the partially reflecting mirror in chamber mirror and the optical train need bear tens of kW/cm
2Power density or tens of to 100 J/cm
2Energy density.Experiment shows, high like this energy density not only causes the heat distortion of mirror light area, chamber central protuberance easily, causes beam quality significantly to descend, and can cause the laser system can't operate as normal.The hot distortion effect of speculum need be selected mirror body material during for the alleviation continuous service, optimizes the mirror body structure, perhaps takes easy cooling provision, does not increase the complexity of system again.
Develop under the limited situation at present mirror-polishing process, coating technique, adopt novel lens body structure and effective cooling provision, become and reduce the distortion of laser mirror heat in the high energy laser system, improve a kind of effective important channel of exporting laser beam quality.The method that tradition reduces the distortion of minute surface heat is to reduce mirror body temperature degree by certain means as far as possible, thereby realizes reducing the purpose of minute surface thermal deformation.The type of cooling commonly used comprises water-cooled and phase change cooling.Common water-cooled bronze mirror because factors such as hydraulic pressure and pressure oscillation will cause the additional nonhomogeneous deformation of minute surface face shape, therefore causes the phase distortion of laser beam-wave front easily.In order to overcome and reduce the influence of water-cooled pressure oscillation, relatively Chang Yong way is to increase the mirror face thickness, but when speculum uses in strong laser system, because laser power is very high, minute surface thickness is big, and heat conduction time is longer, and the minute surface temperature rise is higher, thermal deformation increases, and causes laser beam output beam quality variation equally.Simultaneously because the attachment device problem of using water-cooling system to bring has limited the practical application of water-cooled speculum.The phase change cooling speculum is to adopt " phase-change accumulation energy " to realize a kind of speculum of the mirror body cooling of laser mirror, can improve the thermal deformation characteristic of chamber mirror minute surface.But because general phase-change material thermal conductivity is little, heat exchanger time is long, and for the transient heat distortion that reduces laser mirror, this phase-change material has certain limitation.
Summary of the invention
The purpose of this utility model is to provide a kind of heat distortion self compensation superlaser speculum, the maximum heat distortion that described this heat distortion self compensation superlaser speculum will solve mirror surface spot area in the prior art is bigger with the difference of minimum thermal distortion, make that the transient heat distortion of laser mirror is excessive, thereby influence the technical problem of laser beam quality.
The purpose of this utility model is achieved through the following technical solutions: it comprises substrate, the substrate leading flank is a reflecting surface, the reflecting surface middle section constitutes spot area, be provided with a plurality of apertures at the substrate trailing flank around its spot area, the aperture axis normal is in the substrate trailing flank, the degree of depth of aperture is fixed with copper pedestal less than the thickness of substrate at substrate trailing flank middle part, and copper pedestal is connected with fin by heat pipe.
This substrate is rounded, its diameter is 90mm, and thickness is 16mm, is provided with two circle apertures at the substrate trailing flank, the inner ring aperture is centered close on the circumference that radius is 30mm, the diameter of its aperture is 5mm, and the degree of depth is 13mm, and the angle between adjacent two inner ring apertures is 15 degree, the outer ring aperture is centered close on the circumference that radius is 37mm, the diameter of its aperture is 4mm, and the degree of depth is 13mm, and angle is 10 degree between adjacent two outer ring apertures.
Substrate is a monocrystalline silicon substrate.
The fin trailing flank is provided with fan.
The utility model is compared with prior art, and its effect is actively with tangible.The utility model is provided with a plurality of apertures at the back side of heat distortion self compensation superlaser speculum around spot area, the maximum heat distortion of subduing the mirror surface spot area is poor with the minimum thermal distortion, can in the transient heat distortion that reduces laser mirror, realize that easily spot area laser wave front does not have the purpose of heat distortion; And be provided with certain distance between two adjacent apertures, can reduce the influence of aperture to light area matrix geometry rigidity.The relative water-cooled mirror of the utility model, phase change cooling mirror, the additional distortion of minute surface is little, and the mirror body structure is simple.
Description of drawings
Fig. 1 is the structural representation of the utility model heat distortion self compensation superlaser speculum.
Fig. 2 is the substrate rear side view among Fig. 1.
Fig. 3 is the minute surface thermal deformation correlation curve between the utility model and the ordinary silicon mirror.
Embodiment
The utility model is described in further detail by embodiment below in conjunction with accompanying drawing.
As Fig. 1, Fig. 2 and shown in Figure 3, this heat distortion self compensation superlaser speculum of the present utility model, in the present embodiment, it comprises substrate 1, substrate 1 is a monocrystalline silicon substrate, substrate 1 leading flank is a reflecting surface 11, and the reflecting surface middle section constitutes spot area, and this substrate 1 is rounded, its diameter is 90mm, thickness is 16mm, is provided with two circle apertures at the substrate trailing flank around its spot area, and the aperture axis normal is in the substrate trailing flank, inner ring aperture 2 is centered close on the circumference that radius is 30mm, the diameter of its aperture is 5mm, and the degree of depth is 13mm, and the angle between adjacent two inner ring apertures 2 is 15 degree, outer ring aperture 3 is centered close on the circumference that radius is 37mm, the diameter of its aperture is 4mm, and the degree of depth is 13mm, and angle is 10 degree between adjacent two outer ring apertures 4.Be fixed with copper pedestal 4 at substrate 1 trailing flank middle part, copper pedestal 4 is connected with fin 6 by heat pipe 5.The fin trailing flank is provided with fan, crosses copper pedestal by fan generation air communication substrate is dispelled the heat.
Through calculating, be 99.5% for reflectance of reflector, incident laser power is 100 kW, and spot diameter is 60 mm, and speculum periphery up-and-down boundary is fixed.When light application time was 4s, spot area minute surface heat distortion PV value was 0.039 μ m.For chemical oxygen iodine laser, the bright dipping time is generally about 4s, so this amount of distortion can satisfy actual needs (requiring less than 0.13 μ m).
As shown in Figure 3, the utility model of actual measurement and ordinary silicon mirror minute surface thermal deformation situation are relatively.Solid line is represented the utility model heat distortion self compensation superlaser speculum, and dotted line is represented the thermal deformation of ordinary silicon mirror minute surface.
Certainly, the geometry of mirror substrate can circular, oval, square, rectangle; Its light spot shape also is not limited to circle, mirror body back side aperture should be consistent around profile with its spot area.
Claims (4)
1. heat distortion self compensation superlaser speculum, comprise substrate, the substrate leading flank is a reflecting surface, the reflecting surface middle section constitutes spot area, it is characterized in that: be provided with a plurality of apertures at the substrate trailing flank around its spot area, the aperture axis normal is in the substrate trailing flank, and the degree of depth of aperture is less than the thickness of substrate, be fixed with copper pedestal at substrate trailing flank middle part, copper pedestal is connected with fin by heat pipe.
2. heat distortion self compensation superlaser reflector group as claimed in claim 1, it is characterized in that: this substrate is rounded, its diameter is 90mm, thickness is 16mm, be provided with two circle apertures at the substrate trailing flank, the inner ring aperture is centered close on the circumference that radius is 30mm, the diameter of its aperture is 5mm, the degree of depth is 13mm, angle between adjacent two inner ring apertures is 15 degree, and the outer ring aperture is centered close on the circumference that radius is 37mm, and the diameter of its aperture is 4mm, the degree of depth is 13mm, and angle is 10 degree between adjacent two outer ring apertures.
3. heat distortion self compensation superlaser reflector group as claimed in claim 2, it is characterized in that: substrate is a monocrystalline silicon substrate.
4. heat distortion self compensation superlaser reflector group as claimed in claim 3, it is characterized in that: the fin trailing flank is provided with fan.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200397516U CN201994558U (en) | 2011-02-16 | 2011-02-16 | Thermal-distortion self-compensation high-energy laser reflecting mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200397516U CN201994558U (en) | 2011-02-16 | 2011-02-16 | Thermal-distortion self-compensation high-energy laser reflecting mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201994558U true CN201994558U (en) | 2011-09-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200397516U Expired - Fee Related CN201994558U (en) | 2011-02-16 | 2011-02-16 | Thermal-distortion self-compensation high-energy laser reflecting mirror |
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| CN (1) | CN201994558U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107831583A (en) * | 2017-12-19 | 2018-03-23 | 中国科学院光电技术研究所 | A kind of high-power laser mirror of preprocessing |
-
2011
- 2011-02-16 CN CN2011200397516U patent/CN201994558U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107831583A (en) * | 2017-12-19 | 2018-03-23 | 中国科学院光电技术研究所 | A kind of high-power laser mirror of preprocessing |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110928 Termination date: 20130216 |